JP5773525B2 - Manipulator prevention mechanism - Google Patents

Description

  The present invention relates to a manipulator removal prevention mechanism capable of preventing a manipulator holding a holding member such as an electronic component or a backup pin from coming off from a head holder.

  Conventionally, electronic parts such as chip parts and ICs have been mounted on a printed circuit board. In this case, electronic parts are mounted on the printed circuit board by adsorbing the electronic parts conveyed by the tape feeder with a nozzle. The device is used. However, some electronic components have shapes that cannot be adsorbed by the nozzles, and some electronic components cannot be adsorbed by the nozzles because of their large weight. For this reason, there is also an electronic component mounting device that holds and lifts an electronic component using a manipulator equipped with a clamping device (see, for example, Patent Document 1).

  This electronic component mounting apparatus includes a manipulator (component holding unit) that is movable in the Z-axis direction and the θ-axis direction, and is provided in a head unit that is movable between a component supply unit and a component mounting unit, and the manipulator And a holding device that holds the electronic component by holding it from both sides. Further, the manipulator includes a piston shaft that rises to the base end side by negative pressure applied to the base end side, and a spring that biases the piston shaft to the front end side, and the clamping devices are arranged on both lower sides of the piston shaft. A pair of sandwiched pieces is provided.

  And when the piston shaft rises due to negative pressure, the piston shaft and the pair of sandwiching pieces sandwich the electronic component, when the negative pressure is released and the piston shaft descends due to the elasticity of the spring, The sandwiching pieces are configured to be separated from each other to release the electronic component. Further, the manipulator is prevented from dropping downward by passing a pin disposed on the shaft support member of the head unit through a long hole provided in the support member of the clamping device.

  However, some electronic component mounting apparatuses hold not only electronic components but also various holding members such as backup pins that support a printed circuit board and install them at predetermined positions. In the case of such an electronic component mounting apparatus, since the manipulator is replaced according to the member to be held, the manipulator replacement work is required to be easy. For this reason, in the mounting portion for mounting the manipulator to the holder (shaft support member) of the head unit, for example, a V-shaped groove portion is provided in the shank portion provided in the manipulator, and the holder is engaged with the groove portion. There is a type in which a manipulator is detachably attached to a holder by attaching a plate spring member to be joined with a screw and engaging the leaf spring member with a groove.

JP 2000-183594 A

  However, in the above-described conventional electronic component mounting apparatus, when the weight of the holding member is heavy, the leaf spring member may come off from the groove and the manipulator may come out of the holder of the head.

  The present invention has been made to cope with such problems, and an object of the present invention is to provide a mechanism for preventing the manipulator from coming off from the holder of the head. In the description of each constituent element of the present invention below, the reference numerals of corresponding portions of the embodiment are shown in parentheses in order to facilitate understanding of the present invention. The present invention should not be construed as being limited to the configurations of the corresponding portions indicated by the reference numerals of the forms.

In order to achieve the above-mentioned object, the structural features of the manipulator removal prevention mechanism according to the present invention include a cylindrical holder (13c) provided in the head (13a, 13b), and a cylindrical shape fitted to the holder. Manipulator including a fitting portion (21, 41) and a holding mechanism (26a, 27a, 46a) for holding the holding member (B, 50), and detachably attached to the holder via the attachment portion (30). 20 and 40), a moving member (26, 27, 46) capable of moving forward and backward with respect to the holder is provided in the manipulator, and the moving member is moved to the holder in the state of being moved relative to the holder. attached to the mounting condition of the mounting portion when the manipulator is mounted, constituting an attachment state maintaining mechanism for maintaining the de-disabled state of the fitting portion from the holder State maintaining member (26b, 27b, 46b) and with composed, configured to hold the holding member as the holding mechanism, the moving member, by retracting relative to the holder, the holding mechanism releases the holding of the holding member At the same time, the attachment state maintaining mechanism is configured so that the attachment state of the attachment portion is released from the non-detachable state of the fitting portion from the holder, and the fitting portion is detachable from the holder .

  In the manipulator removal prevention mechanism according to the present invention, in conjunction with the operation of the holding mechanism, when the holding mechanism holds the holding member, the attachment state of the attachment portion is maintained, and when the holding mechanism releases the holding member An attachment state maintaining mechanism for releasing the state in which the attachment state of the attachment portion is maintained is provided. For this reason, when the holding mechanism holds the holding member and a large load is applied to the holding mechanism, the attachment state maintaining mechanism maintains the attachment state of the attachment portion and ensures that the manipulator comes out of the head holder. To prevent. In addition, when the holding mechanism does not hold the holding member, a large load is not applied to the holding mechanism or the mounting portion. Therefore, the manipulator can move the head through the mounting portion even if the state maintaining action by the mounting state maintaining mechanism does not work. It is maintained in the state attached to.

In addition, another structural feature of the manipulator removal prevention mechanism according to the present invention is that the mounting portion includes a groove portion (35) provided in the fitting portion, a locking groove (34b) provided in the holder, An engagement member (32) that is detachably engaged with the groove portion and the locking groove, and an elastic member (31) that is provided on the holder and elastically presses the engagement member against the groove portion and the locking groove, and maintains the mounting state. piece, in advance do I state with respect to the holder, the engagement member is in fact configured to support the elastic member so as to de-impossible from the groove portion and locking groove. According to the present invention, the attachment portion and the attachment state maintaining mechanism can be simplified. Further, in the present invention, the holding member is constituted by a member in which an engaging groove is formed, and the holding mechanism includes an insertion hole through which the holding member is inserted and an engaging hole having an edge portion that engages with the engaging groove. Can be constituted by a shutter formed continuously, and the attachment state maintaining piece can be constituted by a member integrated with the shutter.

  In the present invention, for example, the attachment portion is configured by a mechanism including one or more groove portions provided in the fitting portion and one or more spring members attached to the holder and engaged with the groove portions. And it is preferable to comprise the attachment state maintenance mechanism with the attachment state maintenance piece which can advance / retreat with respect to the surface on the opposite side to the groove part side in one or some spring members. In this case, the spring member may be a spring that directly engages with the groove, or the spring is configured to include a spring and a member that engages with the groove, and the spring presses the member that engages with the groove against the groove. Also good. When the spring member is composed of a spring and a member that engages with the groove portion, for example, the member that engages with the groove portion is formed of a round bar-like pin, and the pin can be inserted into the holder from the circumferential surface side. A notch which penetrates is provided, and the fitting portion is attached to the holder in a state where the groove portion is aligned with the notch, a pin is inserted into the notch and the groove portion, and the pin can be pressed against the groove portion by a spring.

