JP5374203B2 - Substrate processing apparatus schedule creation method and program thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve an operation rate even when a schedule involves liquid exchange. <P>SOLUTION: At the start of liquid exchange, liquid exchange information is output from a chemical processor CHB2 to a liquid exchange time calculating unit 37 of a control unit 31, and the liquid exchange time calculating unit 37 of the control unit 31 calculates the latest liquid exchange time. In consideration of the calculated latest liquid exchange time, a scheduling function unit 33 of the control unit 31 performs first rescheduling. Further, when the liquid exchange is actually started and then is completed, the scheduling function unit 33 of the control unit 31 performs second rescheduling. Therefore, rescheduling is performed in consideration of the actual time of the liquid exchange that is shifted in time according to the pattern of liquid exchange, so that the operation rate is improved even when the schedule involves the liquid exchange. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a method for creating a schedule for a substrate processing apparatus that performs predetermined processing such as cleaning and drying on a glass substrate (hereinafter simply referred to as a substrate) for a semiconductor wafer or a liquid crystal display device, and a program therefor. The present invention relates to a technique for creating a schedule in advance before execution.

  Conventionally, as a method of this kind, when a plurality of lots are processed by a substrate processing apparatus having a plurality of processing units for processing a substrate, the control unit is based on a recipe including a plurality of processing steps. For example, the processing order of each lot is determined in order to sequentially process each lot by each processing unit (see, for example, Patent Document 1).

  In such a substrate processing apparatus schedule creation method, which lot is to be processed at which point in time before actually starting the processing of the lot, each processing step of the lot is efficiently performed. It can arrange | position and can improve the operation rate of a substrate processing apparatus.

  By the way, some of the processing units perform processing with a chemical solution, but the chemical solution has a certain lifetime, and when the lifetime is reached, the chemical solution is completely replaced with a normal temperature chemical solution or a normal temperature chemical solution and a partial solution. Exchange. The lifetime is also referred to as “life” and includes, for example, a life count in which the lifetime is defined by the number of times the chemical is used, and a lifetime in which the lifetime is defined by the usage time of the chemical. As described above, since the liquid exchange process is performed for each known life, a liquid exchange schedule is first created prior to arranging the use timing of resources such as processing units for each lot. Then, the use timing of each resource is determined so that the use timing in the processing unit to be liquid exchange is not overlapped with the scheduled liquid exchange process. In the liquid exchange process, it is necessary to adjust the temperature not only to the liquid exchange but also to a predetermined temperature according to the recipe. In that case, in order to perform temperature control only in the processing unit, or to reduce the temperature control time, there is a type in which temperature control is performed in advance using a preliminary temperature control unit attached to the processing unit (for example, Patent Document 2).

  However, when creating a schedule in advance, the liquid replacement process is based on the premise that it takes a long time to adjust the temperature in order to allow for a margin. Create a schedule that arranges with the maximum duration. Note that the premise may include a maintenance process such as filter cleaning, in which case the maximum required time width may be set longer. Then, the created schedule is executed, and the control unit executes the reschedule in response to the completion of the liquid exchange process.

Japanese Patent Laid-Open No. 2003-241818 JP 2007-266254 A

However, the conventional example having such a configuration has the following problems.
In other words, in the conventional method, the controller performs rescheduling after the completion of the liquid exchange process, so that there are few resources that can be put forward, and rescheduling is not possible at that time. It is in a state. As a result, there is a problem that a long standby time may occur after the liquid exchange process is completed, and the operating rate of the apparatus may be reduced.

  The present invention has been made in view of such circumstances, and notifies the liquid exchange information when starting the liquid exchange process, and performs the rescheduling based on the liquid exchange information, thereby performing the liquid exchange process. An object of the present invention is to provide a schedule creation method for a substrate processing apparatus and a program for the same, which can improve the operation rate even with the accompanying schedule.

