KR20090006009A - Scheduling method and program for a substrate treating apparatus - Google Patents

Abstract

The scheduling method and the program for a substrate treating apparatus are provided to improve the availability and to prevent the long schedule writing time by using plural arrangement methods. The plural sheets of the substrate(W) are accepted in parallel to the FOUP(Front Opening Unified Pod)(1). The FOUP receiving the non-treated substrates is positioned in the input part(3). The input part includes two placement tables(5) placed in the FOUP. The opposite side of the input part is disposed at the output part(7). The output part receives the treated substrates to the FOUP and draws out each FOUP. The output part comprises two placement tables(9).

Description

SCHEDULING METHOD AND PROGRAM FOR A SUBSTRATE TREATING APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a schedule of a substrate processing apparatus and a program for performing predetermined processing such as cleaning, etching, drying, etc. on a semiconductor wafer or a glass substrate (hereinafter, simply referred to as a substrate) for a liquid crystal display device.

Conventionally, in this kind of method, when processing a plurality of lots by a substrate processing apparatus equipped with a plurality of processing units for processing a substrate, the control unit each lot based on a recipe including a plurality of processing steps. The processing order of each lot is determined in advance in order to process the processing in each processing unit in advance, and the processing is performed sequentially while conveying each lot according to the schedule.

Specifically, based on the genealogy diagram showing the combination according to the processing procedure for each lot of each lot, after placing the first process step for a certain lot, the process step is set along the genealogy diagram as a starting point. In the meantime, in the next processing step of each lot, the processing step for the lot with the earliest expected end time in each previous processing step is arranged as the next processing step (for example, Japanese Patent Laid-Open No. 2003-241818). Japanese Patent Laid-Open No. 2003-243274).

The schedule preparation method of the substrate processing apparatus as described above determines which lot is processed at which point in time at which processing part before actually starting processing for the lot, so that each processing step of the lot can be efficiently arranged. The operation rate of the substrate processing apparatus can be improved.

In order to cope with a case where a long time is required for schedule creation as described above, the time required for schedule creation is compared with a predetermined reference time, and when the reference time is exceeded, a predetermined time is added to the reference time as a new reference time. Even if a long time is required for the preparation of the schedule, the schedule completion point is not allowed to exceed the scheduled time (see Japanese Patent No. 3712370).

However, in the conventional example having such a configuration, there are the following problems.

In other words, the conventional method for creating a schedule of a substrate processing apparatus may require a long time for creating a schedule when it is desired to obtain the effect of suppressing the waiting time and improving the operation rate. If the problem caused by this is to be prevented, then it becomes necessary to back off the arrangement position of the processing process of the next lot, and as a result, there is a fear that the waiting time is increased and the operation rate cannot be improved. At the same time, there is a problem that the lot of the schedule target is reduced and flexible scheduling cannot be performed. In addition, there is a problem that the target of the schedule is reduced and the operation rate is lowered.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and by providing a plurality of types of arrangement methods, it is possible to provide a schedule processing method and a program for the substrate processing apparatus which can prevent a long schedule creation time and improve the operation rate. For the purpose of

Another object of the present invention is to provide a schedule processing method and a program of the substrate processing apparatus which can prevent the length of the schedule creation time and improve the operation rate by performing block arrangement for reasons that cannot be arranged. It is to offer.

In addition, another object of the present invention is to arrange a block of a lot that has a processing start order first, thereby preventing a long schedule creation time and improving the operation rate. And providing the program.

Another object of the present invention is to provide a schedule processing method of a substrate processing apparatus which can prevent a long schedule creation time and improve an operation rate by preferentially arranging processing processes of the same lot as a previously arranged lot. Is to provide that program.

In addition, another object of the present invention is to arrange a processing step of a lot having a processing step with a short waiting time, thereby preventing the length of the schedule preparation time from being extended and scheduling the substrate processing apparatus capable of improving the operation rate. The purpose is to provide a method and a program thereof.

In order to achieve this object, the present invention adopts the following configuration.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially, the method includes the following steps: The controller controls a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, after the first treatment process is arranged for a certain lot, the process is completed, following the genealogy diagram starting from the treatment process, and ending in each previous treatment process in the next treatment process of each lot. A basic batch method for searching and arranging the processing steps for the lot with the earliest scheduled time as the next processing step; and the basic batch method If the processing step is arranged on the basis of the above, and the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the processing step is avoided, and the processing step is located above the processing step. A step of creating a plurality of schedules by executing a first batch method of resuming the search from a branch point one ahead of a branching point; creating the plurality of schedules, and selecting one schedule that has been completed within a prescribed time Step of selecting;

According to the present invention, after the control unit arranges the first processing step of a lot based on a genealogy diagram showing a combination according to the processing procedure for each processing step of each lot, the control unit generates a lineage chart based on the processing step. In the following processing steps, the processing steps for the lot with the earliest expected end time in the previous processing step of each lot are arranged as the next processing step (schedule). In addition, the control unit arranges the processing steps based on the basic arrangement method, and if the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the control unit avoids the processing steps. In addition, the search is resumed and scheduled from the branching point one ahead of the branching point above the processing step in the genealogy diagram (first batch method).

Therefore, by pre-scheduling by the basic arrangement method, it is possible to arrange the post-process of the previous processing step and the pre-process of the subsequent processing step in duplicate, so that the processing step of the lot in which the previous processing step ends soon is performed next. By preferentially selecting and arranging as a step, a schedule that can shorten the time until the next processing step ends can be created in advance. In addition, in the first batch method, the number of trials can be reduced because the batch is not executed in the lower line in the genealogy diagram than the processing step for the reason that the batch cannot be arranged. As a result, the schedule time can be shortened compared to the basic arrangement method. In this way, by simultaneously creating a plurality of schedules in accordance with the basic arrangement method and the first arrangement method, each of which has different characteristics, and selecting one schedule that has been completed within a prescribed time, the schedule creation time is prevented from being longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of scheduling a substrate processing apparatus for determining a processing order of each lot in order to process sequentially, the method includes the following steps: The control unit performs a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, after the first treatment process is arranged for a certain lot, the process is completed, following the genealogy diagram starting from the treatment process, and ending in each previous treatment process in the next treatment process of each lot. A basic batch method for searching and arranging the processing steps for the lot with the earliest scheduled time as the next processing step; and the basic batch method When arranging the processing steps on the basis of this, after the first processing steps are arranged for each lot according to the processing start order of each first designated lot, the processing of the lot having the processing start order first among the next processing steps of each lot. A step of creating a plurality of schedules by executing a second batch method in which processes are preferentially arranged; executing the steps of creating the plurality of schedules and selecting one schedule from among those specified within the prescribed time do.

According to the present invention, the control unit arranges the first processing step of a lot based on a genealogy diagram showing a combination according to the processing procedure for each processing step of each lot, and then follows the genealogy diagram starting from the processing step. In the next process of each lot, the process process for the lot with the earliest estimated end time in the previous process process is arrange | positioned as a next process process, and it schedules in advance (basic arrangement method). In addition, the control unit arranges the processing steps based on the basic arrangement method, and also arranges the first processing steps for each lot according to the processing start order of each first designated lot, and then, during the next processing step of each lot, First, the processing steps of the lot with the processing start order first are arranged first (second batch method).

Therefore, by pre-scheduling by the basic arrangement method, it is possible to overlap the post-production of the previous processing step and the pre-production of the subsequent processing step, so that the lot that the previous processing step ends soon. By preferentially selecting and arranging the processing steps as the next processing steps, it is possible to prepare a schedule that can shorten the time until the next processing step is completed. In addition, the second arrangement method becomes impossible to arrange due to physical limitations, and it is possible to suppress the occurrence of a return in the arrangement of the processing steps such as going up the lineage diagram. Therefore, the schedule time can be shortened, so that the schedule time can be shortened as compared with the basic arrangement method. In this way, a plurality of schedules are simultaneously created according to the basic arrangement method and the second arrangement method, each of which has different characteristics, and a single schedule that has been completed within the prescribed time is selected, thereby preventing the schedule creation time from becoming longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially, the method includes the following steps: The control unit performs a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, after the first treatment process is arranged for a certain lot, the process is completed, following the genealogy diagram starting from the treatment process, and ending in each previous treatment process in the next treatment process of each lot. A basic batch method for searching and arranging the processing steps for the lot with the earliest scheduled time as the next processing step; and the basic batch method When arranging the processing step based on the above, if there is a processing step of the lot that can be arranged following the processing step of the previously placed lot, a plurality of schedules are executed by executing a third batch method of preferentially placing the processing step of the lot. Step of creating a plurality of schedules, and selecting a schedule from which a schedule is completed within a prescribed time.

According to the present invention, the control unit arranges the first processing step of a lot based on a genealogy diagram showing a combination according to the processing procedure for each processing step of each lot, and then follows the genealogy diagram starting from the processing step. In the next process of each lot, the process process for the lot with the earliest estimated end time in the previous process process is arrange | positioned as a next process process, and it schedules in advance (basic arrangement method). In addition, the control unit arranges the processing step based on the basic arrangement method, and when there is a processing step of the lot that can be disposed following the processing step of the previously arranged lot, the control unit preferentially arranges the processing step of the lot. (Third batch method).

Therefore, by pre-scheduling by the basic arrangement method, it is possible to arrange the post-process of the previous processing step and the pre-process of the subsequent processing step in duplicate, and the processing step of the lot in which the previous processing step ends soon is completed in the next processing step. By preferentially selecting and arranging, the schedule which can shorten the time until the next process process is complete | finished can be created beforehand. In addition, the third arrangement method can shorten the schedule time with respect to the schedule of resuming the processing from the state where the apparatus is stopped by preferentially arranging the processing steps of the same lot as the previously arranged lot. In this way, by simultaneously creating a plurality of schedules according to the basic arrangement method and the third arrangement method, each of which has different characteristics, and selecting one schedule that has been completed within the prescribed time, the schedule creation time is prevented from becoming longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially, the method includes the following steps: The controller controls a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, after the first treatment process is arranged for a certain lot, the process is completed, following the genealogy diagram starting from the treatment process, and ending in each previous treatment process in the next treatment process of each lot. A basic batch method for searching and arranging the processing steps for the lot with the earliest scheduled time as the next processing step; and the basic batch method A step of creating a plurality of schedules by executing a fourth batch method of preferentially arranging the processing steps of a lot having a processing time with a short allowable time which can be waited by the processing unit when the processing steps are arranged; In addition to creating a schedule, a step of selecting one schedule from which a schedule is completed within a prescribed time is executed.

According to the present invention, the control unit arranges the first processing step of a lot based on a genealogy diagram showing a combination according to the processing procedure for each processing step of each lot, and then follows the genealogy diagram starting from the processing step. In the next processing step of each lot, the processing step for the lot with the earliest scheduled end time in the previous processing step is scheduled as the next processing step (schedule). In addition, the control unit arranges the processing steps based on the basic arrangement method, and preferentially arranges the processing steps of the lot having the processing steps with a short allowable time that can be waited by the processing unit (fourth placement method).

Therefore, by pre-scheduling by the basic batch method, it is possible to arrange the post-process of the previous processing step and the pre-process of the subsequent processing step in duplicate, and the processing step of the lot in which the previous processing step ends soon is completed in the next processing step. By preferentially selecting and arranging, the schedule which can shorten the time until the next process process is complete | finished can be created beforehand. By the way, even if it is possible to physically arrange the processing step with a short allowable time, it becomes impossible to arrange it without keeping the allowable time and the occurrence of return in the genealogy diagram increases. Therefore, in the fourth arrangement method, by preferentially arranging the processing steps having a shorter allowable time, it is possible to easily avoid the unavailability due to the allowable time, so that the schedule time can be shortened. As a result, the schedule time can be shortened compared to the basic arrangement method. In this way, a plurality of schedules are created at the same time according to the basic layout method and the fourth layout method, each of which has different characteristics, and by selecting one schedule that has been completed within the prescribed time, the schedule creation time is prevented from becoming longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially, the method includes the following steps: The controller controls a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, after the first treatment process is arranged for a certain lot, the process is completed, following the genealogy diagram starting from the treatment process, and ending in each previous treatment process in the next treatment process of each lot. Processing process based on the basic arrangement method to search and arrange the processing process for the lot with the earliest scheduled time as the following processing process In addition, if the waiting time generated in the treatment step exceeds the allowable time allowed by the treatment unit, the arrangement of the treatment step is avoided and one point ahead of the branch point above the treatment step. After arranging the first batch method for resuming the search from the branch point of and the batch process process based on the basic batch method, after the first process step is arranged for each lot according to the processing start order of each lot initially designated, A step of creating a plurality of schedules by executing a second batch method of preferentially arranging the processing steps of the lot in which the processing start order is the first of the following processing steps of each lot; Among them, a step of selecting one schedule whose schedule is completed within the prescribed time is executed.

According to the present invention, when the processing unit arranges the processing steps based on the basic arrangement method, when the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the control unit arranges the processing steps. In addition to avoiding this, the search is resumed from the branch point one ahead of the branch point above the processing step in the genealogy diagram and scheduled (first batch method). In addition, the control unit arranges the processing steps based on the basic arrangement method, and also arranges the first processing steps for each lot according to the processing start order of each first designated lot, and then, during the next processing step of each lot, First, the processing steps of the lot with the processing start order first are arranged first (second batch method).

