JP6215065B2 - Substrate fixing device and substrate inspection device - Google Patents

Description

  The present invention relates to a substrate fixing device having a beam-shaped holding portion that holds an edge of a substrate and fixes the substrate to a base, and a substrate inspection device that includes the substrate fixing device and can inspect a substrate. is there.

  As this type of substrate inspection apparatus, an inspection apparatus disclosed by the applicant in Patent Document 1 below is known. This inspection device includes a fixing device, a probing device, and a control unit, and is configured to be able to execute an inspection on a substrate. The fixing device includes a base body, a pair of beam members, a moving mechanism, four clamp mechanisms, and two center clamp mechanisms, and is configured to fix the substrate. Each beam member is formed in a long plate shape, and both ends are fixed to a slider that can move on a rail disposed on the upper surface of the base body, so that it can slide on the base body. It is arranged. Each beam member is provided with two clamp mechanisms and one center clamp mechanism. In this fixing device, it is possible to fix the substrate to the base body by clamping and holding two opposing edge portions of the substrate by the respective clamp mechanisms provided in the respective beam members. Yes. In addition, in this fixing device, it is possible to fix various types of substrates from large substrates to small substrates by sliding the beam members and changing the distance between the beam members. ing.

JP 2009-117740 A (page 5-6, FIG. 2)

  However, the above fixing device and inspection device have the following problems to be improved. That is, in this fixing device and the substrate inspection device, the substrate is fixed to the base body by clamping and holding the edge of the substrate with each clamp mechanism arranged on the beam member. In this case, in order to fix various substrates having different sizes, it is necessary to lengthen the length of the beam member to some extent. On the other hand, in this fixing device and the substrate inspection device, both ends of the beam member are fixed and supported by a slider that can be moved on the rail disposed on the upper surface of the base body. The intermediate part of is a structure which cannot be supported. For this reason, in this fixing device and the substrate inspection device, the deflection of the central portion in the length direction of the beam member increases due to the weight of the beam member and the weight of the clamp mechanism disposed on the beam member, and the deflection is held by this deflection. There is a problem that the substrate that is being bent may be bent and affect the reliable probing of the probe.

  The present invention has been made in view of such a problem to be improved, and a main object of the present invention is to provide a substrate fixing device and a substrate inspection device capable of suppressing the bending of the substrate being held.

  In order to achieve the above object, the substrate fixing apparatus according to claim 1 is configured to fix the substrate to the base by holding the base and a pair of edges arranged on the base and facing each other. A pair of possible beam-shaped holding parts, and an attachment that can be attached to a device that is provided on the base and that performs a pre-defined regulation process on the substrate that is fixed to the base by the holding part A substrate fixing device configured to be movable along a first direction parallel to the upper surface of the base in accordance with the size of the substrate, At least one holding part is arranged at an intermediate part of the both end parts so that both end parts are supported by the base so as to be movable along the first direction and project along the first direction. Provided with a reinforcing member, The support member supports the reinforcing member so as to be movable along the first direction and is capable of restricting the movement of the reinforcing member along the first direction and releasing the restriction according to the restriction instruction and the release instruction. Is arranged.

  According to a second aspect of the present invention, in the substrate fixing device according to the first aspect, the reinforcing member is disposed at a central portion in the length direction of the at least one holding portion.

  According to a third aspect of the present invention, in the substrate fixing device according to the first or second aspect, the support portion includes a pair of holding pieces that hold the reinforcing member, and the holding pieces are close to and separated from each other. And a moving mechanism for moving at least one of the sandwiching pieces.

  According to a fourth aspect of the present invention, there is provided a substrate inspection apparatus comprising: the substrate fixing apparatus according to any one of the first to third aspects; and a probing apparatus that is attached to the attachment portion and executes a probing process as the defining process. Thus, the substrate can be inspected.

