JP2007266050A - Method of executing schedule of substrate processing apparatus and program thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent deterioration of an operation rate even if an abnormality occurs in a processing unit by permitting change of a lot to an alternative processing unit. <P>SOLUTION: For a second lot to be processed using a recipe in which an alternative processing unit is designated for a priority processing unit having an abnormality, a control unit 25 changes a schedule so that the processor is changed to the alternative section to process the second lot, and the control unit 25 continuously executes the processing of the second lot with the changed schedule. Accordingly, since processings for all of first-third lots are not required to stop even if an abnormality occurs in the preferential processor, the deterioration of the operation rate of the substrate processing apparatus can be prevented. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a schedule execution method for a substrate processing apparatus for performing a predetermined process on a semiconductor wafer or a glass substrate for a liquid crystal display device (hereinafter simply referred to as a substrate) and a program therefor.

  Conventionally, as a method of this type, when a plurality of lots are processed by a substrate processing apparatus provided with a plurality of processing units for processing a substrate, the control unit is configured based on a recipe including a plurality of processing steps. In order to process lots sequentially in each processing unit, a processing order of each lot is determined, and processing is performed sequentially while conveying each lot according to the schedule (see, for example, Patent Document 1).

Since such a substrate processing apparatus schedule execution method determines which lot is to be processed at which point in time before actually starting the processing for the lot, the lot can be arranged efficiently. The operating rate of the substrate processing apparatus can be improved.
JP 2002-341923 A

However, the conventional example having such a configuration has the following problems.
That is, in the conventional method, when an abnormality occurs in a processing unit used in a certain processing step, all processing of a lot that is scheduled to use the processing unit is stopped. Therefore, there is a problem that the operating rate of the substrate processing apparatus decreases when an abnormality occurs in one processing unit.

  The present invention has been made in view of such circumstances, and by allowing the transfer of a lot to an alternative processing unit, even if an abnormality occurs in the processing unit, a reduction in operating rate is prevented. It is an object of the present invention to provide a schedule execution method for a substrate processing apparatus and a program thereof.

In order to achieve such an object, the present invention has the following configuration.
That is, the invention according to claim 1 is based on a recipe including a plurality of processing steps when a plurality of lots are processed by a substrate processing apparatus including a plurality of processing units for processing a substrate. Preferentially used to process one processing step in the schedule execution method of a substrate processing apparatus that executes processing after determining the processing order of each lot for processing each lot sequentially in each processing unit If the processing unit to be processed is a priority processing unit, the same processing as the priority processing unit is possible, and a processing unit different from the priority processing unit is used as an alternative processing unit, A recipe in which an alternative processing unit is designated and an alternative processing unit corresponding to the priority processing unit in which an abnormality has occurred is specified even if an abnormality has occurred in the priority processing unit specified in the processing step. so For the lot to be processed, the control unit changes the schedule so that processing is performed by the alternative processing unit, and the control unit continuously executes the processing of the lot with the changed schedule. To do.

  [Operation / Effect] According to the invention described in claim 1, for a lot to be processed in a recipe in which an alternative processing unit is designated as a priority processing unit in which an abnormality has occurred, the lot processing is performed by switching to the alternative processing unit. The control unit changes the schedule so as to perform the process, and the control unit continuously executes the processing of the lot with the changed schedule. Therefore, even if an abnormality occurs in the processing unit, it is not necessary to stop the processing for all the lots, so that the operating rate can be prevented from decreasing.

  Further, in the present invention, when an abnormality occurs in the priority processing unit designated in one processing step, for the lot processed in the recipe in which only the priority processing unit in which the abnormality has occurred is designated, the control unit It is preferable to perform processing for saving the lot, and when the priority processing unit becomes usable, reschedule the lot and then restart the processing of the lot (claim 2). . For lots to be processed with recipes that specify only the priority processing unit in which an abnormality has occurred, the control unit saves the lot and schedules the lot when the priority processing unit is resolved. Then restart the process. Accordingly, it is possible to prevent inconvenience in processing of a lot in which only the priority processing unit is designated in the recipe.

