TW200912581A - Scheduling method and information recording media for a substrate treating apparatus - Google Patents

Abstract

A scheduling method for a substrate treating apparatus having a plurality of treating units for treating substrates, wherein, based on a procedure including a plurality of treating steps, a controller determines an order of treating a plurality of lots successively in the treating units. The method includes a step of preparing a plurality of schedules through execution of a basic allocating method, based on a systematic chart representing combinations of the treating steps for the respective lots, for allocating a first treating step of one of the lots, and thereafter, while following the systematic chart from the treating step, for searching and allocating as a next treating step a treating step selected from among succeeding treating steps in the lots, whose preceding treating step has an earliest expected completion time of all preceding treating steps; and a first allocating method for allocating treating steps based on the basic allocating method, and when a waiting time occurring with one of the treating steps exceeds an allowed time for enabling a standby at one of the treating steps and restarting a search at one branching point before a branching point upstream of the one of said treating steps. The method further includes a step of selecting one schedule having been completed within a specified time, from the plurality of schedules prepared.

Description

[Technical Field] The present invention relates to a substrate treatment for a predetermined process such as cleaning, side, and drying of a glass substrate (hereinafter simply referred to as a substrate) for a semiconductor wafer or a liquid crystal display device. The scheduling method of the device and its program. [Prior Art] Conventionally, when a substrate processing apparatus including a processing unit for processing a plurality of substrates is used, the processing unit is provided with a processing unit for processing, and (4) is processed according to the processing procedure of the package. In order to sequentially process each batch by each processing unit, the processing order of each batch is determined in advance, and each batch is transported in accordance with the schedule and sequentially processed. Specifically, according to the pedigree indicating the combination of the processing order of each processing step of each batch, after the initial processing step of the matching-batch configuration, using the processing step as a base point, according to the pedigree, from each batch The next processing step towel, with (10) the processing steps before the apology, the processing of the earliest batch of the lining (4), as the next processing step (for example, refer to Japanese Patent Laid-Open No. 2 Special opening _ - painting please bulletin). The above-mentioned j-substrate processing device scheduling method is performed because the actual batch processing is started to find the in-service processing unit _ batches. Therefore, the processing steps of the batch can be arbitrarily configured, and the basic processing can be improved. The working rate of the device. In order to make the need for the face-to-face situation as described above, compare the time required for the schedule to 97126028 200912581 and the reference time of the mosquito, and add the designation at the reference time when the situation between the reference temples is exceeded. As the new reference time, even if the schedule is created for a long time, the schedule is not completed when the schedule is completed (refer to Japanese Patent No. 3712370). However, in the case of the conventional example having such a configuration, there are the following problems. That is, in the conventional method of forming a substrate processing apparatus, when it is desired to obtain an effect of suppressing and waiting for the operation rate, it takes a long time to prepare the schedule. In addition, in order to prevent the problem that is caused by this, it is necessary to make the batch configuration of the next configuration t position backward shifting. The result is a problem that the waiting time is increased without the working rate, and there is a scheduling object. The batch is reduced and the schedule of elasticity cannot be made. In addition, there is also a problem that the number of scheduled counties is reduced and the rate is lowered. SUMMARY OF THE INVENTION The present invention is directed to the provision of a method for providing a schedule for a substrate at a substrate and a program thereof, which can prevent a change in time by a variety of configuration methods, and can improve the work rate. . Further, another object of the present invention is to provide a schedule processing for a substrate processing apparatus, and a program for preventing a schedule from becoming longer by performing a block configuration corresponding to a block arrangement reason. At the same time, the work rate can be increased. In addition, the other object of the present invention is to provide a method for preparing a schedule of a substrate at a substrate and a program thereof. The sequence of the processing is started by the configuration of the prior arrangement, and the batch can be used to prevent the schedule from becoming longer. Improve the work rate. 97126028 200912581 Another purpose of the invention is to provide a substrate processing device that can be used to prevent the schedule change time by preferentially configuring the same batch as the previously configured batch. Further, it is also possible to improve, and another object of the present invention is to provide a method for preparing a substrate processing apparatus and a program thereof, which are available by preferentially configuring a batch processing step having a processing well with a short waiting time. To prevent the schedule from becoming longer, the same; can improve the work rate. κ In order to achieve such a purpose, the present invention adopts the following structure. The present invention is a method for arranging a base area, and when a plurality of batches are processed by a plurality of substrate processing apparatuses for processing a processing unit for a substrate, the control unit performs a processing sequence including a plurality of processing steps. Determining the processing sequence of each batch 'used to sequentially process each batch by each processing unit; the above method includes the following steps: the control unit performs: the basic configuration method, and each processing step of each batch is read according to the table _处_序对八八系 After the initial processing step of the arbitrarily-batch configuration, based on the above processing step f, according to the above pedigree map, the processing steps from the next batch t t The processing steps of the batch of the earliest completion time in each of the preceding processing steps are taken as the next processing step, and the i-th configuration method, the processing steps are configured according to the upper=handle method, and at the same time, when the processing steps are When the allowable time allowed in the processing unit is exceeded, the configuration of the processing step is avoided, and one branch before the branch point upstream of the processing step is 9712528 20091258. Step 1 of the process; and the fulcrum of the one completed in the above-mentioned interval starts to be explored again; the execution is made into a plurality of rows and the schedules are selected at the same time. According to the present invention, the processing sequence of each processing step of the '(四)部小县^ corresponds to the combined pedigree, and after the initial processing steps are configured for any batch, the m-ga steps are programmed, according to the (four) spectrum, from The processing of each batch of two batches is configured, and the processing of the batch of the early processing of the special processing step is completed, and the next step is to perform the arranging method for the next stage. In this case, the control unit configures the processing step according to the basic configuration method. At the same time, when the special coffee generated by the processing step exceeds the allowable time of the special-purpose unit, the configuration of the processing step is avoided, and the processing unit 4 Before the branch point of the processing step of the graph, the branch point starts to search again and schedules (the first configuration method). The port is pre-scheduled by the basic configuration method, whereby the processing before the processing step of # and the subsequent processing steps can be repeated, and the processing of the processing step after the priority selection and configuration is performed earlier. The step is taken as the next processing step, whereby it can be shortened to the time when the next processing step is completed. Further, in the second configuration method, because there is a non-configurable reason for the processing of the downstream (four) target downstream, do not try to configure, the righteousness can be 4 money. The result is a shortened schedule time when compared to the basic configuration method. In this way, the basic configuration of each feature is different. The first configuration of the phase is used as the side-by-side selection and subtraction timing (four) to complete the scheduling of 97122528 200912581, thereby preventing the schedule from waiting for the extra waiting time to be generated, which can be improved. The work rate is long, but it can be prevented from using more than: = root _ multiple stipulations to deal with each batch; the steps: the above control department will implement: the basic configuration according to the wire and each miscellaneous Slave money search _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Processing. "Exploring and arranging the processing steps for the batch of the earliest scheduled completion time in each of the preceding processing steps as the next processing step; and the second configuration method, when configuring the processing steps according to the basic configuration method, according to the initial The initial processing sequence of each of the designated groups is selected. After the initial processing steps are configured for each batch, in the next processing step of each batch, the processing steps of the batches whose processing sequence is earlier are preferentially configured; The steps of a plurality of schedules; and the step of making a schedule of the above-mentioned schedules while selecting a schedule in which the schedules are completed within a prescribed time. According to the ', , and the present Maoming' control unit, the genre is combined according to the processing order of each processing step of each batch, and the processing step is used as the base point in the initial position of the arbitrary-batch configuration. 'According to the pedigree map, from the processing steps in the next batch, configure the processing of the first processing of the previous processing steps when the flight is completed at 97126028 200912581 (4), and the next processing is pre-scheduled (Basic configuration method). At the same time, the control unit configures the processing steps according to the basic configuration method, _ according to the most purely scheduled start processing sequence, after configuring the initial processing steps for each batch, in the next processing step of each recording red, 'prior se<; set the start of the processing order first: the processing step (the second configuration method). Therefore, the basic configuration method is used for the age of the county, whereby the previous processing steps and the previous processing steps can be repeatedly configured, and the processing steps of the previous processing steps are prioritized and configured as the next processing step. The processing steps can be shortened until the next processing step is completed, so that the processing can be performed in advance. Further, the second configuration method can suppress the return of the processing step configuration according to the pedigree due to the non-configurability of the physical system. Therefore, it is difficult to time, and when compared with the basic configuration method, the scheduling time can be shortened. In this way, a plurality of schedules are simultaneously created by using the basic configuration method and the second configuration method in which the respective features are different, and one schedule in the predetermined schedule is selected to be selected, which prevents the schedule from becoming longer and longer, and can prevent the occurrence of the schedule. Excessive waiting time can increase the work rate. The present invention is a method for forming a discharge of a New Zealand county, and when the plurality of batches are processed by a processing unit sheet processing apparatus having a plurality of substrates for processing a substrate, the control unit includes a plurality of processing steps. The processing sequence determines each batch: the processing sequence of the batch, which is used to process each batch with each of the annihilation departments. The above method includes the steps of the town: the control unit executes: the basic 97126028 200912581 The order of each of the peripheral steps corresponds to [°' after the most localized steps of the sub-batch configuration, with the above-mentioned processing steps as the base point, according to the above (4) diagram, from the next batch, the processing steps 'Exploring the processing steps of the batch of people who have taken the early processing of each of the previous processing steps, as the next processing step; and the third configuration method, configuring the location according to the above-mentioned configuration method _, when there is When it is possible to continue the processing procedure of the batch of slaves that are configured first, the process of the above-mentioned batch is preferentially configured; the steps of preparing the plurality of schedules are performed, and the plurality of schedules are created. Towel while selecting which of age completed within a predetermined time schedule. In the case of the present, the control unit follows the (four) diagram according to the processing indicating the processing steps of the respective batches, and after the first processing step of the arbitrary-subtractive configuration, the processing step is used as the base point. According to the (4) diagram, from the processing step towel of each batch, the processing steps of the batch of the earliest processing step are completed, and the privatization is performed in advance as the next step. Configuration method). In the same day, the control department configures the processing steps according to the basic configuration method, and at the same time, when there is a batch of the above-mentioned batches that can be connected to the batch slave processing step configured first, the configuration of the slaves is preferentially configured ( The third configuration method). Therefore, the scheduling is performed in advance using the basic configuration method, whereby the processing after the processing step and the processing before the processing step can be repeatedly configured, and the processing steps of the batch of the earlier completed processing steps of the processing step 4 are preferentially selected and configured. As the next 9712228 200912581 processing steps 'this can be shortened until the next processing step is completed, can be pre-scheduled. Further, in the third configuration method, the processing step of the same batch of the priority (4) and the previously configured batch is performed, and the scheduling of the processing is resumed by the device stop state, and the scheduling time can be shortened. In this way, the basic configuration method of each feature is not used, and the third configuration method is used to create a plurality of schedules (four): the scheduling of the schedule is completed within the rule, and the time for the prevention of the schedule becomes longer, and the same can be achieved. Preventing the extra waiting time from happening can increase the work rate. The present invention is a substrate processing apparatus having a plurality of scheduling methods, and the processing unit for processing the processing unit has a plurality of batches 4, and the control unit includes a plurality of processing steps. ·Shangjian (4) Implement the method of _·, according to the pedigree diagram indicating the combination with each batch and soil, in the touch-step-processing sequence corresponding to the processing steps as the base point, according to the following steps, explore the above steps And "H" is the next step in each batch, and the processing steps of the early batches are the most common method in the next step, in accordance with the above Ah steps; and the fourth configuration. When the processing unit waits for the 1st 1st method to configure the processing step, the priority configuration has a step; the processing step of executing the batch of (4) H is shorter, and the scheduling is selected in the prescribed 4' and the tops are made. Scheduling, in accordance with the present day tree, the control unit becomes the step of scheduling. According to the pedigree corresponding to the processing sequence of each processing step 97126028 11 200912581 of each batch, in the corresponding-batch Configuration After the initial processing step, 'the processing step is used as the base point, according to the pedigree map, the processing steps from the batch processing are performed, and the processing steps of the batch of the second processing step are completed as the next processing step mode. In advance, the King of the Kings (Tubenzaki method). In this case, the basic configuration method is configured in two steps, and the processing step of the batch having the processing time waiting for the processing unit is shorter (the processing time is shorter) Configuration method). The basic configuration method is used to pre-schedule, so that the steps after the step of the configuration can be repeated and the operations before the processing step are prioritized, and the processing steps of the batch that are completed earlier are set as the next step. I processing steps, which can be shortened to the time until the next piano is completed, = pre-made 。 。. Fine, even if the material _ short-term reasons: most can not be configured within the allowable time, and according to In the configuration method, the processing with a short allowable time by the priority configuration can be avoided by the valley, and it is not configurable due to the allowable time, so =: The basic configuration method with different characteristics and the first:: 2 process 2 to make a number of schedules, select a schedule within the specified time to complete the schedule = stop schedule creation day (four) variable length, the same day village to prevent anti-(four) remaining waiting time can be generated In order to improve the working rate, the processing method of the rational device is to use a substrate processing device having a processing unit for applying a substrate to handle a plurality of 97126028 12 200912581 shirts (four), and decide each time. Each processing unit sequentially processes each of the steps of the batch method: the control unit performs: the first configuration/the configuration processing step according to the basic configuration method, and the waiting time generated when the processing += is exceeded is available in the processing unit When the waiting is allowed (4), i avoids the configuration of the processing step, and starts the exploration again from a branch point H of the branch point upstream of the processing step, and the basic configuration method is processed according to each processing step of the U batches of the table. The pedigree of the combination corresponding to the order is based on the above processing step 4 after the initial processing step of any batch configuration, 'according to the above pedigree , from the processing steps in the next batch, 'explore and configure the processing steps of the earliest batch of the predetermined completion time in each of the preceding processing steps as the next processing step; and the second configuration method, according to the basic configuration described above When the processing step is configured, according to the opening of each batch originally specified = processing the Chuanbei sequence, after the initial processing steps are configured for each batch, in the processing steps of each batch, the above-mentioned starting is preferentially configured. The processing sequence is the processing step of the first batch of 7 batches; the step of making a plurality of schedules is performed; and the step of making a schedule in which the schedule is completed within a prescribed time is prepared. According to the present invention, when the control unit configures the processing step according to the basic configuration method, when the waiting time generated in the processing step exceeds the waiting time between the processing units, the control unit avoids the processing step. Configuration, at the same time from the branch point upstream of the oxime processing step - the branch point starts to explore again into the 97126028 13 200912581 order (the first configuration method). On the same day, the control department configures the processing steps according to the basic configuration method, and at the same time, according to the initial processing sequence of each of the first specified times, after the initial processing steps are configured for each batch, in the next processing steps of each batch, priority is given. The processing procedure of the batch in which the processing sequence is earlier is started (the second configuration method). Therefore, the basic configuration method is used and the scheduling is performed by the first configuration method. For those who have a non-configurable reason for the processing step (4), the configuration is not attempted. Therefore, the number of trials can be reduced. The result is a shorter schedule time when compared to the basic configuration method. Further, the second configuration method can suppress the occurrence of a return due to a processing step configuration in accordance with the pedigree due to physical limitations. Therefore, the schedule time can be shortened. The result is a shorter schedule time when compared to the basic configuration method. In this way, the first configuration method and the second configuration method (four) having different characteristics are used to create a plurality of schedules, and the selection timing is one schedule of the completion schedule, thereby preventing the schedule creation time from becoming longer and preventing unnecessary Waiting time is generated to increase the work rate. According to the present invention, when the plurality of batches are processed by a substrate processing apparatus including a plurality of processing units for processing a substrate, the control unit is configured to process the plurality of batches by the substrate processing apparatus including the processing unit for applying the substrate to the substrate. The order determines the order of each batch, and the silk batch processes each batch sequentially. The above method includes the following steps: the control unit performs: the i-th configuration method, and configures the processing according to the basic configuration method. (4) At the same time, when the waiting time generated in the above processing step exceeds the allowable time of the processing unit, the situation of the processing step is 97126028 200912581, the configuration of the processing step is avoided, and the branch from the upstream of the processing step is occupied as a branch. The point starts to be explored again, and the basic configuration method is based on the pedigree that the table is not combined with the processing order of each processing step of each of the processing steps. After the initial processing step of the any batch configuration, the above processing step is used as a base point. According to the above (four) spectrum, from each batch: owing the next processing step T 'exploration and configuration for each of the previous processing steps The first batch of the completion time - the processing step of the person as the next processing step; and the third configuration method, when the processing step is configured according to the basic configuration method, when there is a processing step that can be connected to the previously configured batch In the case of the processing steps of the above batches, the processing steps of the batch are preferentially configured; the steps of preparing a plurality of schedules are performed; and the plurality of schedules are created; and a row in which the schedules are completed within a predetermined time is simultaneously selected The steps of Cheng. At the time of this month's 'Control Emperor', when the processing steps are configured according to the basic configuration method, the waiting time generated by the processing step exceeds the condition that can be waited between the handles of the processing unit. Before the upstream branch point of the processing step in the same diagram, the branch point starts to explore again (four) row scheduling (the first configuration method). At the same time, when the 'control unit configures the processing steps according to the basic configuration method' and has the processing steps of the above-mentioned batch that can be connected to the batch slave processing step configured first, the processing steps of the above batch are preferentially configured (third) Configuration method). Therefore, the lining configuration method is carried out by the first saki method, and the chemistogram downstream of the processing step having the non-configurable reason is not tested. 97126028 15 200912581 is performed. Therefore, the number of trials can be reduced. The result is that the schedule time can be shortened when compared to the basic configuration method. Further, in the third arrangement method, the batch configuration can be shortened by the money arrangement and the previously configured batch-to-batch: under-processing step, and the schedule of processing from the stop of the device is resumed. In this way, the first configuration method and the third configuration method with different characteristics are simultaneously used to create a plurality of schedules at the same time, and the schedule of the schedules in the schedule (4) is selected to be longer, and the time is longer. Waiting time is generated to increase the work rate. The present invention is a scheduling method for a substrate processing apparatus, and when a plurality of batches are processed by a substrate processing apparatus including a plurality of processing units for applying a substrate to the substrate, the (fourth) portion includes a township step In the order of the department, the batches are determined in the order of each batch. The above methods include the steps of the towns. The above method includes the steps of the town: the control unit implements the third method: according to the basic configuration method. Configuring the processing step while avoiding the configuration of the processing step when the waiting time generated by the processing step exceeds the allowable time waiting for the processing unit, and starting from the previous branch point of the branch point upstream of the processing step Exploring the basic data of the basic configuration method and the various batches of the various steps to deal with the lion's (four) map, after the most defensive step configuration for the _ batch, the above processing steps as the basis, according to The above pedigree®, from the processing steps below each batch, the county is configured to process the batch of the earliest batch of the predetermined completion time in each of the previous processing steps as the next place And the fourth configuration method, when the processing step is configured according to the basic configuration method, preferentially configuring a processing step of a batch having a processing step that is short between 97126028 1Α 200912581 when the processing unit waits for the processing; The steps of the scheduling process are performed as a plurality of steps, and a step in which the scheduling is completed within a predetermined time is selected. According to the present invention, when the control unit configures the processing steps according to the basic configuration method, and the processing step rides between the eucalyptus trees exceeding the allowable day custodian waiting for the processing unit, the configuration of the processing step is circumvented. At the same time, the branching point is started again from the branch point upstream of the processing step of the pedigree map (the first configuration method). At the same time, the control unit preferentially arranges the processing steps (fourth arrangement method) of the batch having the processing steps that are short in the allowable time waiting for the processing unit, according to the basic arrangement method. Therefore, the basic configuration method is used and the second configuration method is used for scheduling, and the trial of the downstream of the non-smooth processing steps is not performed, so the number of trials can be reduced. Result # When compared with the basic configuration method, 'can be scheduled. However, the processing steps that allow for a shorter period of time, even if they can be physically configured, are mostly not configured in the coffee shop, and the money spectrum map is returned. Therefore, in the fourth arrangement method, since the priority arrangement of the allowable time is prioritized, the allowable time can be easily avoided, so that the scheduling time can be shortened. The result is a short schedule with the basic configuration (4). In this way, the second configuration method and the fourth configuration method having different characteristics are simultaneously used to create a plurality of schedules, and one schedule of the schedule is selected within a predetermined time to prevent the schedule creation time from becoming long, and the unnecessary waiting time is prevented from being generated. Can mention the work rate. 97126028 17 200912581 The present invention is a method for forming a substrate processing apparatus, and when a plurality of batches are processed by using a plurality of substrate processing apparatuses that apply a processing-type processing unit to a substrate, the control unit includes a plurality of processing units. The processing sequence of the steps is determined by the processing order of each of the processing units, and the processing method for sequentially processing each of the processing units includes the following steps: The control unit executes the second and second matching methods according to the basic configuration method. Configure the processing steps, and at the same time, according to the initial = batch processing sequence, configure the initial processing steps for each batch to record the next processing step; preferentially configure the processing steps for the batch processing of the first batch And the basic configuration method is based on the pedigree corresponding to the processing order of each processing step of each batch of the disc, after the first processing step of the butterfly = the above processing step as the base point, == pedigree ^, from each In the processing steps of the batch, the processing steps of the batch of the earliest scheduled completion time in the processing step are explored and matched; 3 configuration method, in the case of the above-mentioned batch processing step of the processing step of the batch configured in the first configuration according to the above basic step, the batch processing step is preferentially configured; (4) The steps of the multi-step process; and the process of 'making a schedule in which the schedule is completed within the specified time. When the department starts processing according to the basic allocation, the side of each batch is configured to be side-like. In the same manner as the 97126028 18 200912581, the control unit configures the processing steps according to the basic configuration method, and at the same time, the processing of the above batch is configured in the first batch processing step of the batch, and the processing steps of the batch are preferentially configured. (The third configuration method is therefore used, and the second configuration method is used to perform scheduling using the basic configuration method: suppressing the return of the configuration of the daily processing step due to the unconfigurable physical limitation. Therefore, the scheduling time can be shortened. Into:: Figure: 3 configuration method towel, via the combination of Yousi and Xianqi: Both - (4) /