  In the substrate fixing device according to claim 1 and the substrate inspection device according to claim 4, at least one holding portion is movable along the first direction so that both ends of the holding portion are supported by the base. Reinforcing members are disposed at intermediate portions of both ends so as to protrude along the first direction, support the reinforcing members movably along the first direction, and follow the restriction instruction and release instruction in the first direction. A support portion capable of restricting the movement of the reinforcing member along the axis and releasing the restriction is disposed on the attachment portion. For this reason, according to this board | substrate fixing apparatus and board | substrate test | inspection apparatus, the bending between the both ends in a holding | maintenance part can be restrained sufficiently few. Therefore, according to the substrate fixing device and the substrate inspection device, as a result of sufficiently suppressing the bending of the substrate held by the holding unit, the influence of the bending of the substrate when probing the probe is prevented, The probe can be reliably probed with respect to the substrate.

  Further, according to the substrate fixing device according to claim 2 and the substrate inspection device according to claim 4, both ends are supported by disposing the reinforcing member in the central portion in the length direction of at least one holding portion. Since the central portion where the deflection is the largest in the holding portion can be supported, the holding portion is bent compared to the configuration in which the reinforcing member is disposed in a portion other than the central portion and the portion is supported. The effect of pressing can be enhanced.

  According to the substrate fixing device according to claim 3 and the substrate inspection device according to claim 4, the pair of sandwiching pieces for sandwiching the reinforcing member, and the sandwiching pieces of the sandwiching pieces so that the sandwiching pieces are close to and away from each other. By configuring the support portion with a moving mechanism that moves at least one of them, the movement of the reinforcing member and the restriction can be reliably released with a simple configuration.

1 is a configuration diagram showing a configuration of a substrate inspection apparatus 1. FIG. 2 is a perspective view showing configurations of a substrate fixing device 2 and a probing device 3. FIG. FIG. 3 is an exploded perspective view of configurations of a substrate fixing device 2 and a probing device 3. FIG. 6 is a first explanatory view illustrating the configuration of a reinforcing member 32 and a support portion 62. It is the 2nd explanatory view explaining the composition of reinforcement member 32 and supporter 62. It is the 3rd explanatory view explaining the composition of reinforcement member 32 and supporter 62. FIG. 6 is a first explanatory view explaining the operation of the support part 62. FIG. 10 is a second explanatory diagram explaining the operation of the support part 62.

  Hereinafter, embodiments of a substrate fixing device and a substrate inspection device will be described with reference to the accompanying drawings.

  First, the configuration of the substrate inspection apparatus 1 shown in FIG. 1 will be described. The substrate inspection apparatus 1 is an example of a substrate inspection apparatus. As shown in the figure, the substrate inspection apparatus 1 includes a substrate fixing device 2, a probing device 3, and a processing unit 4, and electrically inspects the substrate 100 (see FIG. 4). Is configured to run. In this case, as an example, the substrate 100 has a conductive pattern (not shown) formed on the surface thereof, and is configured to be rectangular as a whole.

  The substrate fixing device 2 is an example of a substrate fixing device, and as shown in FIG. 2, a base 11, holding units 12a and 12b (hereinafter, also referred to as “holding unit 12” when not distinguished), a moving mechanism 13 and The mounting portions 14a and 14b are provided.

  As shown in FIG. 3, the base 11 is configured by a structure (ramen structure) that is a substantially rectangular parallelepiped in which a plurality of (in this example, 12) columnar members P1 to P12 are connected. Further, each upper surface (corresponding to the upper surface of the base) of the columnar members P1 and P3 constituting the base 11 is provided with a holding portion 12a along the X direction (corresponding to the first direction) parallel to the upper surface. The rails 21a and 21b for moving are attached so as to extend along the X direction.

  Further, as shown in FIGS. 2 and 3, sliders 22a and 22b that move (slide) along the rails 21a and 21b are arranged on the rails 21a and 21b, respectively. Are attached with support columns 23a and 23b capable of fixing the end portions Ea1 and Ea2 of the holding portion 12a.

  The holding parts 12a and 12b are each formed in a long plate shape as shown in FIG. The holding portions 12 a and 12 b are each provided with a clamp mechanism 31, and are configured to be able to fix the substrate 100 to the base 11 by clamping (clamping) a pair of opposite edges of the substrate 100. .