  Moreover, since the attachment state maintenance piece which comprises an attachment state maintenance mechanism is located in the surface side of a spring member, since it can prevent that a spring member leaves | separates from a groove part, the state which the spring member and the groove part engaged is maintained. Can be made. And since it becomes possible to bend so that a spring member may leave | separate from a groove part by retreating the attachment state maintenance piece from the surface side of a spring member, the state which the spring member and the groove part engaged is cancelled | released. Is possible. In this case as well, the state in which the manipulator is mounted on the holder is maintained unless a force greater than the elasticity of the spring member is applied and the engagement between the spring member and the groove is released. Further, the surface of the spring member in this case is a surface in a direction to bend when the spring member releases the engagement with the groove portion, and the attachment state maintaining piece advances and retreats from the front with respect to this surface. Or you may move forward and backward from the side.

Still another structural feature of the manipulator removal prevention mechanism according to the present invention is that a cylindrical holder provided in the head, a cylindrical fitting portion that fits into the holder, and a holding member that holds the holding member. And a manipulator that is detachably attached to the holder via the attachment portion, and the attachment state maintaining mechanism that maintains the attachment state of the attachment portion when the manipulator is attached to the holder And when the holding mechanism holds the holding member, the mounting state maintaining mechanism maintains the mounting state of the mounting portion, and the holding mechanism releases the holding member. mounted state maintaining mechanism so as to release the state of being maintained attached state of the attachment portion, the holding mechanism, to hold by sandwiching the holding member A pair of holding pieces (26a, 27a) constituted by the mounted state maintaining mechanism each pair of mounting state maintaining member that can advance and retreat with respect to one and Ri holder Do from integral of a pair of pinching pieces (26b, 27b) It is to have done.

  In the present invention, since one of the pair of sandwiching pieces, one of the pair of attachment state maintaining pieces, and the other of the pair of sandwiching pieces and the other of the pair of attachment state maintenance pieces are respectively integrated, the number of parts is reduced and the manipulator The mechanism for preventing the slipping off is simple. In the case of the present invention, when the pair of clamping pieces approach or separate from each other and the holding member is clamped or released, the pair of attachment state maintaining pieces are spring members from the direction facing each other. It is preferable to advance and retreat with respect to the surface.

Still another structural feature of the manipulator removal prevention mechanism according to the present invention is that a cylindrical holder provided in the head, a cylindrical fitting portion that fits into the holder, and a holding member that holds the holding member. And a manipulator that is detachably attached to the holder via the attachment portion, and the attachment state maintaining mechanism that maintains the attachment state of the attachment portion when the manipulator is attached to the holder And when the holding mechanism holds the holding member, the mounting state maintaining mechanism maintains the mounting state of the mounting portion, and the holding mechanism releases the holding member. mounted state maintaining mechanism so as to release the state of being maintained attached state of the attachment portion, the holding member (50) engaging groove (53a) is formed The shutter (46a) is formed of a material, and the holding mechanism is continuously formed with an insertion hole (48a) through which the holding member is inserted and an engagement hole (48b) having an edge engaged with the engagement groove. in configured, it lies in the construction in retractable mounted state maintaining member (46b) of the mounting state maintaining mechanism against the shutter and Do Ri holder from the body.

  In the present invention, the shutter constituting the holding mechanism holds a holding member having an engagement groove. The shutter has an insertion hole through which the holding member is inserted, and an edge engageable with the engagement groove. And an engagement hole having a portion. For this reason, a backup pin is used as a holding member. With the backup pin positioned in the insertion hole, the shutter is moved so that the edge of the engagement hole is engaged with the groove portion. Can be held. In that case, the attachment state maintenance piece moves toward the surface of the spring member from a position retracted with respect to the surface of the spring member. In addition, since the mounting state maintaining piece and the shutter are integrated, the number of parts is reduced, and the mechanism for preventing the manipulator from being detached becomes simple.

  Further, another structural feature of the manipulator removal prevention mechanism according to the present invention is whether or not the position of the shutter is in an appropriate position for holding the holding member when the holding member is held by the holding mechanism. The first confirmation means (14, 42, 46a) for confirming is provided. According to the present invention, it is possible to operate the holding mechanism only when the confirmation unit confirms that the shutter is positioned at an appropriate position. According to this, the shutter can reliably hold the holding member. Further, when the holding mechanism holds the holding member, the holding member can be prevented from colliding with the shutter. This can prevent the shutter and the holding member from being damaged.

Still another structural feature of the manipulator removal prevention mechanism according to the present invention is that a cylindrical holder provided in the head, a cylindrical fitting portion that fits into the holder, and a holding member that holds the holding member. And a manipulator that is detachably attached to the holder via the attachment portion, and the attachment state maintaining mechanism that maintains the attachment state of the attachment portion when the manipulator is attached to the holder And when the holding mechanism holds the holding member, the mounting state maintaining mechanism maintains the mounting state of the mounting portion, and the holding mechanism releases the holding member. when mounted state maintaining mechanism so as to release the state of being maintained attached state of the attachment portion, mounting a manipulator holder, Mani Second confirmation means (18,49a, 49b) that Regulator to confirm whether it is ready mounted in providing the. According to the present invention, the manipulator can be securely attached to the holder.

Still another structural feature of the manipulator removal prevention mechanism according to the present invention is that a cylindrical holder provided in the head, a cylindrical fitting portion that fits into the holder, and a holding member that holds the holding member. And a manipulator that is detachably attached to the holder via the attachment portion, and the attachment state maintaining mechanism that maintains the attachment state of the attachment portion when the manipulator is attached to the holder And when the holding mechanism holds the holding member, the mounting state maintaining mechanism maintains the mounting state of the mounting portion, and the holding mechanism releases the holding member. mounted state maintaining mechanism so as to release the state of being maintained attached state of the attachment portion, the holding mechanism and mounting state maintaining mechanism spring (25a, 5b, 45a, lies in those having a resilient and actuating portion which reciprocates by the operation of the negative pressure generator against the elasticity of the spring 45b). According to the present invention, since the operation of the holding mechanism and the attachment state maintaining mechanism is based on the elasticity of the spring and the operation of the negative pressure generator that resists the elasticity of the spring, the reciprocating movement of the operating portion is ensured.

  Further, another structural feature of the manipulator removal prevention mechanism according to the present invention is that the manipulator is connected to a negative pressure generating device that adsorbs holding parts by negative pressure, and the holding mechanism and the attachment state maintaining mechanism. Is operated by the negative pressure generated by the negative pressure generator, and the negative pressure generator for sucking the holding parts and the negative pressure generator for operating the holding mechanism and the attachment state maintaining mechanism are common. There is to be.