  Moreover, in this invention, it is preferable that the said priority process part is a 1st chemical | medical solution process part, and the said alternative process part is a 2nd chemical | medical solution process part (Claim 3). In order to increase the processing efficiency, the substrate processing apparatus may include a pair of the same processing unit as a first chemical processing unit that performs processing using a chemical and a second chemical processing unit that has the same configuration. Both chemical solution processing units can set conditions such as liquid type and temperature so that the same processing is performed, so if they are set to be the same conditions, priority is given to using one preferentially. The other processing unit can be set as the processing unit.

  In the present invention, it is preferable that the priority processing unit is a first pure water cleaning processing unit, and the alternative processing unit is a second pure water cleaning processing unit. In order to increase the processing efficiency, the substrate processing apparatus includes a pair of the same processing units such as a first pure water cleaning processing unit that performs cleaning processing with pure water and a second pure water cleaning processing unit having the same configuration. There may be. Both pure water treatment units can set conditions such as the temperature and flow rate of pure water to perform the same treatment, so if they are set to be the same conditions, one of them will be given priority. The priority processing unit to be used can be set, and the other can be set as an alternative processing unit.

  According to the fifth aspect of the present invention, when a plurality of lots are processed by a substrate processing apparatus provided with a plurality of processing units for processing a substrate, the control unit is configured based on a recipe including a plurality of processing steps. It is preferentially used to process one processing step in a schedule execution program of a substrate processing apparatus that executes processing after determining the processing order of each lot for processing lots sequentially in each processing unit. When the processing unit is a priority processing unit and the same processing as the priority processing unit is possible and a processing unit different from the priority processing unit is used as an alternative processing unit, the priority processing unit and the alternative processing are included in the recipe processing process. Even if an error occurs in the priority processing unit specified in the processing step, processing is performed with a recipe in which an alternative processing unit corresponding to the priority processing unit in which the error has occurred is specified. For the lots that have been processed, the control unit changes the schedule so that processing is performed by the alternative processing unit, and the control unit performs control so that the processing of the lot is continuously executed according to the changed schedule. It is a schedule execution program of a substrate processing apparatus.

  According to the schedule execution method of the substrate processing apparatus according to the present invention, a lot processed by a recipe in which an alternative processing unit corresponding to a priority processing unit in which an abnormality has occurred is transferred to the alternative processing unit and the lot is processed. The control unit changes the schedule so as to perform processing, and the control unit continuously executes the processing of the lot with the changed schedule. Therefore, even if an abnormality occurs in the processing unit, it is not necessary to stop the processing for all the lots, so that the operating rate can be prevented from decreasing.

An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is a plan view illustrating a schematic configuration of the substrate processing apparatus according to the embodiment, and FIG. 2 is a block diagram illustrating a schematic configuration of the substrate processing apparatus according to the embodiment.

  This substrate processing apparatus is an apparatus for performing chemical liquid processing, pure water cleaning processing, and drying processing on the substrate W. A plurality of (for example, 25) substrates W are stacked on the cassette 1 and stored. The cassette 1 in which the unprocessed substrates W are stacked and stored is placed on the input unit 3. The input unit 3 includes two mounting tables 5 on which the cassette 1 is mounted. A payout unit 7 is disposed on the opposite side of the input unit 3 across the substantially central portion of the substrate processing apparatus. The dispensing unit 7 stores the processed substrate W in the cassette 1 and dispenses the entire cassette 1 out of the apparatus. The payout unit 7 includes two mounting tables 9 for mounting the cassette 1, similarly to the loading unit 3.

  A first transport mechanism 11 configured to be movable between these is disposed at a position along the input unit 3 and the payout unit 7. The first transport mechanism 11 transports a plurality of substrates W together with the cassette 1 placed on the input unit 3 to the second transport mechanism 13.

  The second transport mechanism 13 transports all the substrates W to the third transport mechanism 15 after taking out all the stored substrates W from the cassette 1. Further, after receiving the processed substrate W from the third transport mechanism 15, the substrate W is accommodated in the cassette 1 and transported to the first transport mechanism 11.

  The third transport mechanism 15 is configured to be movable in the longitudinal direction of the substrate processing apparatus, and on the foremost side in the movement direction, the drying processing unit 17 for storing and drying a plurality of substrates W in the chamber. Is arranged.