  Further, as shown in FIG. 3, the holding portion 12a (an example of at least one of the pair of holding portions 12) has end portions Ea1 and Ea2 fixed to the distal ends of the columns 23a and 23b arranged on the base 11, respectively. Is done. In this case, the columns 23a and 23b are attached to the sliders 22a and 22b, respectively, and the sliders 22a and 22b move on rails 21a and 21b attached to the upper surfaces of the columnar members P1 and P3 in the base 11. To do. That is, both end portions Ea1 and Ea2 of the holding portion 12a are supported by the base 11 so that the holding portion 12a can move along the X direction.

  Further, as shown in FIGS. 3 and 4, a reinforcing member 32 is arranged at the central portion Ca in the length direction of the holding portion 12a (intermediate portion between the end portions Ea1 and Ea2) so as to protrude along the X direction. It is installed. In this case, as an example, the reinforcing member 32 is formed in a columnar shape, and the base end (the right end in FIG. 3 (the end on the lower side in FIG. 4)) is fixed to the central portion Ca of the holding portion 12a (for example, It is fixed by screwing or bonding). The reinforcing member 32 is supported on the tip end side (left side in FIG. 3 (upper side in FIG. 4)) by a support part 62, which will be described later, disposed in the attachment part 14a. For this reason, the reinforcing member 32 is held between the central portion Ca of the holding portion 12a and the support portion 62 of the mounting portion 14a so as to support the central portion Ca so that the rigidity of the holding portion 12a is increased. The portion 12a is reinforced to have a function of suppressing the bending between the end portions Ea1 and Ea2 (particularly the central portion Ca) due to the weight of the holding portion 12a. In addition, the structure which forms the reinforcement member 32 and the holding | maintenance part 12a integrally can also be employ | adopted.

  Moreover, the holding | maintenance part 12b is fixed to the fixing | fixed part 63 of the attaching part 14b provided in the base 11, as shown in FIG. In this substrate fixing device 2, since the holding portion 12b is fixed to the mounting portion 14b and the holding portion 12a is configured to be movable in the X direction, the size of the substrate 100 (between a pair of edges facing each other). By moving the holding portion 12a according to the length), it is possible to fix various substrates 100 having different sizes.

  The moving mechanism 13 is a mechanism for moving the holding portion 12a in the X direction, and is disposed on the upper surface of the columnar member P3 constituting the base 11, as shown in FIG. Further, as shown in the figure, for example, the moving mechanism 13 includes a ball screw type linear motion mechanism 41, a motor 42 that rotates one end portion of a screw 41a of the linear motion mechanism 41, and the other end portion of the screw 41a. And a support portion 43 that supports the structure.

  In this case, the motor 42 rotates the screw 41a of the linear motion mechanism 41 under the control of the processing unit 4, and thereby the moving unit 41b of the linear motion mechanism 41 moves in the X direction. Moreover, the moving part 41b is connected to the slider 22b arrange | positioned at the rail 21b attached to the upper surface (upper surface of the columnar member P3) of the base 11, as shown in the figure. For this reason, the slider 22b moves with the movement of the moving part 41b, whereby the holding part 12a is moved in the X direction.

  The attachment portions 14a and 14b are pedestals for attaching the probing device 3, and are disposed on the upper surfaces of the columnar members P1 to P4 constituting the base 11, as shown in FIG. Further, as shown in FIG. 4, the attachment portion 14a is formed with an insertion hole 61 into which the reinforcing member 32 disposed in the holding portion 12a can be inserted.

  In addition, as shown in FIGS. 3 and 4, the attachment portion 14 a supports the reinforcing member 32 so as to be movable along the X direction, and restricts the movement of the reinforcing member 32 using the operation unit outside the figure. In accordance with an instruction to release the restriction, a support portion 62 that restricts the movement of the reinforcing member 32 along the X direction and releases the restriction is disposed.