Therefore, by performing the schedule by the first batch method while using the basic batch method, the number of trials can be reduced because the batch is not executed for the one below the genealogy diagram rather than the processing step for the reason that the batch cannot be placed. As a result, the schedule time can be shortened compared to the basic arrangement method. In addition, the second arrangement method becomes impossible to arrange due to physical limitations, and it is possible to suppress the occurrence of a return in the arrangement of the processing steps such as going up the lineage diagram. Therefore, the schedule time can be shortened. As a result, the schedule time can be shortened compared with the basic arrangement method. In this way, a plurality of schedules are simultaneously created according to the first batch method and the second batch method, each of which has different characteristics, and one schedule that has been completed within the prescribed time is selected, thereby preventing the length of the schedule creation time from becoming longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially, the method includes the following steps: The controller controls a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, after the first treatment process is arranged for a certain lot, the process is completed, following the genealogy diagram starting from the treatment process, and ending in each previous treatment process in the next treatment process of each lot. Processing process based on the basic arrangement method to search and arrange the processing process for the lot with the earliest scheduled time as the following processing process In addition, if the waiting time generated in the treatment step exceeds the allowable time allowed to be waited by the treatment unit, the arrangement of the treatment step is avoided and one point ahead of the branch point above the treatment step. The first batch method for resuming the search from the branch point of the; and when the processing step is arranged based on the basic batch method, when there is a processing step of the lot that can be disposed following the processing step of the previously placed lot, A step of creating a plurality of schedules by executing a third batch method of preferentially arranging the processing steps; creating the plurality of schedules and performing a step of selecting one schedule that has been completed within a prescribed time therefrom do.

According to the present invention, when the processing unit arranges the processing steps based on the basic arrangement method, when the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the control unit arranges the processing steps. In addition, the search is resumed and scheduled from the branching point one ahead of the branching point higher than the processing step in the genealogy diagram (first arrangement method). In addition, the control unit arranges the processing step based on the basic arrangement method, and when there is a processing step of the lot that can be disposed following the processing step of the previously arranged lot, the control unit preferentially arranges the processing step of the lot. (Third batch method).

Therefore, by performing the schedule by the first batch method while using the basic batch method, the number of trials can be reduced since the batch is not executed for the one below the genealogy diagram rather than the processing step for the reason that the batch cannot be placed. As a result, the schedule time can be shortened compared to the basic arrangement method. Further, in the third arrangement method, by preferentially arranging the processing steps of the same lot as the previously arranged lot, the schedule time can be shortened with respect to the schedule of resuming processing from the state where the apparatus is stopped. In this way, a plurality of schedules are simultaneously created according to the first batch method and the third batch method, each of which has different characteristics, and one schedule that has been completed within the prescribed time is selected, thereby preventing the schedule creation time from becoming longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus for determining a processing order of each lot in order to process sequentially, the method includes the following steps: The control unit is a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram showing the first treatment step for a certain lot, and following the genealogy diagram starting from the treatment step, each of the subsequent treatment steps in the next treatment step of each lot. Processing process based on the basic arrangement method to search and arrange the processing process for the lot with the earliest scheduled end time as the following processing process. In addition, if the waiting time generated in the treatment step exceeds the allowable time allowed to be waited by the treatment unit, the arrangement of the treatment step is avoided and one point ahead of the branch point above the treatment step. Firstly arranging the first batch method of resuming the search from the branching point of the branch and the process step of the lot having the shortest allowed processing time to be waited by the processing unit when arranging the processing steps based on the basic arrangement method; A step of creating a plurality of schedules by executing the fourth batch method; the steps of creating the plurality of schedules and selecting one of the schedules completed within the prescribed time from among them;

According to the present invention, when the processing unit arranges the processing steps based on the basic arrangement method, when the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the control unit arranges the processing steps. In addition, the search is resumed and scheduled from the branching point one ahead of the branching point above the processing step in the genealogy diagram (first batch method). In addition, the control unit arranges the processing steps based on the basic arrangement method, and preferentially arranges the processing steps of the lot having the processing steps with a short allowable time that can be waited by the processing unit (fourth placement method).

Therefore, by using the basic batch method and scheduling by the first batch method, the number of trials can be reduced because the batch is not executed for the one below the genealogy diagram rather than the processing step for the reason that the batch cannot be placed. . As a result, the schedule time can be shortened compared to the basic arrangement method. By the way, even if it is possible to physically arrange the processing step with a short allowable time, it becomes impossible to arrange it without keeping the allowable time and the occurrence of return in the genealogy diagram increases. Therefore, in the fourth arrangement method, by preferentially arranging the processing steps having a shorter allowable time, it is possible to easily avoid the disposition that is caused by the allowable time, so that the schedule time can be shortened. As a result, the schedule time can be shortened compared to the basic arrangement method. In this way, a plurality of schedules are simultaneously created according to the first batch method and the fourth batch method, each of which has different characteristics, and one schedule that has been completed within the prescribed time is selected, thereby preventing the length of the schedule creation time from becoming longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially, the method includes the following steps: The controller controls a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, after the first treatment process is arranged for a certain lot, the process is completed, following the genealogy diagram starting from the treatment process, and ending in each previous treatment process in the next treatment process of each lot. Processing process based on the basic arrangement method to search and arrange the processing process for the lot with the earliest scheduled time as the following processing process In addition, the first processing step is arranged for each lot according to the processing start order of each lot first designated, and then, among the following processing steps of each lot, the processing step of the lot having the processing start order first is given priority. When there is a second batch method to be arranged and a processing step of the lot that can be arranged subsequent to the processing step of the batch placed first, when the processing step is arranged based on the basic batch method, the processing step of the lot is given priority. A step of creating a plurality of schedules by executing the third batch method of arranging the data; and creating the plurality of schedules, and selecting one of the schedules completed within the prescribed time therefrom.

According to the present invention, when the control unit arranges the processing steps based on the basic arrangement method, the control unit arranges the first processing step for each lot according to the processing start order of each first designated lot, and then the next processing step for each lot. In the meantime, the processing steps of the lot with the processing start order first are preferentially arranged (second arrangement method). In addition, the control unit arranges the processing step based on the basic arrangement method, and when there is a processing step of the lot that can be disposed following the processing step of the previously arranged lot, the control unit preferentially arranges the processing step of the lot. (Third batch method).

Therefore, by using the basic arrangement method and scheduling by the second arrangement method, it becomes impossible to arrange due to physical limitations, and it is possible to suppress the occurrence of reversion in the arrangement of processing such as going back to the genealogy diagram. Can be. Therefore, the schedule time can be shortened. Further, in the third arrangement method, by preferentially arranging the processing steps of the same lot as the previously arranged lot, the schedule time can be shortened with respect to the schedule of resuming processing from the state where the apparatus is stopped. In this way, a plurality of schedules are simultaneously created according to the second batch method and the third batch method, each of which has different characteristics, and one schedule that has been completed within the prescribed time is selected, thereby preventing the length of the schedule creation time from becoming longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially, the method includes the following steps: The controller controls a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, after the first treatment process is arranged for a certain lot, the process is completed, following the genealogy diagram starting from the treatment process, and ending in each previous treatment process in the next treatment process of each lot. Processing process based on the basic arrangement method to search and arrange the processing process for the lot with the earliest scheduled time as the following processing process In addition, the first processing step is arranged for each lot according to the processing start order of each lot first designated, and then, among the following processing steps of each lot, the processing step of the lot having the processing start order first is given priority. 4th batch method which preferentially arranges the process process of the lot which has a process process with a short allowable time which can be waited by a process part, when arrange | positioning a process process based on the said 2nd batch method to arrange, and the said basic arrangement method. Step of creating a plurality of schedules; the step of creating the plurality of schedules and selecting one of the schedules completed within a prescribed time therefrom.

According to the present invention, when the control unit arranges the processing steps based on the basic arrangement method, the control unit arranges the first processing step for each lot according to the processing start order of each first designated lot, and then the next processing step for each lot. In the meantime, the processing steps of the lot with the processing start order first are preferentially arranged (second arrangement method). In addition, the control unit arranges the processing steps based on the basic arrangement method, and preferentially arranges the processing steps of the lot having the processing steps with a short allowable time that can be waited by the processing unit (fourth placement method).

Therefore, by using the basic arrangement method and scheduling by the second arrangement method, it becomes impossible to arrange due to physical limitations, and it is possible to suppress the occurrence of reversion in the arrangement of processing such as going back to the genealogy diagram. Can be. Therefore, the schedule time can be shortened. By the way, even if it is possible to physically arrange the processing step with a short allowable time, it becomes impossible to arrange it without keeping the allowable time, so that the occurrence of reversion in the genealogy diagram increases. Therefore, in the fourth arrangement method, by preferentially arranging the processing steps having a shorter allowable time, it is possible to easily avoid the disposition that is caused by the allowable time, so that the schedule time can be shortened. As a result, the schedule time can be shortened compared to the basic arrangement method. In this way, a plurality of schedules are simultaneously created according to the second batch method and the fourth batch method, each of which has different characteristics, and one schedule that has been completed within the prescribed time is selected, thereby preventing the schedule creation time from becoming longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially, the method includes the following steps: The controller controls a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, after the first treatment process is arranged for a certain lot, the process is completed, following the genealogy diagram starting from the treatment process, and ending in each previous treatment process in the next treatment process of each lot. Processing process based on the basic arrangement method to search and arrange the processing process for the lot with the earliest scheduled time as the following processing process In addition, if there is a processing step of the lot that can be arranged following the processing step of the previously arranged lot, the processing step based on the third batch method of preferentially placing the processing step of the lot and the basic batch method A step of creating a plurality of schedules by executing a fourth batch method of preferentially arranging the processing steps of a lot having a processing step with a shorter allowable time for waiting in the processing section when arranging the plurality of schedules; In addition, a step of selecting one schedule from which the schedule is completed within the prescribed time is performed.

According to the present invention, if the control unit arranges the processing step based on the basic arrangement method, and there is a processing step of the lot that can be arranged following the processing step of the previously arranged lot, the control step of the lot is preferentially performed. Placement (third placement method). In addition, the control unit arranges the processing steps based on the basic arrangement method, and preferentially arranges the processing steps of the lot having the short processing time that can be waited in the processing unit (fourth placement method). .

Therefore, in the third arrangement method, the schedule time can be shortened with respect to the schedule for resuming processing from the state where the apparatus is stopped. By the way, even if it is possible to physically arrange the processing step with a short allowable time, it becomes impossible to arrange it without keeping the allowable time and the occurrence of return in the genealogy diagram increases. Therefore, in the fourth arrangement method, by preferentially arranging the processing steps having a shorter allowable time, it is possible to easily avoid the unavailability due to the allowable time, so that the schedule time can be shortened. As a result, the schedule time can be shortened compared to the basic arrangement method. In this way, a plurality of schedules are simultaneously created by the third batch method and the fourth batch method, each of which has different characteristics, and by selecting one schedule that has been completed within the prescribed time, the schedule creation time is prevented from becoming longer. On the contrary, it can improve the utilization rate by preventing unnecessary waiting time.

In the present invention, in the step of selecting the schedule, it is preferable that the controller selects the only schedule in which the processing is completed as soon as possible among the schedules completed within the prescribed time.

When there are a large number of schedules completed within the prescribed time, the operation rate of the apparatus can be improved by selecting the one which finishes most quickly among them.

In the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus for determining a processing order of each lot in order to process sequentially in the above, the method includes the following steps; The control unit is a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram showing the first treatment step for a certain lot, and following the genealogy diagram starting from the treatment step, each of the subsequent treatment steps in the next treatment step of each lot. Processing process based on the basic arrangement method to search and arrange the processing process for the lot with the earliest scheduled end time as the following processing process. Arranging step; When arranging a processing step based on the basic arrangement method, if the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the processing step is avoided. In addition, a step of creating a schedule is performed by using a special arrangement method of resuming the search from a branch point one ahead of the branch point above the processing step.

According to the present invention, the control unit arranges the first processing step of a lot based on a genealogy diagram showing a combination according to the processing procedure for each processing step of each lot, and then follows the genealogy diagram starting from the processing step. In the next processing step of each lot, the processing step for the lot with the earliest scheduled end time in the previous processing step is scheduled as the next processing step (schedule). In addition, when the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the control unit avoids arranging the processing step and is located above the processing step in the genealogy diagram. The method of resuming the search from the branch point before the branch point and rescheduling is used in combination.