The step 'restarts U -n*pB , lL _ 1徘#王' for the slave stop state to shorten the row /. In this way, the second arrangement method and the third arrangement method in which the respective characteristics are different are simultaneously made into a plurality of schedules, and the selection of the schedule in which the schedule is completed within a predetermined time is a schedule processing method of the substrate processing apparatus. In the base area of the processing department where the substrate wire is judged, the multi-person control is handled.决定Determining each of the processing meals according to the processing sequence including the plurality of processing steps, and processing the batches sequentially for each of the processing units; the method includes the following steps: the control unit performs: the second The method configures the processing steps according to the basic configuration method, and according to the initial processing sequence of each batch originally specified, in the next processing step of each batch after the initial processing step for each batch configuration, the above-mentioned starting processing staff is preferentially configured. And the basic configuration method is based on the pedigree corresponding to the processing sequence of each processing step of each batch, and the initial processing step is performed on any batch of 97126028 19 200912581. De A, the above processing steps are made, according to the above-mentioned spectrum, from the processing steps of the respective batches, the processing of the batches of the earliest scheduled completion time in each of the previous processing steps is arranged next to each other. Steps as the next processing step; and the fourth configuration method, in accordance with the above basic configuration, matching Wei Libu, priority Qiqi The processing step is to wait for the processing time to wait for a short processing step;

The steps of scheduling; and the steps of redeploying multiple touches, _clearing the schedule of the towel in a specified time. Ship invention, (4) Department _ basic configuration green configuration processing steps, and in accordance with the original designation of each slave _ 卿 卿 卿, each of the first configuration of the next processing step, in each of the next slave processing steps, priority The processing procedure of the batch in which the processing sequence is earlier is started (the second configuration method). At the same time, the control unit arranges the processing steps in accordance with the basic arrangement method, and preferentially arranges the processing steps (fourth configuration method) of the batch having the processing steps that can be waited for by the processing unit for a short period of time. Therefore, the basic configuration method is used and the second configuration method is used for scheduling, thereby suppressing the return of the configuration according to the grammatical processing step due to the unconfigurable physical limitation. Therefore, the scheduling time can be shortened. However, the processing steps that allow for a shorter period of time, even if they are physically configurable, are mostly not configurable within the allowable time, but are returned in accordance with the pedigree. Therefore, the fourth arrangement method can easily avoid the unconfigurable time due to the short-time processing procedure of the priority configuration, so that the scheduling time can be shortened. The result is when the basic configuration method 97126028 20 200912581 7 is available. In this way, the second configuration method and the fourth configuration method of each side 彳 are simultaneously made into a plurality of schedules, and the schedules of the scheduled/scheduled schedules are selected to prevent the schedule creation time from becoming longer, and at the same time, the redundant schedule is prevented. Waiting for time to generate 'can increase the work rate. r %

In the case where a plurality of batches are processed by a substrate processing apparatus having a processing unit for processing a substrate, the control unit performs processing based on a plurality of processing steps. In the order, the processing meal of each batch is determined, and each batch is processed sequentially by each processing unit. The above method includes the following steps: the control unit performs: the third configuration method is configured according to the basic configuration method. The step of arranging the processing steps of the above batches in the case of the processing steps of the above batch configured in the processing steps of the batch that can be connected to the first configuration, and the basic configuration method is based on the The combination of the steps of the various steps is the same as the combination of the initial processing steps of any batch configuration, the above steps are used to make silk points, touch the material _, from each of the miscellaneous slaves The location of the bank, the financial and the configuration of each of the previous New Zealand (4) dare to complete the day ^ take the early batch of processing steps, as the next step of processing; the fourth configuration method 'based on the above base When the configuration method configures the processing steps, the processing steps of the batch having the processing steps that can be allowed in the processing component are preferentially configured; the steps of performing the plurality of scheduling are performed; and the plurality of schedulings are performed simultaneously Select the one of the schedules in which the schedule is completed within the specified time. According to the present invention, the configuration of the basic configuration method of the control unit is fresh, and at the same time, 97126028 21 200912581, when there is a processing step of the above batch configured to be connected to the previously configured batch: the processing step owed, the county configures the above batch Second processing step (third configuration method) ^ At the same time, the control unit configures the processing steps according to the basic configuration method, and preferentially configures the processing steps of the batch having the processing steps that can be processed for a short period of time (fourth configuration) method). Therefore, in the third arrangement method, the schedule can be shortened for the schedule which is processed again from the stop state of the apparatus. However, even if the processing steps of the allowable time are short, the large & can be placed in the allowable coffee (4), and the return is generated according to the spectrum. Therefore, in the fourth arrangement method, it is possible to easily avoid the inability to configure due to the allowable time by the processing step in which the priority is allowed to be short, and thus the mis-scheduling time can be made. The result is that the schedule time can be compared when compared to the basic configuration method. In this way, using the third configuration method and the ^configuration method with different characteristics, the same day (4) in the county, the difficult day is called the schedule of the schedule = to prevent the scheduling time from becoming longer, _ preventive time is generated, Improve the work rate. In the evening, in the seventh step, in the step of selecting the above schedule, it is better to make the upper part select the tender (four) (four) tender (four) Qian Lizhi: choose the earliest use of the possession to handle multiple ^ regulations When the plurality of scheduling situations are completed, the processing rate of the device can be improved by completing the processing. The present invention relates to a substrate processing method for forming a substrate processing, and a substrate processing apparatus for processing a plurality of substrates for processing a substrate. 97126028 22 200912581 In the case of a batch, the control unit determines each processing unit according to a processing sequence including a plurality of processing steps. The processing sequence of the batch is used to sequentially process each batch by each processing unit. The above method includes the following steps: the control unit executes the combination according to the processing order of each processing step of each batch. The pedigree map, after the most detailed processing steps for any batch configuration, using the above-mentioned processing steps as a base point, according to the above pedigree map, from the next processing step of each batch, explore and configure each of the processing steps The processing steps of the earliest batch are taken as the basic configuration method of the next processing step to configure the steps of the step 1; and - the system is configured according to the above basic configuration method = when the above processing When the waiting time generated by the step exceeds the case of the household time in the processing unit, the configuration of the processing step is avoided. When the configuration from the two two: before the branch point - a branch point again began exploring ways to make this particular configuration steps lin distance. At this time, 'the control clerk according to the silk and the various batches of each processing step 2 after the corresponding combination of the pedigree map, in the initial - batch configuration initial treatment 21: Gu Lu σ Hai processing steps as the basis, according to The pedigree map, from the most (four) 3 steps of each batch, 'configure the processing steps before the material is completed in the middle (basic (four) binding-processing (four) simple silk line scheduling soil configuration method). At the same time, the control unit uses the waiting time generated by the processing step to exceed the configuration that can be processed in the :::: time, avoiding the configuration of the processing step, and simultaneously from the upstream branch point of the processing step. Degree began to explore 97126028 23 200912581 Suo Lai to schedule. Therefore, the scheduling is performed in advance by using the basic configuration method, whereby the processing steps of the batch which are completed earlier before the processing step before the processing step and the subsequent processing steps can be set as the next processing step. Shorten the time until the next processing step is completed: pre-scheduled by port. Further, in the special configuration method, because the downstream of the pedigree of the processing steps that are not configurable for 2 reasons, configuration one (household: can be: less trials. The result is when scheduling with the basic configuration method: == Lai scale waits for the time to produce the tree is - the county has reduced the amount of money, the system = = substrate ^ plus the processing unit of the processing unit of the processing unit to process: the person-in-law control unit according to a plurality of processing steps The processing of the meal, the step of sequentially processing each of the batches of the bag S-machi in each processing unit: the control unit performs: corresponding to the one of the reductions according to the processing order of the respective processing steps of the respective batches After the processing steps, according to the above, ς 图 ^ 2 according to the above chart, 'explore and configure each batch of the next processing ^ ' and in the next place in the financial Wei, although the initial information of the people After the meal, after the steps of the training of the Wei line, the gift is given under the batch, and the processing steps of the batch of the first batch are preferentially configured to make the scheduling step. First 97126028 24 200912581 According to this When invented, the control department reads according to the table. The processing order of each processing step corresponds to the combined (4) graph. After the initial processing step is configured for the arbitrarily-arrival, the processing step is used as the base point, and according to the pedigree map, from the next processing step of each batch Exploring and configuring the processing steps under each batch, according to the originally specified (4) processing, after the initial processing steps are configured for each location, 'in the next processing step of each batch, the above-mentioned starting processing sequence is prioritized first. The processing steps of the batch. Therefore, the process of the previous steps of the process of the county and the reading of the pre-existing steps are carried out, so it can be shortened to the next time: the processing time is completed. Step, through the priority configuration, start processing the batches of the batches with the first order, and after configuring a batch of slaves, when configuring the blocks of different batches, it can suppress the non-configurability due to the physical restrictions. The return of the processing step configuration. The result can shorten the scheduling time 'preventing the anti-recurrence time _ generation, can scream high work rate. The present invention is - difficult to record the device In the case of a substrate processing apparatus having a processing unit for applying a substrate to a substrate, a processing unit for processing a plurality of talents is processed, and a processing sequence of a plurality of processing steps is determined, and a processing order of each batch is determined. Each of the processing units sequentially processes the respective batches; the upper= method includes the following steps: the control unit performs: according to the genre map corresponding to the processing order indicating the processing steps of the respective processing steps, for any batch After configuring the initial processing steps, using the above processing steps as a base point, the steps of the next processing step of each batch are explored and configured; and 9712728 25 200912581 when exploring and configuring the next processing step, In the case where there is a processing step of the above-described batch that can be arranged in the processing step of the batch that is configured first, the processing steps of the batch are preferentially arranged to perform the scheduling step. According to the invention, the (4) part is configured according to the processing sequence corresponding to each of the subsequent processing steps, and after the initial processing step is configured for any batch, the processing step is used as a base point, according to the pedigree, and the exploration is performed. When the next processing step of each batch is configured, the processing steps of the batch are preferentially configured when there is a processing step of the batch configured to be connected to the processing step of the batch configured first. Therefore, by using the pre-scheduling before the processing is performed, the operations before the previous processing step and the processing before the processing step can be repeatedly configured, and the processing steps of the batch which are completed earlier by the prior processing step are preferentially selected as the next processing. The step can be shortened to the time until the next processing step is completed, so that the schedule can be made in advance. Further, the processing step of the same-pre-configured batch------------------------------------------------------------------------------ As a result, the schedule creation time is prevented from becoming longer, and at the same time, the waiting time is prevented from being generated, and the work rate can be improved. According to the present invention, in the method of preparing a schedule for seeding, the control unit includes a plurality of processing steps when the plurality of batches are processed by the substrate processing apparatus including the plurality of processing units for applying the substrate. The processing sequence determines the processing order of each batch, and each batch is processed in sequence by (4) each processing; the above method includes the following steps: The control unit performs: according to the representation of 97125228 26 200912581 and each batch of slaves Step_Processing sequence job group--Batch configuration After the initial processing steps, use the above-mentioned processing steps = for the following (4) diagram, explore the configuration of each of the lower steps of the stepping soil; and under exploration and configuration In the processing steps, the priority configuration = the shorter allowable time for the internal waiting is the step of processing the schedule. ^Step-by-step batch: The person searches for the pedigree according to the processing sequence of the control unit of the control department and the processing steps of each slave, and configures the initial processing steps for any batch. With the processing step as a base point, according to the pedigree, and when the next processing step of each batch is explored and configured, the processing steps of the batch having the processing steps that can be waited for by the processing unit for a short period of time are preferentially configured. Therefore, by performing the pre-scheduling before the execution of the process, it is possible to repeatedly configure the work after the previous process step and the subsequent process step, and the time until the next process step is completed can be shortened so that the schedule can be made in advance. However, even in the processing steps with a short allowable time, even if it can be physically arranged, most of them cannot be configured within the allowable time, and the return is generated according to the pedigree. Therefore, it is possible to easily avoid the unconfigurable caused by the allowable time by preferentially arranging the processing step of the shorter allowable time, so that the scheduling time can be shortened. As a result, the scheduling time is prevented from becoming longer, and the waiting time for waste generation is prevented, and the work rate can be improved. The present invention has been described as being preferred in order to explain the present invention, but the present invention is not limited to the construction and countermeasures as illustrated. [Embodiment] 97126028 27 200912581 Hereinafter, preferred embodiments of the present invention will be described in detail based on the drawings. Embodiments of the present invention are described below with reference to the drawings. Fig. 1 is a plan view showing a schematic configuration of a substrate processing apparatus of an embodiment.