In order to achieve such an object, the present invention has the following configuration.
That is, according to the first aspect of the present invention, when a plurality of lots are processed by a substrate processing apparatus including a plurality of processing units for processing a substrate, the control unit is based on a recipe including a plurality of processing steps. In the method for creating a schedule of a substrate processing apparatus for determining a processing order in order to sequentially process each lot in each processing unit, the scheduling function unit of the control unit performs a liquid exchange process according to a predetermined life interval. The liquid exchange processing arrangement process to be arranged, the scheduling process in which the scheduling function unit of the control unit arranges each lot between each liquid exchange process to create a schedule, and the process execution instruction unit of the control unit based on the schedule The liquid exchange information related to the liquid exchange time is the target of the liquid exchange process when executing the process in order and starting the liquid exchange process. The liquid exchange information output process to be output from the physical unit to the liquid exchange time calculation unit of the control unit, and the liquid exchange process is performed, and the liquid exchange time calculation unit of the control unit performs the latest liquid exchange time based on the liquid exchange information. The latest liquid exchange time output process for calculating the first liquid rescheduling process, the first rescheduling process in which the scheduling function unit of the control unit reschedules based on the latest liquid exchange time, and that the liquid exchange process is actually completed. In response, the scheduling function unit of the control unit includes a second rescheduling process in which rescheduling is performed.

  [Operation / Effect] According to the first aspect of the present invention, first, the scheduling function unit of the control unit arranges the liquid exchange process according to the life interval, and the scheduling function unit of the control unit performs the interval between each liquid exchange process. Arrange the processing of each lot. Then, based on the created schedule, the process execution instruction unit of the control unit actually executes each process in order. When starting the liquid exchange process, it is determined what kind of liquid exchange is performed in the processing unit that performs the liquid exchange process. It outputs to a time calculation part, and the liquid replacement time calculation part of a control part calculates the newest liquid replacement time. The scheduling function unit of the control unit performs the first rescheduling in consideration of the calculated latest liquid replacement time. Furthermore, when the liquid exchange process is actually started and the liquid exchange process is actually completed, the scheduling function unit of the control unit performs the second reschedule. Therefore, since rescheduling can be performed in consideration of the actual time of the liquid exchange process, which varies depending on the liquid exchange mode, the operating rate can be improved even in a schedule involving the liquid exchange process. it can.

  In the present invention, it is preferable that the liquid exchange information includes information on whether or not to use the preliminary temperature control unit and whether or not to perform filter cleaning of the processing unit (Claim 2). . When using the preliminary temperature control unit, the liquid replacement time can be shortened compared to when not using it, and when the filter cleaning is not performed, the liquid replacement time can be shortened compared to when cleaning is performed. it can. Therefore, the latest liquid replacement time calculated by the liquid replacement time calculation unit can be made closer to the time required for the actual liquid replacement work.

  In the present invention, it is preferable that the first rescheduling process and the second rescheduling process perform rescheduling for processing other than processing of a lot for which processing has already been performed ( Claim 3). Rescheduling causes inconvenience if the processing of lots that have already been processed is rearranged, and rescheduling is performed for other processing.

  According to a fourth aspect of the present invention, when a plurality of lots are processed by a substrate processing apparatus provided with a plurality of processing units for processing a substrate, the control unit is based on a recipe including a plurality of processing steps. In the schedule creation program of the substrate processing apparatus that determines the processing order in order to sequentially process each lot in each processing unit, the scheduling function unit of the control unit performs a liquid exchange process according to a predetermined life interval. A liquid exchange processing arrangement function to be arranged; a scheduling function in which the scheduling function unit of the control unit arranges the processing of each lot between each liquid exchange process to create a schedule; and a process execution instruction unit of the control unit based on the schedule The function to execute each process in turn and the liquid exchange information related to the liquid exchange time when the liquid exchange process is started A liquid exchange information output function for outputting the liquid exchange information from the processing unit to the liquid exchange time calculation unit of the control unit, and the liquid exchange time calculation unit of the control unit based on the liquid exchange information. The latest liquid exchange time output function for calculating the exchange time, the first rescheduling function in which the scheduling function unit of the control unit reschedules based on the latest liquid exchange time, and the liquid exchange process are actually completed. In response, the scheduling function unit of the control unit causes the computer as the control unit to execute a second rescheduling function in which the rescheduling is performed.