Therefore, by pre-scheduling by the basic batch method, it is possible to arrange the post-process of the previous processing step and the pre-process of the subsequent processing step in duplicate, and the processing step of the lot in which the previous processing step ends soon is completed in the next processing step. By preferentially selecting and arranging, the schedule which can shorten the time until the next process process is complete | finished can be created beforehand. In addition, in the special arrangement method, since the batch is not performed on the lower line in the genealogy diagram than the processing step for the reason that the batch cannot be arranged, the number of trials can be reduced. As a result, the scheduling time can be shortened as compared with the scheduling of the basic batch method alone, and the operation rate can be improved by preventing unnecessary waiting time.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially, the method includes the following steps: The controller controls a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram shown, the step of arranging the first treatment process for a lot and then searching for and arranging the next treatment process of each lot while following the genealogy diagram starting from the treatment process; After placing the first processing step for each lot according to the processing start order of each first designated lot, Among the following processing steps, the step of creating a schedule by preferentially arranging the processing steps of the lot having the above processing start order first is executed.

According to the present invention, the control unit arranges the first processing step of a lot based on a genealogy diagram showing a combination according to the processing procedure for each processing step of each lot, and then follows the genealogy diagram starting from the processing step. In the process of searching for and arranging the next processing step of each lot, the first processing step is arranged for each lot according to the processing start order of each firstly designated lot, and then the processing start order of the next processing step of each lot. First, the process of lot processing is arranged first.

Therefore, by scheduling in advance before the execution of the process, by arranging the post-process of the preceding processing step and the pre-process of the subsequent processing step in duplicate, the time until the completion of the next processing step can be shortened. In addition, by arranging the processing steps of the lot with the processing start order first, when placing blocks of one lot and then placing blocks of another lot, it becomes impossible to arrange them by physical limitations and goes back to the genealogy diagram. Similarly, the occurrence of reversion in the arrangement of the processing steps can be suppressed. As a result, the schedule time can be shortened, and it is possible to prevent unnecessary waiting time and improve the operation rate.

According to the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing on a substrate, the control unit is to process each lot in each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus for determining a processing order of each lot in order to process sequentially, the method includes the following steps: The control unit is a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram which shows, after the initial treatment process is arranged for a lot, following the genealogy diagram starting from the treatment process, searching for and placing the next treatment process for each lot; In the case of searching and arranging, if there is a processing step of the lot that can be arranged following the processing step of the previously arranged lot, It executes the steps of: to preferentially placed in a re-writing process the schedule.

According to the present invention, the control unit arranges the first processing step of a lot based on a genealogy diagram showing a combination according to the processing procedure for each processing step of each lot, and then follows the genealogy diagram starting from the processing step. In the meantime, when searching for and arranging the next processing step of each lot, if there is a processing step of the lot that can be arranged following the processing step of the previously arranged lot, the processing step of the lot is preferentially arranged.

Therefore, by scheduling in advance before the execution of the processing, it is possible to overlap the post-process of the previous processing step and the pre-process of the subsequent processing step, and the processing step of the lot in which the previous processing step is completed as the next processing step is performed. By preferentially selecting and arranging, the schedule which can shorten the time until the next process process is complete | finished can be created beforehand. In addition, by preferentially arranging the processing steps of the same lot as the previously arranged lot, the schedule time can be shortened with respect to the schedule of resuming the processing from the state where the apparatus is stopped. As a result, the schedule creation time can be prevented from being longer, and useless waiting time can be prevented from occurring.

In the present invention, when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit each processing unit based on the processing sequence including a plurality of processing steps. A method of creating a schedule of a substrate processing apparatus that determines a processing order of each lot in order to process sequentially in the above, the method includes the following steps: The control unit is a combination according to the processing order for each processing step of each lot. Based on the genealogy diagram which shows, after the initial treatment process is arranged for a lot, following the genealogy diagram starting from the treatment process, searching for and placing the next treatment process for each lot; When searching and arranging, the process process of lots which have a process process with a short allowable time which can be waited by a process part is arranged preferentially. Step to create a schedule.

According to the present invention, the control unit arranges the first processing step of a lot based on a genealogy diagram showing a combination according to the processing procedure for each processing step of each lot, and then follows the genealogy diagram starting from the processing step. In the meantime, when searching for and arranging the next processing step of each lot, the processing step of the lot having a processing step with a short allowable time that can be waited by the processing unit is preferentially arranged.

Therefore, by scheduling in advance before the execution of the process, it is possible to arrange the post-process of the previous processing step and the pre-process of the subsequent processing step so that the schedule can be shortened and the time until the completion of the next processing step can be shortened. You can write in advance. However, even if it is possible to physically arrange the treatment step with a short allowable time, it becomes impossible to arrange it without keeping the allowable time, so that the occurrence of reversion in the genealogy diagram increases. Therefore, by preferentially arranging the processing steps with a shorter allowable time, it is possible to easily avoid the disposition due to the allowable time, so that the schedule time can be shortened. As a result, the schedule creation time can be prevented from being lengthened, and the use rate can be improved by preventing unnecessary waiting time.

According to the present invention, by providing a plurality of types of arrangement methods, it is possible to provide a schedule preparation method and a program of the substrate processing apparatus, which can prevent the length of the schedule creation time and improve the operation rate.

In addition, according to the present invention, by implementing block arrangement for reasons that cannot be arranged, it is possible to provide a schedule preparation method and a program of the substrate processing apparatus which can prevent a long schedule creation time and improve the operation rate. Can be.

In addition, according to the present invention, a method of creating a schedule of a substrate processing apparatus capable of preventing a long schedule creation time and improving an operation rate by arranging the blocks of the lot having the processing start order first in advance, and the same Program can be provided.

In addition, according to the present invention, a process for producing a substrate processing apparatus and a program thereof, which can prevent a long schedule creation time and improve an operation rate by preferentially arranging processing processes of the same lot as a previously arranged lot. Can be provided.

In addition, according to the present invention, by preferentially arranging the processing steps of a lot having a processing time with a short waiting time, a schedule preparation method of a substrate processing apparatus capable of preventing a long schedule creation time and improving an operation rate and You can provide that program.

Best Mode for Carrying Out the Invention Preferred embodiments of the present invention will be described in detail below with reference to the drawings.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 is a plan view showing a schematic configuration of a substrate processing apparatus according to an embodiment.

This substrate processing apparatus is an apparatus for performing chemical | medical solution process, a washing process, and a drying process with respect to the board | substrate W, for example. A plurality of substrates (for example, 25 sheets) are stored in a standing position with respect to the front opening unified pod (FOUP) 1 in a horizontal position. The FOUP 1 containing the unprocessed substrate W is placed in the feeding section 3. The input section 3 includes two mounting tables 5 on which the FOUP 1 is placed. The lead portion 7 is arranged on the opposite side of the input portion 3 sandwiched between the central portion of the substrate processing apparatus. The lead-out unit 7 stores the processed substrate W in the FOUP 1 and pulls out each FOUP 1. The lead-out part 7 which functions in this way is equipped with the two mounting bases 9 for mounting the FOUP 1 similarly to the input part 3.

At the position along the input part 3 and the extraction part 7, the 1st conveyance mechanism CTC comprised so that a movement between them is arrange | positioned. The first transport mechanism CTC takes out a plurality of substrates W from the FOUP 1 mounted on the mounting table 5 of the feeding section 3, and simultaneously moves the posture of the substrate W from the horizontal direction. After the conversion in the vertical direction, the substrate W is sent to and received from the second transport mechanism WTR. Moreover, after receiving the processed board | substrate W from the 2nd conveyance mechanism WTR, the 1st conveyance mechanism CTC converts the attitude | position of the board | substrate W from a vertical direction to a horizontal direction, and the lead-out part 7 is carried out. The substrate W is accommodated in the FOUP 1 of. The 2nd conveyance mechanism WTR is comprised so that a movement to the longitudinal direction of a substrate processing apparatus is possible.

In the foremost direction in the moving direction of the second transfer mechanism WTR, two drying treatment units LPD1 and LPD2 are arranged for storing and drying a plurality of substrates W in a low pressure chamber.

The 1st processing part 19 is arrange | positioned in the movement direction of the 2nd conveyance mechanism WTR and adjacent to the drying process part LPD2. The first processing unit 19 includes a pure water cleaning processing unit ONB1 for performing pure water cleaning processing on the plurality of substrates W, and the processing liquid is applied to the plurality of substrates W by the processing liquid. A chemical liquid processing unit CHB1 for chemical liquid processing is provided. Moreover, the sub conveyance mechanism LF1 which conveys the board | substrate W between them is provided. The sub conveyance mechanism LF1 exchanges the substrate W between the second conveyance mechanism WTR and the substrate conveyance in the first processing unit 19.

The second processing unit 20 is disposed at a position adjacent to the first processing unit 19. This second processing unit 20 has the same configuration as the first processing unit 19 described above. That is, the pure water cleaning process part ONB2, the chemical liquid processing part CHB2, and the sub conveyance mechanism LF2 are provided.

In addition, the third processing unit 21 is disposed at a position adjacent to the second processing unit 20.

This third processing unit 21 includes a pure water cleaning processing unit ONB3, a chemical liquid processing unit CHB3, and a sub-conveying mechanism LF3.

In addition, the fourth processing unit 22 is disposed at a position adjacent to the third processing unit 21. This fourth processing unit 22 includes a pure water cleaning processing unit ONB4, a chemical liquid processing unit CHB4, and a sub-conveying mechanism LF4.

Further, the first transport mechanism CTC, the second transport mechanism WTR, the drying processing units LPD1 and LPD2, the first processing unit 19 (pure cleaning processing unit ONB1, the chemical liquid processing unit CHB1, and Conveying mechanism LF1, second processing unit 20 (pure cleaning processing unit ONB2, chemical liquid processing unit CHB2, subconveying mechanism LF2), and third processing unit 21 (pure cleaning processing unit ONB3). , Chemical processing unit CHB3, subconveying mechanism LF3, and fourth processing unit 22 (pure cleaning processing unit ONB4, chemical liquid processing unit CHB4, subconveying mechanism LF4), Processing part ”.

The substrate processing apparatus configured as described above is collectively controlled by the controller 31 as shown in the block diagram of FIG. 2.

The control part 31 is comprised by CPU, a counter timer, etc., and is provided with the scheduling function part 33 and the process execution instruction part 35. As shown in FIG. The storage unit 37 connected to the control unit 31 is prepared in advance by an operator of the substrate processing apparatus or the like, and is formed of a block including one processing step or a plurality of processing steps that define how to process the substrate. Recipes (processing procedures), various "schedule creation programs", "schedule creation main programs" for controlling various schedule creation programs, and "processing programs" for executing the created schedules are stored in advance. have. In addition, a plurality of schedules created by the schedule preparation main program and one "schedule" selected therefrom are also stored.

In addition, in the storage unit 37, the "regular time" corresponding to the scheduling time limit or the waiting time that occurs between the next block when arranging the blocks, the allowable time being the allowable time. And "arrangement start position" relating to the positional information on which the block is placed, data (a genealogical diagram) indicating a combination of blocks in a plurality of lots in each schedule, and the like.

The scheduling function unit 33 treats the plurality of substrates W accommodated in the FOUP 1 as one lot, placed in the input unit 3, and is instructed by the operator of the apparatus. According to the recipe stored in advance in advance, a plurality of schedules are created using various schedule creation methods described below so that the processing steps (blocks) for each lot can be efficiently arranged in time series before actually starting the processing. do.

The process execution instruction unit 35 is created by the scheduling function unit 33, and based on one schedule selected as described below among various schedules stored in the storage unit 37, each at an appropriate timing. The operation instruction according to the processing of the processing unit or the like is performed.

The placement control unit 39 of the scheduling function unit 33 performs trial and error for selecting and arranging blocks according to various schedule preparation methods.

The scheduling time monitoring unit 41 of the scheduling function unit 33 counts the elapsed time from the start of execution of various schedule creation methods with a timer (not shown), and displays the time until the specified time. Has the function to measure

The schedule selection unit 43 of the scheduling function unit 33 selects a schedule that finishes soonest among schedules completed within the prescribed time, and informs the process execution instruction unit 35 of the schedule.

Although the scheduling function unit 33 executes a plurality of schedule creation methods having a basic arrangement method, a first arrangement method, a second arrangement method, a third arrangement method, and a fourth arrangement method, these schedules are executed. The creation method is described below. Their schedule preparation method is controlled based on the main program. 3 is a flowchart which shows the main program of a schedule.

Step S1, S2

The process branches by determining whether the target lot number is appropriate or not. If appropriate, the process branches to Step S3, and if inappropriate, the process proceeds to Step S2 and ends abnormally.

Step S3-S5

Creation of a schedule is started in accordance with various schedule creation methods described below (step S3). At the same time, monitoring of the prescribed time is started by the scheduling time monitoring unit 41 (step S4), and the counting is continued until the specified time elapses (step S5).

Step S6, S7

The processing branches according to whether one of the schedules created in accordance with various schedule creation methods is completed. If it is not completed, the lot number is considered to be inappropriate, and the process is executed again from step S1. On the other hand, if any of the schedules are completed, the schedule is selected. When only one is completed, the schedule is selected. However, when a plurality of schedules are completed, the earliest scheduled end time is selected among them. In addition, even if within a prescribed time, at least one of the schedules may be selected when the schedule is completed.

<Basic Placement Method>

Fig. 4 is a flowchart showing the flow of the basic arrangement method, Fig. 5 (a) is a specific example of the time chart of lot 1 in the step batch, and Fig. 5 (b) is the step chart in the step batch. A concrete example of a time chart of lot 2 is shown below.

