TWI630391B - Jig with retractable probe - Google Patents

Jig with retractable probe Download PDF

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Publication number
TWI630391B
TWI630391B TW105143609A TW105143609A TWI630391B TW I630391 B TWI630391 B TW I630391B TW 105143609 A TW105143609 A TW 105143609A TW 105143609 A TW105143609 A TW 105143609A TW I630391 B TWI630391 B TW I630391B
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Taiwan
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clamping device
retractable
slider
clamping
jig
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TW105143609A
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Chinese (zh)
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TW201823726A (en
Inventor
李璧男
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東捷科技股份有限公司
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Priority to TW105143609A priority Critical patent/TWI630391B/en
Publication of TW201823726A publication Critical patent/TW201823726A/en
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Publication of TWI630391B publication Critical patent/TWI630391B/en

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Abstract

本發明的夾具包括一第一夾持裝置、一第二夾持裝置及一驅動裝置。第一夾持裝置包括一夾塊及多個第一可伸縮探針,該些第一可伸縮探針固定連接第一夾塊,該些第一可伸縮探針的針尖是可做伸縮移動。第二夾持裝置包括一第二夾塊。第一可伸縮探針的針尖是朝向第二夾塊。驅動裝置連接第一夾持裝置及第二夾持裝置,且驅動第一夾持裝置及第二夾持裝置移動。如此,本發明的夾具可藉由伸縮探針來避免損害面板。 The jig of the present invention includes a first clamping device, a second clamping device, and a driving device. The first clamping device includes a clamping block and a plurality of first retractable probes. The first retractable probes are fixedly connected to the first clamping block, and the tips of the first retractable probes are movable for telescopic movement. The second clamping device includes a second clamping block. The tip of the first retractable probe is toward the second block. The driving device connects the first clamping device and the second clamping device, and drives the first clamping device and the second clamping device to move. As such, the jig of the present invention can avoid damage to the panel by the telescopic probe.

Description

具有可伸縮探針的夾具 Jig with retractable probe

本發明係與夾持裝置有關,特別是指一種具有可伸縮探針的夾具。 The invention relates to a clamping device, and in particular to a clamp having a retractable probe.

面板及各種電子元件(下稱待測物)在生產的過程中會經過電性測試,以測試待測物的功能及導電接腳功能是否正常。舉例來說,面板的測試包括點燈及液晶配向等,在測試時,通常是利用氣動夾具來夾持固定面板,且連接氣動夾具的探針是抵觸面板的導電接腳,接著對探針輸送對應的控制訊號或電源訊號,以測試導電接腳對應的功能是否正常。 The panel and various electronic components (hereinafter referred to as the object to be tested) are electrically tested during the production process to test whether the function of the object to be tested and the function of the conductive pins are normal. For example, the test of the panel includes lighting and liquid crystal alignment. In the test, the pneumatic clamp is usually used to clamp the fixed panel, and the probe connected to the pneumatic clamp is the conductive pin of the opposite panel, and then the probe is transported. Corresponding control signal or power signal to test whether the function corresponding to the conductive pin is normal.

實際上,氣動夾具夾持面板的時候,不僅需要考量氣動夾具是否確實夾持固定面板,更需避免過度對面板施力,因此,目前的氣動夾爪通常會在夾持塊上增設彈性墊片,例如工程橡膠或工程塑膠等具有彈性的材質以做為緩衝。 In fact, when the pneumatic clamp holds the panel, it is necessary to consider not only whether the pneumatic clamp actually holds the fixed panel, but also to avoid excessive force on the panel. Therefore, the current pneumatic gripper usually adds elastic spacers on the clamping block. For example, an elastic material such as engineering rubber or engineering plastic is used as a buffer.

此外,測試時是同步測試面板的各個導電接腳,因此,上述設置彈性墊片僅能避免過度夾持面板,造成面板損壞,而無法確保該些固定式探針的針尖都能確實電性連接面板的導電接腳。 In addition, the test is to synchronize the various conductive pins of the test panel. Therefore, the above-mentioned elastic spacers can only avoid excessive clamping of the panel, which causes damage to the panel, and cannot ensure that the tips of the fixed probes can be electrically connected. The conductive pins of the panel.