The substrate processing apparatus is, for example, a device for applying a chemical liquid treatment, a cleaning treatment, and a drying treatment to the substrate W. A plurality of sheets (e.g., 25 sheets) of the substrate w are accommodated in a horizontal posture in a front opening σ type universal container (Front Opening Unified Pod, the lower handle is just p) i. The F-cut containing the unprocessed substrate w is placed on the investment unit 3. The investment unit 3 has two mounting stations 5 for placing _ρι. A discharge portion 7 is provided on the opposite side of the input portion 3 at the center portion of the substrate processing apparatus. The discharge unit 7 accommodates the processed substrate W at just P1 and discharges each F〇m. The discharge unit 7 having such a function includes two mounting stages 9 on which the FOUP 1 is placed, similarly to the input unit 3. The third transport mechanism ctc' is disposed between the input unit 3 and the discharge unit 7 so as to be movable between the two. The transport mechanism ctc takes out the multi-wire plate w from the P1 placed on the mounting table 5 of the input unit 3, and converts the posture of the substrate w from the horizontal direction to the vertical direction, and then performs the substrate on the second transport mechanism 粞. The handover of W. Further, after receiving the processed substrate w from the second transport mechanism WTR, the first transport mechanism CTC converts the posture of the substrate w from the vertical direction to the horizontal direction, and stores the substrate w in the f_ of the discharge unit 7. The second moving mechanism WTR is configured to be movable in the longitudinal direction of the substrate processing. On the most recent front side of the moving direction of the second transport mechanism WTR, two 97126028 28 200912581 drying processing units LPD1 and LPD2 are provided for storing the plurality of substrates w in the low pressure processing chamber and drying them. The first processing unit 19 is provided at a position in the moving direction of the second transport mechanism WTR and adjacent to the drying processing unit LPD2. The first processing unit 19 includes a pure water washing treatment unit 0NB1' for applying a pure water washing treatment to the plurality of substrates w, and a chemical liquid processing unit CHB1' is applied to the plurality of substrates W by the processing liquid. Liquid treatment. Further, there is provided a sub-transport mechanism LF1 for transporting the substrate w in the rooms. The sub-transport mechanism LF1 transfers the substrate w between the second transport mechanism WTR in addition to the substrate transport in the first processing unit 19. The second processing unit 2 is provided at a position adjacent to the first processing unit 19. The second processing unit 20 has the same structure as the first processing unit 19 described above. In other words, the pure water washing treatment unit (10) B2, the chemical liquid processing unit CHB2, and the sub transport mechanism LF2 are provided, and the third processing unit 21 is provided at a position adjacent to the second processing unit 20. The third processing unit 21 includes a pure water washing treatment unit (10) B3, a chemical liquid processing unit CHB3, and a sub transport mechanism LF3. Further, the fourth processing unit 22 is provided at a position adjacent to the third processing unit 21. The fourth processing unit 22 is provided with a 'pure water washing treatment unit', a liquid processing unit CHB4, and a sub-transporting unit lf4. First transport mechanism CTC, second transport mechanism WTR, drying processing unit LPD, LPD2, 帛1 processing unit 19 (pure water washing processing unit (10) M, chemical liquid processing 邙CHB1, and 衂 transporting mechanism LF1), and second processing unit 2〇 (pure water washing treatment unit 97126528 29 200912581 0NB2, chemical liquid processing unit CHB2 and sub transport mechanism LF2), third processing unit 21 (pure water washing processing unit 0NB3, chemical liquid processing unit CHB3, and sub transport mechanism LF3) The fourth processing unit 22 (the pure water washing processing unit 〇Νβ4, the chemical liquid processing unit CHM, and the sub transport mechanism LF4) corresponds to the "processing unit" of the present invention. The substrate processing apparatus constructed as described above is collectively controlled by the control unit 31 as shown in the block diagram of Fig. 2 . The control unit 31 is configured by a CPU, a counter, a timer, and the like, and includes a scheduling power f energy unit 33 and a processing execution instruction unit 35. The memory unit 37 connected to the control unit 31 stores a "recipe" (process step) in advance, and is prepared in advance by a user of the substrate processing apparatus or the like, and is composed of blocks including a processing step or a plurality of processing steps. How to deal with the substrate; various "scheduled programming"; "scheduled programming" is used to control various scheduling programs; and "processing programs" are used for scheduling. In addition, a plurality of schedules created by the schedule creation program and a "schedule" selected therefrom are also stored. In the memory unit 37, the "predetermined time" is equivalent to the scheduled time limit or the "permissible time", and the allowable waiting time between the block and the next block is generated; And the "configuration start position", the location information, or the data (generogram) for configuring the block, etc., are used to indicate the block combinations of the plurality of batches in each schedule. The vacancy month b 4 33 will be placed in the F0UP1 of the input unit 3:: The second is treated as a batch, and is instructed by the operator of the device. The formula 'Before actually starting the processing, a plurality of schedules are created by using various scheduling methods described later in a manner that the processing steps (blocks) of each 97126028 30 200912581 batch can be effectively configured in time series. The processing execution instructing unit 35 writes the various schedules 10 stored in the storage unit 37 by the scheduling function unit 33, and performs an operation instruction relating to the processing of each processing unit or the like at an appropriate timing based on the schedule selected later. The arrangement control unit 39 of the scheduling function unit 33 performs various scheduling creation methods, and selects and arranges the block selection. The scheduling time monitoring function of the crying scheduling function unit 33 has the function of timing (four) (four). The elapsed time from the time when the various schedules are made into a new one is measured until the time is shorter. In the scheduling selection unit of the scheduling function unit 33, the earliest completed axis is selected. The homing schedule notification processing execution instruction unit is used to give > θ; the second arrangement method, the third assignment method, the first arrangement method, and the method, and the following is for the rows. The plurality of schedule creation methods of the fourth configuration method are controlled according to the main program. The % creation method is explained. These schedules are the main program. In addition, Figure 3 is a flow chart for indicating the schedule

[Steps Si, %J determine whether the number of object arrivals is appropriate. The process branches to step S3 to branch. When appropriate, it ends abnormally. In the case of k-field, the process proceeds to step S2, 97126028 200912581 [steps S3 to S5] S3/using the various schedule creation methods of (4) to start the schedule creation (step 2: using the row (four) inter-monitoring unit 41 to start the regulation Time monitoring (step (4)' continues to count until the elapsed time (steps [6, S7] in: the various difficult ways to make the lungs, according to a treatment branch. In Fu Shishi + # ^ f si In other respects, the number of batches is not appropriate, and the schedule is selected from (4). In addition, when the situation is completed, when the force is completed, the schedule is selected, but In the case of a schedule, from <Basic Configuration Method> Fig. 4 is a stream_, which is used to indicate the basic configuration method flow, a specific example of the sequence diagram of batch 1 of μ batch, and FIG. The batch of arrival: _ owed to the specific example of the timing chart. The person's long time 2 ^ below thank you, _ understand her, as shown in Figure 5, used: second is = the actual formula is abbreviated formula will batch Processing coffee ^

St: 冓 包含 : 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理Washing treatment unit_pure water washing treatment; processing step (block 〇, 97126028 32 200912581 - transport processing using the second transport mechanism WTR and drying processing by the drying processing unit; and processing step (block D), Regarding the handling process using the first cloth Z transport mechanism TR and the handling by the first transport mechanism ctc, the following is a description of the processing steps of the single unit or the need for continuous configuration. The processing steps are called blocks. In addition, for the block, it is indicated by the symbol of "batch one symbol" in multiple batches. That is, the symbol "a block of magic" is indicated by In the recipe, the initial configuration block 丨~8, the main

In other cases, there is a combination of blocks as shown in FIG. 6. In addition, Fig. 6 is a schematic diagram of the U spectrum] used to indicate an example of the schedule combination in the basic configuration method. In the middle, the number enclosed by the dotted line corresponds to the step number in the following description. [Steps T1, T2] Obtain the first block, and if the ship's obtained block exists, make [Step Τ3, Τ4] the knife.

Before the search: the scheduled completion of the block _ the earliest. At this time, for the first one, because the _ wealth exists, _ the block before the voyage (four) her time (the beginning of the ( (6) as the scheduled completion time of the previous block. However ^ configure the block that is scheduled to complete earlier. [Step Τ5~Τ7] The waiting time for the generation of conflicts in the various parts of the batch does not exceed the allowable time as the "configuration condition", and according to the situation, the situation is met.疋 260 260 260 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋Then, it is transferred to the step. Then, according to whether there is a block that is configured before the acquisition, the processing branch is made. When there is no block, the process is shifted to step T9 so that the configuration is started to be shifted backward. [Step no, tiij In the above step T8, when there is a situation in which the block that was previously issued is obtained, the process moves to step T10, and the suspension is stopped. After that, the block is suspended and simultaneously acquired. Block configuration, To step T2. [Step T12] block in step T5, T12 Disposing Step

Here, reference is made to Figs. 7 to 21 as timing charts for indicating [Steps 1 to 3 J when the configuration condition is not satisfied] and then returning to step T2. ‘Exclusion cannot be used. Children's specific schedules are made. In addition, Figures 7 to 21 pass through the configuration process of the basic configuration method. It has long been meticulously referred to. Moreover, the block of the first 4 7 is not scheduled to be completed (the scheduled start time) is compared with the reservation of A (symbol 1-A) (step υ. Second, the start time of the block 1 is performed) Compare # / and the scheduled completion time of batch 2 (predetermined „ minus 2 scheduled completion _ earlier, 200912581 to configure batch 2 block A (symbol 2 — A) in block 1 of block A (symbol 1 -A) After (step 2 of Figure 7B). However, in the same processing of the first transport mechanism CTC, because of block A of block 1 (symbol 1 - A) and block 2 of lot 2 (symbol 2 - B) A conflict occurs, so block A of batch 2 (symbol 2 -A) cannot be configured. Therefore, block B of block 1 (symbol 1 - B) is placed after block A (symbol 1 - A) of batch 1 (Step 3 of Fig. 7C) [Steps 4 to 6] When the predetermined completion time of the block B (symbol 1 - B) of the lot 1 is compared with the predetermined completion time (predetermined start time) of the lot 2, because the batch The scheduled completion time of the second time is earlier, so the block A of the batch 2 (symbol 2 - A) is configured (step 4 of Fig. 8A). Secondly, the predetermined completion time of the block B of the batch 1 and the block B of the batch 2 (symbol 2 - B) scheduled to be completed For comparison, since block 2 - a is scheduled to complete earlier, block B of block 2 (symbol 2 - B) is configured (Fig. 8β step 5). Second, when block 1 of block 1 is used (symbol 丨—B) The scheduled completion _ and the block B (symbol 2_B) of the batch 2 are compared at the scheduled completion time, and the predetermined completion time of the block 1 - b is earlier than the block 2-B. (symbol Bu C) (Fig. 8C, step 6). ' [Steps 7 to 9] When comparing the predetermined completion time of block 1-C and block 2-B by 9 inches, since block 2 - B is earlier, Therefore, the block c of the batch 2 is allocated to pay Z to C) (Fig. 9ΑStep 7) Here, because of the relationship of the drying processing unit LPD1, the earned 9 R ± A has to be arranged at a time interval from the previous block 2 - B. If the inter-turn wt is within the allowable time of 97126028 35 200912581, then block 2 - C can be configured, but the waiting time wt has exceeded the allowable time, and the configuration condition is not satisfied. Therefore, the configuration of the block 2 - c is suspended. Configure block 1 D at the same time (step 8 of Figure 9B). Second, for batch 1 because the final block is configured