In the following, in order to make understanding of an invention easy, the case where a lot is processed by the recipe which is simplified rather than an actual recipe is demonstrated as an example as shown in FIG. Specifically, the processing process related to the conveyance process by the 1st conveyance mechanism CTC (block A), the conveyance process by the 2nd conveyance mechanism WTR, and the pure water cleaning process part ONB1 of the 1st process part 19 Treatment process for pure water cleaning treatment (B), treatment process for drying treatment by the second transport mechanism (WTR) and drying treatment by the drying treatment unit (LPD1) (block C), second transport mechanism This is a recipe consisting of a processing process (block D) relating to a conveyance process by (WTR) and a conveyance process by the first conveyance mechanism (CTC).

In addition, in the following description, a single process process or the some process process which needs to arrange | position continuously is called a block. In addition, about a block, it is expressed by the code of "lot-block code", and it is easy to distinguish with a plurality of lots. That is, the code | symbol "1-A" shows the block A of the lot 1.

With respect to the above-described recipe, when the block 1-A is first disposed with the lot 1 first, there is a combination of blocks as shown in FIG. 6 is a schematic diagram (lineage diagram) which shows the combination example of the schedule in a basic arrangement method. 6, the number enclosed by the dotted line corresponds to the step number in the following description.

Step T1, T2

Retrieves the first block and branches the process based on whether or not the retrieved block exists.

Step T3, T4

The earliest end time of the previous block is searched. At that time, since the previous block does not exist for the first arrangement, the previous block in that case is the end time of the previous block at the time (starting time) at which the start of the lot is indicated. Then, a block in which the end scheduled time is early is arranged.

Step T5-T7

The processing branches according to whether or not the lot satisfies the "positioning condition" that the parts do not collide with each other, and that the waiting time generated between the blocks by the arrangement does not exceed the allowable time. . If the arrangement condition is satisfied, the next block of the arrangement block is obtained. Then, the process is repeated from the above step T3 until all blocks are arranged.

Step T8, T9

In step T2, when a block does not exist, the process proceeds to step T8. Then, the process branches further depending on whether or not there are blocks arranged before acquisition. If there is no block, the process is shifted in step T9, and the arrangement position is stored so as to back off the arrangement start position.

Step T10, T11

In the step T8, if there is a block arranged before acquisition, the process is shifted in step T10, and the arrangement of the block is stopped. Then, the arrangement of the block and the block acquired at the same time is stopped, and the flow returns to step T2.

Step T12

In step T5 mentioned above, when an arrangement | positioning condition is not satisfied, the block which cannot be arrange | positioned at step T12 is excluded. Then, the process returns to step T2.

Here, with reference to FIGS. 7-21, specific schedule preparation is demonstrated. 7 to 21 are time charts showing the arrangement process according to the basic arrangement method.

Step 1 ~ 3

It is assumed that lot 1 is instructed to start processing earlier than lot 2, and a time point (down arrow) shown in Fig. 7A is instructed. Then, first, block A (symbol 1-A) of lot 1 having an early scheduled end time (starting time) is arranged (step 1).

Next, when the scheduled end time of the block A (code 1-A) of the lot 1 and the scheduled end time (the scheduled start time) of the lot 2 are compared, the end scheduled time of the lot 2 is faster. (Code 2-A) is placed after Block A (Code 1-A) of the lot 1 (Fig. 7 (b), Step 2). However, block A (code 1-A) of lot 1 collides with block B (code 2-B) of lot 2 in the same processing by the first transport mechanism CTC. A) cannot be placed. Therefore, next, block B (code 1-B) of the lot 1 is arranged after block A (code 1-A) of the lot 1 (Fig. 7 (c), step 3).

Step 4 ~ 6

If the scheduled end time of block B (sign 1-B) of lot 1 and the scheduled end time of start (lot start time) of lot 2 are compared, the end scheduled time of lot 2 is faster, so block A (sign 2 of lot 2). -A) is placed (FIG. 8 (a), step 4). Next, the end scheduled time of block B of lot 1 and the end scheduled time of block B (code 2-B) of lot 2 are compared, and the end scheduled time of block 2-A is faster. (Code 2-B) is placed (Fig. 8 (b), step 5). Next, when the scheduled end time of block B (sign 1-B) of lot 1 and the scheduled end time of block B (code 2-B) of lot 2 are compared, block 1-B ends than block 2-B. Since the scheduled time is fast, the block C (code 1-C) of the lot 1 is arranged (Fig. 8 (c), step 6).

Step 7-9

Comparing block 1-C with the expected end time of block 2-B, since block 2-B is faster, block C (code 2-C) of lot 2 is arranged (Fig. 9 (a) and step 7). . Here, in relation to the drying process part LPD1, block 2-C should be arrange | positioned at a time interval rather than the previous block 2-B. If this waiting time (wt) is within the allowable time, blocks 2-C can be arranged. Here, the waiting time (wt) exceeds the allowable time and it is assumed that the arrangement condition is not satisfied. Therefore, the arrangement of blocks 2-C is stopped, and blocks 1-D are arranged (Fig. 9 (b) and step 8). Next, since the block 1-D which is the last block was arrange | positioned about the lot 1, the selection is only block 2-C. Thus, this block 2-C is arranged (Fig. 9 (c), step 9). In this case, the waiting time wt occurs in block 2-C, which is considered to exceed the allowable time.

Step 10-12

Since the arrangement conditions were not satisfied, the arrangement of blocks 1-D and 1-C before that was stopped. Since the option of arranging the block 2-C after the block 1-C has disappeared, the block 2-C is placed first (FIG. 10 (a), step 10). And since the block 1-B is early, the block 1-C is arrange | positioned, and block 1-C arranges block 1-C (FIG. 10 (b), step 11). Then, the collision of the block C (symbol 2-C) of the lot 2 and the block C (symbol 1-C) of the lot 1 which were not carried out from the drying process part LPD1 arises. Therefore, the block 2-D is arranged first after the block 2-C (Fig. 10 (c) and Step 12).

Step 13-15

Since the block 2-D is arranged, the option is only block 1-C, so the block 1-C is arranged (Fig. 11 (a) and step 13). However, in block 1-C, a waiting time wt occurs, which is considered to exceed the allowable time. Therefore, the arrangement of blocks 2-D, blocks 2-C, and blocks 2-B, which have been arranged before, is stopped, and blocks 1-C are disposed instead of them (Fig. 11 (b) and step 14). Next, among Blocks 2-A and 1-C, Blocks 2-B are arranged after Blocks 2-A having the earliest scheduled end times (Fig. 11 (c) and Step 15).

Step 16-18

The scheduled end times of the block 2-B and the block 1-C are compared, and the block 2-C is arranged after the block 2-B which is the earlier one (Fig. 12 (a) and Step 16). In this case, since the block 1-C of the lot 1 and the block 2-C of the lot 2 collide with the drying processing part LPD1, the arrangement condition is not satisfied. Thus, block 1-D is placed in place of block 2-C (Fig. 12 (b) and Step 17). Since all blocks have been arranged for lot 1, the option is only block 2-C (Fig. 12 (c), step 18). However, it is assumed that the wait time (wt) exceeds the allowable time.

Step 19 ~ 21

Since the option of arranging the block 1-D after the block 2-B has disappeared, the block 1-D is placed before the block 2-B (Fig. 13 (a) and step 19).

The block 2-B is arranged after the block 2-A, which is the earlier one, among the scheduled scheduled times of the blocks 2-A and 1-D (Fig. 13 (b) and Step 20).

Then, among blocks 2-B and 1-D, blocks 2-C are arranged after blocks 2-B having the earliest scheduled end times (Fig. 13 (c) and Step 21).

Here, it is assumed that the waiting time wt exceeds the allowable time.

Step 22 ~ 34

The procedure as described above is repeated in the same manner, and the block arrangement is trial and error for the two lots (Figs. 14 to 18 (a) and steps 22 to 34). This trial and error is shown by the code | symbols 1-34 enclosed with the dotted line in FIG.

Step 35 ~ 44

However, in the trial and error described above, since all blocks cannot be arranged eventually, the interval between injection of the lot 1 and the lot 2 is widened as shown in Fig. 18 (c), and the trial and error is repeated again (Fig. 18 ( b) to FIG. 21, steps 35 to 44).

According to the basic arrangement method described above, all block arrangements are completed in step 44. This trial and error is shown by the code | symbol 1-44 enclosed with the dotted line with respect to FIG.

Thus, the scheduling function part 33 of the control part 31 which implements a basic arrangement method is based on the data (the genealogy diagram of FIG. 6) which shows the combination according to the recipe for each block of each lot, The first of a lot After arranging the blocks, follow the genealogy diagram with the block as the starting point, and arrange the block for the lot with the earliest scheduled end time of the previous block among the next block of each lot as the next block. Schedule in advance.

Therefore, by pre-scheduling by the basic arrangement method, it is possible to overlap the post work of the previous block and the pre-work of the subsequent block, and to select and arrange the block of the lot where the previous block ends early as the next block first. In addition, a schedule that can shorten the time until the end of the next block can be created in advance.

<First Placement Method> (Why Not Placement)

Fig. 22 is a flowchart showing the flow of the first batch method, and Fig. 23 is a schematic diagram showing a combination example of schedules in the first batch method (the genealogy diagram).

In addition, about step U1-U7, it is the same as that of step T1-T7 in the basic arrangement method mentioned above, and abbreviate | omits description. In addition, in steps U8-U11, it is the same as that of step T8-T11 in the basic arrangement method mentioned above, and abbreviate | omits about description. This first arrangement method corresponds to the special arrangement method in the present invention.

Step U12, U13

In step U5, when the arrangement condition is not satisfied, the processing branches according to whether or not the waiting time exceeds the allowable time (step U12). That is, if the reason is that the waiting time exceeds the allowable time, all acquired blocks are excluded (step U13).

Step U14

In the above step Ul2, if the reason why the block cannot be arranged is not the waiting time, only the block that cannot be arranged is excluded and the process branches to step U2.

In the above-mentioned recipe, when the lot 1 is started first and a schedule is performed in the first arrangement method, a combination of blocks exists as shown in FIG. 23 is a schematic diagram (lineage diagram) which shows the combination example of the schedule in a 1st arrangement method. In FIG. 23, the number enclosed by the dotted line corresponds to the step number in the following description.

Here, with reference to FIGS. 24-35, specific schedule preparation is demonstrated. 24 to 35 are time charts showing the arrangement process according to the first arrangement method.

Step 1 ~ 6

For these steps, the only reason for the non-arrangement is the collision of the lot, and thus the same arrangement procedure as in the basic arrangement method described above is followed (Figs. 24 (Steps 1 to 3) and 25 (Steps 4 to 6).

Step 7-9

Comparing end time to end of block 2-C and block 2-B, the end time of end of block 2-B is fast, so block C (symbol 2-C) of lot 2 is placed (Fig. 26 (a)). , Step 7). If the waiting time (wt) generated here is within the allowable time, blocks 2-C can be arranged. However, the wait time (wt) exceeds the allowable time, and it is assumed that the arrangement condition is not satisfied. Therefore, after removing block 1-C, block 2-C is arranged after block 2-B (FIG. 26 (b), step 8). Next, the block 1-C is arranged from the scheduled end time of the block 1-B and the block 2-C (FIG. 26 (c), step 9).

Step 10-12

In step 9, it is assumed that the waiting time wt occurs in block 1-C, which exceeds the allowable time. After excluding block 2-C and block 2-B, block 1-C is arranged (FIG. 27 (a), step 10). Next, the end scheduled time of block 2-A and block 1-C is compared, and the block 2-B which is an earlier one is arrange | positioned (FIG. 27 (b), step 11). Then, the scheduled end times of blocks 2-B and 1-C are compared, and blocks 2-C are arranged after the earlier block 2-B (Fig. 27 (c) and Step 12).

Step 13-15

In Step 12, a wait time wt occurs in block 2-C, and it is assumed that this exceeds the allowable time. After excluding the block 2-C and the block 2-B, the option of placing the block 2-C after the block 2-B disappears, so that the block 1-D is placed first (Fig. 28 (a) and step 13). . The estimated end time of block 2-A and block 1-D is compared, and block 2-B which is an earlier one is arrange | positioned (FIG. 28 (b), step 14). Then, from the scheduled time of completion of blocks 2-B and 1-D, blocks 2-C are arranged after blocks 2-B (Fig. 28 (c) and step 15).

Step 16-18

In step 15, it is assumed that the waiting time wt occurs in block 2-C, which exceeds the allowable time. Since Block 2-C, Block 2-B, and Block 2-A have been excluded and the option to place Block 1-C after Block 2-A has been eliminated, place Block 1-C before Block 2-A. (FIG. 29 (a), step 16). If the end scheduled time of the block 1-C is compared with the scheduled end time of the lot 2 (starting time), the end of the lot 2 is expected to be faster (starting time). (B), step 17). Next, the end scheduled time of block 2-A and block 1-C is compared, and block 2-B is arrange | positioned after block 2-A which is an earlier one (FIG. 29 (c), step 18).