  A first processing unit 19 is disposed at a position adjacent to the drying processing unit 17 in a direction in which the third transport mechanism 15 moves, and a second processing is performed at a position on the back side adjacent to the first processing unit 19. Part 21 is arranged.

  The first processing unit 19 includes a pure water cleaning processing unit 19a for performing pure water cleaning processing on a plurality of substrates W, and a chemical solution for performing chemical processing on the plurality of substrates W. A processing unit 19b is provided. A plurality of substrates W are received only between the pure water cleaning processing unit 19a and the chemical processing unit 19b at a position opposite to the third transport mechanism 15 across the pure water cleaning processing unit 19a and the chemical processing unit 19b. A sub-transport mechanism 19c for passing is provided.

  The second processing unit 21 has the same configuration as the first processing unit 19 described above. That is, the apparatus includes a pure water cleaning processing unit 21a, a chemical processing unit 21b, and a sub-transport mechanism 21c.

  A cassette cleaning unit 23 is disposed at a position adjacent to the second transport mechanism 13. The cassette cleaning unit 23 has a function of cleaning the empty cassette 1 after the above-described second transport mechanism 13 has taken out all the substrates W.

  The first transport mechanism 11, the second transport mechanism 13, the third transport mechanism 15, the first processing unit 19 (the pure water cleaning processing unit 19a and the chemical solution processing unit 19b), and the second processing unit 21 described above. (The pure water cleaning processing unit 21a and the chemical processing unit 21b) correspond to the processing unit in the present invention.

  The substrate processing apparatus having the above configuration is comprehensively controlled by the control unit 25 as shown in the block diagram of FIG.

  The control unit 25 includes a CPU and the like, and includes a scheduling unit 27, a batch stop state management unit 29, and a process execution instruction unit 31. The storage unit 33 connected to the control unit 25 is created in advance by a user of the substrate processing apparatus, includes a recipe including a plurality of processing steps that define how to process the substrate W, a schedule creation program, In addition, a processing program for executing the created schedule, a program for determining a lot to be stopped when an abnormality occurs, a program for determining whether to resume processing for the stopped lot, and the like are stored in advance. The created schedule is also stored.

  The scheduling unit 27 treats a plurality of substrates W accommodated in the cassette 1 and placed on the input unit 3 as one lot, and stores the recipe stored in advance in the storage unit 33 instructed by the operator of the apparatus. Accordingly, before actually starting processing, a schedule is created so that processing steps for each lot can be efficiently arranged in time series. Further, as will be described in detail later, a function is also provided for rescheduling the saved lot when the reason for saving is resolved.

  In addition, it is good also considering the several board | substrate W accommodated in the several cassette 1 as one lot instead of the cassette 1 unit.

  When an abnormality occurs in any of the processing units used based on the schedule, the batch stop state management unit 29 discriminates a lot that needs to be stopped from a lot that does not need to be stopped and saves the lot. Or an alternative processing unit (described later in detail) manages whether to continue the processing.

  The process execution instructing unit 31 issues an operation instruction related to processing of each processing unit at an appropriate timing based on the schedule created by the scheduling unit 27 and stored in the storage unit 33.

  Here, specific recipes will be described with reference to Table 1. In order to facilitate the understanding of the description, an example simplified from an actual recipe will be described.

  In Table 1 above, reference signs A to F represent processing units, and specifically, the processing unit A is one processing unit related to transporting the first transport mechanism 11, the second transport mechanism 13, and the third transport mechanism 15. The processing unit B represents the chemical processing unit 19b of the first processing unit 19, the processing unit C represents the chemical processing unit 21b of the second processing unit 21, and the processing unit D represents the first processing unit 19. The pure water cleaning processing unit 19a, the processing unit E represents the pure water cleaning processing unit 21b of the second processing unit 21, and the processing unit F represents the drying processing unit 17. The chemical processing unit 19b of the first processing unit 19 and the chemical processing unit 21b of the second processing unit 21 can be set to different processing liquids, different liquid temperatures, supply flow rates, etc. for different recipes. Assume that you have the same settings for the exact same recipe. In addition, the pure water temperature, the supply flow rate, and the like are set to be the same for the pure water cleaning processing unit 19b and the pure water cleaning processing unit 21b. In the above recipe, the auxiliary transport mechanisms 19c and 21c are omitted.