  According to the schedule creation method of the substrate processing apparatus according to the present invention, when the liquid exchange process is started, it is determined what kind of liquid exchange is performed in the processing unit that performs the liquid exchange process. Therefore, the liquid exchange information is output from the processing unit to the liquid exchange time calculation unit of the control unit, and the liquid exchange time calculation unit of the control unit calculates the latest liquid exchange time. In consideration of the calculated latest liquid exchange time, the scheduling function unit of the control unit performs the first reschedule, and further, when the liquid exchange process is actually started and the liquid exchange process is actually completed, The scheduling function unit of the control unit performs the second rescheduling. Therefore, since rescheduling can be performed in consideration of the actual time of the liquid exchange process, which varies in time depending on the liquid exchange mode, the operating rate can be improved even in a schedule involving the liquid exchange process.

It is the top view which showed schematic structure of the substrate processing apparatus which concerns on an Example. It is the block diagram which showed schematic structure of the substrate processing apparatus which concerns on an Example. It is a flowchart which shows schedule operation | movement. It is a time chart which shows the example of a schedule of a single batch, (a) is a schedule of a 1st lot, (b) is a schedule of a 2nd lot. It is a time chart explaining a schedule process. It is a time chart explaining a schedule process. It is a time chart explaining a schedule process. It is a time chart explaining a schedule process.

An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is a plan view illustrating a schematic configuration of the substrate processing apparatus according to the embodiment, and FIG. 2 is a block diagram illustrating a schematic configuration of the substrate processing apparatus according to the embodiment.

  This substrate processing apparatus is, for example, an apparatus that performs chemical liquid processing, cleaning processing, and drying processing on the substrate W. A plurality of (for example, 25) substrates W are stored in a horizontal posture with respect to the FOUP 1. The FOUP 1 containing the unprocessed substrate W is placed on the loading unit 3. The input unit 3 includes two mounting tables 5 on which the FOUP 1 is mounted. A payout unit 7 is provided at a position adjacent to the input unit 3. The payout unit 7 pays out the processed substrate W stored in the FOUP 1 together with the FOUP 1. The payout unit 7 includes two mounting bases 9 for mounting the FOUP 1 in the same manner as the input unit 3.

  A first transport mechanism CTC configured to be movable between these is provided at a position along the input unit 3 and the payout unit 7. The first transport mechanism CTC transports all the substrates W stored in the FOUP 1 mounted on the mounting table 5 of the loading unit 3 to the second transport mechanism WTR. Further, after receiving the processed substrate W from the second transport mechanism WTR, the first transport mechanism CTC carries the substrate W into the FOUP 1 mounted on the mounting table 9 of the dispensing unit 7. The second transport mechanism WTR is configured to be movable along the longitudinal direction of the substrate processing apparatus.

  On the loading unit 3 side in the moving direction of the second transport mechanism WTR, a drying processing unit LPD is provided for storing and drying a plurality of substrates W in a low-pressure chamber.

  A first processing unit 19 is disposed at a position adjacent to the drying processing unit LPD in the moving direction of the second transport mechanism WTR. The first processing unit 19 includes a pure water cleaning processing unit ONB1 for performing pure water cleaning processing on a plurality of substrates W. In addition, the first processing unit 19 includes a chemical processing unit CHB1 for performing chemical processing on a plurality of substrates W with a processing liquid containing a chemical. The first processing unit 19 delivers the substrate W to and from the second transport mechanism WTR, and transfers the substrate W between the lifter LF1 that can be lifted and lowered only by the pure water cleaning processing unit ONB1 and the second transport mechanism WTR. A lifter LF2 is provided which can be transferred and moved only by the chemical treatment unit CHB1.