Step 19 ~ 21

The end scheduled time of block 1-C and block 2-B is compared, and block 2-C is arrange | positioned after block 2-B which is an earlier one (FIG. 30 (a), step 19). However, it is assumed here that the waiting time (wt) exceeds the allowable time. Therefore, block 2-C and block 2-B are excluded, and block 1-D is disposed instead (FIG. 30 (b), step 20). Since all blocks have been arranged for lot 1, the option is only block 2-B, so block 2-B is placed (FIG. 30 (c), step 21).

Step 22 ~ 24

Since the selection is only block 2-C following block 2-B, block 2-C is arranged (FIG. 31 (a), step 22). Here, it is assumed that the waiting time wt occurs in the block 2-C, which exceeds the allowable time. Therefore, block 2-C, block 2-B, and block 2-A are excluded (FIG. 31 (b), step 23). Since the selection is only block 2-A, block 2-A is arranged (FIG. 31 (c), step 24).

Step 25-27

Since the selection is only block 2-B following block 2-A, block 2-B is arrange | positioned (FIG. 32 (a), step 25). Since the next option is only block 2-C following block 2-B, block 2-C is arrange | positioned (FIG. 32 (b), step 26). Here, it is assumed that the waiting time wt occurs in the block 2-C, which exceeds the allowable time. In the combination of FIG. 23, since arrangement | positioning was not possible in all the path | routes, plan is made again by extending the input interval of lot 1 and lot 2. FIG. First, the block 1-A with a quick start scheduled time is arrange | positioned (FIG. 32 (c), step 27).

Step 28-30

At the scheduled end time of the block 1-A and the scheduled start time of the lot 2, the starting scheduled time of the lot 2 is faster, so that the block 2-A is arranged (Fig. 33 (a) and step 28). Since Lot 1 and Lot 2 collide with each other in the first transport mechanism CTC, the arrangement of Block 2-A is avoided and Block 1-B is disposed (Fig. 33 (b) and Step 29). The scheduled start time of lot 2 is compared with the scheduled end time of block 1-B, and the block 2-A which is the earlier one is arranged (Fig. 33 (c), step 30).

Step 31-33

Block 2-A is faster by comparing block 1-B with scheduled end times of block 2-A, so that block 2-B is arranged after block 2-A (Fig. 34 (a) and step 31). Next, the end scheduled time of Block 1-B and Block 1-C is compared, and Block 1-C is arranged after Block 1-B which is the earlier one (Fig. 34 (b) and Step 32). In Block 1-C and Block 2-B, since Block 2-B has a short estimated end time, Block 2-C is disposed following Block 2-B (Fig. 34 (c) and Step 33).

Step 34 ~ 36

However, since lot 1 is not carried out from the drying process part LPD1, the collision of the block 1-C of the lot 1 and the block 2-C of the lot 2 arises. That is, block 1-C and block 2-C cannot be arrange | positioned adjacently. Therefore, if the block 2-C is excluded, the option is only block 1-D, so that block 1-D is arranged (Fig. 35 (a), step 34). Since all blocks have been arranged for lot 1, since the option is only block 2-C, block 2-C is arranged (FIG. 35 (b), step 35). After the arrangement of the block 2-C, the options are only the block 2-D, so the block 2-D is arranged (Fig. 35 (c), step 36).

According to the first arrangement method described above, all block arrangements can be completed in step 36 which is smaller than step 44 of the basic arrangement method. This trial and error is shown by the code | symbol 1-36 enclosed with the dotted line in FIG.

As described above, according to the first arrangement method, when a block is arranged based on the basic arrangement method described above, and the waiting time generated by the block exceeds the allowable time that the processing unit can wait, the arrangement of the block is performed. In addition, the search is resumed and scheduled from the branch point one ahead of the branch point above the block based on the data (the genealogy diagram in FIG. 23) indicating the combination according to the recipe for each block of each lot. Therefore, the number of trials can be reduced because no batch is executed for the one below the genealogy diagram than the block having the reason for not being able to arrange. As a result, the schedule time can be shortened as compared with the basic arrangement method described above.

<The second batch method> (input lot order)

FIG. 36 is a flowchart showing the flow of the second batch method, and FIG. 37 is a schematic diagram (the genealogy diagram) showing a combination example of schedules in the second batch method.

In addition, about step V1, V2, V4-V7, since it is the same as that of step T1, T2, T4-T7 in the basic arrangement method mentioned above, detailed description is abbreviate | omitted. This second arrangement method corresponds to the "schedule preparation method of the substrate processing apparatus" in the present invention.

Step V3

From the acquired block, the one whose earliest starting time of the lot is early is searched.

Step V8-V11

Only steps V9 and V11 differ from steps T8 to T11 in the basic arrangement method and steps U8 to 11 in the first arrangement method. That is, step V9 stores a lot of blocks having a waiting time exceeding the allowable time so that the starting position of arrangement of the first block of the lot is withdrawn in time. Step V11 excludes the block at which the arrangement is stopped and the block whose waiting time exceeds the allowable time.

Step V12-V14

Steps U13 to U14 in the first arrangement method differ from step V13. In other words, step V13 stores that the waiting time is a block of lots whose time exceeds the allowable time.

In the above-mentioned recipe, when lot 1 is started first and a schedule is performed with respect to the second arrangement method, there are combinations of blocks as shown in FIG. In addition, in this FIG. 37, the number enclosed with the dotted line corresponds to the step number in the following description.

Here, with reference to FIGS. 38-43, specific schedule preparation is demonstrated. 38 to 43 are time charts showing the arrangement process according to the second arrangement method.

Step 1 ~ 3

First, block 1-A is arranged for lot 1 with a fast estimated end time (started time expected) (FIG. 38 (a), step 1). Next, in block 1-A and block 2-A, since the starting time of a lot is early in block 1-A, the block 1-B following block 1-A is arrange | positioned (FIG. 38 (b), Step 2). In Block 1-B and Block 2-A, since Block 1-B has an early scheduled start time, Block 1-C following Block 1-B is arranged (Fig. 38 (c) and Step 3).

Step 4 ~ 6

In Block 1-C and Block 2-A, since Block 1-C of Lot 1 has an early scheduled start time, Block 1-D following Block 1-C is arranged (Fig. 39 (a) and Step 4). . Since all blocks have been arranged for lot 1, the only option is block 2-A, so block 2-A is placed (Fig. 39 (b) and step 5). Next, block 2-B is arranged following block 2-A (FIG. 39 (c), step 6).

Step 7-9

Since the selection is only block 2-C, block 2-C is arranged (FIG. 40 (a), step 7). However, it is assumed that this waiting time wt exceeds the allowable time. Thus, while not being able to be placed on the basis that the waiting time exceeds the allowable time, the block that is not placed is excluded. Specifically, all the blocks except for the block 2 of the lot 2 and the block 1-A of the lot 1 (Fig. 40 (b) and Step 8). After that, the interval between lot 1 and lot 2 is widened to perform the schedule again. First, in lot 1 and lot 2, since the scheduled start time is lot 1, block 1-A is arranged (Fig. 40 (b) and step 8). In the block 1-B of the lot 1 and the block 2-A of the lot 2, since the scheduled start time of the lot 1 is early, the block 1-B of the lot 1 is arranged (Fig. 40 (c), step 9).

Step 10-12

In Block 1-C of Lot 1 and Block 2-A of Lot 2, since the scheduled start time of Lot 1 is early, after Block 1-C of Lot 1 is arranged (Fig. 41 (a), Step 10), In Block 1-C and Block 2-A, since the scheduled start time of the block 1-C is faster, the block 1-D is arranged (Fig. 41 (b) and Step 11). Since all blocks have been arranged for lot 1, blocks 2-A of lot 2 are arranged (Fig. 41 (c), step 12). However, the time interval between block 1-A and block 2-A is wider than the previous time interval.

Step 13-15

Since the selection is only block 2-B, block 2-B is arranged (FIG. 42 (a), step 13). Since the selection is only block 2-C, block 2-C is arranged (FIG. 42 (b), step 14). Next, since the selection is only block 2-D, block 2-D is arranged (FIG. 42 (c), step 15).

According to the second arrangement method as described above, all block arrangements can be completed in step 15 which is smaller than step 44 of the basic arrangement method. This trial and error is shown by the code | symbol 1-15 enclosed with the dotted line with respect to FIG.

As described above, according to the second arrangement method, in the processing start order of each designated lot, the first block is arranged first, so that when a block of one lot is arranged and then a block of another lot is physically arranged, It becomes impossible to arrange | position because of a restriction | limiting, and it can suppress that the fall back in arrangement | positioning of a block, such as going back to the genealogy diagram, can be suppressed. Therefore, the schedule time can be shortened.

<The third placement method> (continued block)

In the description of this third arrangement method, an example is described in which a schedule is performed for three lots while applying the one shown in FIG. 43 different from the above-described recipe so that the difference from the basic arrangement method can be easily understood. 43A is a specific example of the time chart of lot 1 in a single batch, FIG. 43B is a specific example of the time chart of lot 2 in a single batch, and FIG. Shows a concrete example of the time chart of the lot 3 in the single batch.

When the lot number is three, and the above-mentioned recipe is applied, a combination of blocks exists as shown in FIG. 44 and FIG. 44 is a schematic diagram (lineage diagram) showing a combination example of schedules in the case where three lots are processed by the basic arrangement method. In FIG. 44, the number enclosed with a dotted line corresponds to the step number in the following description.

In addition, this third arrangement method corresponds to the "schedule preparation method of the substrate processing apparatus" in the present invention.

<Basic Placement Method for Three Lots>

46 to 51, specific schedule creation will be described. 46 to 51 are time charts showing the arrangement process according to the basic arrangement method in the case of 3 lots.

Further, the scheduled start time of the lot 3 is set following the lot 1 and the lot 2, and the timing is as shown in Fig. 46 (a), for example. That is, it is assumed that the scheduled start time of lot 3 is set when lot 1 is processed in pure water cleaning processing unit ONB1 and lot 2 is processed in pure water cleaning processing unit ONB2. Therefore, first, the blocks after the block 1-B and the block 2-B being processed at this point are excluded (Fig. 46 (b)).

Step 1

At this point of time, since the scheduled start time of the block 1-B, the scheduled end time of the block 2-B, and the scheduled start time of the lot 3, the scheduled start time of the lot 3 is the fastest, the block 3-A is arranged. (Fig. 46 (c), step 1).

Step 2 ~ 4

Since Block 3-A has the earliest estimated end time among Blocks 1-B, 2-B, and 3-A, blocks 3-B are arranged (Fig. 47 (a) and Step 2). However, since the block 2-B is not carried out from the pure water cleaning processing unit ONB2, a lot collision occurs. Therefore, block 3-B cannot be arrange | positioned. Thus, the arrangement position of the block 3-A of the lot 3 is rearranged in time (Fig. 47 (b), step 3). In Block 1-B, Block 2-B, and Block 3-A, since Block 3-A is the earliest scheduled end time, Block 3-B is arranged (Fig. 47 (c), Step 4).

Step 5-7

Since Lot 2 and Lot 3 collide with each other in the pure water cleaning processing unit ONB2, blocks 3-B cannot be arranged. Therefore, the block 3-B is excluded, and the block 3-A is backed off in time again (Fig. 48 (a) and step 5). Next, blocks 2-B are arranged after blocks 2-B, blocks 2-B, and blocks 2-B having the earliest scheduled end times among blocks 3-A (Fig. 48 (b) and 6).

Next, the blocks 3-B, the blocks 2-C, and the blocks 3-A are arranged next to the block 3-A having the earliest expected end time (Fig. 48 (c), step 7). ).

Step 8-10

Block 1-B, block 2-C, and block 3-B are arranged next to block 1-B having the earliest estimated end time (Fig. 49 (a), step 8). However, since a lot collision occurs, block 1-C is excluded, and block 2-D is arranged after block 2-C, which has a shortest estimated end time, among blocks 2-C and 3-B (Fig. 49). (b), step 9).

Next, block 1-C is arranged after block 1-B, block 2-D, and block 3-B, which is the earliest scheduled end time (Fig. 49 (c), step 10). .

Step 11 ~ 13

Blocks 3-C are arranged after blocks 3-B having the earliest expected end time of blocks 3-C and blocks 3-B (Figs. 50 (a) and 11). However, since block 1-C and block 3-C collide, the arrangement of block 3-C is avoided, and block 1-D is arranged instead of block 1-C (FIG. 50 (b) and step 12). . Next, since the selection is only block 3-C, block 3-C is arranged (FIG. 50 (c), step 13).

Step 14

Since the selection is only block 3-D, block 3-D is arranged after block 3-C (FIG. 51, step 14).

As described above, according to the basic arrangement method in the case of 3 lots, all block arrangements are completed in step 14. This trial and error is shown by the reference numerals 1-14 surrounded by the dotted line in FIG.

Next, a third arrangement method will be described. 52 is a flowchart which shows the flow of a 3rd arrangement method, and FIG. 53 and FIG. 54 is a schematic diagram (the genealogy diagram) which shows the combination example of the schedule in a 3rd arrangement method.