  According to the present invention, since the negative pressure generating device originally provided in the electronic component mounting apparatus to which the manipulator is attached can be used to operate the holding mechanism and the attachment state maintaining mechanism, the negative pressure for the holding mechanism is newly added. There is no need to provide a generator or a negative pressure generator for the attachment state maintaining mechanism. Further, according to the present invention, the entire apparatus can be simplified, and the operations of the holding mechanism and the attachment state maintaining mechanism can be synchronized.

It is the perspective view which showed the electronic component mounting apparatus used by each embodiment of this invention. It is the perspective view which showed the state which the holding mechanism of the removal prevention mechanism of the manipulator concerning 1st Embodiment hold | maintained the electronic component. FIG. 3 is a front view of a mechanism for preventing the manipulator from dropping out shown in FIG. 2. It is the perspective view which showed the state which the holding mechanism of the removal prevention mechanism of the manipulator concerning 1st Embodiment opened. FIG. 5 is a front view of a mechanism for preventing the manipulator from dropping out shown in FIG. 4. FIG. 6 is a longitudinal sectional view of a mechanism for preventing the manipulator from coming off shown in FIG. 5. It is the cross-sectional view which showed the principal part of the manipulator. It is the disassembled perspective view which showed the attaching part. It is the perspective view which showed the attaching part. It is the perspective view which showed the state which the holding mechanism of the removal prevention mechanism of the manipulator concerning 2nd Embodiment closed. It is the perspective view which showed the state which the holding mechanism of the removal prevention mechanism of the manipulator concerning 2nd Embodiment opened. It is the front view which showed the backup pin. The manipulator which concerns on 2nd Embodiment is shown, (a) is a top view, (b) is a front view, (c) is a side view. It is the longitudinal cross-sectional view which showed the part in which the spring accommodating part of the manipulator which concerns on 2nd Embodiment is located. It is a cross-sectional view of a manipulator according to a second embodiment. It is the longitudinal cross-sectional view which showed the part in which the shutter penetration hole of the manipulator which concerns on 2nd Embodiment is located. It is the top view which showed the shutter. It is the perspective view which showed the state before mounting | wearing a manipulator with a holder. It is the perspective view which showed the state which mounted | wore the holder with the manipulator. It is the perspective view which showed the state which the attachment state maintenance mechanism maintained the attachment state of the attachment part, and the engagement with the manipulator with which the holder was mounted | worn, and the manipulator fixing pin was cancelled | released. It is the perspective view which showed the state which the attachment state maintenance mechanism maintained the attachment state of the attachment part, and pulled the manipulator with which the holder was mounted | worn from the manipulator fixing pin. It is the perspective view which showed the state which inserted the upper part of the backup pin in the manipulator with which the holder was mounted | worn. It is the perspective view which showed the state in which the attachment state maintenance mechanism maintained the attachment state of the attachment part, and the manipulator with which the holder was mounted | worn hold | maintained the backup pin.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows an electronic component mounting apparatus 10 having a manipulator removal prevention mechanism according to the embodiment. The electronic component mounting apparatus 10 is an apparatus for mounting an electronic component B (see FIGS. 2 and 3) composed of an IC chip, a resistor, a capacitor, and the like on a substrate A. The electronic component mounting apparatus 10 moves above the base 11 to move the board A in the X direction (left and right direction indicated by the arrow a in FIG. 1) and set in advance (position of the board A in FIG. 1). A pair of transfer heads 13a and 13b that are arranged above the base 11 and move in the X direction and the Y direction (the front-rear direction indicated by the arrow b in FIG. 1), and the base 11 The component imaging camera 14 disposed on the upper surface of the electronic component and electronic component supply units 15a and 15b including a plurality of tape feeders 15 for supplying the electronic component B are provided.

  The conveyor 12 moves the mounting table 12a by the operation of a mounting table 12a, a pair of rail portions 12b and 12c that are provided before and after the mounting table 12a and fix the substrate A sandwiched from the front and rear, and a transport motor (not shown). And a ball screw 12d for transporting the substrate A. In addition, a pair of X rail units 16a and 16b provided with a driving device extend in the left-right direction at regular intervals on both front and rear sides of the mounting table 12a on the upper surface of the base 11. Then, the Y rail unit 17 is stretched between the pair of X rail units 16a and 16b so as to be movable in the left-right direction.

  The Y rail unit 17 includes leg portions 17a and 17b that can move along the X rail units 16a and 16b, and a Y shaft portion 17c that spans the upper ends of the leg portions 17a and 17b. The Y-axis portion 17c includes a rail portion 17d that movably supports the transfer heads 13a and 13b, and a drive device that individually moves the transfer heads 13a and 13b along the rail portion 17d. Yes. For this reason, the Y rail unit 17 moves in the left-right direction by driving of the driving devices of the X rail units 16a and 16b. And the transfer heads 13a and 13b move along the longitudinal direction of the rail part 17d by the drive of the drive device of the Y-axis part 17c.

  Each of the transfer heads 13a and 13b includes a plurality of cylindrical holders 13c and an electronic component manipulator 20 that holds the electronic component B and is attached to the lower ends of the plurality of holders 13c. In addition, the transfer heads 13a and 13b include a Z-axis servo motor that individually lifts and lowers the plurality of holders 13c, and an R-axis servo motor that individually rotates the plurality of holders 13c in the rotation direction. Therefore, the transfer heads 13a and 13b can move on the base 11 within the movable range of the Y rail unit 17, and each holder 13c and the manipulator 20 can move in the vertical direction and rotate around the Z axis. it can.

  In addition, the transfer heads 13a and 13b are provided with a moving camera 18 that images a predetermined portion of the substrate A and the tape feeder 15 and the like. The moving camera 18 is used to confirm the installation position of the substrate A, the component suction position of the tape feeder 15, the position of the electronic component B conveyed to the component suction position of the tape feeder 15, and the like. The component imaging camera 14 is used for confirming the arrangement of the plurality of manipulators 20, and for imaging the electronic component B and the like held by each manipulator 20.

  The manipulator 20 is attached to the holder 13c via the attachment part 30 shown in FIGS. The manipulator 20 includes a shank portion 21 as a fitting portion of the present invention, a spring holding portion 22 attached to the lower end of the shank portion 21, and a pair of spring pressing portions 23 and 24 attached to both sides of the spring holding portion 22. As will be described later, coil springs 25a and 25b (see FIGS. 6 and 7) that are housed in the spring holding portion 22 and the spring pressing portions 23 and 24, respectively, and expand and contract by the movement of the spring pressing portions 23 and 24. , And a pair of moving members 26 and 27 attached to the outer sides of the spring pressing portions 23 and 24.