有鑑於上述缺失,本發明的夾具的目的在於提供一種具有可伸縮探針的夾具,以確保夾具的探針確實夾持固定待測物,且與待測物的導電接腳形成電性連接。 In view of the above-mentioned deficiencies, the purpose of the jig of the present invention is to provide a jig having a retractable probe to ensure that the probe of the jig securely holds the object to be tested and is electrically connected to the conductive pin of the object to be tested.

為達成上述目的,本發明的夾具包括一第一夾持裝置、一第二夾持裝置及一驅動裝置。第一夾持裝置包括一夾塊及多個第一可伸縮探針,該些第一可伸縮探針固定連接第一夾塊,該些第一可伸縮探針的針尖是可做伸縮移動。第二夾持裝置包括一第二夾塊。第一可伸縮探針的針尖 是朝向第二夾塊。驅動裝置連接第一夾持裝置及第二夾持裝置,且驅動第一夾持裝置及第二夾持裝置移動。 To achieve the above object, the jig of the present invention includes a first clamping device, a second clamping device, and a driving device. The first clamping device includes a clamping block and a plurality of first retractable probes. The first retractable probes are fixedly connected to the first clamping block, and the tips of the first retractable probes are movable for telescopic movement. The second clamping device includes a second clamping block. Tip of the first retractable probe It is towards the second clamp. The driving device connects the first clamping device and the second clamping device, and drives the first clamping device and the second clamping device to move.

因此,本發明的驅動裝置驅動第一夾持裝置向第二夾持裝置移動來夾持固定待測物,由於第一可伸縮探針的針尖是可以伸縮移動,因此,針尖接觸待測物後,即便驅動裝置又驅動第一夾持裝置朝第二夾持裝置移動時,第一可伸縮探針的針尖也不會對待測物施加過度的力量,以避免待測物損壞。 Therefore, the driving device of the present invention drives the first clamping device to move to the second clamping device to clamp and fix the object to be tested. Since the tip of the first retractable probe is telescopically movable, the needle tip contacts the object to be tested. Even if the driving device drives the first clamping device to move toward the second clamping device, the tip of the first telescopic probe does not exert excessive force on the object to be tested to avoid damage of the object to be tested.

有關本發明所提供之夾具的詳細構造、特點、組裝或使用方式,將於後續的實施方式詳細說明中予以描述。然而,在本發明領域中具有通常知識者應能瞭解,該等詳細說明以及實施本發明所列舉的特定實施例,僅係用於說明本發明,並非用以限制本發明之專利申請範圍。 The detailed construction, features, assembly or use of the jig provided by the present invention will be described in the detailed description of the subsequent embodiments. However, it should be understood by those of ordinary skill in the art that the present invention is not limited by the scope of the invention.

10‧‧‧夾具 10‧‧‧Clamp

11‧‧‧驅動裝置 11‧‧‧ drive

111‧‧‧軌道 111‧‧‧ Track

113‧‧‧氣壓缸 113‧‧‧ pneumatic cylinder

115‧‧‧第一滑塊 115‧‧‧First slider

117‧‧‧第二滑塊 117‧‧‧second slider

13‧‧‧第一夾持裝置 13‧‧‧First clamping device

131‧‧‧第一夾塊 131‧‧‧First clamp

133‧‧‧第一可伸縮探針 133‧‧‧First retractable probe

1331‧‧‧針尖 1331‧‧‧ needle tip

1333‧‧‧本體 1333‧‧‧ Ontology

1334‧‧‧容置空間 1334‧‧‧ accommodating space

1335‧‧‧彈簧 1335‧‧ spring

1337‧‧‧針 1337‧‧ needle

15‧‧‧第二夾持裝置 15‧‧‧Second clamping device

151‧‧‧第二夾塊 151‧‧‧Second clamp

153‧‧‧第二可伸縮探針 153‧‧‧Second retractable probe

1531‧‧‧針尖 1531‧‧‧Needle

30、50‧‧‧電線 30, 50‧‧‧ wires

70‧‧‧面板 70‧‧‧ panel

第1圖是本發明的夾具的一實施例的立體圖。 Fig. 1 is a perspective view showing an embodiment of a jig of the present invention.

第2圖是第1圖中探針的剖視圖。 Fig. 2 is a cross-sectional view of the probe in Fig. 1.

第3圖是應用本發明的夾具夾持一面板的示意圖。 Figure 3 is a schematic view of a panel clamped by the clamp of the present invention.

第4圖是第3圖右邊夾具及局部面板的放大示意圖。 Figure 4 is an enlarged schematic view of the right side clamp and the partial panel of Figure 3.