  A second processing unit 21 is provided at a position adjacent to the first processing unit 19. The second processing unit 21 has the same configuration as the first processing unit 19 described above. That is, the second processing unit 21 includes a pure water cleaning processing unit ONB2, a chemical processing unit CHB2, and lifters LF3 and LF4.

  In addition, a preliminary temperature adjustment unit CSB1 is attached to the above-described chemical treatment unit CHB1. This preliminary temperature control unit CSB1 replenishes the chemical solution to be exchanged in the chemical solution processing unit CHB1, adjusts the temperature of the chemical solution to be exchanged to the processing temperature in advance, or performs filter cleaning when performing the liquid exchange processing in the chemical solution processing unit CHB1. Or do. In addition, a preliminary temperature adjustment unit CSB2 is attached to the chemical treatment unit CHB2. The preliminary temperature control unit CSB2 also has a function of performing chemical solution exchange and the like, similar to the preliminary temperature control unit CSB1.

  The substrate processing apparatus configured as described above is comprehensively controlled by the control unit 31 as shown in the block diagram of FIG.

  The control unit 31 includes a CPU, a timer, and the like, and includes a scheduling function unit 33, a process execution instruction unit 35, and a liquid exchange time calculation unit 37. A storage unit 39 connected to the control unit 31 is prepared in advance by a user of the substrate processing apparatus, and includes a recipe including a plurality of processing steps that define how to process the substrate W, and a schedule generation program In addition, a processing program for executing the created schedule, liquid replacement information described later, a liquid replacement time calculation program described later, and the like are stored in advance. The control unit 31 controls all resources. Here, the resource means the first transport mechanism CTC, the second transport mechanism WTR, the drying processing unit LPD, the pure water cleaning processing units ONB1 and ONB2, the chemical processing units CHB1 and CHB2, the preliminary temperature adjustment units CSB1 and CSB2, and the like.

  The scheduling function unit 33 handles a plurality of substrates W stored in the FOUP 1 and mounted on the mounting table 5 of the loading unit 3 as one lot, and is stored in advance in the storage unit 39 instructed by the operator of the apparatus. A schedule is created so that the processing steps for each lot can be efficiently arranged in a time series before actually starting the processing according to the recipe. The created schedule is stored in the storage unit 39. In creating the schedule, “single batch schedule creation”, which is a schedule for a single lot, “liquid exchange schedule creation” only for liquid exchange processing, and single batch schedule for each lot in consideration of the liquid exchange schedule There are “general schedule creation” and “re-schedule creation” (details will be described later) accompanying the liquid exchange process.

  In addition, a liquid exchange process is replacement | exchange of the chemical | medical solution used by the chemical | medical solution process part CHB1, CHB2. There are two types of chemical liquid replacement: “All liquid replacement” in which all of the chemical liquid is replaced with a new liquid, and “Partial liquid replacement” in which a part of the chemical liquid is discharged and the new liquid corresponding to the discharged amount is replenished. . In general, a chemical solution to be processed has a lifetime that allows the substrate W to be processed appropriately. This lifetime includes, for example, a temporal lifetime based on the elapsed time since the chemical solution is generated, and a lifetime based on the number of times the chemical solution is used. The lifetime is also referred to as life. Here, the lifetime in time is referred to as “lifetime”, and the lifetime based on the number of times is referred to as “life count”. The lifetime and the life count correspond to the “life interval” in the present invention.