Step W1, W2

Acquires the first block of the lot that has not yet been placed, which has not been started. Branch processing based on whether a block exists or not.

Step W3-W8

From the acquired blocks, the block with the earliest scheduled end time of the previous block is searched (step W3), and the block is placed (step W4). Then, the process branches to whether or not the arrangement condition is satisfied (step W5).

If the arrangement condition is satisfied, the block following the arranged block is acquired (step W6), and the processing branches according to whether the next block of the block exists in the same lot (step W7). If there is no next block, the process branches according to whether or not all blocks have been placed, and is repeatedly executed from step W3 until all blocks are completed (step W8).

Step W9

If no block exists in step W2, the unpositionable state is reset, and the arrangement start position of the first block of the lot is backed off in time and stored.

Step W10

In step W5, when the arrangement condition is not satisfied, the block of the lot that cannot be arranged is excluded, and the arrangement is not possible.

Step W11

In step W7, when there is a thing of the same lot, the process branches according to whether or not the arrangement can be made by satisfying the arrangement condition. If the arrangement condition is satisfied and the arrangement is possible, branching is made at step W6, and if it is not possible, the branching is made at step W10.

55 to 59, specific schedule creation will be described. 55 to 59 are time charts showing the arrangement process according to the third arrangement method.

Similarly to the basic arrangement method described above, the scheduled start time of the lot 3 is set following the lot 1 and the lot 2, and the timing is as shown in Fig. 55 (a), for example. Therefore, first, blocks later than the block 1-B and the block 2-B being processed at this point are excluded (Fig. 55 (b)).

Step 1

At this point of time, since the scheduled start time of the block 1-B, the scheduled end time of the block 2-B, and the scheduled start time of the lot 3, the scheduled start time of the lot 3 is the fastest, the block 3-A is arranged. (FIG. 55 (c), step 1).

Step 2 ~ 4

Since block 3-A was arrange | positioned, block 3-B is continued (FIG. 56 (a), step 2). However, since the block 2-B and the block 3-B collide with each other, the arrangement of the block 3-B is avoided and stored therein. Since block 3-B of lot 3 could not be arrange | positioned, block 3-A and 3-B are deleted, and block 2-C with an earliest estimated end time is next placed (FIG. 56 (b), step 3). . And since block 2-D of the same lot 3 exists, block 2-D is arrange | positioned after block 2-C (FIG. 56 (c), step 4).

Step 5-7

Since all the blocks have been arranged for lot 2, blocks 3-A of lot 3 with the earliest scheduled start time are arranged next (Fig. 57 (a) and step 5). However, since the arrangement was impossible last time, the arrangement start position is stored so as to back off in time. Therefore, compared with step 2 (FIG. 56 (a)), the arrangement | positioning position is withdrawn from time. Since block 3-A was arrange | positioned, block 3-B is continued (FIG. 57 (b), step 6). However, since the arrangement conditions cannot be satisfied, the block 3-B is excluded, the block 3-A is removed, and the block 1-C of the lot 1 is disposed (Fig. 57 (c), step 7). ).

Step 8-10

Since Step 1-C has been arranged, Block 1-D is then placed (Fig. 58 (a) and Step 8). Since the arrangement of all the blocks of lot 1 is completed, it arranges with respect to lot 3. In that case, since the arrangement | positioning position was backed off in the previous step 5 (FIG. 57 (a)), block 3-A is arrange | positioned in the position which backed away in time (FIG. 58 (b), step 9). Since block 3-A was arrange | positioned, block 3-B is then arrange | positioned (FIG. 58 (c), step 10).

Steps 11, 12

Since block 3-B was arrange | positioned, block 3-C is then arrange | positioned (FIG. 59 (a), step 11). Since block 3-C is arrange | positioned, block 3-D is arrange | positioned (FIG. 59 (b), step 12).

According to the third arrangement method as described above, all block arrangements can be completed in step 12 which is smaller than step 14 of the basic arrangement method. This trial and error is shown by reference numerals 1-14 surrounded by a dotted line with respect to FIGS. 53 and 54.

As described above, in the third arrangement method, by preferentially placing blocks of the same lot as the lot arranged earlier, the schedule time can be shortened with respect to the schedule of resuming processing from the state where the apparatus is stopped.

<4th batch method>

Fig. 60 is a flowchart showing the flow of the fourth batch method, and Fig. 61 is a schematic diagram (the genealogy diagram) showing a combination example of schedules in the fourth batch method.

In addition, about step X1, X2, X4-X7, it is the same as that of step T1, T2, T4-T7 in the basic arrangement method mentioned above, and abbreviate | omits description.

This fourth arrangement method corresponds to the "schedule production method of the substrate processing apparatus" in the present invention.

Step X3

From the acquired blocks, the ones with the shortest allowable time among the preceding blocks are searched. In the comparison of the first blocks, however, each scheduled start time is compared to select the earlier one.

Step X8 ~ X11

Step X9 and step X11 are different from the basic arrangement method. That is, in step X9, if the waiting time is a block of lots which has exceeded the allowable time, the arrangement start position is stored back. In step X11, the block acquired at the same time as the block which stopped arrangement | positioning is acquired again, and the block which stopped arrangement | positioning and the block of the lot whose waiting time exceeded the allowable time are excluded.

Step X12-X14

These steps are the same as the second arrangement method described above.

In the above-described recipes of the basic batch method, the first batch method and the second batch method, the lot 1 is started first, and when the schedule is performed in the fourth batch method, as shown in FIG. There is a combination of. In addition, in this FIG. 61, the number enclosed with the dotted line corresponds to the step number in the following description.

Here, with reference to FIGS. 62-66, specific schedule preparation is demonstrated. 62 to 66 are time charts showing the arrangement process according to the fourth arrangement method. In this example, however, the allowable time in the first transport mechanism CTC is 0, the allowable time in the drying processing unit LPD1 is ∞, and the pure water cleaning processing unit ONB1 and the second processing unit in the first processing unit. It is assumed that the allowable time in the pure water cleaning processing unit ONB2 of the processing unit is ∞.

Step 1 ~ 3

First, block 1-A is arranged for lot 1 with a short estimated end time (started time expected) (Fig. 62 (a) and step 1). Next, the block 1-B and the block 2-A can be arranged, and the allowable time is the shorter block 1-A in each of the previous scheduled start times of the blocks 1-A and lot 2. -B side is arranged (FIG. 62 (b), step 2). Next, the block 1-C and the block 2-A can be arranged, and the allowable time is the allowable time of the block 1-B in the start time of each of the preceding blocks 1-B and lot 2. Block 1-C following block 1-B is arranged (Fig. 62 (c), step 2).

Step 4 ~ 5

The next possible arrangements are blocks 2-A of blocks 1-D and lot 2, and the start time of each of the preceding blocks 1-C and lot 2 has the same allowable time, so that blocks 1-C and block 2 are the same. The scheduled start time of -A is compared, and the block 2-A which is an earlier one is arrange | positioned (FIG. 63 (a), step 4). Then, the allowable time of the block 1-D (the allowable time = ∞) and the block 2-A (the allowable time = 0), which is the block preceding the block 1-D and the block 2-B, can be compared. Block 2-B following block 2-A is arrange | positioned (FIG. 63 (b), step 5). Next, the allowable time is compared with the allowable time of the block 1-C (permissible time = ∞) and the block 2-B (permissible time = 180 seconds), which are the blocks before the block 1-D and the block 2-C that can be arranged. Block 2-C is arranged after short block 2-B (FIG. 63 (c), step 6).

Step 7-9

However, it is assumed here that the waiting time (wt) of the block 2-C exceeds the allowable time. Thus, the interval between the input of the lot 1 and the lot 2 is widened to perform the schedule again. First, the block 1-A of the lot 1 with an early start time is arrange | positioned (FIG. 64 (a), step 7). At the scheduled start time of the block 1-A corresponding to the block 1-B that can be arranged and the lot 2 corresponding to the block 2-A that can be arranged, the block 1-A is shorter, so the block 1-A is shorter. Subsequently, blocks 1-B are arranged (Fig. 64 (b), step 8). Subsequently, blocks 1-C having a short allowable time are arranged (Fig. 64 (c), step 9).

Step 10-12

At block 1-C and the scheduled start time corresponding to each of the blocks preceding the block 1-D and the block 2-A that can be arranged, block 2-A is fast, so block 2 -A is arranged (Fig. 65 (a), step 10). Next, in Block 1-C (allowable time = ∞) and Block 2-A (allowed time = Osec) corresponding to the preceding block, since Block 2-A has a shorter allowable time, the block 2-A is followed by Block 2-A. Block 2-B is arranged (Fig. 65 (b), step 11). In Block 1-C (permissible time = ∞) and Block 2-B (permissible time = 180 sec) corresponding to the preceding block, since Block 2-B has a shorter permissible time, following Block 2-B 2-C is disposed (Fig. 65 (c), step 12).

Step 13-15

However, when the block 2-C is arranged, the lot 1 and the lot 2 collide in the drying processing unit LPD1, so that the block 1-D is disposed without the block 2-C (Fig. 66 (a) and step 13). Since all blocks have been arranged for lot 1, since the option is only block 2-C, block 2-C is arranged (Fig. 66 (b) and Step 14). Since the selection is only block 2-D, block 2-D is arranged (Fig. 66 (c), step 15).

According to the fourth arrangement method as described above, all block arrangements can be completed in step 15, which is less than step 44 of the basic arrangement method. This trial and error is shown by the reference numerals 1-15 enclosed by the dotted line in FIG.

According to the fourth arrangement method described above, even if the block having a shorter allowable time can be physically arranged, it becomes impossible to arrange the block without keeping the allowable time, so that the occurrence of reversion in the combination (the genealogy diagram) increases. Thus, by arranging blocks with a shorter allowable time first, it is possible to easily avoid disposition due to the allowable time, so that the schedule time can be shortened.

The schedule is created using the above basic arrangement method, the first placement method, the second placement method, the third placement method, and the fourth placement method, and is finished. By executing a schedule with a predetermined scheduled time, the operation rate of the substrate processing apparatus can be improved. In addition, by having a plurality of types of arrangement methods, it is possible to prevent the length of the schedule preparation time from being longer.

The present invention is not limited to the above embodiment and can be modified as follows.

(1) In the above-described embodiment, as a basic arrangement method, the first batch method, the second batch method, the third batch method, and the fourth batch method are described as an example of the schedule method. It is sufficient to combine at least one arrangement method as a method.

(2) In the above-described embodiment, the schedule in the case of processing two lots or three lots at the same time has been taken as an example, but the present invention can be applied even when the schedule is performed for four or more lots.

(3) In the above-described embodiment, a recipe for washing with water and drying for a lot has been described as an example, but the present invention is not limited to this recipe, but various recipes can be applied. .

The present invention can be carried out in other specific forms without departing from the spirit or the essence thereof, and therefore, by showing the scope of the invention, reference should be made to the appended claims rather than the foregoing description.

Although some forms are now shown to be suitable for illustrating the invention, it should be understood that the invention is not limited to the illustrated configuration and measures.

1 is a plan view showing a schematic configuration of a substrate processing apparatus according to an embodiment.

2 is a block diagram showing a schematic configuration of a substrate processing apparatus according to an embodiment.

3 is a flowchart showing a main program of a schedule;

4 is a flowchart showing the flow of the basic arrangement method.

Fig. 5A is a specific example of the time chart of lot 1 in the single batch.

Fig. 5B is a specific example of the time chart of lot 2 in the single batch.

6 is a schematic diagram showing a combination example of schedules in a basic arrangement method.

Fig. 7A is a time chart of step 1 showing an arrangement process according to the basic arrangement method.

Fig. 7B is a time chart of step 2 showing an arrangement process according to the basic arrangement method.

Fig. 7 (c) is a time chart of step 3 showing an arrangement process according to the basic arrangement method.

Fig. 8A is a time chart of step 4 showing an arrangement process according to the basic arrangement method.

8 (b) is a time chart of step 5 showing an arrangement process according to the basic arrangement method.

8C is a time chart of step 6 showing an arrangement process according to the basic arrangement method.

Fig. 9A is a time chart of step 7 showing an arrangement process according to the basic arrangement method.

Fig. 9B is a time chart of step 8 showing an arrangement process according to the basic arrangement method.

Fig. 9C is a time chart of step 9 showing the arrangement process according to the basic arrangement method.

Fig. 10A is a time chart of step 10 showing the arrangement process according to the basic arrangement method.

10 (b) is a time chart of step 11 showing an arrangement process according to the basic arrangement method.

10 (c) is a time chart of step 12 showing an arrangement process according to the basic arrangement method.

Fig. 11A is a time chart of step 13 showing an arrangement process according to the basic arrangement method.

Fig. 11B is a time chart of step 14 showing an arrangement process according to the basic arrangement method.

Fig. 11C is a time chart of step 15 showing an arrangement process according to the basic arrangement method.

Fig. 12A is a time chart of step 16 showing an arrangement process according to the basic arrangement method.

12 (b) is a time chart of step 17 showing an arrangement process according to the basic arrangement method.

Fig. 12 (c) is a time chart of step 18 showing an arrangement process according to the basic arrangement method.