  In this case, as an example, as shown in FIGS. 5 and 6, the support portion 62 is sandwiched so that the pair of sandwiching pieces 71 a and 71 b that can sandwich the reinforcing member 32 and the sandwiching pieces 71 a and 71 b are close to and away from each other. An air cylinder 72 for moving the piece 71b (an example of at least one of the sandwiching pieces 71a and 71b) and a spring 73 (both of which correspond to a moving mechanism) are configured. The air cylinder 72 moves the clamping piece 71b toward the clamping piece 71a when air is supplied by an instruction using the operation unit. The air cylinder 72 is connected to an air supply tube and a valve (both not shown) for supplying and stopping air supply. The spring 73 biases (pulls) the clamping piece 71b in a direction away from the clamping piece 71a.

  Further, as shown in FIG. 3, the attachment portion 14b is provided with a fixing portion 63 for fixing the holding portion 12b. In this case, the fixing portion 63 is configured to support the holding portion 12b over the entire region in the length direction. For this reason, the holding | maintenance part 12b fixed to the fixing | fixed part 63 is maintained in the state without bending over the whole area of a length direction.

  The probing device 3 is attached to the attachment portions 14a and 14b of the substrate fixing device 2, and performs a probing process (provision processing specified in advance) for probing a probe (not shown) to the substrate 100 fixed by the substrate fixing device 2. For example). Specifically, as shown in FIG. 3, the probing apparatus 3 includes a first moving mechanism 51, second moving mechanisms 52a and 52b, and third moving mechanisms 53a and 53b.

  The first moving mechanism 51 is a mechanism for moving a probe (not shown) in the Y direction orthogonal to the X direction, and as shown in FIG. 3, linear motion mechanisms 51a and 51b, rails 51c, sliders 51d and 51e. And plate bodies 51f and 51g.

  The linear motion mechanisms 51a and 51b are, for example, ball screw type linear motion mechanisms, and are disposed on the upper surface of the attachment portion 14a as shown in FIG. In this case, the linear motion mechanisms 51a and 51b are each provided with a screw Sa, a motor Ma, a support portion Ba, and a moving portion Ta as shown in FIG. The rail 51c is disposed on the upper surface of the mounting portion 14b, and the sliders 51d and 51e are disposed on the rail 51c. Both ends of the plate 51f are fixed to the moving part Ta and the slider 51d of the linear motion mechanism 51a, respectively, and are moved in the Y direction with the movement of the moving part Ta. Both ends of the plate body 51g are fixed to the moving part Ta and the slider 51e of the linear motion mechanism 51b, and are moved in the Y direction as the moving part Ta moves. In this case, the first moving mechanism 51 moves the plates 51f and 51g in the Y direction by the motor Ma of the linear motion mechanisms 51a and 51b rotating the screw Sa to move the moving unit Ta according to the control of the processing unit 4. Move.

  The second moving mechanisms 52a and 52b are mechanisms for moving the probe in the X direction (see FIG. 3). As shown in FIG. 3, the second moving mechanisms 52a and 52b are respectively disposed on the plate bodies 51f and 51g of the first moving mechanism 51. It is attached. In this case, the second moving mechanisms 52a and 52b are ball screw type linear motion mechanisms, and are each configured to include a screw Sb, a motor Mb, a support portion Bb, and a moving portion Tb, as shown in FIG. The motor Mb rotates the screw Sb according to the control of the processing unit 4 to move the moving unit Tb in the X direction.

  The third moving mechanisms 53a and 53b are mechanisms for moving the probe in the Z direction, and are attached to the moving portions Tb of the second moving mechanisms 52a and 52b, respectively, as shown in FIG. In this case, the third moving mechanisms 53a and 53b are constituted by a ball screw type linear motion mechanism, and a non-illustrated motor rotates a non-illustrated screw in accordance with the control of the processing unit 4, thereby moving the probe in the Z direction. Move.

  The processing unit 4 moves the holding unit 12 a by controlling the motor 42 of the moving mechanism 13 in the substrate fixing apparatus 2. Further, the processing unit 4 controls the probing device 3 by controlling the linear motion mechanisms 51a and 51b, the second movement mechanisms 52a and 52b, and the third movement mechanisms 53a and 53b of the first movement mechanism 51 constituting the probing device 3. Controls the probing process (probe movement). In addition, the processing unit 4 executes an inspection process for inspecting the quality of the substrate 100 based on an electric signal input and output through the probe probed by the probing device 3.