第5圖是本發明的夾具的另一實施例的側視示意圖。 Figure 5 is a side elevational view of another embodiment of the clamp of the present invention.

以下,茲配合各圖式列舉對應之較佳實施例來對本發明的夾具的組成構件及達成功效來說明。然各圖式中夾具的構件、尺寸及外觀僅用來說明本發明的技術特徵,而非對本發明構成限制。 Hereinafter, the constituent members of the jig of the present invention and the achievement of the effects will be described with reference to the preferred embodiments in the respective drawings. The components, dimensions and appearance of the clamps in the various figures are only used to illustrate the technical features of the present invention and are not intended to limit the invention.

如第1圖所示,該圖是本發明的夾具10的立體圖。本發明的夾具10包括一驅動裝置11、一第一夾持裝置13及一第二夾持裝置15。 As shown in Fig. 1, this figure is a perspective view of the jig 10 of the present invention. The jig 10 of the present invention includes a driving device 11, a first clamping device 13, and a second clamping device 15.

驅動裝置11連接第一夾持裝置13及第二夾持裝置15,且驅動第一夾持裝置13及第二夾持裝置15移動。驅動裝置11包括一軌道111、一氣壓缸113、一第一滑塊115及一第二滑塊117。第一滑塊115及第二滑塊117分別連接軌道111。氣壓缸113用以驅動第一滑塊115及第二滑塊117沿軌道111移動。 The driving device 11 connects the first clamping device 13 and the second clamping device 15, and drives the first clamping device 13 and the second clamping device 15 to move. The driving device 11 includes a track 111, a pneumatic cylinder 113, a first slider 115 and a second slider 117. The first slider 115 and the second slider 117 are respectively connected to the rail 111. The pneumatic cylinder 113 is configured to drive the first slider 115 and the second slider 117 to move along the rail 111.

第一夾持裝置13包括一第一夾塊131及多個第一可伸縮探針133。第一夾塊131是連接第一滑塊115。該些第一可伸縮探針133分別固定地連接第一夾塊131,且間隔排列。該些第一可伸縮探針133的針尖1331可伸縮移動。 The first clamping device 13 includes a first clamping block 131 and a plurality of first telescopic probes 133. The first clamping block 131 is connected to the first slider 115. The first telescopic probes 133 are fixedly connected to the first clamping block 131 and are arranged at intervals. The needle tips 1331 of the first telescopic probes 133 are telescopically movable.

第二夾持裝置15包括一第二夾塊151及多個第二可伸縮探針153。第二夾塊151是連接第二滑塊117,並正對第一夾塊131。該些第二可伸縮探針153分別固定地連接第二夾塊151,且間隔排列。該些第二可伸縮探針153的針尖1531可伸縮移動。 The second clamping device 15 includes a second clamping block 151 and a plurality of second telescopic probes 153. The second clamping block 151 is connected to the second slider 117 and faces the first clamping block 131. The second telescopic probes 153 are fixedly connected to the second clamping block 151, respectively, and are arranged at intervals. The needle tips 1531 of the second telescopic probes 153 are telescopically movable.

其中,氣壓缸113驅動的方式有三種,第一種是驅動第一滑塊115向上或向下移動,而第二滑塊117固定不動,第二種是第一滑塊115固定不動,第二滑塊117被驅動而向上或向下移動,第三種方式是同步驅動第一滑塊115及第二滑塊117相接近而形成夾持,或者同步驅動第一滑塊115及第二滑塊117遠離而形成放開。 There are three ways to drive the pneumatic cylinder 113. The first one is to drive the first slider 115 to move up or down, and the second slider 117 is fixed. The second type is that the first slider 115 is fixed, and the second is The slider 117 is driven to move up or down. The third way is to synchronously drive the first slider 115 and the second slider 117 to form a clamping, or synchronously drive the first slider 115 and the second slider. 117 is far away and forms a release.

需特別說明的是,雖然本實施例中第一滑塊115與第二滑塊117分別位在下方及上方,但實際上第一滑塊也可以位在上方,第二滑塊也可以是位在下方,因此,第一滑塊及第二滑塊的位置解釋是不以本實施例所述為限。 It should be noted that, in the embodiment, the first slider 115 and the second slider 117 are respectively located below and above, but the first slider may also be located above, and the second slider may also be located. Below, therefore, the positional interpretation of the first slider and the second slider is not limited to the description of the embodiment.