Fig. 13A is a time chart of step 19 showing an arrangement process according to the basic arrangement method.

Fig. 13B is a time chart of step 20 showing an arrangement process according to the basic arrangement method.

13 (c) is a time chart of step 21 showing an arrangement process according to the basic arrangement method;

Fig. 14A is a time chart of step 22 showing an arrangement process according to the basic arrangement method.

Fig. 14B is a time chart of step 23 showing an arrangement process according to the basic arrangement method.

Fig. 14C is a time chart of step 24 showing an arrangement process according to the basic arrangement method.

Fig. 15A is a time chart of step 25 showing an arrangement process according to the basic arrangement method.

Fig. 15B is a time chart of step 26 showing an arrangement process according to the basic arrangement method.

15 (c) is a time chart of step 27 showing an arrangement process according to the basic arrangement method.

Fig. 16A is a time chart of step 28 showing an arrangement process according to the basic arrangement method.

Fig. 16B is a time chart of step 29 showing the arrangement process according to the basic arrangement method.

Fig. 16C is a time chart of step 30 showing an arrangement process according to the basic arrangement method.

Fig. 17A is a time chart of step 31 showing an arrangement process according to the basic arrangement method.

Fig. 17B is a time chart of step 32 showing an arrangement process according to the basic arrangement method.

Fig. 17C is a time chart of step 33 showing the arrangement process according to the basic arrangement method.

Fig. 18A is a time chart of step 34 showing the arrangement process according to the basic arrangement method.

18 (b) is a time chart of step 35 showing an arrangement process according to the basic arrangement method.

18 (c) is a time chart of step 36 showing an arrangement process according to the basic arrangement method.

19 (a) is a time chart of step 37 showing an arrangement process according to the basic arrangement method.

19 (b) is a time chart of step 38 showing an arrangement process according to the basic arrangement method.

19 (c) is a time chart of step 39 showing an arrangement process according to the basic arrangement method.

20 (a) is a time chart of step 40 showing an arrangement process according to the basic arrangement method.

20 (b) is a time chart of step 41 showing an arrangement process according to the basic arrangement method.

20 (c) is a time chart of step 42 showing an arrangement process according to the basic arrangement method.

21 (a) is a time chart of step 43 showing an arrangement process according to the basic arrangement method.

21 (b) is a time chart of step 44 showing an arrangement process according to the basic arrangement method.

Fig. 22 is a flowchart showing the flow of the first batch method.

23 is a schematic diagram showing a combination example of schedules in a first batch method;

Fig. 24A is a time chart of step 1 showing an arrangement process according to the first arrangement method.

Fig. 24B is a time chart of step 2 showing an arrangement process according to the first arrangement method.

Fig. 24C is a time chart of step 3 showing an arrangement process according to the first arrangement method.

Fig. 25A is a time chart of step 4 showing an arrangement process according to the first arrangement method.

Fig. 25B is a time chart of step 5 showing an arrangement process according to the first arrangement method.

25 (c) is a time chart of step 6 showing an arrangement process according to the first arrangement method.

Fig. 26A is a time chart of step 7 showing an arrangement process according to the first arrangement method.

Fig. 26 (b) is a time chart of step 8 showing an arrangement process according to the first arrangement method.

Fig. 26 (c) is a time chart of step 9 showing an arrangement process according to the first arrangement method.

Fig. 27A is a time chart of step 10 showing an arrangement process according to the first arrangement method.

27 (b) is a time chart of step 11 showing an arrangement process according to the first arrangement method.

Fig. 27C is a time chart of step 12 showing an arrangement process according to the first arrangement method.

Fig. 28 (a) is a time chart of step 13 showing an arrangement process according to the first arrangement method.

Fig. 28 (b) is a time chart of step 14 showing an arrangement process according to the first arrangement method.

Fig. 28 (c) is a time chart of step 15 showing an arrangement process according to the first arrangement method.

Fig. 29A is a time chart of step 16 showing an arrangement process according to the oil removal arrangement method.

29 (b) is a time chart of step 17 showing an arrangement process according to the first arrangement method.

Fig. 29C is a time chart of step 18 showing an arrangement process according to the first arrangement method.

30 (a) is a time chart of step 19 showing an arrangement process according to the first arrangement method.

30 (b) is a time chart of step 20 showing an arrangement process according to the first arrangement method.

30 (c) is a time chart of step 21 showing an arrangement process according to the first arrangement method.

31 (a) is a time chart of step 22 showing an arrangement process according to the first arrangement method.

31 (b) is a time chart of step 23 showing an arrangement process according to the first arrangement method.

31 (c) is a time chart of step 24 showing an arrangement process according to the first arrangement method.

32 (a) is a time chart of step 25 showing an arrangement process according to the first arrangement method.

32 (b) is a time chart of step 26 showing an arrangement process according to the first arrangement method.

Fig. 32 (c) is a time chart of step 27 showing an arrangement process according to the first arrangement method.

33 (a) is a time chart of step 28 showing an arrangement process according to the first arrangement method.

33 (b) is a time chart of step 29 showing an arrangement process according to the first arrangement method.

33 (c) is a time chart of step 30 showing an arrangement process according to the first arrangement method.

34 (a) is a time chart of step 31 showing an arrangement process according to the first arrangement method.

34 (b) is a time chart of step 32 showing an arrangement process according to the first arrangement method.

Fig. 34 (c) is a time chart of step 33 showing an arrangement process according to the first arrangement method.

35 (a) is a time chart of step 34 showing an arrangement process according to the first arrangement method.

35 (b) is a time chart of step 35 showing an arrangement process according to the first arrangement method.

35 (c) is a time chart of step 36 showing an arrangement process according to the first arrangement method.

36 is a flowchart showing the flow of the second batch method.

Fig. 37 is a schematic diagram showing a combination example of schedules in a second batch method.

38 (a) is a time chart of step 1 showing an arrangement process according to the second arrangement method.

38 (b) is a time chart of step 2 showing an arrangement process according to the second arrangement method.

38 (c) is a time chart of step 3 showing an arrangement process according to the second arrangement method.

Fig. 39 (a) is a time chart of step 4 showing an arrangement process according to the second arrangement method.

39 (b) is a time chart of step 5 showing an arrangement process according to the second arrangement method.

39 (c) is a time chart of step 6 showing an arrangement process according to the second arrangement method.

40 (a) is a time chart of step 7 showing an arrangement process according to the second arrangement method.

40 (b) is a time chart of step 8 showing an arrangement process according to the second arrangement method.

40 (c) is a time chart of step 9 showing an arrangement process according to the second arrangement method.

41 (a) is a time chart of step 10 showing an arrangement process according to the second arrangement method.

Fig. 41 (b) is a time chart of step 11 showing an arrangement process according to the second arrangement method.

41 (c) is a time chart of step 12 showing an arrangement process according to the second arrangement method.

Fig. 42 (a) is a time chart of step 13 showing an arrangement process according to the second arrangement method.

Fig. 42 (b) is a time chart of step 14 showing an arrangement process according to the second arrangement method.

Fig. 42 (c) is a time chart of step 15 showing an arrangement process according to the second arrangement method.

Fig. 43A is a specific example of the time chart of lot 1 in the single batch.

Fig. 43B is a specific example of the time chart of lot 2 in the single batch.

Fig. 43C is a specific example of the time chart of lot 3 in the single batch.

Fig. 44 is a schematic diagram showing a combination example of schedules in the case where three lots are processed by the basic arrangement method;

Fig. 45 is a schematic diagram showing a combination example of schedules in the basic arrangement method in the case of 3 lots.

46 (a) and 46 (b) show an arrangement process according to the basic arrangement method in the case of 3 lots, and show a time chart before the start.

Fig. 46 (c) is a time chart of step 1 showing the arrangement process according to the basic arrangement method for the three lots.

Fig. 47A is a time chart of step 2 showing an arrangement process according to the basic arrangement method for the three lots.

Fig. 47 (b) is a time chart of step 3 showing an arrangement process according to the basic arrangement method for the three lots.

Fig. 47 (c) is a time chart of step 4 showing an arrangement process according to the basic arrangement method for the three lots.

48 (a) is a time chart of step 5 showing an arrangement process according to the basic arrangement method in the case of 3 lots.

48 (b) is a time chart of step 6 showing an arrangement process according to the basic arrangement method in the case of 3 lots.

48 (c) is a time chart of step 7 showing an arrangement process according to the basic arrangement method for the three lots.

Fig. 49 (a) is a time chart of step 8 showing an arrangement process according to the basic arrangement method for the three lots.

Fig. 49 (b) is a time chart of step 9 showing the arrangement process according to the basic arrangement method for the three lots.

Fig. 49 (c) is a time chart of step 10 showing the arrangement process according to the basic arrangement method for the three lots.

50 (a) is a time chart of step 11 showing an arrangement process according to the basic arrangement method for the three lots.

50 (b) is a time chart of step 12 showing an arrangement process according to the basic arrangement method in the case of 3 lots.

50 (c) is a time chart of step 13 showing an arrangement process according to the basic arrangement method for the three lots.

Fig. 51 is a time chart showing step 14 in the arrangement process according to the basic arrangement method for the three lots.

52 is a flowchart showing the flow of the third batch method.

Fig. 53 is a schematic diagram showing a combination example of schedules in a third batch method.

Fig. 54 is a schematic diagram showing a combination example of schedules in a third batch method.

55 (a) and 55 (b) are time charts showing the pre-start state of the batch process according to the third batch method.

Fig. 55 (c) is a time chart of step 1 showing an arrangement process according to the third arrangement method.

Fig. 56 (a) is a time chart of step 2 showing an arrangement process according to the third arrangement method.

Fig. 56 (b) is a time chart of step 3 showing an arrangement process according to the third arrangement method.

Fig. 56 (c) is a time chart of step 4 showing an arrangement process according to the third arrangement method.

Fig. 57 (a) is a time chart of step 5 showing an arrangement process according to the third arrangement method.

Fig. 57 (b) is a time chart of step 6 showing an arrangement process according to the third arrangement method.

57 (c) is a time chart of step 7 showing an arrangement process according to the third arrangement method.

Fig. 58 (a) is a time chart of step 8 showing an arrangement process according to the third arrangement method.

Fig. 58 (b) is a time chart of step 9 showing an arrangement process according to the third arrangement method.

Fig. 58 (c) is a time chart of step 10 showing an arrangement process according to the third arrangement method.

Fig. 59 (a) is a time chart of step 11 showing an arrangement process according to the third arrangement method.

Fig. 59 (b) is a time chart of step 12 showing an arrangement process according to the third arrangement method.

Fig. 60 is a flowchart showing the flow of the fourth batch method.

Fig. 61 is a schematic diagram showing a combination example of schedules in a fourth batch method.

Fig. 62A is a time chart of step 1 showing an arrangement process according to the fourth arrangement method.

Fig. 62 (b) is a time chart of step 2 showing an arrangement process according to the fourth arrangement method.

Fig. 62 (c) is a time chart of step 3 showing an arrangement process according to the fourth arrangement method.

Fig. 63 (a) is a time chart of step 4 showing an arrangement process according to the fourth arrangement method.

Fig. 63 (b) is a time chart of step 5 showing an arrangement process according to the fourth arrangement method.

Fig. 63 (c) is a time chart of step 6 showing an arrangement process according to the fourth arrangement method.

Fig. 64 (a) is a time chart of step 7 showing an arrangement process according to the fourth arrangement method.

Fig. 64 (b) is a time chart of step 8 showing an arrangement process according to the fourth arrangement method.

Fig. 64 (c) is a time chart of step 9 showing an arrangement process according to the fourth arrangement method.

Fig. 65 (a) is a time chart of step 10 showing an arrangement process according to the fourth arrangement method.

Fig. 65 (b) is a time chart of step 11 showing an arrangement process according to the fourth arrangement method.

Fig. 65 (c) is a time chart of step 12 showing an arrangement process according to the fourth arrangement method.

Fig.66 (a) is a time chart of step 13 showing an arrangement process according to the fourth arrangement method.

Fig. 66 (b) is a time chart of step 14 showing an arrangement process according to the fourth arrangement method.

Fig. 66 (c) is a time chart of step 15 showing an arrangement process according to the fourth arrangement method.