  The recipe of the first lot L1 is composed of five processing steps of the first processing step to the fifth processing step, the first processing step is carry-in by the processing unit A, and the second processing step is the processing unit B or the processing unit C. The third processing step is a pure water cleaning process by the processing unit D or the processing unit E, the fourth processing step is a drying process by the processing unit F, and the fifth processing step is carried out by the processing unit A. Suppose that it is processing. The recipe for the second lot L2 is the same as the recipe for the first lot L2 described above.

  The recipe of the third lot L3 is composed of five processing steps of the first to fifth processing steps, the first processing step is a carry-in processing by the processing unit A, and the second processing step is a chemical solution processing by the processing unit B. The third processing step is pure water cleaning processing by the processing unit D, the fourth processing step is drying processing by the processing unit F, and the fifth processing step is transporting processing by the processing unit A.

  Note that, in the second processing step in the first lot L1 and the second lot L2 described above, the processing unit B is a processing unit that is used in preference to performing the second processing step, and this is used as the priority processing unit. Called. A processing unit that can perform the same processing as the priority processing unit and is different from the priority processing unit is referred to as an alternative processing unit. In this example, the processing unit C in the second processing step is an alternative processing unit for the processing unit B, and the processing unit E in the third processing step is an alternative processing unit for the processing unit D. The above-described third lot L2 is a lot in which only one processing unit is designated in any processing step, and the priority processing unit and the alternative processing unit are not defined. However, in this case, the processing unit is referred to as a priority processing unit.

  Next, the operation of the substrate processing apparatus having the above-described configuration will be described with reference to FIGS. FIG. 3 is a flowchart showing the operation of the substrate processing apparatus, FIG. 4 is a time chart showing an example of a scheduled state, and FIG. 5 is a time chart showing an example of changing the schedule. FIG. 6 is a time chart showing an example of the reschedule.

Steps S1-S3
The operator of the apparatus places the cassette 1 storing the unprocessed substrates W on the placing table 5 of the loading unit 3 (Step S1) and instructs a recipe from an instruction unit (not shown) (Step S2). Then, the control part 25 reads the recipe data memorize | stored in the memory | storage part 33, and also performs the time calculation of a process process (step S3). Then, the scheduling unit 27 creates a schedule based on the time required for the processing process. Here, it is assumed that the first lot L1 to the third lot L3 are sequentially placed on the placing table 5, and the recipe is designated by the operator as shown in Table 1 above.

Step S4
The scheduling unit 27 refers to the storage unit 33 and creates a schedule based on each recipe shown in Table 1 (step S4). There are various scheduling methods. For example, as shown in FIG. 4, each processing step included in the recipe of the first lot L1, the second lot L2, and the third lot L3 (the first lot in the figure is the first). It is assumed that the processing step P1, the second processing step P2, the third processing step P3, the fourth processing step P5, and the sixth processing step P6) are arranged in time series. In addition, the 1st process process P1 etc. in FIG. 4 represent the substantial process in the center part, and the front is the pre-operation (preparation performed before using a process part), and the post-process (process) after that. It is added as a cleanup performed after using the part. Since the present invention is a method of creating a schedule in advance before actually starting processing, before the lot actually moves, the previous operation of the next processing unit is started, and the lot is transferred to the next processing unit. After moving, the post-processing of the processing unit used by the lot is performed.

Steps S5 and S6
When the scheduling unit 27 completes scheduling and processing starts (step S5), the process execution instructing unit 31 sequentially instructs operation commands for the respective processing units according to the schedule shown in FIG. 4 (step S6). ). Thereby, lots L1 to L3 are processed in each processing unit.

Steps S7 and S8
The batch stop state management unit 29 determines whether an abnormality has occurred in each processing unit (step S7), and branches the processing. If no abnormality has occurred, the process execution instructing unit 31 determines whether there is another command (step S8). When there is a next command, the process returns to step S6 and the next operation command is issued. Instruct. If there is no next command, the process is terminated.