  The liquid exchange process described above is performed in cooperation with the chemical treatment unit CHB1 and the preliminary temperature adjustment unit CSB1 under the control of the control unit 31, and the chemical treatment unit CHB2 and the preliminary temperature adjustment unit CSB2 are controlled by the control unit 31. It is done in collaboration under control. In addition, the liquid exchange process may be performed by using the preliminary temperature control units CSB1 and CSB2, or may not be performed by the preliminary temperature control unit, or may be performed by cleaning the filter in the chemical processing units CHB1 and CHB2. There are modes in which the filter is not washed or all liquid replacement or partial liquid replacement. According to such a liquid exchange mode, the time required for the liquid exchange process in the chemical treatment units CHB1 and CHB2 varies. Since these modes are determined when the liquid exchange is started in the chemical liquid processing units CHB1 and CHB2, the chemical liquid processing units CHB1 and CHB2 output the liquid exchange mode to the control unit 31 as “liquid exchange information”. To do. Further, a “liquid exchange completion signal” indicating that the liquid exchange is completed is also output to the control unit 31. In the liquid exchange schedule creation performed before receiving the liquid exchange information from the chemical liquid processing units CHB1 and CHB2, the scheduling function assumes that the time required for the liquid exchange process is the longest as the liquid exchange mode described above. The unit 33 arranges the liquid exchange process with the maximum required time width.

  As described above, the liquid replacement mode is determined at the time of liquid replacement depending on the situation at that time, whether or not preliminary temperature adjustment is necessary, whether or not filter cleaning is necessary, whether all liquid replacement or partial liquid replacement. It is because is decided.

  The scheduling function unit 33 creates a single batch schedule for each lot, and then creates a liquid exchange schedule for arranging the liquid exchange process having the above-described maximum required time width, for example, at intervals of the lifetime. As a whole schedule creation, a single batch schedule is arranged in consideration of the liquid exchange schedule. Thereafter, when the liquid exchange process is actually started, “liquid exchange information” is output from the target chemical solution processing units CHB1 and CHB2. Receiving this, the liquid replacement time calculation unit 37 of the control unit 31 calculates the latest liquid replacement time based on the liquid replacement information. Then, the scheduling function unit 33 performs rescheduling based on the latest liquid exchange time, and creates the entire schedule again. However, the position of the lot processing that has already been executed is not moved. When the rescheduling is completed, the processing execution instructing unit 35 instructs processing according to the schedule. When the liquid replacement is actually completed and a liquid replacement completion signal is received, the scheduling function unit 33 performs rescheduling. Thereby, even when the liquid replacement is completed earlier than the latest liquid replacement time, the schedule may be prepared in advance. When the rescheduling is completed, the process execution instructing unit 35 instructs each processing unit based on the schedule to proceed with the process.

  Next, specific scheduling will be described with reference to FIGS. FIG. 3 is a flowchart showing the schedule operation, FIG. 4 is a time chart showing an example of a single batch schedule, (a) is the schedule of the first lot, and (b) is the second schedule. It is a lot schedule. 5 to 8 are time charts for explaining the schedule process.

  In the following, in order to facilitate understanding, a case where two lots of the first lot and the second lot are processed will be described as an example, but scheduling is similarly performed for three or more lots. Is possible. First, the recipes related to these two lots will be specifically described below. In this example, there is a one-to-one correspondence between processing steps and resources, but a plurality of resources may correspond to one processing step.

The recipe for the first lot is, for example, as shown in FIG.
That is, the process step a is, for example, a transport process by the processing unit of the first transport mechanism CTC. The processing step b is, for example, a transport process by the processing unit of the second transport mechanism WTR. The process step c is, for example, a drying process by the processing unit of the drying processing unit LPD. The processing step d is, for example, pure water cleaning processing by the processing unit of the pure water cleaning processing unit ONB1, the processing step e is, for example, chemical processing by the processing unit of the chemical processing unit CHB1, and the processing step f is, for example, The pure water cleaning processing is performed by the processing unit of the pure water cleaning processing unit ONB2, and the processing step g is, for example, chemical processing by the processing unit of the chemical processing unit CHB2. However, in this embodiment, the process step e is not used.