  The shank part 21 is comprised by the cylinder which can communicate with the holder 13c and can form a negative pressure space inside. The spring holding part 22 has two fan-shaped notches formed in predetermined opposing portions of a disk having a diameter larger than the height, and two fan-shaped parts slightly larger in plan view than the notch parts are connected symmetrically. It is comprised by the member formed in the shape, The spring accommodating part 22a, 22b connected to the shank part 21 is formed in the inside. The spring accommodating portions 22a and 22b extend in parallel from opposite directions. In the state shown in FIG. 7, the spring accommodating portion 22a extends from the front notch portion toward the left side, and the spring accommodating portion 22b , Extending from the rear notch to the right.

  And coil spring 25a, 25b is accommodated in spring accommodating part 22a, 22b. One end of the coil spring 25a is located at the back end of the spring accommodating portion 22a, and the other end of the coil spring 25a protrudes outward from the opening of the spring accommodating portion 22a. Similarly, one end portion of the coil spring 25b is located at the back end portion of the spring accommodating portion 22b, and the other end portion of the coil spring 25b projects outward from the opening of the spring accommodating portion 22b. A stopper 22c is fixed to the left and right centers of the lower surface of the spring holding portion 22 with screws 22d.

  The spring pressing parts 23 and 24 are both formed of a cylindrical member that is open on one side and closed on the other side, and most of the opening side can be inserted into the spring accommodating parts 22a and 22b, and is in an extended state inside. The coil springs 25a and 25b are formed in a size that can accommodate most of them. The spring pressing portions 23 and 24 are arranged so as to face each other with their axes shifted, both of which have the opening side positioned inside the spring accommodating portions 22a and 22b and the closed side of the spring accommodating portions 22a and 22b. Coil springs 25a and 25b are housed inside by being positioned outside. The space formed by the portion from the inside of the shank portion 21 to the inside of the spring accommodating portions 22a and 22b and the spring pressing portions 23 and 24 is in a sealed state, and the spring pressing portions 23 and 24 have their sealed state. Maintain and slide against the spring retainer 22. The coil springs 25a and 25b expand and contract as the spring pressing portions 23 and 24 move forward and backward.

  The moving members 26 and 27 constitute a holding mechanism and an attachment state maintaining mechanism according to the present invention. That is, as for the moving members 26 and 27, the lower part is comprised by the holding pieces 26a and 27a as a holding mechanism, and the upper part is comprised by the attachment state maintenance pieces 26b and 27b as an attachment state maintenance mechanism. The gripping piece 26a and the attached state maintaining piece 26b are connected by a square plate-like connecting piece 26c, and the connecting piece 26c is fixed to a closed portion of the spring pressing portion 23 by a screw 26d. The gripping piece 27a and the attached state maintaining piece 27b are connected by a square plate-like connecting piece 27c, and this connecting piece 27c is fixed to a closed portion of the spring pressing portion 24 by a screw 27d.

  The gripping piece 26a includes a horizontal portion extending from the lower end of the connecting piece 26c perpendicular to the connecting piece 26c and extending along the lower surface of the spring holding portion 22, and a vertical portion extending downward from the tip of the horizontal portion perpendicular to the horizontal portion. The cross-sectional shape which consists of is comprised in the L-shaped part. The grip piece 27a is formed symmetrically with the grip piece 26a, and extends horizontally from the lower end of the connection piece 27c so as to be perpendicular to the connection piece 27c and along the lower surface of the spring holding portion 22, and the tip of the horizontal portion. A cross-sectional shape composed of a vertical portion extending perpendicularly to the horizontal portion and extending downward is constituted by an L-shaped portion. In addition, notches 26e and 27e that can be engaged with the side portions of the stopper 22c are formed in opposing portions of the upper portions of the vertical portions of the gripping pieces 26a and 27a.

  The gripping pieces 26a, 27a change the distance between them as the spring pressing portions 23, 24 move. When the gripping pieces 26a, 27a approach each other, as shown in FIG. 2 and FIG. It can move to a position where 27e is engaged. Further, when the gripping pieces 26a and 27a are separated from each other, the notches 26e and 27e are separated from the stopper 22c as shown in FIGS. Therefore, the gripping pieces 26a and 27a can sandwich the electronic component B having a longer width than the shortest distance between the vertical portions in the state shown in FIGS.

  The attachment state maintaining pieces 26b and 27b are both formed in a U-shaped plate shape in plan view, and the attachment state maintenance piece 26b is formed from the upper end of the connecting piece 26c with both ends directed to the front and rear of the holder 13c. The attachment state maintaining piece 27b extends to the holder 13c side from the upper end of the connecting piece 27c with both ends directed toward the front and rear of the holder 13c. The width between both ends of each of the attachment state maintaining pieces 26b and 27b is set to a length that allows the holder 13c to be sandwiched from the front and back in a state of being close to the holder 13c. For this reason, when the attachment state maintaining pieces 26b and 27b approach each other, as shown in FIG. 2, the attachment state maintenance pieces 26b and 27b substantially surround the periphery of the holder 13c, and when the attachment state maintenance pieces 26b and 27b are separated from each other, As shown in FIG. 4, it will be in the state away from the holder 13c.

  The attachment portion 30 for attaching the manipulator 20 configured as described above to the holder 13c includes the leaf spring 31, the locking pin 32, the pair of screws 33, the spring member attachment portion 34 formed on the holder 13c, and the shank portion shown in FIG. 21 is formed by a V-shaped groove 35 formed in the member 21. The leaf spring 31 bends the lower part of the vertically long rectangular plate 31a having elasticity backward substantially at a right angle, and forms a pair of retaining claws 31b projecting rearward perpendicular to the rectangular plate 31a on both sides of the corner portion. A pair of screw insertion holes (not shown) are formed on both sides of the upper portion of the rectangular plate 31a. The locking pin 32 is configured by a round bar having a length that can be disposed between the pair of retaining claws 31 b of the leaf spring 31.