Block 1-D, so choose only block 2 - c. Therefore, the block 2 - c is configured (step 9 of Figure 9C). In this case, a wait time 纣 is generated in blocks 2 - c to exceed the allowable time. [Step 1 〇~12] Γ Since the configuration conditions are not met, the configuration of the block 丨D and 丨_C before the suspension is suspended. Since block 2 - c is not selected after block i - c, block 2 - C is first configured (step 10 of Figure 10A). Moreover, the predetermined completion time of the block B and the block 2_c is because the blocks 1 - B are earlier 'therefore the block is configured (Fig. 11). As a result, the block c (symbol 2-C) of the lot 2 that has not been carried out from the drying processing unit LPD1 and the block c (symbol dice of the lot) conflict. Therefore, the block 2 - D is first arranged in the block 2 - After C (Fig. i〇c, step 12). 〇 [Steps 13 to 15] Since the block 2-D is configured, the material has a block ^lapping block η (Fig. m, step 13). However, in block b Waiting time, this exceeds the allowable time. Therefore, the configuration of the block 2 -D, block 2 - C, block " configured before is aborted, and is replaced by the configuration block c (step 14 of Figure 11B) and continues to block 2 -A and block Bu (: Zhongzhi dare to complete the block η earlier, configure block 2 - Β (Fig. lie step 15). [Steps 16~18] 97126028 36 200912581 Will block 2 - B and block l - c The predetermined completion time is compared, and the earlier block 2 - B is continued, and the block 2 - C is configured (step 16 of Fig. 12A). In this case, in the drying processing section LPD1 because of the block 1 - batch and batch 2 of the batch 1 The block 2_c conflicts, so the configuration condition is not met. Therefore, the configuration block 丨-D is used instead of the block 2 - C (step Π of Figure 12B). For the batch 1 all blocks have been configured, so select only 2 - C (Fig. 12C, step 18). However, the waiting time η exceeds the allowable time. Γ [Steps 19 to 21] Since the block 丨-D is not selected after the block 2 - B, the block D is first arranged in the block. Before 2-B (step 19 of Fig. 13A), and in the predetermined completion of block μ and block 1-D, 'continues to the earlier block 2 - a, and blocks 2 - B (step 20 of Fig. 13B). Then, among the blocks 2 - B and the block D, the block 2 - B which is earlier than the scheduled completion time is continued, and the block 2 - c is arranged (the plate step 21). Here, the waiting time wt exceeds the allowable time. [Steps 22 to 34] The above steps are repeated in the same manner, and a trial error is made to the block configuration of the two batches (steps 22 to 34 of Fig. 14A to Fig. 18A). The attempt is wrong with the symbol 1 surrounded by the broken line in Fig. 6. ～34 indicates. [Steps 35 to 44] However, as a result of the above-mentioned trial error, since all the blocks cannot be configured, the interval between the batch i and the batch 2 is expanded as shown in Fig. 18C, and the error is repeated again. (Fig. 18B to Fig. 21, steps 35 to 44). 97126028 37 200912581 When the basic configuration method is completed according to the above, it is completed in step 44. The entire block configuration is indicated by a symbol 44 surrounded by a broken line in Fig. 6. The scheduling function unit 33 of the control unit 31 that performs the basic configuration method performs pre-scheduling 'in accordance with the representation and each batch. The recipe of the block corresponds to the combination data (the pedigree of Figure 6). After configuring the initial block of any batch, using the block as the base point, according to the pedigree map, from the next block of each batch, the configuration is for these The block of 4 is pre-formed into the block of the earliest batch, as the next block. Therefore, 'pre-scheduling according to the basic configuration green, thereby allowing the previous block after the job, and the previous block before the job to be repeatedly configured, preferentially selected and configured as the block of the block #x The next block, which can be shortened to the time until the next block is completed, can be pre-made in such a schedule. <First Configuration Method> (The reason why the configuration cannot be configured) Fig. 22 is a machine private diagram for indicating the flow of the jth configuration method, and Fig. μ is a schematic diagram (genegram) for indicating the schedule of the first configuration method Combination example. Further, since the step _7 is the same as the step Τ7 of the basic arrangement method described above, the description thereof will be omitted. Further, the step (10) is called the same as the steps Τ8 to Τ11 of the above-described basic arrangement method, and therefore the explanation is omitted for the first arrangement of the first configuration. [Step U12, U13]

If the waiting time exceeds the allowable time, the processing is performed in accordance with the waiting time, and the processing is branched in accordance with the waiting time (step U12). That is, in the case of the reason, all the blocks obtained are divided by 97126028 38 200912581 (step U13). [Step U14] In the above-described step U12, when the non-configurable block reason is not the waiting time, the unconfigurable block is excluded, and the process proceeds to step U2. (In the above formula, the batch i is started first, and when the arranging method is performed, the combination of the blocks shown in Fig. 23 is shown in Fig. 23. In addition, the figure is a schematic diagram (the pedigree)' is used to indicate the 1. Example of scheduling arrangement of the arrangement method. In Fig. 23, the number surrounded by a broken line corresponds to the step number described below. Here, reference is made to Figs. 24 to 35 for explaining the specific schedule creation. 24 to FIG. 35 are timing charts for indicating the configuration using the second configuration method [Steps 1 to 6]. In the steps, the batch conflicts because of the non-configurable reason, according to the basic configuration method described above. The same configuration process (Fig. 24 (steps Fig. 25 (steps 4 to 6)).) and [steps 7 to 9] For block 1-C and block 2 - B, when the predetermined completion time is compared, the Japanese, block 2 The predetermined completion time of -β is earlier, so the batch 2 is configured because -〇 (Fig. 7). The waiting time wt ^ symbol 2 generated here can be configured as block 2 - G, but here is the date (4) ^ is allowed for a certain time, so the configuration conditions are not met. After the capacity-B configuration block 2 - (X Figure 26 β step 8). Secondly, from the block ^ at the scheduled completion time of block 2 97126028 β and block 2 39 200912581 -c 'configuration block c (Figure 26C step 9). [Step HM2] At step 9, a wait_ is generated at block 1-c, which has exceeded the allowable time. After block 2-C and block 2-B are excluded, the block (4) 27a step 1) is configured. Next, comparing the predetermined complete oblique riding of blocks 2 - A and 1 , the earlier blocks 2 - B are configured (Fig. 27β step (1). Then, the predetermined completion of blocks 2 to b and block 丄-c is performed _ In comparison, the block 2 is connected to the earlier nB (X Figure 27C, step 12). [Steps 13~15] In the step ~Wang Shangyufu Town called we, this has exceeded the allowable time. Excluding block 2-G and After block 2-B, because there is a choice after the block 2 - g is equipped with 2-B, the block D is first configured (step 13 of Fig. 28A). The predetermined completion of 2-A and block 1-D , configure early B (Fig. 28 Β = step 14). Then, from block 2_β and block η predetermined, block 2 - c is continued following block 2 - (Fig. 28 (: step 15). [Steps 16~18] In the step of the block Μ axis to _wt, this taste is over the exclusion block and block 2_A, there is no block 卜2-摩^', so before the block 2 -A, configure the block C (Fig. = (8). First, compare the scheduled completion time of the block and the batch start time (pre-start time), because the batch 2 yuan (predetermined start_earlier, so configure block 2, 29β 2 70%) = 97126028 200912581 times, will block 2 - A and block 1 - C The predetermined completion time is compared, and the block 2 - B is arranged next to the earlier block 2 - A (step 18 of Fig. 29C). [Steps 19 to 21] The predetermined completion times of the blocks 1 - C and the blocks 2 - B are compared. , Continuing from the earlier block 2 - B and configuring block 2 - C (step 19 of Figure 30A). However, the waiting time wt has exceeded the allowable time. Therefore, block 2__c and block 2__B are excluded, and block 1 - D is configured. Instead (Fig. 30B, step 2〇). For all blocks of batch 1, the block is completed. 'Select only block 2 - B' is left, so block 2 - B is configured (step 30 of Figure 30C). [Steps 22~24] Since only block 2 - c following block 2 - B is selected, block 2 - c is configured (step 22 of Figure 31A). Here, a wait time wt is generated at block 2-C, which has exceeded the allowable time. Therefore, the block is excluded. 2 —c, block 2 —B and block 2 —A (Fig. 3ΐβ step

twenty three). Since the selection only has the block 2_A', the block 2 - a is configured (Fig. 4) [Step 25~27J

Since the choice is only followed by block 2 - B of block 2 - A, block 2 - b is configured (step 25 of Figure 32A). Since the next option is to block only blocks 2 - c of block 2 - β, block 2 - C is configured (Fig. 32, step 26). This is at block 2-C which produces a wait time wt which has exceeded the allowable time. In the combination of the map, it is impossible to arrange in all the paths, so the batch 丨 _ 隹 查 查 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' First, the configuration is scheduled to go on and further into 27). The block at the beginning of the earlier time A (Fig. 32C step [step 28~30J 97126028 41 200912581 in the scheduled completion time of block 1-A and the scheduled start time of batch 2, because the scheduled start time of batch 2 is earlier, Therefore, block 2 - A is configured (step 28 of Fig. 33A). Since batch 1 and batch 2 collide in the first transport mechanism CTC, the configuration of block 2 -A is avoided, but block 1-B is configured (step 33B) 29) Compare the scheduled start time of the batch 2 with the predetermined completion time of the block 1 - B, and configure the earlier block 2 - A (Fig. 33C, step 30). [Steps 31 to 33] Blocks 1 - B and The predetermined completion time of block 2 - A is compared because block 2 - A is earlier, so it is continued in block 2 - A configuration block 2 - B (step 34 of Fig. 34A). Second, block 1 - B and block 1 - C The predetermined completion time is compared, and the block 1-C is arranged following the earlier block 1-B (step 34 of Fig. 34B). Then, in block 1 - C and block 2 - B, the block 2 - B is scheduled to be completed. Since the time is earlier, the block 2 - C is arranged following the block 2 - B (step 34 of Fig. 34C) [Steps 34 to 36] However, since the lot 1 is not carried out from the drying processing unit LPD1 Therefore, block 1 - C of batch 1 and block 2 - C of batch 2 collide. That is, block 1 - C and block 2 - C cannot be adjacently configured. Therefore, when block 2 - C is excluded, because Select to become block 1 - D, so configure block 1 - D (step 34 of Figure 35A). For all block configuration of batch 1 is completed, select only block 2 - C, so configure block 2 - C (Figure 35B step 35) After configuring blocks 2 - C, since only blocks 2 - D are selected, blocks 2 - D are configured (Fig. 35C, step 36). When according to the first configuration method described above, steps can be performed in comparison with the basic configuration method. 97126028 42 200912581 44 Step 34 completes the configuration of all the blocks. The attempt error is indicated by the symbols 1 to 36 surrounded by the broken line in Fig. 23. According to the first configuration method, the blocks are configured according to the above basic configuration method, and simultaneously When the waiting time generated by the block exceeds the allowable waiting time in the processing unit, the configuration at the block is avoided, and the data corresponding to the recipes of the respective blocks of the respective batches are combined (the pedigree of Fig. 23) Figure), one from the upstream of the block The branch point starts to explore again for scheduling. Therefore, because it is not configured for the downstream of the block with the reason of the configuration, the number of trials can be reduced. The result is when compared with the above basic configuration method. 'The scheduling time can be shortened. <Second configuration method> (input batch order) Fig. 流程图 is a flowchart showing the flow of the second configuration method, and the figure is a schematic diagram (a pedigree) 2 scheduling method of the matching method. In addition, the steps Vh V2 and V4 to V7 are the same as the 'synthesis 1'1, 12, 1'4 to 17' of the above-described basic arrangement method, and therefore the detailed description is omitted. Difficult to match [Step V3]" In the obtained block, the predetermined open of the batch is searched [Steps V8 to VII]. When the steps T8 to TU with the basic configuration method are for the batch having the block whose waiting time exceeds the allowable time, the batch 97126028 is taken as the starting position of the A-y 200912581 initial block to be temporally shifted backward. Step V11 excludes the block of the aborted configuration and the block whose waiting time exceeds the allowable time. [Steps V12 to V14] In comparison with the steps U12 to U14 of the first configuration method, the step of step V13, in which the block of the waiting time exceeds the allowable time, is in the above formula, 'the batch 1 is started first, when In the second configuration method

In the case of scheduling, there is a combination of blocks as shown in FIG. Further, in Fig. 37, the number surrounded by a broken line corresponds to the step number in the following description. Here, referring to FIG. 38 to FIG. 43 % bb 曰 μ s , the specific schedule of the shed is created. In addition, FIG. 38 to =: Γ is used to indicate the configuration process of the second configuration method. Block 1, the start time is the earlier batch 1, and the scheduled start time is the second because block 2 owes earlier in the block configuration block 1-B (step 2 of Fig. 38B). X is spliced to the block 1-A and U is scheduled to start earlier, in block ^ and block 2 -" because block -C (Fig. 38C, step 3). Therefore, block 1 is arranged next to the block 1-B [Step 4^ In block 1 - C and block 2 ^ , the time is earlier, so the connection: the predetermined start of block 1 - C of person 1 is 4). For batch 1 because all blocks are configured in block 1-D (Figure 39A, so configure block 2 ~ Α ( ° ' is configured, select only block 2 - A, 97126028 ^ step 5 3. Second, continue with block 2 - Λ Configuration 44 200912581 Block 2 - B (Step 6 of Figure 39C) [Steps 7~9] Since only Block 2 - C is selected, Block 2 - C is configured (Step 7 of Figure 40A). However, the wait time wt has been Exceeding the allowable time. Therefore, the memory is not configurable for reasons that the waiting time has exceeded the allowable time, and the unconfigurable block is excluded. Specifically, all blocks except batch 2 and block 1 of batch 1 are all except A Block (Step 8 of Figure 40B). Then, make the interval between batch 1 and batch 2 expand (large, re-schedule. First, in batch 1 and batch 2, because the scheduled start time of batch 1 is Early, so configure block 1 A (Fig. 40B, step 8). In block 1 - B of batch 1 and block 2 - A of batch 2, because batch 1 is scheduled to start earlier, configure batch 1 Block 1 - B (Step 9 of Figure 40C) [Step HM2] In Block 1 - C of Batch 1 and Block 2 - A of Batch 2, because Batch 1 is scheduled to open At a later time, block 1 - C of batch 1 is configured (Fig. 41A, step 10), and second, in blocks 1 - C and 2 - A, because of the scheduled start time of batch 1 of blocks 1 - C Earlier, configure blocks 1 - D (step 11 of Figure 41B). Then, for batch 1, block 2 - A of batch 2 is configured because the configuration of all blocks has been completed (step 41 of Figure 41C). However, the time interval between block 1-A and block 2-A is larger than the previous time interval. [Steps 13 to 15] Since only blocks 2 - B are selected, blocks 2 - B are configured (Fig. 42A, step 13). Since only block 2 - C is selected, block 2 - C is configured (Fig. 42B, step 97126028 45 200912581 14). Second, since only block 2 - D is selected, block 2 - d is configured (step 15 of Fig. 42c). According to the second configuration method of the above-described manner, the configuration of all the blocks can be completed in step 15 which is less than the step 44 of the basic configuration method. The attempt error is indicated by symbols 1 to 15 surrounded by a broken line in the figure. In the case of the method, the prior batch is processed by prioritizing the start of each batch that is originally specified. Block, and when configuring a batch of blocks, when configuring different batches of blocks, it is not configurable due to physical constraints, and can be suppressed from being returned in the block configuration according to the pedigree. Therefore, the scheduling time can be short. <3rd configuration method> (continued block)