  In the first lot example, processing step a constitutes block A, processing steps b and d constitute block B, processing steps b and c constitute block C, and processing steps b and a constitute block D. Is configured. These blocks are grouped in processing steps that can interrupt processing.

The recipe for the second lot is, for example, as shown in FIG.
That is, processing step a constitutes block A, processing steps b and d constitute block B, processing steps b, g, b and f constitute block C, and processing steps b and c constitute block D. The processing steps b and a constitute a block E.

  In addition, lots are distinguished by attaching numbers before each of the blocks A to E. That is, the block A of the first lot is represented as “1-A”, and the block A of the second lot is represented as “2-A”. In addition, the previous part (blank part) in each of the processing steps a to g described above is a preparation work, the subsequent part (blank part) represents rear-cleaning, and the center part (hatched part) represents the substance of the process. Yes. However, depending on the processing step, there may be no clean-up.

  Reference is now made to FIG.

Step S1
The control unit 31 accepts the first lot and the second lot from the input unit 5. In addition, the operator instructs recipes corresponding to the first lot and the second lot via an operation panel (not shown).

Step S2
The scheduling function unit 33 of the control unit 31 reads processing data such as recipes corresponding to the first lot and the second lot from the storage unit 39.

Step S3
The scheduling function unit 33 of the control unit 31 creates a single batch schedule for the first lot and the second lot. At that time, the recipe for each lot read from the storage unit 39 is referred to. The single batch schedule is a single schedule without considering other lots or liquid exchanges. For example, the first lot is as shown in FIG. Suppose that it came to show in FIG.4 (b).

Step S4
The scheduling function unit 33 of the control unit 31 creates a liquid exchange schedule. In this example, for convenience of explanation, it is assumed that only the chemical solution processing unit CHB2 is the target of the chemical solution exchange among the chemical solution processing units CHB1 and CHB2. As shown in FIG. 5, it is assumed that the lifetime is up at time t1. Therefore, the scheduling function unit 33 arranges the liquid exchange process EX1 having the maximum required time Tmx as the time width from the time point t1 to the time point t9 so as to use the resource of the chemical liquid processing unit CHB2. As described above, since the lifetime is determined at predetermined time intervals, the subsequent liquid exchange process EX1 is arranged when the lifetime LT has elapsed from the liquid exchange process EX1, but this is omitted for the sake of illustration. The liquid exchange process EX1 performs temperature adjustment without using the preliminary temperature adjustment unit CSB2, and also performs a process of cleaning the filter of the chemical liquid processing unit CHB2 at the time of liquid exchange, so that the time width of the maximum required time Tmx is obtained. Is set.

Step S5
The scheduling function unit 33 of the control unit 31 creates an overall schedule. Specifically, the processing is started first in the already created single batch schedule of the first lot (FIG. 4A) and single batch schedule of the second lot (FIG. 4B). The single batch schedule of the first lot to be incorporated into the overall schedule. Specifically, the single batch schedule of the first lot is arranged so as not to overlap with the liquid exchange process EX1 in the liquid exchange schedule in which the liquid exchange process has already been arranged. In this first lot, since the recipe does not use the chemical processing unit CHB2, it can be arranged as it is. Then, the entire schedule is as shown in FIG.

Steps S6 and S7
Assume that the operator of the apparatus gives an instruction to start processing the first lot. Then, the process execution instructing unit 35 of the control unit 31 operates each resource while referring to the entire schedule (step S6). Here, as shown in FIG. 6, it is assumed that the current time has reached the time point t1 while the processing of the first lot proceeds. Then, under the control of the process execution instruction unit 35, the chemical solution processing unit CHB2 starts the liquid exchange process, but outputs “liquid exchange information” to the control unit 31 at the start of the liquid exchange process (step S7). Here, it is assumed that the liquid exchange information includes performing preliminary temperature control by the preliminary temperature control unit CSB2 and not performing filter cleaning.