  The spring member mounting portion 34 is formed on the outer peripheral surface of the portion where the shank portion 21 is inserted in the lower portion of the holder 13c, and is composed of a spring mounting surface 34a and a locking groove 34b. The spring mounting surface 34a is configured by a plane whose left and right widths are substantially equal to the left and right widths of the rectangular plate 31a, and whose vertical length is shorter than the vertical length of the rectangular plate 31a by about the diameter of the locking pin 32. A pair of screw holes 34c are formed at the same interval as the pair of screw insertion holes of the leaf spring 31. The locking groove 34b is formed of a straight horizontal groove having a length (width) and depth that allows the locking pin 32 to be inserted almost without margin, and a central portion in the left-right direction is formed inside the holder 13c. It penetrates. The vertical length of the spring member mounting portion 34 is slightly longer than the vertical length of the leaf spring 31.

  The shank portion 21 is inserted into the holder 13c in close contact with the holder 13c and is attached to the holder 13c. The V-shaped groove 35 is a locking groove 34b when the shank portion 21 is inserted into the holder 13c. It is formed in the outer peripheral surface of the shank part 21 so that it may be located in a position. Further, an inclined surface 35 a is formed in the upper part of the V-shaped groove 35 at the upper edge of the shank portion 21. The V-shaped groove 35 extends in the horizontal direction and has a depth with which a part of the locking pin 32 can be engaged. Therefore, in a state where the locking pin 32 is put in the locking groove 34b, the leaf spring 31 is positioned on the spring member mounting portion 34 so that the locking pin 32 is sandwiched between the pair of retaining claws 31b, and the screw 33 is moved to the leaf spring. The leaf spring 31 can be attached to the spring member attachment portion 34 together with the locking pin 32 by passing through the screw insertion hole 31 and screwing into the screw hole 34c.

  And the shank part 21 can be attached to the holder 13c by inserting the upper part of the shank part 21 into the lower part of the holder 13c and engaging the V-shaped groove 35 with the locking pin 32. As a result, the state shown in FIG. 9 is obtained. In this state, the locking pin 32 is pressed by the leaf spring 31 and is prevented from coming off from the locking groove 34 b and the V-shaped groove 35. In addition, when inserting the shank part 21 in the holder 13c, the shank part 21 is smoothly inserted in the holder 13c because the inclined surface 35a contacts the locking pin 32. Further, when the attachment state maintaining pieces 26b, 27b described above approach each other, the front portions of the attachment state maintenance pieces 26b, 27b are positioned on the surface side of the leaf spring 31 in a state of approaching the leaf spring 31. Thus, the leaf spring 31 is bent forward and the locking pin 32 is prevented from coming off from the locking groove 34 b and the V-shaped groove 35.

  Further, the inside of the holder 13c communicates with a negative pressure generator (not shown) via piping or the like provided in the transfer heads 13a and 13b, and the manipulator is caused by a suction force generated by the operation of the negative pressure generator. 20 operates. That is, when the negative pressure generator is not operating, the spring pressing portions 23 and 24 are urged to the outside of the spring accommodating portions 22a and 22b by the elasticity of the coil springs 25a and 25b, and the moving members 26 and 27 are , They are separated from each other. When the negative pressure generating device is activated, a negative pressure is generated in the space formed by the spring accommodating portions 22a and 22b and the spring pressing portions 23 and 24, and the negative pressure resists the elasticity of the coil springs 25a and 25b. The pressing portions 23 and 24 are sucked into the spring accommodating portions 22a and 22b.

  As a result, the moving members 26 and 27 come close to each other, and the gripping pieces 26a and 27a can hold the electronic component B. The attachment state maintaining pieces 26b and 27b hold the leaf spring 31 and 32 is prevented from coming off from the locking groove 34 b and the V-shaped groove 35. The holder 13c, the manipulator 20, the mounting portion 30, and the negative pressure generator constitute the manipulator removal prevention mechanism according to the present invention. In addition, a nozzle can be attached to the holder 13c instead of the manipulator 20, and in this case, the nozzle sucks the electronic component B by the operation of the negative pressure generator. That is, the moving members 26 and 27 are originally operated by using the negative pressure generated by the negative pressure generating device that sucks the electronic component B through the nozzle.

  When the electronic component B is mounted on the board A using the electronic component mounting apparatus 10 configured as described above, first, a plurality of tape feeders 15 are installed on the base 11 as shown in FIG. In this state, the electronic component mounting apparatus 10 is operated. As a result, the carrier tape holding the electronic component B is fed out from the tape feeder 15, and the plurality of electronic components B are sequentially sent to the component pick-up position. Next, the electronic component B that has reached the component extraction position is picked up by the manipulator 20 provided in the transfer heads 13a and 13b. Then, after the picked-up electronic component B is conveyed to a predetermined portion of the printed circuit board A, it is mounted on that portion. The operation of picking up and mounting the electronic component B is repeated. Meanwhile, even if the electronic component B is heavy, the manipulator 20 does not fall out of the holder 13c. For this reason, the electronic component mounting apparatus 10 can operate | move appropriately.

  As described above, in the manipulator removal prevention mechanism according to the present embodiment, the gripping piece 26a among the gripping pieces 26a and 27a constituting the holding mechanism and the attachment state maintaining pieces 26b and 27b constituting the attachment state maintaining mechanism. And the attachment state maintaining piece 26b are integrally formed, and the gripping piece 27a and the attachment state maintaining piece 27b are integrally formed. Further, with the locking pin 32 positioned in the locking groove 34b, the leaf spring 31 is fixed to the spring member mounting portion 34 with the screw 33, and the upper portion of the shank portion 21 is inserted into the lower portion of the holder 13c in that state. Thus, the manipulator 20 is attached to the holder 13c.

  For this reason, the gripping pieces 26a and 27a and the attachment state maintaining pieces 26b and 27b are operated in conjunction with each other, and the gripping pieces 26a and 27a hold the electronic component B and a large load is applied to the manipulator 20 and the mounting portion 30. In the hooked state, the mounting state maintaining pieces 26b and 27b hold the leaf spring 31 and maintain the mounting state of the mounting portion 30. As a result, the manipulator 20 can be reliably prevented from coming out of the holder 13c. Further, the operation of attaching / detaching the manipulator 20 to / from the holder 13c is simplified. Further, since the gripping piece 26a and the mounting state maintaining piece 26b and the gripping piece 27a and the mounting state maintaining piece 27b are respectively integrated, the number of parts is reduced, and the mechanism for preventing the manipulator from being detached becomes simple.

  Further, since the moving members 26 and 27 including the gripping pieces 26a and 27a and the attachment state maintaining pieces 26b and 27b move due to the elasticity of the coil springs 25a and 25b and the operation of the negative pressure generating device, the reciprocating movement is surely performed. Is possible. Further, since the gripping pieces 26a and 27a and the attachment state maintaining pieces 26b and 27b are reciprocated by the elasticity of the same coil springs 25a and 25b and the operation of the negative pressure generator, the electronic component mounting apparatus 10 can be simplified. .