  Next, a method for inspecting the substrate 100 using the substrate inspection apparatus 1 will be described with reference to the accompanying drawings. In the initial state, it is assumed that the holding portions 12a and 12b are close to each other. In the initial state, as shown in FIGS. 5 and 6, the sandwiching pieces 71 a and 71 b of the support portion 62 are separated from each other and do not sandwich the reinforcing member 32 (that is, the reinforcing member 32 is movable). It shall be.

  First, the substrate 100 to be inspected is fixed to the substrate fixing device 2. Specifically, various setting values such as the size of the substrate 100 are input by operating an operation unit (not shown). Next, the processing unit 4 controls the motor 42 of the moving mechanism 13 to rotate the screw 41a of the linear moving mechanism 41 in the moving mechanism 13, thereby moving the moving unit 41b of the linear moving mechanism 41 in the direction X1 in the X direction ( (See FIG. 4). At this time, as a result of the slider 22b connected to the moving part 41b moving along the rail 21b attached to the upper surface of the base 11, the holding part 12a is moved in the X1 direction.

  Further, as shown in FIG. 4, the reinforcing member 32 disposed in the central portion Ca of the holding portion 12a moves in the direction of X1 along with the movement of the holding portion 12a and is disposed in the attachment portion 14a. Passes between the sandwiching pieces 71a and 71b (see FIGS. 5 and 6) in the supporting portion 62, and enters the insertion hole 61 (see FIG. 4) formed in the attachment portion 14a.

  Subsequently, the processing unit 4 is screwed by the motor 42 when the holding unit 12a moves until the distance between the holding units 12a and 12b is separated by the length between a pair of opposing edges on the substrate 100. The rotation of 41a is stopped.

  Next, an operation unit (not shown) is operated to instruct to restrict the movement of the reinforcing member 32 by the support unit 62 (regulation instruction). At this time, the air cylinder 72 of the support portion 62 is actuated by the supply of air from an air supply portion (not shown) to move the sandwiching piece 71b toward the sandwiching piece 71a. As a result, as shown in FIGS. 7 and 8, the reinforcing member 32 is held by the holding pieces 71a and 71b, and the movement of the reinforcing member 32 is restricted.

  Here, in this board | substrate fixing apparatus 2, while the reinforcement member 32 arrange | positioned by the center part Ca of the holding | maintenance part 12a is supported by the support part 62 arrange | positioned at the attachment part 14a, it follows an X direction. The movement is restricted by the support portion 62. For this reason, in this board | substrate fixing apparatus 2, the reinforcement member 32 is spanned between the center part Ca of the holding | maintenance part 12a, and the support part 62 of the attaching part 14a, and supports the center part Ca, Therefore The holding | maintenance part 12a The bending between the end portions Ea1 and Ea2 (particularly the central portion Ca) due to its own weight is sufficiently reduced. Moreover, since the holding | maintenance part 12b is being fixed to the fixing | fixed part 63 of the attaching part 14b, it is maintained in the state without bending over the whole area of a length direction.

  Subsequently, the pair of edge portions of the substrate 100 are clamped (sandwiched) by the clamp mechanism 31 of the holding portions 12a and 12b. As a result, the substrate 100 is fixed to the base 11. In this case, as described above, the bending between the end portions Ea1 and Ea2 in the holding portion 12a is sufficiently reduced, and the holding portion 12b is maintained in a state without bending over the entire region in the length direction. The bending of the substrate 100 held by the holding portions 12a and 12b is sufficiently reduced.

  Next, the operation unit is operated to start inspection. In response to this, the processing unit 4 controls the probing device 3 to execute the probing process. Specifically, the processing unit 4 controls the linear motion mechanisms 51a and 51b, the second movement mechanisms 52a and 52b, and the third movement mechanisms 53a and 53b of the first movement mechanism 51 constituting the probing device 3, The probe is probed (contacted) with the inspection target point on the substrate 100.