In the case of explaining the third arrangement method, it is easy to understand the difference from the basic arrangement method, and the case shown in Fig. 43 which is different from the above-described recipe is used, and the case where the three batches are used as the object is scheduled as an example. . In addition, FIG. 43A is a specific example of the timing chart of the single batch of the first one, and the figure is a specific example of the timing chart of the batch 2 of the single batch 'FIG. 43C; the timing chart of the batch 3 of the single batch Specific examples. In the case where the number of batches is three, in the case where the above formula is applied, there is a combination of blocks as shown in Fig. 45 and as shown in Fig. 45. In addition, the figure & is a schematic diagram (a genre diagram). When the three basic batches are processed by the basic configuration method, the example of the schedule combination is used. In the 44th, the step number of the money is surrounded by the number. ° Brother and the Moon "The row of the substrate processing apparatus. In addition, this third arrangement method corresponds to the method of creating a 97126028 46 200912581 in the present invention." <Basic Arrangement Method in Case of Three Batches> Here, specific schedule creation will be described with reference to Figs. 46 to 51. In addition, Fig. 46 to Fig. 51 are used to indicate the configuration procedure using the basic configuration method in the case of three batches. Further, 'the scheduled start timing of the batch 3 is set after the batch 1 and the batch 2', the same as the one shown in Fig. 46A. That is, when the lot 1 is washed with pure water (the 'treatment unit 0NB1 process' lot 2 is processed by the pure water washing processing unit 0NB2, the predetermined start time of the lot 3 is set. Therefore, the time processing is first excluded. Block 1 - B and block 2 - block after B (Fig. 46B) [Step 1] At this time 'At the scheduled completion time of block 1-B, the scheduled completion time of block 2 - B, and batch 3 In the scheduled start time, since the scheduled start time of the batch 3 is the earliest, the block 3 - a is arranged (step 1 of Fig. 46C). U [Steps 2 to 4] In block 1 - B, block 2 - ~ β, and block 3 - In A, since the predetermined completion time of the block 3 - A is the earliest, the block 3_B is arranged (step 2 of Fig. 47A). However, the block 2 - B is not carried out from the pure water washing processing unit (10) B2, so a batch conflict occurs. Therefore, 'blocks 3~~B cannot be configured. Therefore, the configuration position of block 3-A of batch 3 is configured in a time-shifted backward manner (Fig. 47B, step 3). In blocks, blocks 2 - B and 3 - In A, 'Because Block 3 - A is the earliest scheduled completion time, configure Block 3 - B (Step 47 of Figure 47C). 97126028 47 200912581 [Steps 5~7] Because Batch 2 and Batch 3 are in The pure water washing treatment unit 〇nb2 collides, so Wei 3-B cannot be assigned. Therefore, the blocks 3 to B are excluded, and the block 3-4a is again shifted backward in time (step 5 of Fig. 48A). Secondly, following Block b, block ^ B, and block 3 - A are scheduled to complete when the old d takes the early block 2 - B and configures block 2 - C (Fig. 48B step 6). Second, for the change ~ ~ B, block 2 - C and block 3 - A, which are connected to the block 3~A ^ and 八 in the earliest scheduled completion time, and block 3 - B (Fig. 48C, step 7). [Steps 8 to 10] For block 1 B, block 2 - C And pump Q n ^ 槐3 - B, continue to block 1 - B at the earliest scheduled completion time and configure blocks l ~ ~ c (49A step 8). However, because batch conflicts occur, exclude blocks 1 ~ r C At the same time, in block 2 - C and block 3 - B, the block 2 - PI / c which is the earliest completion time is scheduled, and block 2 - D is configured (step 49 of Fig. 49B). Its - person, in block 1 B block 2 In d and block 3_b, the block μ is arranged next to the block 1-B at the earliest completion time (Fig. 49c, step 1). [Steps 11 to 13] In the block C, and the block 3-B, the connection is scheduled. Completion of the earliest block 3 - B and configuration block 3 - C (Figure 5 〇 _ _曰m eight steps 11). But 疋 'because block 1 - C and block 3 - C collide ' so avoid 埗 Q ρ π pull you 3 - C configuration 'continued in block 1 - c configuration block 1 - D Instead of (Fig. 50 brewing 1〇, Gan a, Tian to Xixi step 12). The two, because only the block 3 - C is selected, the block 3 - C is Μ (Fig. 50C step 13). [Step 14] Since only block 3~D is selected, the block 0_D is connected from the block 3 - C (Fig. 97126028 48 200912581 51, step 14). As described above, in accordance with the basic configuration method of the three batches, in step 14, Wang. The configuration of the p block is 1%. The material test error is indicated by symbols 1 to 14 surrounded by a broken line in Fig. 44. First, the third configuration method will be explained. Further, the ® 52 is a flowchart for describing the flow of the third arrangement method, and Fig. 53 and Fig. % are schematic diagrams (genegrams) for indicating a combination example of scheduling in the third arrangement method. [Procedures Wl, W2] In the batch that has not reached the unconfigurable, the initial block that has not yet started is obtained. The processing branch is made according to whether or not the block exists. [Steps W3 to W8] In the acquired block, the block in which the predetermined completion time of the previous block is the earliest (step W3) is searched for (block W4). Then, the branch is processed (frequency W5) according to whether the configuration condition is satisfied. In the case where the configuration condition is satisfied, the block continued to be transferred to the block to be configured (step W6)', and in the same batch t, the process is branched according to whether or not the block below the block exists (step W7). In the case where there is no next block, the processing branch is performed in accordance with whether or not all the blocks have been configured, and the execution is repeated from the step W3 before all the blocks are configured (step W8). [Step W9] When there is no block in the step W2, the unconfigurable state is reset, and the start position of the initial block of the lot is memorized in a temporally backward manner. [Step W10] 97126028 49 200912581 § When the configuration condition is not satisfied in step W5, the unconfigurable batch block is excluded and the memory is not configurable. [Step W11] In the case where there is the same batch in step W7, it is configured in accordance with whether or not the configuration condition can be satisfied, so that the processing is branched. When it is configured to satisfy the configuration conditions, it branches to step W6, and when it is not configurable, it branches to step w1. Here, a specific schedule creation will be described with reference to FIGS. 55 to 59. Further, Fig. 55 to Fig. 59 are timing charts for showing the configuration process by the third arrangement method. Further, similarly to the above-described basic arrangement method, the start timing of the batch 3 is set after the batch 1 and the batch 2, and the timing is as shown in the figure. Therefore, the block U after the processing and the block after the block 2 - B are first excluded (Fig. 55B). [Step 1] At this time, in the scheduled completion time of the block 1-B, the scheduled completion time of the block 2 - β, and the scheduled start time of the lot 3, since the predetermined start time of the lot 3 is the earliest, the configuration block is configured. 3 - A (Fig. 55C, step 1). [Steps 2 to 4] Since block 3-A ' has been configured, continue to configure blocks 3 - B (Fig. 2). However, since block 2-B and block 3-8 cause a collision, the user is pre-memorized by avoiding the configuration of block 3 - b. Since block 3 - B of batch 3 cannot be configured, blocks 3-A, 3-B are deleted, and the block which is scheduled to be completed earlier is arranged in Fig. 56β step 3). Then 'because there is block 2 - D of the same batch 3, block 2 - D is arranged following block 2 97126028 200912581 - C (Fig. 56C step 4). [Steps 5 to 7] For the batch 2, since the configuration of all the blocks has been completed, the block 3 - A of the batch 3 which is scheduled to start earlier is arranged next (step 57 of Fig. 57A). However, because the order is not configurable, its starting configuration position is memorized in a time-shifted manner. Therefore, compared with step 2 (Fig. 56A), its configuration position is shifted in time. Since block 3 -A has been configured, continue to configure block 3 -B (step 6 of Figure 57B). Because the configuration conditions are not met, block 3 - b is excluded, block 3 - A is excluded, and batch 1 is configured. Block i_c (step 7 of Figure 57C). [Step 8 to 1〇] Since the block 丨-c is already configured, continue to configure the block 丨-D (Fig. 58A, step 8). Since the configuration of all blocks of batch 1 has been completed, it is configured for batch 3. At this time, since the configuration position has been shifted in the previous step 5 (Fig. 57A), the block 3 A is arranged at a position shifted backward in time (Fig. mb, step 9). Since block 3 - A ' has been configured, block 3-B is continued (Fig. 58C, step 1). [Steps 11, 12] Since Blocks 3 - B have been configured, continue to configure Blocks 3 - c (Step 59 of Figure 59A). Since block 3 - c ' has been configured, block 3 - D continues to be configured (Fig. 59 β step i2). According to the third configuration method as described above, the configuration of all the blocks can be completed in step 12 which is less than step 14 of the basic configuration method. The #trial error is indicated by symbols 1 to 14 surrounded by broken lines in Figs. 53 and 54. According to the third configuration method, the batch is the same as the previously configured batch of the 97126028 51 200912581 batch, and the short scheduling time is stopped from the stop state. The schedule of the fourth processing method is shown in the flowchart of FIG. 60, which is a schematic diagram (system diagram 4) used to indicate the fourth configuration method. Medium scheduling combination example. Further, the steps Q, Χ2, χ4 to χ7 are the same as the steps Π, T2, and T4 to T7 of the above-described basic arrangement method, and therefore the description thereof will be omitted. The fourth matching fund is touched on the "production method of the substrate processing apparatus" in the present invention. [Step Χ 3] In the obtained piece of towel, the time when the block towel is the shortest is checked. However, in the comparison between the first blocks, the earlier of the predetermined start timings was selected. [Steps 〜8 to XII] The difference from the basic configuration method is the steps χ9 and XU. That is, 0 in step Χ9, if there is a block of the batch whose waiting time exceeds the allowable time, the configuration position is started to be memorized in the backward offset mode. In step 11, the block obtained by the block stop configuration block is obtained again, and the block of the stop configuration and the block of the batch whose waiting time exceeds the allowable time are excluded. [Steps X12 to X14] These steps are the same as the second configuration method described above. In the case where the above-described basic arrangement method, the first arrangement method, and the second arrangement method are made to make the batch 1 difficult to perform, the 97126028 52 200912581 has a combination of blocks as shown in Fig. 61. Further, the number enclosed by the dotted line in _ 6i corresponds to the step number in the following description. Here, reference is made to FIGS. 62 to 66 for explaining a specific disassembly process. Further, Fig. 62 to Fig. 66 are timing charts for showing the configuration process by the fourth configuration method. However, in the present example, the allowable time of the i-th transport mechanism (10) = the daily charge of the dry processing unit LPD1 = 00, the pure water in the second processing unit: the leg of the management section and the second process of the pure water washing treatment section (10) Allowance of β2 = OO 〇 [Steps 1 to 3] First, the block 1-A is arranged for the batch which is earlier than the scheduled completion time (predetermined start time) (Step 1 of Fig. 62A). n Its - human configurable block U and block

2—A, in each of the previous blocks 丨A.t A only batch-person 2’s scheduled start time, because

The allowable date of C A is too short, so configure the block 丨-B (Fig. 2). Secondly, configurable is: block C and block 2 - A, in the beginning of each block " batch_person 2, because the allowable time of block 1-B is longer than the one, so the configuration is connected to the block丨, block Bu [Steps 4 to 5] H set the block μ and the block 2 block b because each of the previous blocks C: and the scheduled start of batch 2 _ and the allowable date _ mesh, etc., so block 1 C is compared with the predetermined starting time of block 2-A, and the earlier block 2-A is configured (Fig. 4). Then, the configurable block and the block before the block-B block c (allowable time _) and the block Η (allowable time _) 97126028 53 200912581 odor, configuration (four) in the block of the coffee shop (four) block 2-a 2, coffee step 5). Secondly, it will be 4 2 A

#) rv+ H block D and block 2-C allowable day ^ time = W) and block 2 — __ = _, block 2-C (H曰/丁 comparison 'continued to allowable time Short block 2 to B and block 2 C (Fig. 63C, step 6). [Steps 7 to 9]