此外,該些第一可伸縮探針133是一對一地電性連接對應的電線30,該些第二可伸縮探針153也是一對一地電性連接對應的電線50。該些電線30、50是用以傳輸控制訊號或電源訊號。該些第一可伸縮探針133及該些第二可伸縮探針153是相同的結構,隨後第2圖詳述第一可伸縮探針133的結構,且由於是相同的結構,因此不再贅述第二可伸縮探針153的結構。 In addition, the first retractable probes 133 are electrically connected to the corresponding electric wires 30 one-to-one, and the second retractable probes 153 are also electrically connected to the corresponding electric wires 50 one-to-one. The wires 30, 50 are used to transmit control signals or power signals. The first retractable probes 133 and the second retractable probes 153 have the same structure, and then FIG. 2 details the structure of the first retractable probes 133, and since they are the same structure, they are no longer The structure of the second retractable probe 153 will be described.

如第2圖所示,該圖是第一可伸縮探針133的剖視圖。第一可伸縮探針133是導電材質製造而成,例如銅及銀等。第一可伸縮探針133包括一本體1333、一彈簧1335及一針1337。本體1333是固定地連接第一夾塊,且具有一容置空間1334。彈簧1335設於本體1333的容置空間1334內。針1337的部分是插入本體1333的容置空間1334內,且針1337的一端是抵頂彈簧1335。針1337的另一端是針尖1331,且外露於本體1333外。 As shown in FIG. 2, this figure is a cross-sectional view of the first retractable probe 133. The first retractable probe 133 is made of a conductive material such as copper or silver. The first retractable probe 133 includes a body 1333, a spring 1335 and a needle 1337. The body 1333 is fixedly connected to the first clamping block and has an accommodating space 1334. The spring 1335 is disposed in the accommodating space 1334 of the body 1333. A portion of the needle 1337 is inserted into the accommodating space 1334 of the body 1333, and one end of the needle 1337 is an abutting spring 1335. The other end of the needle 1337 is a needle tip 1331 and is exposed outside the body 1333.

針尖1331的彈性伸縮移動是指針1337藉由壓縮彈簧1335及釋放彈簧1335,而使針1337彈性地伸縮移動。 The elastic telescopic movement of the needle tip 1331 is that the pointer 1337 elastically expands and contracts the needle 1337 by the compression spring 1335 and the release spring 1335.

以上說明了本發明的夾具的組成,隨後說明本發明的夾具的應用,於此實施例中,應用是以面板為例。 The composition of the jig of the present invention has been described above, and the application of the jig of the present invention will be described later. In this embodiment, the application is a panel.

如第3及4圖所示,第3圖是兩夾具10分別夾持一面板70的頂面及底面,第4圖是第3圖中右邊夾具10及局部面板70的放大示意圖。驅動裝置11驅動第一滑塊115及第二滑塊117朝面板70移動,以使第一夾持裝置13的第一可伸縮探針133及第二夾持裝置15的第二可伸縮探針153分別夾住面板70的頂面及底面,也就是,該些第一可伸縮探針133的針尖1331是分別抵頂面板70的頂面的電極,該些第二可伸縮探針153的針尖1531是分別抵頂面板70的底面的電極,以分別傳輸電源訊號或控制訊號來測試面板70的各電極對應的功能是否正常。 As shown in FIGS. 3 and 4, FIG. 3 is a top view showing a top surface and a bottom surface of a panel 70 sandwiched by two clamps 10, and FIG. 4 is an enlarged schematic view showing a right clamp 10 and a partial panel 70 in FIG. The driving device 11 drives the first slider 115 and the second slider 117 to move toward the panel 70 to make the first retractable probe 133 of the first clamping device 13 and the second retractable probe of the second clamping device 15 153 respectively, the top surface and the bottom surface of the panel 70 are clamped, that is, the needle tips 1331 of the first retractable probes 133 are electrodes respectively abutting the top surface of the top panel 70, and the tips of the second retractable probes 153 are respectively 1531 is an electrode that respectively abuts the bottom surface of the top panel 70 to transmit a power signal or a control signal to test whether the function corresponding to each electrode of the panel 70 is normal.