  In this case, as described above, since the bending of the substrate 100 held by the holding portions 12a and 12b is sufficiently suppressed, the influence of the bending of the substrate 100 when the probe is probed is prevented, and the substrate It is possible to reliably probe the probe with respect to 100 inspection target points.

  Subsequently, the processing unit 4 executes an inspection process for inspecting the quality of the substrate 100 based on an electric signal input / output via the probe. In this case, as described above, since the probe is reliably probed with respect to the inspection target point of the substrate 100, the inspection of the substrate 100 is performed accurately.

  Next, when the inspection process is completed, the processing unit 4 controls the probing device 3 to move the probe to the initial position. Subsequently, the clamping of the edge portion of the substrate 100 by the clamp mechanism 31 of the holding portions 12a and 12b is released, and then the substrate 100 is removed from the holding portions 12a and 12b. Thereafter, the operation unit is operated to instruct release of the movement restriction of the reinforcing member 32 by the support unit 62 (release instruction). At this time, the supply of air to the air cylinder 72 of the support portion 62 is stopped, and the clamping piece 71b is separated from the clamping piece 71a by the urging force (tensile force) of the spring 73. As a result, as shown in FIGS. 5 and 6, the holding of the reinforcing member 32 by the holding pieces 71a and 71b is released, and the restriction on the movement of the reinforcing member 32 is released.

  Next, the processing unit 4 controls the motor 42 of the moving mechanism 13 to rotate the screw 41a of the linear moving mechanism 41, thereby moving the moving unit 41b of the linear moving mechanism 41 in the X2 direction in the X direction (see FIG. 4). ). At this time, as a result of the slider 22b connected to the moving part 41b moving along the rail 21b attached to the upper surface of the base 11, the holding part 12a is moved in the X2 direction. Subsequently, the processing unit 4 stops the rotation of the screw 41a by the motor 42 when the holding unit 12a moves to the initial position. Thus, the inspection for the substrate 100 is completed.

  Thus, in this board | substrate fixing apparatus 2 and the board | substrate test | inspection apparatus 1, the edge part Ea1 and Ea2 of the holding | maintenance part 12a are supported by the base 11 so that the holding | maintenance part 12a can move along an X direction, and it follows an X direction. A reinforcing member 32 is disposed at an intermediate portion between the end portions Ea1 and Ea2 so as to protrude, and supports the reinforcing member 32 so as to be movable along the X direction, and along the restricting instruction and the releasing instruction, the reinforcing member along the X direction A support portion 62 capable of restricting the movement of 32 and releasing the restriction is disposed on the attachment portion 14a. For this reason, according to this board | substrate fixing apparatus 2 and the board | substrate test | inspection apparatus 1, the bending between the edge parts Ea1 and Ea2 in the holding | maintenance part 12a can be suppressed enough. Therefore, according to this board | substrate fixing apparatus 2 and the board | substrate inspection apparatus 1, as a result of being able to restrain bending of the board | substrate 100 currently hold | maintained by holding | maintenance part 12a, 12b sufficiently small, the bending of the board | substrate 100 at the time of probing a probe is carried out. Thus, the probe can be reliably probed with respect to the substrate 100.

  Moreover, according to this board | substrate fixing apparatus 2 and the board | substrate inspection apparatus 1, the holding | maintenance part by which edge part Ea1 and Ea2 are supported is arrange | positioned by arrange | positioning the reinforcement member 32 in the center part Ca of the length direction in the holding | maintenance part 12a. Since the central portion Ca where the bending becomes the largest in 12a can be supported, the holding member 12a is bent more than the configuration in which the reinforcing member 32 is provided in a portion other than the central portion Ca and the portion is supported. The effect of pressing can be enhanced.

  Moreover, according to this board | substrate fixing apparatus 2 and the board | substrate test | inspection apparatus 1, the clamping piece 71b is moved so that a pair of clamping piece 71a, 71b which clamps the reinforcement member 32, and clamping piece 71a, 71b may mutually adjoin and separate. By configuring the support portion 62 with the air cylinder 72 and the spring 73, the movement of the reinforcing member 32 and the restriction can be reliably released with a simple configuration.