Step S8
Based on the liquid exchange information, the liquid exchange time calculation unit 37 of the control unit 31 calculates the liquid exchange time required for the liquid exchange process EX1 as the latest liquid exchange time Tn. Specifically, since the liquid replacement information includes preliminary temperature control by the preliminary temperature control unit CSB2 and no filter cleaning, the latest liquid replacement time Tn is significantly shortened from the maximum liquid replacement time Tmx. Will be. In this example, for example, as shown in FIG. 6, it is assumed that the end point of the liquid exchange process EX1 is shortened from the time t9 to the time t5 by the latest liquid exchange time Tn.

Step S9 (first rescheduling)
As shown in FIG. 7, it is assumed that the current time is t2. The scheduling function unit 33 of the control unit 31 reschedules based on the latest liquid replacement time Tn. However, if there is a process near the current time t2, and the process has already been executed, it is excluded from the rescheduling target. This is to avoid rearranging the processing of a schedule that has already been created and being executed, because it may adversely affect the processing. Here, as shown in FIG. 7, the entire schedule is created for the second lot that has not yet been processed. The second lot uses the chemical solution processing unit CHB2, but since the end of the liquid exchange processing is set at time t5, it is arranged so that the processing using the chemical solution processing unit CHB2 of the block 2-C follows this. Can do.

Step S10
As shown in FIG. 8, it is assumed that the current time is a time point t2. Then, it is assumed that the liquid exchange process EX1 is completed at this time. Then, the chemical liquid processing unit CHB2 outputs a liquid exchange completion signal indicating that the liquid exchange is completed to the control unit 31. From the viewpoint of life, it is preferable to perform the liquid replacement schedule again so that the subsequent liquid replacement process is positioned at the time when the lifetime LT has elapsed with reference to the time t2.

Step S11 (second rescheduling)
The scheduling function unit 33 of the control unit 31 receives the liquid exchange completion signal and performs second rescheduling. Specifically, the arrangement is possible for those that can be arranged after the time t2 near the current time and for which the current processing is not executed. This rescheduling is the same as in the prior art. In this example, there is no process that can be arranged, so the rescheduling is terminated.

  Incidentally, in the prior art, as shown by a dotted line in FIG. 5, the process of the second lot is arranged such that the block 2-C is arranged after the liquid exchange process EX1 of the maximum required time Tmx, and the liquid exchange process Rescheduling is performed when EX1 is completed. However, since there is no block that can be pre-packed in the second lot that has not started processing at that time, the processing of the second lot is delayed as compared with the present embodiment as shown in FIG. .

  As described above, in this embodiment, when the liquid exchange process EX1 is started, it is determined what kind of liquid exchange is performed in the chemical liquid processing unit CHB2 that performs the liquid exchange process EX1. Therefore, the liquid replacement information is output from the chemical liquid processing unit CHB2 to the liquid replacement time calculation unit 37 of the control unit 31, and the liquid replacement time calculation unit 37 of the control unit 31 calculates the latest liquid replacement time Tn. The scheduling function unit 33 of the control unit 31 performs the first rescheduling in consideration of the calculated latest liquid exchange time Tn, and the liquid exchange process EX1 is actually started to actually perform the liquid exchange process EX1. When completed, the scheduling function unit 33 of the control unit 31 performs the second rescheduling. Therefore, since rescheduling can be performed in consideration of the actual time of the liquid exchange process EX1, which varies in time depending on the mode of liquid exchange, the operating rate can be improved even with a schedule involving the liquid exchange process EX1. .

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) In the above-described embodiment, the substrate processing apparatus having the configuration as shown in FIG. 1 has been described. However, the present invention is not limited to the configuration.

  (2) In the above-described embodiment, the liquid exchange process EX1 managed as the lifetime as an example has been described, but a life count may be employed instead.