<疋 The waiting time wt of block 2-C here has exceeded the allowable time. Therefore, the investment interval between the minus 1 and the batch 2 is expanded, and the scheduling is performed again. First, configure ^_ earlier M1 block A _A step 7). In the equivalent: configurable block 1_~B _ block 丨-A, and the equivalent of the configurable block 2 depends on the start of the batch 2, because the allowable time of the block 1-A is shorter, it is configured in the block Block U (Figure 6 fairy step 8). After the missing, configure the block 1-C with a shorter allowable time (Step 9 in Figure 64C). [Steps 10 to 12] In the configurable block 1-D and the block b and the predetermined start time of the block corresponding to each of the blocks 2 - A, since the predetermined start time of the block 2_A is earlier, the block 2 is configured. -A (Fig. 65A, step 1Q). Secondly, in the block 1-C (allowed time = 〇〇) and block 2 - A (allowed nc) which are equivalent to the previous block, since block 2 -A has a shorter allowable time, it is continued in block 2 - a Block 2 - B is configured (step 65 of Figure 65B). Then 'in the block i-c (allowable time = 〇〇) and block 2 - B (allowable time = 18 〇 sec) which are equivalent to the previous block, because the allowable time of block 2 - B is known, 'thus continues Block 2__^ configures block 2_c (Fig. 65C, step 12). 97126028 54 200912581 [Steps 13 to 15] However, when the block 2 - C is configured, since the batch 1 and the batch 2 collide in the drying processing portion LPD1, the block 2 - c is excluded, and the block D is arranged (Fig. 13 ). For batch 1 since all blocks have been configured, select only block 2 - ^ so configure block 2 - C (step 66 of Figure 66B). Since only blocks 2 - D are selected, block 2 - D is configured (step 66 of Figure 66C). According to the fourth configuration method as described above, the entire block configuration can be completed in step 15 which is less than step 44 of the basic configuration method. This attempt error is indicated by the symbol M5 surrounded by the dashed line in Fig. 61. According to the fourth configuration method described above, even if the block having a short allowable time can be physically arranged, it is often not allowed to be placed in the allowable time, and the return is generated by the combination (genreogram). Therefore, it is possible to easily avoid the unconfigurable time caused by the allowable time by the block having the shorter allowable time, so that the scheduling time can be shortened. By using the above-described basic arrangement method, the second arrangement method, the second arrangement method, the third arrangement method, and the fourth arrangement method, the schedule creation method is used to make a schedule, and the schedule is scheduled to be performed within a predetermined time. The scheduling of the earlier completion of the scheduled completion time is performed, and the working rate of the substrate processing apparatus can be improved. In addition, due to the variety of configuration methods, the schedule creation time can be prevented from becoming longer. The present invention is not limited to the above embodiment, and can be implemented as follows. (1) The above-described implementation of the basic configuration is a combination of the picking method, the second method, the third method, and the fourth method, but the present invention can also be combined in the basic configuration method. ^ 97126028 200912581 Any configuration method. (2) In the above-mentioned real towel, the use of _ processing two: domain three batches two, t schedule as an example, but the four batches as the object of scheduling f month conditions can also be applied to the present invention . (3) In the above-mentioned implementation, it is a case in which the formula of the money is washed and the dry mouth is taken as an example (4), but the present invention is not limited to the formulation, and even various formulations may be applied. The present invention may be embodied in other specific forms without departing from the spirit and scope of the invention. Therefore, the scope of the present invention is not described above, but rather the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a schematic configuration of a substrate processing apparatus of an embodiment for illustrating a schematic configuration of a substrate processing apparatus of an embodiment. Figure 3 is a flow chart showing the main program of the schedule. Figure 4 is a flow chart showing the flow of the basic configuration method. Figure 5 is a specific example of a sequence diagram of a single batch of illusion. Fig. 5A is a specific example of the timing chart of the batch 2 of a single batch. Fig. 6 is a diagram showing an example of the schedule combination of the basic arrangement method when the diagram is shown in Fig. 6. "The sequence of the day 1 is used to indicate the configuration process of the basic configuration method. 97126028 56 200912581 Figure 7B is a timing diagram of Step 2, which is used to indicate the configuration process of the basic configuration method. Figure 7C is a timing diagram of step 3 for indicating the configuration process of the basic configuration method. Figure 8A is a timing diagram of step 4 for indicating the configuration process of the basic configuration method. Figure 8B is a timing diagram of step 5 for indicating the configuration process of the basic configuration method. Figure 8C is a timing diagram of step 6 for indicating the configuration process of the basic configuration method. Figure 9A is a timing diagram of step 7 for indicating the configuration process of the basic configuration method. Figure 9B is a timing diagram of step 8 for indicating the configuration process of the basic configuration method. j Figure 9C is a timing diagram of step 9 to illustrate the configuration process of the basic configuration method. Figure 10A is a timing diagram of step 10 for indicating the configuration process of the basic configuration method. Figure 10B is a timing diagram of step 11 for indicating the configuration process of the basic configuration method. Figure 10C is a timing diagram of step 12 for indicating the configuration process of the basic configuration method. 97126028 57 200912581 Figure 11A is a timing diagram of step 13 for indicating the configuration process of the basic configuration method. Figure 11 is a timing diagram of step 14 for indicating the configuration process of the basic configuration method. Figure 11C is a timing diagram of step 15 for indicating the configuration process of the basic configuration method. Figure 12B is a timing diagram of step 16 showing the configuration f process of the basic configuration method. Figure 12B is a timing diagram of step 17 for indicating the configuration process of the basic configuration method. Figure 12C is a timing diagram of step 18 for indicating the configuration process of the basic configuration method. Figure 13A is a timing diagram of step 19 for indicating the configuration process of the basic configuration method. - Figure 13B is a timing diagram of step 20 for indicating the configuration process of the basic configuration method. Figure 13C is a timing diagram of step 21 for indicating the configuration process of the basic configuration method. Figure 14A is a timing diagram of step 22 for indicating the configuration process of the basic configuration method. Figure 14B is a timing diagram of step 23 for indicating the configuration process of the basic configuration method. 97126028 58 200912581 Figure 14C is a timing diagram of step 24 to illustrate the configuration process of the basic configuration method. Figure 15A is a timing diagram of step 25 for indicating the configuration process of the basic configuration method. Figure 15B is a timing diagram of step 26 for indicating the configuration process of the basic configuration method. Figure 15C is a timing diagram of step 27 for indicating the configuration of the basic configuration method. Figure 16A is a timing diagram of step 28 for indicating the configuration process of the basic configuration method. Figure 16B is a timing diagram of step 29 for indicating the configuration process of the basic configuration method. Figure 16C is a timing diagram of step 30 for indicating the configuration process of the basic configuration method. u Figure 17A is a timing diagram of step 31 for indicating the configuration process of the basic configuration method. Figure 17B is a timing diagram of step 32 for indicating the configuration process of the basic configuration method. Figure 17C is a timing diagram of step 33 for indicating the configuration process of the basic configuration method. Figure 18A is a timing diagram of step 34 for indicating the configuration process of the basic configuration method. 97126028 59 200912581 Figure 18B is a timing diagram of step 35 for indicating the configuration process of the basic configuration method. Figure 18C is a timing diagram of step 36 for indicating the configuration process of the basic configuration method. Figure 19A is a timing diagram of step 37 for indicating the configuration process of the basic configuration method. Figure 19B is a timing diagram of step 38 for indicating the configuration f process of the basic configuration method. Figure 19C is a timing diagram of step 39 for indicating the configuration process of the basic configuration method. Figure 20A is a timing diagram of step 40 for indicating the configuration process of the basic configuration method. Figure 20B is a timing diagram of step 41 for indicating the configuration process of the basic configuration method. I Fig. 20C is a timing diagram of step 42 for indicating the configuration process of the basic configuration method. Figure 21A is a timing diagram of step 43 for indicating the configuration process of the basic configuration method. Figure 21B is a timing diagram of step 44 for indicating the configuration process of the basic configuration method. Figure 22 is a flow chart showing the flow of the first configuration method. Fig. 23 is a schematic view showing an example of a schedule combination of the first arrangement method. 97126028 60 200912581 Figure 24A is a timing diagram of step 1 for indicating the configuration process of the first configuration method. Fig. 24B is a timing chart of the step 2 for indicating the configuration process of the first configuration method. Fig. 24C is a timing chart of the step 3 for indicating the configuration process of the first configuration method. Fig. 25A is a timing chart of step 4 for indicating the configuration of the first configuration method. Fig. 25B is a timing chart of step 5 for indicating the configuration process of the first configuration method. Fig. 25C is a timing chart of step 6. Fig. 26A is a timing chart of the step 7 for indicating the configuration process of the first configuration method. Fig. 26A is a timing chart of the step 8 for indicating the first configuration method. Fig. 26C is a timing chart of the step 9 for indicating the configuration process of the first configuration method. Fig. 27A is a timing chart of the step 10 for indicating the configuration process of the first configuration method. The timing chart is used to indicate the configuration process of the first configuration method. 97126028 61 200912581 FIG. 27C is a timing chart of step 12 for indicating the configuration process of the first configuration method. FIG. 28A is a timing chart of step 13 for indicating the Fig. 28B is a timing chart of the step 14 for indicating the configuration process of the first configuration method. Fig. 28C is a timing chart of the step 15 for indicating the configuration of the first configuration method (process. Fig. 29A Is a step The timing chart of step 16 is used to indicate the configuration process of the first configuration method. Fig. 29B is a timing chart of step 17 for indicating the configuration process of the first configuration method. Fig. 29C is a timing chart of step 18 for indicating the 1. Configuration procedure of the configuration method. Fig. 30A is a timing chart of step 19 for indicating the configuration process of the first configuration method. Fig. 30A is a timing chart of step 20 for indicating the configuration process of the first configuration method. 30C is a timing chart of step 21 for indicating the configuration process of the first configuration method. Fig. 31A is a timing chart of step 22 for indicating the configuration process of the first configuration method. 97126028 62 200912581 FIG. 31B is a timing chart of step 23. Fig. 31C is a timing chart of the step 24 for indicating the configuration process of the first configuration method. Fig. 32A is a timing chart of the step 25 for indicating the configuration of the first configuration method. Fig. 32B is a timing chart of step 26 for indicating the configuration f process of the first configuration method. Fig. 32C is a timing chart of step 27 for indicating the configuration process of the first configuration method. Fig. 33A is step 28 The timing chart is used to indicate the configuration process of the first configuration method. Fig. 33B is a timing chart of the step 29 for indicating the configuration process of the first configuration method. & Figure 33C is a timing chart of the step 30 for indicating the first Fig. 34A is a timing chart of step 31 for indicating the configuration process of the first configuration method. Fig. 34B is a timing chart of step 32 for indicating the configuration process of the first configuration method. The timing chart of 33 is used to indicate the configuration process of the first configuration method. 97126028 63 200912581 FIG. 35A is a timing chart of step 34 for indicating the configuration process of the first configuration method. Fig. 35B is a timing chart of the step 35 for indicating the configuration process of the first configuration method. Fig. 35C is a timing chart of the step 36 for indicating the configuration process of the first configuration method. Figure 36 is a flow chart showing the flow of the second configuration method. Fig. 37 is a schematic diagram showing an example of a schedule combination of the second arrangement method. Fig. 38A is a timing chart of the step 1 for indicating the configuration process of the second configuration method. Fig. 38B is a timing chart of the step 2 for indicating the configuration process of the second configuration method. Fig. 38C is a timing chart of the step 3 for indicating the configuration process of the second configuration method. Fig. 39A is a timing chart of the step 4 for indicating the configuration process of the second configuration method. Fig. 39B is a timing chart of the step 5 for indicating the configuration process of the second configuration method. Fig. 39C is a timing chart of the step 6 for indicating the configuration process of the second configuration method. Fig. 40A is a timing chart of the step 7 for indicating the configuration process of the second configuration method. 97126028 64 200912581 FIG. 40B is a timing chart of step 8 used to indicate the configuration process of the second configuration method. Fig. 40C is a timing chart of the step 9 for indicating the configuration process of the second configuration method. Fig. 41A is a timing chart of step 10 for indicating the configuration process of the second configuration method. 41B is a timing chart of the step 11 for indicating the configuration of the second configuration method (process. FIG. 41C is a timing chart of step 12) for indicating the configuration process of the second configuration method. FIG. 42A is a timing chart of the step 13. Fig. 42B is a timing chart of step 14 for indicating the configuration process of the second configuration method. I Fig. 42C is a timing chart of step 15 for indicating the configuration of the second configuration method. Fig. 43A is a specific example of the timing chart of batch 1 of a single batch. Fig. 43B is a specific example of the timing chart of batch 2 of a single batch. Fig. 43C is a timing chart of batch 3 of a single batch. Fig. 44 is a schematic diagram showing an example of a combination of exhaust and squeezing when three batches are processed by a basic configuration method. Fig. 疋 diagram showing the basic configuration method of three batches of 97126028 65 200912581 Scheduling combination example. Figs. 46A and 46B are timing charts for explaining the configuration process of the basic configuration method of the three batches, showing the state before the start. Fig. 46C is a timing chart of the step 1 for indicating 3 Basic configuration method for batch conditions Figure 47A is a timing diagram of step 2, which is used to indicate the configuration process of the basic configuration method for three batches. r Figure 47B is a timing diagram of step 3, which is used to indicate the basic configuration method of three batches. Figure 47C is a timing diagram of step 4, which is used to indicate the configuration process of the basic configuration method of the three batches. Figure 48A is a timing diagram of step 5, which is used to indicate the basic configuration of the three batches.

The configuration process of the method. Figure 48B is a timing diagram of step 6, the configuration process of the method. Figure 48C is a timing diagram of step 7, the configuration process of the method. Fig. 49A is a timing chart of the step 8 of the configuration process of the method. Fig. 49B is a timing chart of the step 9, the configuration process of the method. Figure 49C is a timing diagram of step 10 for indicating the basic allocation of the three batches to indicate the basic allocation of the three batches. The basic allocation of the three batches is used to indicate the three batches. Basic configuration, used to indicate the configuration process of the basic 97126028 66 200912581 configuration method for 3 batch situations. Fig. 50A is a timing chart of the step 11 for indicating the configuration process of the basic configuration method of the three batches. Fig. 50B is a timing chart of the step 12 for indicating the configuration process of the basic configuration method of the three batches. Fig. 50C is a timing chart of the step 13 for indicating the configuration process of the basic configuration method of the three batches. [Fig. 51 is a timing chart for indicating step 14 in the configuration process of the basic configuration method for three batches. Figure 52 is a flow chart showing the flow of the third configuration method. Fig. 53 is a schematic view showing an example of the schedule combination of the third arrangement method. Fig. 54 is a schematic view showing an example of the schedule combination of the third arrangement method. Figs. 55A and 55B are timing charts for showing the state before the start of the configuration process of the third arrangement method. Fig. 55C is a timing chart of the step 1 for indicating the configuration process of the third configuration method. Fig. 56A is a timing chart of the step 2 for indicating the configuration process of the third configuration method. Fig. 56B is a timing chart of the step 3 for indicating the configuration process of the third configuration method. Fig. 56C is a timing chart of the step 4 for indicating the configuration process of the third configuration method. 97126028 67 200912581 Figure 57A is a timing diagram of step 5 for indicating the configuration process of the third configuration method. Fig. 57B is a timing chart of the step 6 for indicating the configuration process of the third configuration method. Fig. 57C is a timing chart of the step 7 for indicating the configuration process of the third configuration method. Fig. 58A is a timing chart of the step 8 for indicating the configuration of the third configuration method. Fig. 58B is a timing chart of the step 9 for indicating the configuration process of the third configuration method. Fig. 58C is a timing chart of the step 10 for indicating the configuration process of the third configuration method. Fig. 59A is a timing chart of the step 11 for indicating the configuration process of the third configuration method. Fig. 59B is a timing chart of the step 12 for indicating the configuration process of the third configuration method. Figure 60 is a flow chart showing the flow of the fourth configuration method. Fig. 61 is a schematic view showing an example of the schedule combination of the fourth arrangement method. Fig. 62A is a timing chart of the step 1 for indicating the configuration process of the fourth configuration method. Fig. 62B is a timing chart of the step 2 for indicating the configuration process of the fourth configuration method. 97126028 68 200912581 Figure 62C is a timing diagram of step 3 for indicating the configuration process of the fourth configuration method. Fig. 63A is a timing chart of the step 4 for indicating the configuration process of the fourth configuration method. Fig. 63B is a timing chart of the step 5 for indicating the configuration process of the fourth configuration method. Fig. 63C is a timing chart of the step 6 for indicating the configuration of the fourth configuration method. Fig. 64A is a timing chart of the step 7 for indicating the configuration process of the fourth configuration method. Fig. 64B is a timing chart of the step 8. , which is used to indicate the configuration process of the fourth configuration method. Fig. 64C is a timing chart of the step 9 for indicating the configuration process of the fourth configuration method. I Fig. 65A is a timing chart of the step 10 for indicating the fourth configuration method. Fig. 65B is a timing chart of step 11 for indicating the configuration process of the fourth configuration method. Fig. 65C is a timing chart of step 12 for indicating the configuration process of the fourth configuration method. Fig. 66A is the timing of step 13. The figure is used to indicate the configuration process of the fourth configuration method. 97126028 69 200912581 Fig. 66B is a timing chart of step 14 for indicating the configuration process of the fourth configuration method. Fig. 66C is a timing chart of step 15 for indicating the fourth [Configuration of main components] [Front description of main components] 1 Front opening general-purpose container 3 Input unit 5 Mounting table 7 Discharging unit 9 Mounting stage 19 First processing unit 20 Second processing unit 21 Third processing unit 22 Fourth processing Part 31 Control unit 33 Scheduling function unit 35 Process execution instruction unit 37 Memory unit 39 Arrangement control unit 41 Scheduling time monitoring unit 43 Scheduling selection unit CHB1, CHB2, CHB3, CHB4 Chemical liquid processing unit 97126828 70 200912581 CTC First handling Mechanisms LF1, LF2, LF3, LF4 Sub-transport mechanism LPD1 > LPD2 Drying processing unit 0NB1, 0NB2, 0NB3, 0NB4 Pure water washing processing unit W Substrate wt Waiting time WTR Second transport mechanism 97126528 71