  The substrate fixing device and the substrate inspection device are not limited to the above configuration. For example, the example in which only one of the pair of holding parts 12a and 12b (only the holding part 12a in the above example) is configured to move is described above, but both the holding parts 12a and 12b can be configured to be movable. . In this case, in this configuration, the reinforcing member 32 is disposed on both the holding portions 12a and 12b, and the support portion 62 is disposed on both the attachment portions 14a and 14b, thereby realizing the same effect as the above effect. can do.

  Moreover, although it described above about the example which has arrange | positioned the reinforcement member 32 in the center part Ca of the length direction in the holding | maintenance part 12a, arbitrary positions between edge part Ea1, Ea2 of the holding | maintenance part 12a other than center part Ca. The reinforcing member 32 can be disposed in the case, and even in this case, the effect of suppressing the bending of the holding portion 12a can be realized.

  Further, the configuration example in which one reinforcing member 32 is disposed in one holding portion 12 has been described above. However, two or more reinforcing members 32 are disposed in one holding portion 12 and each reinforcing member 32 is supported. A configuration in which two or more support portions 62 are disposed in the attachment portion 14 may be employed.

  In addition, the example in which the reinforcing member 32 formed in a columnar shape is described above. However, the shape of the reinforcing member 32 is not limited to the columnar shape, and various columnar shapes such as an elliptical columnar shape and a polygonal columnar shape are exemplified. The reinforcing member can be employed.

  Further, the configuration of the support portion that supports the reinforcement member 32 and restricts the movement of the reinforcement member 32 is not limited to the configuration of the support portion 62 described above. For example, a configuration provided with a moving mechanism using a motor instead of the air cylinder 72 may be employed.

  In addition, the example in which the probing device 3 that executes the probing process as the regulation process is attached to the attachment portions 14a and 14b has been described above. However, a configuration in which a device that performs another regulation process is attached to the attachment portions 14a and 14b is adopted. You can also. For example, it is possible to employ a configuration in which an imaging unit that executes an imaging process for detecting a positional deviation of the substrate 100 as a prescribed process is attached to the attachment units 14a and 14b.

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 2 Board | substrate fixing apparatus 3 Probing apparatus 4 Processing part 11 Base 12a, 12b Holding part 14a, 14b Attachment part 32 Reinforcement member 62 Support part 71a, 71b Clamping piece 72 Air cylinder 73 Spring 100 Board | substrate Ca center part Ea1, Ea2 end

Claims (4)

A base, a pair of beam-shaped holding portions that are disposed on the base and hold a pair of opposite edges of the substrate to fix the substrate to the base, and provided on the base And a mounting portion to which a device for performing a pre-defined regulation process can be attached to the substrate fixed to the base by the holding portion, and at least one of the holding portions is provided on the substrate. A substrate fixing device configured to be movable along a first direction parallel to the upper surface of the base according to the size,
The at least one holding portion is supported at the both ends by the base so as to be movable along the first direction, and at an intermediate portion of the both ends so as to protrude along the first direction. Provided with a disposed reinforcing member,
The attachment portion supports the reinforcement member movably along the first direction, and restricts the movement of the reinforcement member along the first direction and releases the restriction according to the restriction instruction and the release instruction. The board | substrate fixing apparatus by which the support part which can be arranged is arrange | positioned.   The substrate fixing device according to claim 1, wherein the reinforcing member is disposed at a central portion in a length direction of the at least one holding portion.   The support portion includes a pair of sandwiching pieces that sandwich the reinforcing member, and a moving mechanism that moves at least one of the sandwiching pieces so that the sandwiching pieces approach and separate from each other. Item 3. The substrate fixing device according to Item 1 or 2.   A substrate fixing device according to any one of claims 1 to 3 and a probing device that is attached to the attachment portion and executes a probing process as the defining process, and configured to be able to perform an inspection on the substrate. Board inspection equipment.

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