此外,由於第一夾持裝置13的第一可伸縮探針133的針尖1331及第二夾持裝置15的第二可伸縮探針153的針尖1531都可彈性的伸縮移動,因此,該些第一可伸縮探針133及該些第二可伸縮探針153不僅可穩定地夾住面板70,更可藉由彈性地伸縮運動使該些第一可伸縮探針133的針尖1331及第二可伸縮探針153的針尖1531確實抵頂面板的電極,且不會過度施力而損壞面板70的電極。 In addition, since the needle tip 1331 of the first telescopic probe 133 of the first clamping device 13 and the needle tip 1531 of the second telescopic probe 153 of the second clamping device 15 are elastically expandable and contractible, the first The retractable probe 133 and the second retractable probes 153 can not only stably clamp the panel 70, but also elastically expand and contract the needle tips 1331 and the second of the first retractable probes 133. The tip 1531 of the telescopic probe 153 does abut against the electrode of the top panel and does not excessively apply force to damage the electrode of the panel 70.

雖然,本實施例中,夾具的第一夾持裝置及第二夾持裝置都設有可伸縮探針,但實際上,該些可伸縮探針也可以僅設在第一夾持裝置或第二夾持裝置,沒有設置可伸縮探針的夾持裝置可選擇設置固定探針或沒有探針,因此,可伸縮探針的設置是不以本實施例所述為限。隨後以第二夾持裝置沒有探針為例作說明。 In this embodiment, the first clamping device and the second clamping device of the clamp are both provided with a telescopic probe, but in fact, the telescopic probes may also be provided only in the first clamping device or the first The second clamping device, the clamping device without the telescopic probe can be selected to be provided with a fixed probe or without a probe, and therefore, the setting of the retractable probe is not limited to the embodiment. Subsequently, the second clamping device has no probe as an example for illustration.

如第5圖所示,該圖是本發明的夾具的另一實施例,其中,第二夾持裝置15沒有探針的示意圖。於此實施例中,第二夾持裝置15包括一第二夾塊151及一墊部155。墊部155連接第二夾塊151,且面對該些第一可伸縮探針133的針尖1331。墊部155用以支撐及接觸面板70,本實施例中,墊部155較佳選用具有天然橡膠或合成橡膠,以避免刮傷面板70。 As shown in Fig. 5, this figure is another embodiment of the jig of the present invention, wherein the second holding device 15 has no schematic view of the probe. In this embodiment, the second clamping device 15 includes a second clamping block 151 and a pad portion 155. The pad portion 155 is connected to the second clamping block 151 and faces the needle tip 1331 of the first telescopic probes 133. The pad portion 155 is used for supporting and contacting the panel 70. In the embodiment, the pad portion 155 is preferably made of natural rubber or synthetic rubber to avoid scratching the panel 70.

如此,本發明的探針可以有效與面板或待測物的導電接腳或 焊墊連接,且不會對面板或待測物造成損壞。 As such, the probe of the present invention can effectively interact with the conductive pins of the panel or the object to be tested or The pads are connected without damage to the panel or the object to be tested.

最後,強調,本發明於前揭實施例中所揭露的構成元件,僅為舉例說明,並非用來限制本案之範圍,其他等效元件的替代或變化,亦應為本案之申請專利範圍所涵蓋。 Finally, it is emphasized that the constituent elements disclosed in the foregoing embodiments are merely illustrative and are not intended to limit the scope of the present invention. The alternatives or variations of other equivalent elements are also covered by the scope of the patent application of the present application. .

Claims (7)