Claims (1)

200912581 VII. Patent application scope: L. The age of the base for the reduction of the number of the bases, the age _ when there are a plurality of substrate processing apparatuses for processing the processing unit for the substrate to process a plurality of batches, the control unit includes The processing sequence of the plurality of processing steps determines the processing order of each batch, and the respective processing units sequentially process the respective batches. The method includes the following steps: The control unit executes: the configuration method, according to the representation and each The processing of each processing step of the batch, the page order corresponding to the (four) map, after the initial processing step for any batch configuration, 'using the above processing steps as a base point, according to the above pedigree map, processing from each batch Step-by-step, explore the processing steps of the first batch of the pre-equivalent time in the step of each ship's new face, as the next processing step; and the first and first configuration methods, configure the processing steps according to the above basic configuration method, At the same time, the waiting process generated by the processing step exceeds the configuration of the processing step of the upper tank in the processing unit, and from the processing step method - re-phase pure ; Choi line as described above while the party creating step of scheduling the plurality; and - 1-th row of said = & 'while selecting step of scheduling towel completion within a predetermined time of a schedule. Method 2: = Please schedule the substrate processing device of the first item of the patent range. In addition to the respective configuration methods, in addition to the respective configuration methods, the second step is provided to: Method configuration 97126028 26028 200912581 y $ According to the initial processing sequence of each batch specified, after the initial processing steps are configured for each batch, the processing is performed in the next batch. The processing of the batch is a step. </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> When the processing is configured according to the above-described configuration method, when there is a processing step of the above-mentioned batch that can be arranged in the processing step of the batch configured first, the processing steps of the batch are preferentially configured. In addition, in the method of creating the substrate processing device of the second item of the fourth patent (4), in addition to the respective arrangement methods, the third configuration branch is provided. When listening to the steps of the process, when there are processes that can be connected to the batch configuration, the processing of the batch is performed, and the above-mentioned 5 of the configuration of the m-person (4) is configured as a case where the processing steps of the above batch are preferentially configured. 5. If you apply for a full-time (four) w (four) ^ slave substrate processing device, Cheng Zuo Cheng Fang, in the preparation of the above multiple schedules, the shovel fourth configuration method, according to the various configuration methods, the slaves of the steps The shortest method between the contents of the tree ί ' 请 请 请 专利 专利 专利 专利 专利 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板Each of the f-soils is more equipped with the following: in the fourth configuration, the county (four) is equipped with the w-method configuration 97_4, and the allowable time for the processing of the material is shorter. The processing steps of the batch of steps. 7. In the method of the substrate processing apparatus of the third item, the method of the above-mentioned plurality of scheduling steps is performed, and the fourth configuration method is provided: the fourth configuration method is configured according to the basic configuration method described above. In the processing step, the 理m material having the processing step of the processing part is preferentially configured. % Short place 8. - The touch of the base area device is made into green, and the control data contains the order of the multi-steps, and the batches are called when the silk is processed. The processing sequence 'is used to sequentially process each of the processing units. The above method includes the following steps: u The control unit performs: a basic configuration method, corresponding to the processing order corresponding to each of the Nunau mineral steps After the combination of the _ 谱 : : 欠 欠 欠 欠 欠 欠 欠 欠 欠 欠 欠 欠 欠 欠 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合The earliest batch of the predetermined completion time in the previous processing steps: the owed processing step as the next one of the steps; and the =y configuration method, when the processing steps are configured according to the basic configuration method described above, according to the batches originally specified Start processing, after configuring the initial processing steps for each of the other sub-processes, in the next processing step of each batch, prioritize the above-mentioned first batch of slave processing steps; The step of creating a plurality of the above-described method of scheduling; 9,712,602,874,200,912,581 creating and scheduling a plurality of the above-described, while step of selecting t a predetermined schedule when the schedule. △ For example, please arrange the schedule of the substrate processing device in the eighth item of the patent range _ In addition to the above-mentioned multiple schedules, in addition to her own laws, there are more: 帛3 configuration branches, in the _ Shangxian distribution In the case of the above-mentioned batch=processing step of the processing step of the batch configured in the first configuration, the processing steps of the above batch are preferentially configured. In the step of creating the above-mentioned plurality of schedules, in addition to the respective configuration methods, there is a fourth configuration method according to the above basic configuration. The method configuration takes precedence over the processing steps of the batch of processing steps that can be waited for by the processing unit for a shorter period of time. The method for preparing a substrate processing apparatus according to claim 9 of the patent application scope, wherein in the step of creating the plurality of schedules, except for the respective configuration methods, the configuration method is configured according to the basic configuration method: 'Prioritize the processing steps of a batch having a processing step that can be waited for by the processing unit for a short period of time. In the scheduling method of the substrate processing apparatus, the plurality of batches/days are processed by the substrate processing μ having the processing unit having the plurality of substrate application processing units, and the processing unit determines the processing order including the plurality of processing steps. The processing sequence of each batch and person is used to sequentially process each batch processing method by each processing unit, and includes the following steps: Person, 97126028 75 200912581 The above-mentioned control department implements: Basic configuration method, according to the shirt and each miscellaneous The order of processing of each of the gifting steps corresponds to the combined pedigree, and after the initial processing steps for any batch configuration, 'the above processing steps are used as the silk point, and the ship is swayed, and the processing steps from each batch are explored. And configuring a processing step for the batch of the earliest predetermined completion time in each of the preceding processing steps as a processing step τ and a third configuration method 'when the processing step is configured according to the basic configuration method, when there is a continuation system Set the batch processing steps to configure the processing steps of the above batches, and use the above-mentioned method to handle the dumping; The step U of making a plurality of schedules is made into the above-mentioned touch, and the schedule is completed by the same time (four). 13. The schedule of the substrate processing apparatus of the No. 12 item of the towel patent is made in the eighth step of the above-mentioned plurality of scheduling steps, except for the respective configuration methods. The configuration method configuration processing preferentially configures the processing of the batch of the village-reduction department. The method of making the substrate is difficult to make, and when there are multiple times, the processing substrate is placed at the county level, and the batch is processed by a number of batches. Each of the batches ==:: one processing unit sequentially processes each batch; upper 9712228 76 200912581 The above-mentioned control unit executes: The basic configuration method 'based on the pedigree corresponding to the processing order of each of the processing steps of each shirt In the initial processing step of any batch configuration, the it processing step is used as the base point. According to the above pedigree diagram, from the respective batch=next processing steps, 'explore and configure the pre-processing steps for each of the preceding processing steps. * The processing steps of the earliest batch are the next processing step; and the fourth configuration method 'When the processing steps are configured according to the above basic configuration method, the 'worry configuration has the allowable time to wait in the processing unit. a processing step of a batch of short processing steps; a step of performing a plurality of schedulings by performing the above method; and making the plurality of schedulings described above, and simultaneously selecting a schedule therein A step in the schedule that is completed in time. In the scheduling method of the substrate processing apparatus, when a plurality of batches are processed by a substrate processing apparatus including a processing unit for multi-soil to processing, the control data includes a processing order of the township. The processing sequence of each batch of mosquitoes is used to sequentially process each batch by each processing unit; the above method includes the following steps: The above control unit performs: the first configuration method, the processing steps are configured according to the basic configuration method, and When the waiting time for the processing step is generated (4), when the processing time of the processing unit is allowed, the configuration of the processing step is avoided, and the searching is started again from another branch point of the upstream processing point of the processing step, and the basic configuration is performed. Method 97126028 77 200912581 According to the pedigree corresponding to the processing sequence of each processing step of each batch, after the initial processing step is configured for any batch, the following steps are taken as the basis, according to the above pedigree, From the processing of each batch below + in the process of 'exploring and configuring the completion of each of the previous processing steps The processing step of the batch of the engraving is taken as the next processing step; and the second configuration method 'in the processing procedure according to the basic configuration method described above, according to the processing sequence of the initial designation of each batch, the initial configuration of each batch After the processing step, in the processing steps of each batch, the processing steps of the batch starting with the processing sequence are first set; if the method is performed by the method, the steps of the plurality of scheduling are performed; The schedule 'selects the steps in which one of the schedules is touched. In addition to the respective configuration methods, the third configuration method is configured to be configured in the processing steps of the batch configured according to the above basic configuration method. In the case of the processing steps of the if batch, the processing steps of the above batch are preferentially configured. The substrate processing method of the fifteenth item of the σ26 patent range, wherein, in the step of making a schedule, in addition to the configuration of the above-mentioned respective configuration methods, in the step of making a schedule "There is a fourth method, and according to the above-mentioned steps, priority is given to the department and the ancient π" "(4) priority configuration has a processing step that can be waited at the processing unit for a short period of time: 97126028 78 200912581 . 18. The method for preparing a substrate processing apparatus according to the scope of claim 16 of the present invention, wherein in the step of creating the plurality of schedules, in addition to the respective configuration methods, the processing steps of the batch of the processing steps are prepared. According to the fourth configuration method, in the arrangement according to the basic configuration method, the step tk is first configured to have a scheduling method for the substrate processing apparatus having a short allowable time waiting for the processing unit. When the plurality of batches are processed by the substrate processing apparatus of the processing unit for processing the substrate (4), the control unit determines the processing order of each batch based on the processing order including the plurality of processing steps, and sequentially uses the processing units for each processing unit. Processing each batch; the above method includes the following steps: The control unit performs: the first configuration method 'configures the processing step according to the basic configuration method, and when the waiting time generated by the processing step exceeds the allowable time that can be waited at the processing unit In the case of reading, the configuration of the 'back_processing step, and from the branch point upstream of the processing step - the branch point starts again. (4) The basic configuration method is based on the combination of the processing sequence of each processing step of each batch according to Table 7F, and after the initial processing step is performed for any batch, the processing V step is used as the base point. IPlease refer to the processing steps from the next processing step of each batch and configure the processing steps for the batch of the earliest scheduled completion time in the processing steps of each other as the next processing step; and 97126028 79 200912581, - the method of configuring the processing steps according to the basic configuration method described above, wherein the processing steps of the batch are configured in the case where the processing steps of the batch configured in the batch slave processing step of the leader &amp; The steps of the above method are performed to make a plurality of schedules; and the plurality of rows are formed, and a step in which the schedule is completed within a predetermined time is selected. 20. The method for preparing a substrate processing apparatus according to Item 19 of the Patent Patent No. 19, wherein in addition to each of the plurality of scheduling steps, a fourth configuration method is provided. When the above basic configuration method configures the processing steps, the processing steps of the batch having the processing steps that can be processed for a short period of time are preferentially configured. 21_ A method for preparing a substrate processing apparatus, wherein a plurality of batches of control units are processed by a substrate having a processing unit for processing a substrate having a plurality of substrates, and each of the plurality of processing units determines a processing order including a plurality of processing steps. The batch-person processing sequence 'is used to sequentially process each batch by each processing unit; the above method includes the following steps: The control unit performs: The first configuration method 'configures the processing steps according to the basic configuration method, and simultaneously When the above-mentioned processing step rides the transition _ more than can be in the situation between the positions, the return processing step of the "n.../4 wins eight _ 乂 乂 之 , , , , , , , , , , , , , , , , , , 再 再Start the exploration, and according to the processing sequence corresponding to the processing sequence of each batch of each processing step, the 97126028 200912581 system is used to process the initial processing steps after the batch-to-batch configuration. ', the processing steps of the batch of the earliest batch of the processing step at the scheduled completion time are taken as the next processing step; and the fourth matching Method 'When configuring a processing step according to the above basic configuration method, preferentially configuring a processing step of a batch having a processing step that can be waited for by the processing unit; and performing the above method to create a plurality of scheduling steps; And making the plurality of schedules described above, and selecting a step in which the schedule is completed within a predetermined time. I 22. The method for preparing the schedule of the substrate processing apparatus is to use a plurality of pairs of substrates Then, the silk processing county of the processing department handles the processing of a plurality of batches-persons. The control unit processes each of the batches of the mosquitoes according to the processing sequence including the plurality of processing steps. The method of the above I includes the following steps: The control unit performs: The second configuration method, the processing steps are configured according to the basic configuration method, and the same processing sequence is the same as 1=7, 4 After configuring the initial processing steps for each batch, 'in each of her slaves, the first step is to configure the batch slave processing steps that start earlier. The configuration method is based on a pedigree that is not combined with the processing order of each processing step of each of the processing steps. After the initial processing step is configured for any batch, the processing step 97126028 81 200912581 is used as a base point, according to the above pedigree, From the processing of the next batch of the batches, 'explore and configure the processing steps for each valve face, the financial order completion time is the most = the batch processing step as the next processing step; and the third configuration method' is based on When the processing step of the basic configuration method is configured, when there is a processing step of the batch configured to be connected to the processing step of the batch configured first, the processing steps of the batch are preferentially configured; The steps of multiple schedules; and at the same time, the schedules are completed within the specified time period - 23·If the application of the 5th patent scope of the application is 22nd, the schedule of the base reduction equipment of _ Tian Zhuangdi ^ is made into squares, In addition to the respective arrangement methods, the steps of creating the plurality of schedules include: 4th Sakizawa, and 'Priority' A processing step is provided with a batch that can be awaited by the processing unit. The shorter one is the method of creating a schedule for the county, and the system uses a substrate processing device having a plurality of processing units to process a plurality of batches. Each of the batches ==:: one processing unit sequentially processes each batch; the above-mentioned control unit performs: the second configuration method, the first configuration method of the first step of the mosquito, and according to the order in which the person starts processing, After configuring the initial processing steps of 97126028 82 200912581 for each batch, in the next processing step of each batch, the above-mentioned processing of the first batch slaves is preferentially configured, and the basic configuration method is based on the representation and each The pedigree of the corresponding combination of the processing steps of the batch slaves, after the most-in-one configuration of the corresponding-subtractive configuration, the above processing steps are used as the base point, and the processing steps from the respective batches are followed according to the above-mentioned tactile In the 'exploration and configuration of the processing steps for each of the previous processing, the earliest batch of human processing steps, as the next processing step; and the fourth configuration method 'in accordance with the above basic configuration When the processing step is configured, the processing step having the batch that can be processed in the processing section (four)_processing step is preferentially configured; the step of performing the above method for the scheduling of the shirt is performed; and the plurality of difficulties described above are simultaneously selected. The step of finishing a schedule that is completed within a prescribed time. 25. A scheduling method for preparing a substrate processing apparatus, wherein when a plurality of batches are processed by a substrate processing apparatus including a plurality of substrates to which a processing and processing unit is applied, the control unit performs processing according to the plurality of processing steps. In the order, the processing order of each batch is determined, and each batch is sequentially processed by each processing unit. The above method includes the following steps: The control unit executes: the third configuration method, and the processing steps are configured according to the basic configuration method, In the U condition of the processing steps of the above batch configured in the processing steps of the batch that can be connected to the first configuration, the processing steps of the batch are preferentially configured, and the basic configuration side is determined according to the representation and each batch. The pedigree of the combination of the processing steps of the next processing step, after the initial processing step is configured for any batch, using the above processing steps as a base point, according to the pedigree diagram, from each batch - the processing step 'Exploring and arranging the earliest batch of scheduled completion time for each of the previous processing steps Step, as a next processing step ^4th configuration method, when configuring the processing step according to the basic configuration method described above, preferentially configuring a processing step having a batch of processing steps that can be processed for a shorter waiting time; The steps of performing the above method to make a plurality of schedules; and making the plurality of schedules described above' simultaneously select a schedule in which the schedules are completed within the specification. 