(Second Embodiment)
10 and 11 show a mechanism for preventing the manipulator from coming off according to the second embodiment of the present invention. The manipulator 40 provided in the mechanism for preventing the removal of the manipulator is not the electronic component B but a manipulator for a backup pin for holding the backup pin 50 shown in FIG. A plurality of backup pins 50 are arranged side by side on a pedestal 56 (see FIG. 22 and FIG. 23) provided inside the base 11, and predetermined ones thereof are appropriately held by the manipulator 40 and conveyed to the substrate A. Is mounted on a backup plate (not shown) installed below the installation section. The backup pin 50 is located below the substrate A and prevents the substrate A from being bent when the electronic component B is mounted on the substrate A.

  The backup pin 50 is composed of a bar-like body having a lower portion that is thicker and narrower as it goes upward. An adsorption portion 51, a large diameter portion 52, and a small diameter portion 53 are formed in this order from the bottom, and an upper portion of the small diameter portion 53 is formed. A small support pin 54 is formed. Further, the length in the axial direction becomes longer from the lower suction portion 51 toward the upper small diameter portion 53. An accommodation hole is formed in the center of the bottom surface of the attracting portion 51, and the magnet 55 is accommodated therein. The backup pin 50 is installed upright on the backup plate by the magnetic force of the magnet 55. Further, an engagement groove 53 a is formed along the outer peripheral surface in the upper portion of the small diameter portion 53. A tapered surface is formed at each boundary portion of the suction portion 51, the large diameter portion 52, and the small diameter portion 53 and on the upper portion of the small diameter portion 53.

  As shown in FIGS. 13A, 13 </ b> B, and 13 </ b> C, the manipulator 40 includes a shank portion 41, a spring holding portion 42 attached to the lower portion of the shank portion 41, and one side of the spring holding portion 42. The spring pressing portions 43 and 44 (see FIGS. 14 and 15) attached to the portion, and the spring holding portion 42 and the spring pressing portions 43 and 44, respectively, are accommodated in the spring pressing portions 43 and 44, as will be described later. Coil springs 45a and 45b that expand and contract by the movement of, and a moving member 46 attached to the outer ends of the spring pressing portions 43 and 44.

  The spring holding portion 42 is configured by a member formed in a planar shape by cutting out one side portion (the right side in FIGS. 14 and 15) of a disk having a diameter larger than the height, Spring accommodating portions 42 a and 42 b communicating with the shank portion 21 are formed. The spring accommodating portions 42 a and 42 b are formed in parallel with a distance therebetween, and extend from the planar portion cut out together toward the inner side of the spring holding portion 42. Further, as shown in FIG. 16, a shutter insertion hole 42c penetrating the spring holding part 22 to the left and right is formed in the lower part of the spring holding part 22 in parallel with the spring accommodating parts 42a and 42b. And the hole parts 42d, 42e, and 42f which cross | intersect the shutter insertion hole 42c and are extended from the lower surface of the spring holding | maintenance part 42 are formed at intervals in the right and left. Among these, the diameter of the hole 42e is set to a size that allows the small diameter portion 53 of the backup pin 50 to be inserted.

  The spring pressing portions 43 and 44 have the same configuration as the above-described spring pressing portions 23 and 24, both of which have the opening side positioned inside the spring accommodating portions 42a and 42b, and the closing side on the spring accommodating portions 42a and 42b. The spring holding portion 42 is disposed outside the main body. In addition, coil springs 45 a and 45 b are accommodated inside the spring pressing portions 43 and 44. When the coil springs 45a and 45b are in the extended state, part of the coil springs 45a and 45b protrude from the openings of the spring pressing portions 43 and 44. Between the spring pressing portions 43 and 44, a guide rod 47 made of a screw extending from the flat portion of the spring holding portion 42 to the right outside in parallel to the spring pressing portions 43 and 44 is provided.

  The moving member 46 includes a shutter 46a as a holding mechanism at a lower portion and an attachment state maintaining piece 46b as an attachment state maintaining mechanism at an upper portion. The shutter 46a and the attachment state maintaining piece 46b are connected by a square plate-like connecting piece 46c, and the connecting piece 46c is fixed to a closed portion of the spring pressing portions 43 and 44 by a pair of screws 46d. . Further, an insertion hole is formed in the middle of the portion of the connecting piece 46c where the pair of screws 46d are attached, and the guide rod 47 is inserted into the insertion hole. For this reason, the moving member 46 can move left and right along the guide rod 47.

  The shutter 46a extends slightly downward from the lower end of the connecting piece 46c, and then bends and extends into the shutter insertion hole 42c. As shown in FIG. 17, the shutter 46a has a long hole 48 penetrating vertically. The elongated hole 48 includes a substantially rectangular insertion hole 48a formed side by side in the center portion, a long and narrow engagement hole 48b, a semicircular hole 48c formed on the left of the insertion hole 48a, and the engagement hole 48b. It consists of a circular hole 48d formed on the right. The insertion hole 48a is sized to allow the small diameter portion 53 of the backup pin 50 to pass therethrough, and the engagement hole 48b is sized to allow the engagement groove 53a of the small diameter portion 53 to engage with the edge thereof. Is formed.

  When the shutter 46a moves to the left and right with the movement of the spring pressing portions 43 and 44 and is located on the right side (outside), the insertion hole 48a communicates with the hole portion 42e of the spring holding portion 42, and the backup pin 50 small-diameter portions 53 can be inserted through the hole 42e. When the shutter 46a is located on the left side (inner side), the engagement hole 48b communicates with the hole 42e of the spring holding portion 42, and the small-diameter portion 53 of the backup pin 50 cannot be inserted through the hole 42e. become. In this case, if the engagement groove 53a of the small diameter portion 53 is positioned in the engagement hole 48b, the engagement groove 53a can be engaged with the edge of the engagement hole 48b to hold the backup pin 50.

  Further, as shown in FIG. 13A, holes 49a and 49b to be marks are formed on the upper surface of the spring holding portion 42 and the upper surface of the moving member 46, and the space between the holes 49a and 49b is formed. From the distance, it is possible to recognize whether the shutter 46a is in an open state (a state positioned on the right) or a closed state (a state positioned on the left). Since the attachment state maintaining piece 46b has the same configuration as one of the attachment state maintenance pieces 26b and 27b described above, description thereof is omitted. Furthermore, since the attachment part which attaches the manipulator 40 comprised in this way to the holder 13c is also the same structure as the attachment part 30 mentioned above, the same code | symbol is attached | subjected to the same part and description is abbreviate | omitted. The manipulator 40 configured in this way is attached to the electronic component mounting apparatus 10 described above.