  (3) In the above-described embodiment, as the liquid replacement information, whether to use the preliminary temperature control unit or whether to perform the filter cleaning is taken as an example, but information related to the time required for the liquid replacement processing, for example, Other information such as total liquid replacement or partial liquid replacement may be included.

W ... Substrate 1 ... FOUP
DESCRIPTION OF SYMBOLS 3 ... Input part 5,9 ... Mounting stage 7 ... Delivery part CTC ... 1st conveyance mechanism WTR ... 2nd conveyance mechanism 19 ... 1st process part ONB1, ONB2 ... Pure water washing process part CHB1, CHB2 ... Chemical solution process part LF1- LF4 ... Lifter 21 ... 2nd processing part CSB1, CSB2 ... Preliminary temperature control unit 31 ... Control part 33 ... Scheduling function part 35 ... Process execution instruction part 37 ... Liquid exchange time calculation part 39 ... Storage part EX1 ... Liquid exchange process Tmx ... Maximum required time LT ... Life time Tn ... Latest liquid exchange time

Claims (4)

When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing a substrate, the control unit sequentially processes each lot based on a recipe including a plurality of processing steps. In the substrate processing apparatus schedule creation method for determining the processing order to
A liquid exchange processing arrangement process in which the scheduling function unit of the control unit arranges the liquid exchange processing according to a predetermined life interval,
A scheduling process in which the scheduling function unit of the control unit arranges the processing of each lot during each liquid exchange processing and creates a schedule,
An execution process in which the process execution instruction unit of the control unit sequentially executes each process based on the schedule,
When starting the liquid exchange process, the liquid exchange information related to the liquid exchange time, the liquid exchange information output process for outputting the liquid exchange information from the processing unit that is the target of the liquid exchange process to the liquid exchange time calculation unit of the control unit,
While performing the liquid exchange process, the liquid exchange time calculation unit of the control unit calculates the latest liquid exchange time based on the liquid exchange information, the latest liquid exchange time output process,
A first rescheduling process in which a scheduling function unit of the control unit reschedules based on the latest liquid exchange time;
A second rescheduling process in which the scheduling function unit of the control unit reschedules in response to the completion of the liquid exchange process;
A method of creating a schedule for a substrate processing apparatus, comprising: In the schedule preparation method of the substrate processing apparatus of Claim 1,
The method for creating a schedule of a substrate processing apparatus, wherein the liquid exchange information includes information on whether or not to use a preliminary temperature control unit and whether or not to perform filter cleaning of a processing unit. In the schedule preparation method of the substrate processing apparatus of Claim 1 or 2,
The substrate processing apparatus schedule characterized in that the first rescheduling process and the second rescheduling process perform rescheduling for other processes excluding the processes of lots that have already been processed. How to make. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing a substrate, the control unit sequentially processes each lot based on a recipe including a plurality of processing steps. In the schedule creation program of the substrate processing apparatus for determining the processing order in order to
A liquid exchange processing arrangement function in which the scheduling function unit of the control unit arranges the liquid exchange processing according to a predetermined life interval;
A scheduling function in which the scheduling function unit of the control unit arranges the processing of each lot during each liquid exchange process to create a schedule,
An execution function in which the process execution instructing unit of the control unit sequentially executes each process based on the schedule;
A liquid exchange information output function for outputting the liquid exchange information related to the liquid exchange time from the processing unit that is the target of the liquid exchange process to the liquid exchange time calculation unit of the control unit when starting the liquid exchange process;
While performing the liquid replacement process, the liquid replacement time calculation unit of the control unit calculates the latest liquid replacement time based on the liquid replacement information, the latest liquid replacement time output function,
A first rescheduling function in which a scheduling function unit of the control unit reschedules based on the latest liquid exchange time;
A second rescheduling function in which the scheduling function unit of the control unit reschedules in response to the completion of the liquid exchange process;
Is executed by a computer which is the control unit.

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