一種夾具,用以夾持固定一待測物,且測試該待測物功能,該夾具包括:一第一夾持裝置,包括一第一夾塊及多個第一可伸縮探針,該些第一可伸縮探針固定連接該第一夾塊,該些第一可伸縮探針的針尖是可做伸縮移動;一第二夾持裝置,包括一第二夾塊,其中,該些第一可伸縮針的針尖朝向該第二夾塊;及一驅動裝置,連接該第一夾持裝置及該第二夾持裝置,且驅動該第一夾持裝置及該第二夾持裝置移動。 A clamp for clamping and fixing a test object and testing the function of the test object, the clamp comprising: a first clamping device comprising a first clamping block and a plurality of first retractable probes, The first retractable probe is fixedly connected to the first clamping block, the tip of the first retractable probe is movable for telescopic movement, and the second clamping device comprises a second clamping block, wherein the first clamping block The tip of the retractable needle faces the second clamping block; and a driving device connects the first clamping device and the second clamping device and drives the first clamping device and the second clamping device to move. 如申請專利範圍第1項所述的夾具,其中,每一第一可伸縮探針包括一第一本體、一第一彈簧及一第一針,該第一本體固定連接該第一夾塊,且有一容置空間,第一彈簧是設在該第一本體的容置空間內,該第一針的部分插入該第一本體內,且抵頂該第一彈簧,該第一針的針尖是外露於該第一本體外。 The jig of claim 1, wherein each of the first telescopic probes comprises a first body, a first spring and a first pin, the first body being fixedly connected to the first clamping block, And having a receiving space, the first spring is disposed in the accommodating space of the first body, a portion of the first needle is inserted into the first body, and the first spring is abutted, and the tip of the first needle is Exposed to the first body. 如申請專利範圍第1項所述的夾具,其中,該第二夾持裝置包括多個第二可伸縮探針,該些第二可伸縮探針固定連接該第二夾塊,該些第二可伸縮探針的針尖是可做伸縮移動,該些第二可伸縮探針的針尖朝向該第一夾塊。 The jig of claim 1, wherein the second clamping device comprises a plurality of second retractable probes, the second retractable probes are fixedly coupled to the second clamping block, and the second The tip of the retractable probe is for telescopic movement, and the tip of the second retractable probe faces the first block. 如申請專利範圍第3項所述的夾具,其中,每一第二可伸縮探針包括一第二本體、一第二彈簧及一第二針,該第二本體固定連接該第二夾塊,且有一容置空間,第二彈簧是設在該第二本體的容置空間內,該第二針的部分插入該第二本體內,且抵頂該第二彈簧,該第二針的針尖是外露於該第二本體外。 The jig of claim 3, wherein each second retractable probe comprises a second body, a second spring and a second pin, the second body being fixedly connected to the second clamping block, And having a receiving space, the second spring is disposed in the accommodating space of the second body, a portion of the second needle is inserted into the second body, and the second spring is abutted, and the tip of the second needle is Exposed to the second body. 如申請專利範圍第1項所述的夾具,其中,該驅動裝置包括一軌道、一第一滑塊及一第二滑塊,該第一滑塊及該第二滑塊分別連接該軌道,且可沿該軌道移動,該第一夾塊連接該第一滑塊,該第二夾塊連接該第二滑塊。 The jig of claim 1, wherein the driving device comprises a track, a first slider and a second slider, wherein the first slider and the second slider are respectively connected to the track, and It is movable along the track, the first clamp is connected to the first slider, and the second clamp is connected to the second slider. 如申請專利範圍第5項所述的夾具,其中,該驅動裝置還包括一氣壓缸,用以驅動該第一滑塊及該第二滑塊沿該軌道移動。 The jig of claim 5, wherein the driving device further comprises a pneumatic cylinder for driving the first slider and the second slider to move along the rail. 如申請專利範圍第1項所述的夾具,其中,該第二夾持裝置包括一墊部,該墊部連接第二夾塊,且面對該些第一可伸縮針的針尖。 The jig of claim 1, wherein the second clamping device comprises a pad portion that connects the second clamping block and faces the tip of the first retractable needle.
TW105143609A 2016-12-28 2016-12-28 Jig with retractable probe TWI630391B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001096885A1 (en) * 2000-06-12 2001-12-20 Phicom Corp Connector apparatus
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CN103308733A (en) * 2012-03-13 2013-09-18 日本电产理德株式会社 Probe and connecting jig
TWI438441B (en) * 2012-01-26 2014-05-21 Nidec Read Corp Probe and fixture
CN104215799A (en) * 2014-09-15 2014-12-17 上海克来机电自动化工程股份有限公司 Floating plug device for testing of electronic function module

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001096885A1 (en) * 2000-06-12 2001-12-20 Phicom Corp Connector apparatus
TWI272392B (en) * 2002-03-22 2007-02-01 Electro Scient Ind Inc Test probe alignment apparatus
JP2010016053A (en) * 2008-07-01 2010-01-21 Tokyo Electron Ltd Transfer mechanism for target object to be inspected
US20120126843A1 (en) * 2009-07-30 2012-05-24 Advantest Corporation Probe card holding apparatus and prober
TWI438441B (en) * 2012-01-26 2014-05-21 Nidec Read Corp Probe and fixture
CN103308733A (en) * 2012-03-13 2013-09-18 日本电产理德株式会社 Probe and connecting jig
CN104215799A (en) * 2014-09-15 2014-12-17 上海克来机电自动化工程股份有限公司 Floating plug device for testing of electronic function module

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