Steps S9 and S10
If the batch stop state management unit 29 detects that an abnormality has occurred in any of the processing units in step S7, the process proceeds to step S9 to notify the operator that the abnormality has occurred. Do. Then, it is determined whether or not the process should be stopped (step S10), and if it is not necessary to stop, the process returns to step S6 to instruct a processing command. This is the case, for example, when an abnormality occurs in the processing unit that is not related to the first lot L1 to the third lot L3 currently being processed.

Steps S11 and S12
When the batch stop state management unit 29 detects that an abnormality has occurred in one of the processing units and determines that the process should be stopped, it first determines the target lot and saves the lot. At the same time, when the processing of the lot can be resumed, a restart instruction is issued (step S12), and the scheduling unit 27 performs rescheduling only for the lot.

  Here, as shown in FIG. 5, the current time is time t1, for example, an abnormality occurs in the processing unit B (the chemical processing unit 19b of the first processing unit 19), and the processing unit B is used. It is assumed that the process (second process step P2) cannot be performed. At this time t1, since the processing for the first lot L1 by the processing unit B has already been completed, it is determined that the target lots are the second lot L2 and the third lot L3. Therefore, the batch stop state management unit 29 refers to the recipe of the second lot L2, determines whether or not an alternative processing unit is specified, and if there is an alternative processing unit, changes the schedule of the second lot L2. Then, the processing by the processing unit B that is the priority processing unit is switched to the processing by the processing unit C that is the alternative processing unit (the chemical processing unit 21b of the second processing unit 21). Then, the process execution instructing unit 31 issues a process command according to the schedule when the process is changed to the process unit C, and the second lot L2 is continuously processed without stopping the process.

  For the third lot L3 for which processing has been stopped, the batch execution state management means that the processing execution instructing unit 31 temporarily saves it in a saving unit (not shown) and also saves the third lot L3 in the saving unit. The unit 29 manages it. When the abnormality of the processing unit B is resolved and the processing unit B becomes usable, this is notified to the batch stop state management unit 29, and the batch stop state management unit 29 that receives this is the schedule for using the processing unit B To the scheduling unit 27 to perform again. Receiving this, the scheduling unit 27 performs rescheduling.

  For example, assuming that the abnormality of the processing unit B is resolved at time t2 (during the drying process by the processing unit F of the second lot) in FIG. 6, the processing is initially started from the position indicated by the dotted line in the drawing. The scheduled third lot L3 is rescheduled so that the process is started immediately after the transfer process of the second lot L2 is completed.

  As described above, for the second lot L2 to be processed by the recipe in which the alternative processing unit C is designated as the priority processing unit B in which an abnormality has occurred, the second lot L2 is processed by switching to the alternative processing unit C. As described above, the control unit 25 changes the schedule, and the control unit 25 continuously executes the processing of the second lot L2 with the changed schedule. Therefore, even if an abnormality occurs in the priority processing unit B, it is not necessary to stop the processing for all the lots from the first lot L1 to the third lot L3, so that the operating rate of the substrate processing apparatus is prevented from decreasing. Can do.

  For the third lot L3 processed by the recipe in which only the priority processing unit B in which an abnormality has occurred is specified, the control unit 25 saves the third lot L3 and the abnormality in the priority processing unit B is resolved. At this point, the process is resumed after scheduling the third lot L3. Therefore, it is possible to prevent inconvenience from occurring in the processing of the third lot L3 in which only the priority processing unit B is specified in the recipe.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) In the above-described embodiment, the case where three lots are processed simultaneously has been described as an example. However, the present invention can be applied even when one or two lots or four or more lots are processed simultaneously. Is possible.

  (2) In the embodiment described above, one alternative processing unit is defined for one priority processing unit in the recipe. However, in the substrate processing apparatus, in addition to the first processing unit 19 and the second processing unit 21 described above, there are three processing units that can perform the same processing, such as a third processing unit and a fourth processing unit. In the case where the above is provided, a plurality of alternative processing units may be defined in one priority processing unit. In that case, schedule the system so that it will be used preferentially according to the specified order of the alternative processing unit, and if an abnormality has occurred in that alternative processing unit, use the next alternative processing unit. do it.