  When the backup pins 50 are installed on the backup plate in the electronic component mounting apparatus 10 using the manipulator 40, first, the operations shown in FIGS. 18 to 21 are sequentially performed to attach the manipulator 40 to the holder 13c. The manipulator 40 before use is fixed to a manipulator fixing pin 57 installed on a pedestal 56 a, and in this case, the shutter 46 a is fixed to a pair of engaging pins 57 a provided on the upper surface of the manipulator fixing pin 57. Is done by engaging.

  That is, the engagement pin 57a has a shape and a size that are substantially the same as the portion of the small diameter portion 53 of the backup pin 50 where the engagement groove 53a is formed. And the distance between the hole portion 42f and the hole portion 42f. Then, the engaging grooves of the pair of engaging pins 57a are engaged with the edge portions of the engaging holes 48b and the semicircular holes 48c of the long holes 48 of the shutter 46a, respectively, so that the manipulator 40 is fixed to the manipulator fixing pin 57. It is fixed to. Further, a positioning protrusion 58 is provided between the pair of engaging pins 57a on the upper surface of the manipulator fixing pin 57, and the pair of engaging pins 57a and the positioning protrusion 58 are respectively provided with spring holding portions. It is located in 42 hole part 42d, 42e, 42f.

  From this state, as shown in FIG. 18, the holder 13c is moved upwardly of the manipulator 40 and then lowered to insert the shank portion 41 into the holder 13c, thereby attaching the manipulator 40 to the holder 13c. The state shown in FIG. Before the holder 13c is lowered, the holes 49a and 49b are imaged by the moving camera 18 to confirm that the shutter 46a is open. As a result, the holder 13c can be prevented from colliding with the attached state maintaining piece 46b. The moving camera 18 and the holes 49a and 49b constitute a second confirmation unit according to the present invention.

  Then, by operating the negative pressure generating device and sucking the moving member 46 into the inside of the spring holding portion 42 as shown in FIG. 20, the pair of engaging pins 57 a and the insertion holes 48 a of the long holes 48 and the circular holes are formed. It is located inside 48d. As a result, the engagement between the engagement pin 57a and the shutter 46a is released. Therefore, by raising the holder 13c, as shown in FIG. 21, the manipulator 40 is separated from the manipulator fixing pin 57 and together with the holder 13c. It rises.

  Next, an operation of holding the backup pin 50 with the manipulator 40 is performed. In this case, the operation of the negative pressure generator is stopped, and the moving member 46 is moved to the outside of the spring holding portion 42 by the elasticity of the coil springs 45a and 45b. As a result, the insertion hole 48a of the shutter 46a communicates with the hole 42e of the spring holding portion 42, and the small diameter portion 53 of the backup pin 50 can be inserted into the hole 42e. In this state, the manipulator 40 is lowered from above the backup pin 50 to obtain the state shown in FIG. Note that immediately before the manipulator 40 is lowered, the component imaging camera 14 is in a state where the shutter 46a is opened based on the length of the shutter 46a protruding from the spring holding portion 42 by imaging the manipulator 40 from below. Recognize The component imaging camera 14, the spring holding portion 42, and the shutter 46a constitute a first confirmation unit according to the present invention.

  Then, by operating the negative pressure generating device and sucking the moving member 46 into the spring holding portion 42 as shown in FIG. 23, the edge of the engagement hole 48b is formed in the engagement groove 53a of the small diameter portion 53. Engage. As a result, the backup pin 50 is held by the manipulator 40. When the holder 13c rises, the backup pin 50 moves away from the base 56 and rises together with the manipulator 40. Moreover, since the leaf | plate spring 31 is pressed by the latching groove 34b side by the front part of the attachment state maintenance piece 46b, the manipulator 40 does not fall out from the holder 13c. Then, the backup pin 50 is conveyed to the backup plate and installed at a predetermined position. At this time, the operation of the negative pressure generator is stopped, and the engagement between the engagement groove 53a of the small diameter portion 53 and the edge of the engagement hole 48b is released.

  As described above, the manipulator removal prevention mechanism according to the present embodiment can reliably prevent the manipulator 40 from falling out of the holder 13c even if the heavy backup pin 50 is held. In addition, since the attachment state maintaining piece 46b is formed integrally with the shutter 46a, the number of parts is reduced, and the mechanism for preventing the manipulator from being detached becomes simple. Furthermore, when the manipulator 40 is attached to the holder 13c, the holder 13c collides with the attachment state maintaining piece 46b in order to confirm that the shutter 46a is in an open state by imaging the holes 49a and 49b with the moving camera 18. This can be prevented, and the manipulator 40 can be securely attached to the holder 13c.

  Further, when the small diameter portion 53 of the backup pin 50 is inserted into the insertion hole 48a of the shutter 46a, the manipulator 40 is imaged from below to confirm that the small diameter portion 53 and the insertion hole 48a are aligned. It is recognized that the shutter 46a is open. For this reason, it can prevent that the shutter 46a collides with the backup pin 50, and the shutter 46a and the backup pin 50 are damaged. Other functions and effects in this embodiment are the same as the functions and effects of the first embodiment described above.

  Further, the mechanism for preventing the manipulator from falling off according to the present invention is not limited to the above-described embodiment, and can be implemented with appropriate modifications. For example, in the first embodiment described above, the gripping piece 26a and the mounting state maintaining piece 26b, and the gripping piece 27a and the mounting state maintaining piece 27b are integrally formed, but these are not integrated and are separate members. You may comprise as. Similarly, the shutter 46a and the attachment state maintaining piece 46b in the second embodiment may not be integrated and may be configured as separate members. In this case, the negative pressure generating device may be composed of separate devices for the holding mechanism and the attachment state maintaining mechanism, or a single device may be used in common.

  Further, in each of the embodiments described above, the attachment state maintaining pieces 26b, 27b and 46b advance and retreat from the side of the leaf spring 31 to the surface of the leaf spring 32, but the leaf spring 32 faces the side. Then, one of the attachment state maintaining pieces 26b and 27b and 46b may advance and retract from the front surface of the leaf spring 31 to the surface of the leaf spring 32. Further, in the second embodiment described above, the manipulator 40 is imaged from below and it is recognized that the shutter 46a is open, but the shutter 46a is open from the distance between the holes 49a and 49b. You may recognize that. Further, the other parts of the manipulator removal prevention mechanism and the configuration of the electronic component mounting apparatus provided with the manipulator removal prevention mechanism can be changed as appropriate.