Claims (40)

When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. A basic batch method of searching and arranging the processing step for the lot with the earliest scheduled end time in each previous processing step as the next processing step; If the processing step is arranged based on the basic arrangement method, and the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the processing step is avoided, and A first batch method of resuming the search from a branch point one ahead of the branch point above the processing step, Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule creation method for a substrate processing apparatus that executes. The method of claim 1, In the step of creating the plurality of schedules, in addition to each arrangement method, When arranging the processing steps based on the basic arrangement method, after the first processing steps have been arranged for each lot according to the processing start order of each firstly designated lot, the processing start order is one of the following processing steps for each lot. A method for creating a schedule of a substrate processing apparatus, comprising a second batch method of preferentially arranging the preceding lot processing steps. The method of claim 1, In the step of creating the plurality of schedules, in addition to each arrangement method, And a third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when arranging the processing step based on the basic arrangement method. Schedule preparation method of the substrate processing apparatus being performed. The method of claim 2, In the step of creating the plurality of schedules, in addition to each arrangement method, And a third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when arranging the processing step based on the basic arrangement method. How to schedule a substrate processing device. The method according to any one of claims 1 to 4, In the step of creating the plurality of schedules, in addition to each arrangement method, The schedule of the substrate processing apparatus provided with the 4th batch method which arrange | positions the process process of the lot which has a process process with short allowable time which can be waited by a process part at the time of arrange | positioning a process process based on the said basic arrangement method. How to write. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. A basic batch method of searching and arranging the processing step for the lot with the earliest scheduled end time in each previous processing step as the next processing step; When arranging the processing steps based on the basic arrangement method, after the first processing steps have been arranged for each lot according to the processing start order of each firstly designated lot, the processing start order of the next processing step of each lot. Batch method for preferentially arranging the processing steps of the lot preceded by Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule creation method for a substrate processing apparatus that executes. The method of claim 6, In the step of creating the plurality of schedules, in addition to each arrangement method, And a third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when arranging the processing step based on the basic arrangement method. A method of creating a schedule of a substrate processing apparatus. The method according to claim 6 or 7, In the step of creating the plurality of schedules, in addition to each arrangement method, The schedule of the substrate processing apparatus provided with the 4th batch method which arrange | positions the process process of the lot which has a process process with a short allowable time which can be waited by a process part at the time of arrange | positioning a process process based on the said basic arrangement method. How to write. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. A basic batch method of searching and arranging the processing step for the lot with the earliest scheduled end time in each previous processing step as the next processing step; A third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when the processing step is arranged based on the basic batch method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A method of creating a schedule of a substrate processing apparatus that executes. The method of claim 9, In the step of creating the plurality of schedules, in addition to each arrangement method, The schedule of the substrate processing apparatus provided with the 4th batch method which arrange | positions the process process of the lot which has a process process with a short allowable time which can be waited by a process part at the time of arrange | positioning a process process based on the said basic arrangement method. How to write. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. A basic batch method of searching and arranging the processing step for the lot with the earliest scheduled end time in each previous processing step as the next processing step; A fourth batch method of preferentially arranging the processing steps of a lot having a processing step with a shorter allowable time for waiting in the processing section when arranging the processing steps based on the basic arrangement method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A method of creating a schedule of a substrate processing apparatus that executes. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the lot with the earliest estimated end time in each previous processing step as the next processing step. If the waiting time generated in the process exceeds the allowable time for waiting in the processing unit, the arrangement of the processing step is avoided and the search is resumed from the branch point one ahead of the branch point higher than the processing step. The first batch method, When arranging the processing steps based on the basic arrangement method, after the first processing steps have been arranged for each lot according to the processing start order of each firstly designated lot, the processing start order is one of the following processing steps for each lot. A second batch method of preferentially arranging the processing steps of the preceding lot, Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A method of creating a schedule of a substrate processing apparatus that executes. The method of claim 12, In the step of creating the plurality of schedules, in addition to each arrangement method, And a third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when arranging the processing step based on the basic arrangement method. A method of creating a schedule of a substrate processing apparatus. The method according to claim 12 or 13, In the step of creating the plurality of schedules, in addition to the arrangement methods described above, The schedule of the substrate processing apparatus provided with the 4th batch method which arrange | positions the process process of the lot which has a process process with a short allowable time which can be waited by a process part at the time of arrange | positioning a process process based on the said basic arrangement method. How to write. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the lot with the earliest estimated end time in each previous processing step as the next processing step. If the waiting time generated in the process exceeds the allowable time for waiting in the processing unit, the arrangement of the processing step is avoided and the search is resumed from the branch point one ahead of the branch point higher than the processing step. The first batch method, A third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when the processing step is arranged based on the basic batch method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A method of creating a schedule of a substrate processing apparatus that executes. The method of claim 15, In the step of creating the plurality of schedules, in addition to each arrangement method, The schedule of the substrate processing apparatus provided with the 4th batch method which arrange | positions the process process of the lot which has a process process with a short allowable time which can be waited by a process part at the time of arrange | positioning a process process based on the said basic arrangement method. How to write. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the lot with the earliest estimated end time in each previous processing step as the next processing step. If the waiting time generated in the process exceeds the allowable time for waiting in the processing unit, the arrangement of the processing step is avoided and the search is resumed from the branch point one ahead of the branch point higher than the processing step. The first batch method, A fourth batch method of preferentially arranging the processing steps of a lot having a processing step with a shorter allowable time for waiting in the processing section when arranging the processing steps based on the basic arrangement method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A method of creating a schedule of a substrate processing apparatus that executes. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a certain lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step for the lot with the earliest scheduled end time in each previous processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the next processing step. A second batch method in which the first processing step is arranged for each lot according to the processing start order of each lot, and then, among the next processing steps of each lot, the processing step of the lot preceding the processing start order is preferentially arranged; , A third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when the processing step is arranged based on the basic batch method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A method of creating a schedule of a substrate processing apparatus that executes. The method of claim 18, In the step of creating the plurality of schedules, in addition to each arrangement method, The schedule of the substrate processing apparatus provided with the 4th batch method which arrange | positions the process process of the lot which has a process process with a short allowable time which can be waited by a process part at the time of arrange | positioning a process process based on the said basic arrangement method. How to write. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step for the lot with the earliest scheduled end time in each previous processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the next processing step. A second batch method in which the first processing step is arranged for each lot according to the processing start order of each lot, and then, among the next processing steps of each lot, the processing step of the lot having the processing start order first is preferentially arranged; and, A fourth batch method of preferentially arranging the processing steps of a lot having a processing step with a shorter allowable time for waiting in the processing section when arranging the processing steps based on the basic arrangement method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A method of creating a schedule of a substrate processing apparatus that executes. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step is arranged first based on the basic arrangement method of searching and arranging the processing step for the lot with the earliest estimated end time in each previous processing step as the next processing step. A third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of one lot; A fourth batch method of preferentially arranging the processing steps of a lot having a processing step with a shorter allowable time for waiting in the processing section when arranging the processing steps based on the basic arrangement method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A method of creating a schedule of a substrate processing apparatus that executes. The method according to any one of claims 1, 6, 9, 11, 12, 15, 17, 18, 20, and 21, And in the step of selecting the schedule, the control section selects the only schedule that the processing finishes earlier among the schedules completed within the prescribed time. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. A basic batch method of searching and arranging the processing step for the lot with the earliest scheduled end time in each previous processing step as the next processing step; If the processing step is arranged based on the basic arrangement method, and the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the processing step is avoided, and A first batch method of resuming the search from a branch point one ahead of the branch point above the processing step, Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a certain lot, the next step of each lot is followed, starting from the process step. A basic batch method of searching and arranging the processing step for the lot with the earliest scheduled end time in each previous processing step as the next processing step; When arranging the processing steps based on the basic arrangement method, after the first processing steps have been arranged for each lot according to the processing start order of each firstly designated lot, the processing start order is one of the following processing steps for each lot. A second batch method of preferentially arranging the processing steps of the preceding lot, Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing a substrate, the control unit sequentially processes each lot in each processing unit based on a processing sequence including a plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. A basic batch method of searching and arranging the processing step for the lot with the earliest scheduled end time in each previous processing step as the next processing step; A third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when the processing step is arranged based on the basic batch method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a certain lot, the next step of each lot is followed, starting from the process step. A basic batch method of searching and arranging the processing step for the lot with the earliest scheduled end time in each previous processing step as the next processing step; A fourth batch method of preferentially arranging the processing steps of a lot having a processing step with a shorter allowable time for waiting in the processing section when arranging the processing steps based on the basic arrangement method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the lot with the earliest scheduled end time in each previous processing step as the following processing step. If the waiting time generated in the processing step exceeds the allowable time for waiting in the processing unit, the arrangement of the processing step is avoided and the search is resumed from the branch point one ahead of the branch point above the processing step. The first batch method, When arranging the processing steps based on the basic arrangement method, after the first processing steps have been arranged for each lot according to the processing start order of each firstly designated lot, the processing start order is one of the following processing steps for each lot. The second batch method of preferentially arranging the processing steps of the first lot; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first process step for a lot, the next step of each lot is followed by the process step starting from the process step. In the processing step, the processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the lot with the earliest estimated end time in each previous processing step as the next processing step. If the waiting time generated in the step exceeds the allowable time for waiting in the processing section, the arrangement of the processing step is avoided and the search is resumed from the branch point one ahead of the branch point above the processing step. The first batch method, A third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when the processing step is arranged based on the basic batch method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the lot with the earliest estimated end time in each previous processing step as the next processing step. If the waiting time generated in the process exceeds the allowable time for waiting in the processing unit, the arrangement of the processing step is avoided and the search is resumed from the branch point one ahead of the branch point higher than the processing step. The first batch method, A fourth batch method of preferentially arranging the processing steps of a lot having a processing step with a shorter allowable time for waiting in the processing section when arranging the processing steps based on the basic arrangement method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step for the lot with the earliest scheduled end time in each previous processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the next processing step. A second batch method in which the first processing step is arranged for each lot according to the processing start order of each lot, and then, among the next processing steps of each lot, the processing step of the lot having the processing start order first is preferentially arranged; and, A third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of the previously placed lot when the processing step is arranged based on the basic batch method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step for the lot with the earliest scheduled end time in each previous processing step is arranged based on the basic arrangement method of searching and arranging the processing step for the next processing step. A second batch method in which the first processing step is arranged for each lot according to the processing start order of each lot, and then, among the next processing steps of each lot, the processing step of the lot having the processing start order first is preferentially arranged; and, A fourth batch method of preferentially arranging the processing steps of a lot having a processing step with a shorter allowable time for waiting in the processing section when arranging the processing steps based on the basic arrangement method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. In the processing step, the processing step is arranged first based on the basic arrangement method of searching and arranging the processing step for the lot with the earliest estimated end time in each previous processing step as the next processing step. A third batch method of preferentially arranging the processing steps of the lot when there is a processing step of the lot that can be arranged following the processing step of one lot; A fourth batch method of preferentially arranging the processing steps of a lot having a processing step with a shorter allowable time for waiting in the processing section when arranging the processing steps based on the basic arrangement method; Executing a step to create a plurality of schedules; Creating a plurality of schedules and selecting one schedule from among the schedules within a prescribed time; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. Arranging the processing steps based on the basic arrangement method of searching for and placing the processing steps for the lot with the earliest scheduled end time in each preceding processing step as the next processing step; When arranging the treatment step based on the basic arrangement method, if the waiting time generated in the treatment step exceeds the allowable time for waiting in the treatment unit, the treatment step is avoided and the treatment is performed. A step of creating a schedule using a special arrangement method of resuming the search from a branch point one step ahead of the branch point above the process; A method of creating a schedule of a substrate processing apparatus that executes. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. Arranging the processing steps based on the basic arrangement method of searching for and placing the processing steps for the lot with the earliest scheduled end time in each preceding processing step as the next processing step; When arranging the treatment step based on the basic arrangement method, if the waiting time generated in the treatment step exceeds the allowable time for waiting in the treatment unit, the treatment step is avoided and the treatment is performed. A step of creating a schedule using a special arrangement method for resuming the search from a branch point one step ahead of the branch point above the process; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. Searching and arranging the treatment step; When searching for and arranging the next processing step, the first processing step is arranged for each lot according to the processing start order of each first designated lot, and then the processing of the lot preceding the processing start order among the next processing steps of each lot. A step of arranging the process first and creating a schedule; A method of creating a schedule of a substrate processing apparatus that executes. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. Searching and arranging the treatment step; When searching for and arranging the next processing step, the first processing step is arranged for each lot according to the processing start order of each first designated lot, and then, among the next processing steps of each lot, A step of arranging a process step first and creating a schedule; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. Searching and arranging the treatment step; When searching for and arranging the next processing step, if there is a processing step of the lot that can be arranged following the processing step of the previously placed lot, the step of preferentially arranging the processing step of the lot and creating a schedule; A method of creating a schedule of a substrate processing apparatus that executes. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. Searching and arranging the treatment process; When searching for and arranging the next processing step, if there is a processing step of the lot that can be arranged following the processing step of the previously placed lot, the step of preferentially arranging the processing step of the lot and creating a schedule; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation method of the substrate processing apparatus for determining the processing order of each lot, The control unit, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. Searching and arranging the treatment step; When searching for and arranging the next processing step, a step of preferentially arranging a processing step of a lot having a processing step with a shorter allowable time that can be waited by the processing unit to create a schedule; A method of creating a schedule of a substrate processing apparatus that executes. When processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit sequentially processes each lot in each processing unit based on the processing sequence including the plurality of processing steps. As a schedule preparation program of the substrate processing apparatus for determining the processing order of each lot, Based on the genealogy diagram showing the combination according to the processing sequence for each lot of each lot, after placing the first treatment step for a lot, the next step of each lot is followed, starting from the process step. Searching and arranging the treatment step; When searching for and arranging the next processing step, a step of preferentially arranging a processing step of a lot having a processing step with a shorter allowable time that can be waited by the processing unit to create a schedule; A schedule preparation program for a substrate processing apparatus which causes the controller to execute the control.

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