  (3) The substrate processing apparatus taken as an example in the embodiment is an apparatus that sequentially performs a chemical treatment, a pure water cleaning process, and a drying process on a substrate, but is a substrate processing apparatus that performs other processes. Even if it exists, this invention is applicable. For example, an apparatus may be used in which a photoresist solution is applied to a substrate, thinned by a rotation process, and a film is formed by a baking process.

  (4) In the above-described embodiment, a change is made to a lot that is processed by the prescribed recipe in the alternative processing unit, and a lot that is not saved is saved, and rescheduling is performed when the defect of the processing unit is resolved. I am letting. However, it may be configured such that all the lots processed by the recipe for which the alternative processing unit is not defined are only saved, and the lot is again input by the operator.

It is the top view which showed schematic structure of the substrate processing apparatus which concerns on an Example. It is the block diagram which showed schematic structure of the substrate processing apparatus which concerns on an Example. It is a flowchart which shows operation | movement of a substrate processing apparatus. It is a time chart which shows an example of the scheduled state. It is a time chart which shows the example of a change of a schedule. It is a time chart which shows an example of a reschedule.

Explanation of symbols

W ... Substrate 1 ... Cassette 17 ... Drying processing unit 19 ... First processing unit 21 ... Second processing unit 19a ... Pure water cleaning processing unit 19b ... Chemical solution processing unit 19c ... Sub-transport mechanism 21a ... Pure water cleaning processing unit 21b ... Chemical solution Processing unit 21c ... Sub-transport mechanism 25 ... Control unit 27 ... Scheduling unit 29 ... Batch stop state management unit 31 ... Process execution instruction unit 33 ... Storage unit

Claims (5)

When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing a substrate, the control unit sequentially processes each lot in each processing unit based on a recipe including a plurality of processing steps. In the schedule execution method of the substrate processing apparatus for executing the processing after determining the processing order of each lot for
A processing unit preferentially used for processing one processing step is a priority processing unit, and the same processing as the priority processing unit is possible, and a processing unit different from the priority processing unit is an alternative processing unit. In this case, the priority processing unit and the alternative processing unit can be specified for the recipe processing process.
Even if an abnormality has occurred in the priority processing unit specified in the processing step, the above-mentioned alternative for the lot processed in the recipe in which the alternative processing unit corresponding to the priority processing unit in which the abnormality has occurred is specified A schedule execution method for a substrate processing apparatus, wherein the control unit changes the schedule so that the processing unit performs processing, and the control unit continuously executes the processing of the lot with the changed schedule. In the schedule execution method of the substrate processing apparatus of Claim 1,
When an abnormality occurs in the priority processing unit specified for one processing step, the control unit saves the lot for a lot processed by a recipe in which only the priority processing unit in which the abnormality has occurred is specified. A schedule execution method for a substrate processing apparatus, comprising: performing a process and re-scheduling the lot when the priority processing unit becomes usable, and then restarting the process of the lot. In the schedule execution method of the substrate processing apparatus of Claim 1 or 2,
The priority processing unit is a first chemical processing unit, and the alternative processing unit is a second chemical processing unit. In the schedule execution method of the substrate processing apparatus of Claim 1 or 2,
The substrate processing apparatus schedule creation method, wherein the priority processing unit is a first pure water cleaning processing unit, and the alternative processing unit is a second pure water cleaning processing unit. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing a substrate, the control unit sequentially processes each lot in each processing unit based on a recipe including a plurality of processing steps. In the schedule execution program of the substrate processing apparatus for executing the processing after determining the processing order of each lot for
A processing unit preferentially used for processing one processing step is a priority processing unit, and the same processing as the priority processing unit is possible, and a processing unit different from the priority processing unit is an alternative processing unit. In this case, the priority processing unit and the alternative processing unit can be specified for the recipe processing process.
Even when an abnormality occurs in the priority processing unit specified in the processing step, for the lot processed in the recipe in which the alternative processing unit corresponding to the priority processing unit in which the abnormality has occurred is specified, A schedule execution program for a substrate processing apparatus, wherein the control unit changes a schedule so that processing is performed by an alternative processing unit, and the control unit performs control so that processing of the lot is continuously executed according to the changed schedule.

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