  13a, 13b ... transfer head, 13c ... holder, 14 ... component imaging camera, 18 ... moving camera, 20, 40 ... manipulator, 21, 41 ... shank part, 42 ... spring holding part, 25a, 25b, 45a, 45b ... Coil spring, 26a, 27a ... gripping piece, 26b, 27b, 46b ... mounting state maintaining piece, 30 ... mounting portion, 35 ... V-shaped groove, 46a ... shutter, 48a ... insertion hole, 48b ... engagement hole, 49a, 49b ... Hole, 50 ... Backup pin, 53a ... Engagement groove, B ... Electronic component.

Claims (9)

A cylindrical holder provided on the head;
In a mechanism for preventing a manipulator from being removed, including a cylindrical fitting portion that fits into the holder and a holding mechanism that holds a holding member, and a manipulator that is detachably attached to the holder via an attachment portion,
Provided in the manipulator a moving member that can move forward and backward with respect to the holder,
In the state where the moving member is advanced with respect to the holder, the attachment state of the attachment portion when the manipulator is attached to the holder is maintained in a state in which the fitting portion cannot be detached from the holder. such an attachment state maintaining member constituting the maintenance mechanism Rutotomoni is configured to hold said retaining member as said retaining mechanism,
When the moving member moves backward with respect to the holder, the holding mechanism releases the holding of the holding member, and the attachment state maintaining mechanism changes the attachment state of the attachment portion from the holder to the fitting portion. A mechanism for preventing the manipulator from coming off is configured to release the unremovable state of the manipulator and make the fitting portion detachable from the holder . The mounting portion is provided in the holder, a groove portion provided in the fitting portion, a locking groove provided in the holder, an engagement member detachably engaged with the groove portion and the locking groove, and the holder. The engagement member is elastically pressed against the groove and the locking groove, and the attachment state maintaining piece is in a state of being advanced with respect to the holder, and the engagement member is connected to the groove and the groove. The manipulator removal prevention mechanism according to claim 1 , wherein the elastic member is supported so that it cannot be removed from the locking groove . A cylindrical holder provided on the head;
A manipulator that includes a cylindrical fitting portion that fits into the holder and a holding mechanism that holds a holding member, and is detachably attached to the holder via an attachment portion;
In the mechanism to prevent the manipulator with
While providing an attachment state maintenance mechanism that maintains the attachment state of the attachment portion when the manipulator is attached to the holder, the attachment state maintenance mechanism is interlocked with the holding mechanism,
When the holding mechanism holds the holding member, the attachment state maintaining mechanism maintains the attachment state of the attachment portion, and when the holding mechanism releases the holding member, the attachment state maintenance mechanism is Release the state that maintained the mounting state,
The holding mechanism, and a pair of holding pieces for holding by sandwiching the holding member, a pair of retractable said mounting state maintaining mechanism for one and the holder Ri Do from integral respective said pair of clamping pieces A mechanism for preventing the manipulator from coming off , characterized in that it is composed of the above-mentioned attachment state maintaining piece.   The holding member is composed of a member formed with an engagement groove, and the holding mechanism has an insertion hole through which the holding member is inserted and an engagement hole having an edge portion engaged with the engagement groove. The manipulator removal preventing mechanism according to claim 2, wherein the mounting state maintaining piece is formed of a member integrated with the shutter. A cylindrical holder provided on the head;
A manipulator that includes a cylindrical fitting portion that fits into the holder and a holding mechanism that holds a holding member, and is detachably attached to the holder via an attachment portion;
In the mechanism to prevent the manipulator with
While providing an attachment state maintenance mechanism that maintains the attachment state of the attachment portion when the manipulator is attached to the holder, the attachment state maintenance mechanism is interlocked with the holding mechanism,
When the holding mechanism holds the holding member, the attachment state maintaining mechanism maintains the attachment state of the attachment portion, and when the holding mechanism releases the holding member, the attachment state maintenance mechanism is Release the state that maintained the mounting state,
The holding member is composed of a member formed with an engagement groove, and the holding mechanism has an insertion hole through which the holding member is inserted and an engagement hole having an edge portion engaged with the engagement groove. constituted by a shutter formed Te, strain relief of the manipulator, characterized in that the attachment state maintaining mechanism is constituted by retractable mounted state maintaining member relative to the shutter and the holder Ri Do from solid. The first confirmation means for confirming whether or not the position of the shutter is in an appropriate position for holding the holding member when the holding member is held by the holding mechanism is provided in claim 4 or 5 . A mechanism for preventing the described manipulator from coming off. A cylindrical holder provided on the head;
A manipulator that includes a cylindrical fitting portion that fits into the holder and a holding mechanism that holds a holding member, and is detachably attached to the holder via an attachment portion;
In the mechanism to prevent the manipulator with
While providing an attachment state maintenance mechanism that maintains the attachment state of the attachment portion when the manipulator is attached to the holder, the attachment state maintenance mechanism is interlocked with the holding mechanism,
When the holding mechanism holds the holding member, the attachment state maintaining mechanism maintains the attachment state of the attachment portion, and when the holding mechanism releases the holding member, the attachment state maintenance mechanism is Release the state that maintained the mounting state,
A mechanism for preventing a manipulator from being removed, comprising: a second confirmation means for confirming whether or not the manipulator can be attached when the manipulator is attached to the holder. A cylindrical holder provided on the head;
A manipulator that includes a cylindrical fitting portion that fits into the holder and a holding mechanism that holds a holding member, and is detachably attached to the holder via an attachment portion;
In the mechanism to prevent the manipulator with
While providing an attachment state maintenance mechanism that maintains the attachment state of the attachment portion when the manipulator is attached to the holder, the attachment state maintenance mechanism is interlocked with the holding mechanism,
When the holding mechanism holds the holding member, the attachment state maintaining mechanism maintains the attachment state of the attachment portion, and when the holding mechanism releases the holding member, the attachment state maintenance mechanism is Release the state that maintained the mounting state,
Strain relief of the manipulator, characterized in that the holding mechanism and said mounting state maintaining mechanism are those having a working portion which reciprocates by the operation of the negative pressure generator against the elasticity and resilience of the spring of the spring . A negative pressure generating device that adsorbs the holding component by negative pressure is connected to the manipulator, and the holding mechanism and the attachment state maintaining mechanism are operated by negative pressure generated by the negative pressure generating device, and a vacuum generator for sucking the holding part, to any one of from the negative pressure generating device for actuating the retaining mechanism and the mounted state maintaining mechanism claims 1 is common 8 A mechanism for preventing the described manipulator from coming off.