26. The method for preparing a substrate processing apparatus according to claim i, wherein in the step of selecting a step, the control unit selects the earliest money from the schedule completed within the prescribed time. The only schedule. 27. The method for preparing a schedule of a substrate at the substrate of item 8 of the application, wherein, in the step of selecting the above schedule, the control unit selects the earliest completion processing from the privatization completed within the prescribed time. The only schedule. The process of creating a substrate processing apparatus according to item 12 of the patent application scope is as follows. In the step of selecting the above-mentioned scheduling, the above-mentioned control officer selects the earliest processing from the schedule of completing 97126028 84 200912581 within the prescribed time. The only schedule. The law 29 is like /, and it is expected that the 14th slavery of the county will be set aside. ^Select the _ Cheng Zhicai, the above (4) miscellaneous schedule, select the only schedule that is the earliest to complete the processing. In the case of the processing of the substrate processing device of the patent application scope ls, the ground wheel job selects the only schedule that is the earliest to complete the processing. The material (4) 19-shaped wire-shaped device is cut into the square. 1 In the above-mentioned scheduling step, the above-mentioned control (4) selects the only scheduling--distribution of the earliest processing from the scheduling. In the step of the above-mentioned scheduling, the control unit is in the process of selecting the above-mentioned schedule, and the control unit is the earliest in the process of scheduling the schedule. Only - touch. _Intra-element method (4) 22-shaped base area management _ Cheng Zuocheng In the step of selecting the above schedule, the above-mentioned control department from the schedule of the regulation, the first to complete the money is difficult. (10) Yuancheng 34. If the substrate processing apparatus of claim 24 of the patent application scope is smashed into a 97126028 85 200912581 method, in which the step (4) is selected from the scheduled time, the above-mentioned (four) part is scheduled to be completed within the prescribed time. 'Select the only schedule that is the earliest to complete processing. 35. The method for preparing a substrate processing apparatus according to claim 25, wherein, in the step of selecting the schedule, the control unit selects the earliest processing from the schedule completed in the (4) interval. The only schedule.电脑 A computer-readable information recording medium, in which a substrate processing apparatus is prepared, and (4) 'When a plurality of batches are processed by a substrate processing apparatus of a processing unit where a plurality of substrates are applied to the substrate, the control unit The processing sequence including a plurality of processing steps determines the processing order of each batch, and is used to process each batch in an orderly manner; the above program includes the steps of the town. The basic configuration method 'according to the processing of the processing steps corresponding to each of the processing steps, the pedigree correspondingly combined, after the initial processing step for any batch configuration, the above processing steps as a base point, according to the above pedigree map, from each In the processing step of batch = one, the processing steps of the batch of the earliest predetermined completion time in each of the preceding processing steps are searched and configured as the next processing step, and a first configuration method according to the above basic configuration method The processing step is configured, and when the waiting time generated by the processing step exceeds the waiting time allowed in the processing unit, the configuration of the processing is reversed, and the branch point is re-pointed from the branch point upstream of the processing step. Beginning to explore; 97126028 86 200912581 The steps of performing the above method to make a plurality of schedules; and completing the above-mentioned plurality of schedules' simultaneously select the steps in which the schedules are scheduled for a predetermined time. The information recording medium that is electrically thin can be recorded, and the substrate processing device is recorded. The program is processed by a plurality of substrates for processing the substrate. The multi-record is processed by the county. (4) The processing sequence of a plurality of sub-steps determines the processing sequence of each batch, and is used to process the batches of each item sequentially in each page; the above program includes the following steps: The above control unit performs: Basic configuration method According to the processing sequence indicating the processing steps of each batch, the m-predicate, after the initial processing step for any batch configuration, the above processing steps are used as the base point, and according to the above i (four) graph, from each batch Processing the steps, exploring and compiling the processing steps of the batch completion time and the early batch in the steps of the stepping step as the next processing step; and the second configuration method 'configuring the processing according to the basic configuration method described above In the step, according to the most her own Na Nanu start processing, after the initial processing steps are configured for each batch, in each batch: the next processing step towel, priority configuration Processing begins processing order than the first batch of step; thus implementing the above method of scheduling a plurality of steps and made; and creating a plurality of the above-described scheduling, wherein the step of selecting simultaneously scheduled completion within a predetermined time of a schedule. 8. A computer-readable information recording medium in which a schedule preparation program of a substrate processing apparatus 97126028 87 200912581 is recorded, and a plurality of batches are processed by a substrate processing apparatus including a plurality of processing units for applying a substrate to a substrate When the control unit determines the processing order of each batch based on the processing sequence including the plurality of processing steps, the processing unit sequentially processes the respective batches by the respective processing units. The program includes the following steps: The control unit executes: The basic configuration method is based on a pedigree that is combined with the processing order of each processing step of each of the various slaves. After the initial processing step is configured for any batch, the processing step is used as a base point, and each batch is used according to the pedigree. The next processing step, the money allocation configuration processing step for the earliest batch of the predetermined completion time in each processing step is taken as the next processing step; and, the third configuration method 'is based on the above basic configuration Method When the processing step is configured, when there is a batch that can be connected to the processing step of the previously configured batch, Emotion scales processing step, the priority of the batch the above-described configuration step; thus the step of creating a plurality of schedules of implementing the above methods; and creating a plurality of the above-described scheduling '_ select schedule a predetermined time schedule. 39.- A computer-readable information recording medium, recorded with a substrate processing device, and a program created by the company. There are a plurality of processing methods for applying the substrate to the substrate. ==^2^Tree _ Stick earning includes multiple Processing Department Shun box processing (9) - Shang _ private 対 "The next step ^ where the above control department is implemented: 97126028 88 200912581 顺 == method: according to the processing of each processing step with each batch, the above 2 (four) In the first step of the batch-to-batch configuration, the steps are as follows: 'According to the above pedigree chart, when each batch is completed and configured, the processing steps for each of the preceding processing steps are as follows - Processing step frequency; and the basic configuration method configuration processing step, the batch-human processing step of the processing step waiting for a shorter waiting time in the processing unit; thus performing the above method to make a plurality of scheduling Step; making the above multiple schedules' while selecting the steps in which it is difficult to schedule a schedule. The information recording medium "recording the substrate processing device creation program" is used to process a plurality of batches by using a plurality of processing methods for the substrate application processing: the control unit According to the processing sequence of the processing steps, the processing order of each batch is determined, and the processing unit is used to process each batch sequentially. The above-mentioned control unit includes the following steps: ^Setting|Subtracting the basic configuration method The processing step is configured, and at the same time, the branch phase generated above exceeds the branch point before the processing unit can wait for the branch point::=: The upstream step according to the table does not correspond to the processing order of each processing step of each batch. The combination of 97126028 89 200912581 capture map after the initial processing steps for any batch configuration, the steps as the base point, according to the above-mentioned car encounter processing, on the 'from each batch below the next step, explore and configure The processing steps of the batch that are scheduled to be completed in the processing plane of the south v _ each # are the processing steps of the next one; and the configuration method of the brother 2 is based on Kawasaki said basic processing steps in accordance with the method of configuring a shape of each of the first recording track slave _ Shu Yang, at times after initial wear of each step of the process, in a batch under the respective process steps, Priority The processing steps of the batch in which the processing sequence is earlier are started; the step of performing the above method to create a plurality of schedules; and the step of making the above-mentioned multiple repentances while selecting one of the schedules in which it is difficult to complete in the prescribed_. 41. A kind of computer-readable information recording medium, which records the scheduling of the substrate processing and splicing, and the substrate processing device of the processing unit of the substrate is applied to the home. According to the processing material including a plurality of processing steps, the mosquitoes are used to sequentially process the respective batches by the respective processing units; the upper axis includes the following steps: &lt; The above control unit carries out: 1 configuration method, the processing step is configured according to the basic configuration method, and when the waiting time generated by the processing step exceeds the allowable time waiting for the processing unit, the configuration of the processing step is avoided, and the branch from the upstream of the processing step The point before the point starts to be explored again, and the basic configuration method is based on the processing sequence corresponding to each processing step of each batch, and the 97126028 90 200912581 pedigree is configured, and the initial processing steps are configured for any batch. Then, using the above processing steps as a base point, according to the above pedigree map, from the processing steps of each batch, explore and configure the pair a processing step of a batch of the earliest completion time in each of the preceding processing steps as a next processing step; and a third configuration method, when the processing step is configured according to the basic configuration method, when there is a batch that can be connected to the first configuration In the case of the processing steps of the batch described above, the processing steps of the batch are preferentially configured; (the steps of performing the above method to make a plurality of schedules; and creating the plurality of schedules at the same time) Step of completing a schedule in the specified _. 42.: A computer-readable information recording medium, recorded with a substrate processing device a privately made &amp; 'When there is a plurality of substrates applied to the substrate When the substrate processing apparatus for processing P is processed to reduce the time, the control unit determines the processing order of each batch according to the processing sequence including the plurality of processing/steps, and sequentially processes each batch by each processing unit; The following steps are included: · The above control unit executes the ·· ^ setting, and configures the processing steps according to the basic configuration method, while at the same time ~ main V ^ The waiting time generated is longer than the waiting time that can be waited for in the processing unit. 1 = N condition % • 'avoiding the configuration of the processing step, and starting again from the upstream branch points of the processing step, and the basic configuration method is rooted The table does not correspond to the processing order of each processing step of each batch, and after the initial processing step of _ a batch configuration, in the above process 97126028 91 200912581 Φ = base point ' according to the above pedigree, from each batch The processing step of the next processing step - the processing step of the predetermined processing completion step in the processing step of the facing area is taken as the next processing step; and the bursting 4 configuration method is based on the basic configuration method described above When the processing steps are configured, the processing steps of the batch having the processing steps with a short allowable waiting time are set; the steps of the plurality of scheduling are performed by the above method; and, A step in which a schedule is completed within a specified time. A computer-readable information recording medium in which a schedule preparation program of a substrate processing apparatus is recorded, and when a plurality of batches are processed by a substrate processing apparatus including a plurality of processing units for applying a substrate to the substrate, control is performed The department determines the order of each batch according to the sequence of multiple steps, and processes each batch sequentially with each processing unit; the above program includes the following steps: ^ The above control department implements: The θ first configuration method 'configures the processing steps according to the basic configuration method, and according to the initial processing sequence of each batch of the initial batch, after the initial processing steps are configured for each batch, 'the next processing step in each batch , preferentially configuring the above-mentioned σ where the item sequence &amp; first batch red processing step, and the silk screen configuration method according to the table is not combined with the processing order of each batch of each processing step of the pedigree 'in any batch After the initial processing step of the sub-configuration, the above processing steps are used as the base point m (four) map, and the processing steps from the next sub-process are 97126028 92 200912581. And configuring a processing step for the batch of the earliest scheduled completion time in each of the preceding processing steps as the next processing step; and when the two parties configure the processing step according to the basic configuration method, when there is a batch that can be connected to the first configuration The processing steps of the batch processing configured in the second processing step are preferentially configured with the processing step of the slaves; thus, the steps of the plurality of scheduling are performed only by the above method; and the plurality of schedulings are completed within the same time, Select the step in which a schedule is mixed in the specified time. 44--a computer-readable information recording medium, in which a substrate processing device is recorded as a privately-made shirt, and when a substrate processing wire having a multi-dip substrate application portion is disposed, the control unit is configured according to The processing includes a plurality of processing steps, the processing of each of the slaves of the mosquitoes, and (4) sequentially processing each of the seven batches of the miscellaneous type including the towns by the respective processing units: The control unit performs: In the second configuration method, the processing steps are configured according to the basic configuration method, and at the same time, according to the initial form of the milk, the slaves are arranged in the order of the other, and after the processing steps are performed, the processing is performed in each lower step, and the priority is configured. The above-mentioned opening: Department:: Lai Xian's batch processing steps, and the basic configuration method is root: ❿, each batch of slaves each processing step of the corresponding sequence of the field map 'in the right-to-batch configuration The initial processing step 曰 as the base point, I indicate the feeding, m U describes the processing step mountain, phase 5 day chart, from the next batch of processing steps 'exploration and configuration for each of the previous processing steps, the scheduled completion time is the earliest 97126028 93 200912581 Batch processing steps, as a processing step of τ-, and J 4 ^ method, when the processing steps are configured according to the above-mentioned county configuration method, priority is given to the batch correction of the village money transfer (4) batch Processing step; thus performing the above method (4) step of multi-turning; and making the above-mentioned plurality of touches, the lion is in the step of scheduling. 45. A computer-readable information recording medium in which a schedule processing program of a substrate processing apparatus is recorded, and a plurality of batches are processed by a substrate processing apparatus including a plurality of processing units for applying a substrate to a substrate When the control unit determines the processing order of each batch based on the processing sequence including the plurality of processing steps, the processing unit sequentially processes the money of the seven-axis-type Baotou-cho in the processing unit: The control unit executes: 3 Configuration Method 'Configure the processing steps according to the basic configuration method, and at the same time, in the case of the processing steps of the above batch configured in the processing steps of the batch that can be connected to the first configuration, the above-mentioned batch slave processing is preferentially configured (4), and the job configuration The method is based on a pedigree indicating a combination corresponding to each of the processing steps of each slave, 'after the initial processing step is configured for any batch, and the above processing steps are used as a base point', according to the above (4) diagram, from each batch In the next processing step, the first step of the processing step for each of the previous processing steps is explored and configured. Step, as the next processing step; and the fourth configuration method, when the processing step is configured according to the basic configuration method described above, 97126028 94 200912581 is preferentially configured to have a processing step that can be processed in the processing unit; ia, the processing step of b t. The above-mentioned method of “making a plurality of schedules; and making the above-mentioned plurality of rows of light, and selecting the material touches in a scheduling step. The intervening internal hunger-type substrate processing device is arranged. In the method, when the substrate is used for processing the substrate, and the field J is used for a plurality of times, the control unit processes the processing steps of the plurality of batches of the image processing step according to the processing device, and is used for Each of the processing units sequentially processes each of the methods including the following steps: · Each of the above-mentioned control units executes: 2 according to the table, the pedigree circle of each batch of slaves is read. The initial processing step of a batch configuration 』= the processing steps as the base point, according to the above pedigree processing steps, 探帝#(四)#... 分顺-人下下刻刻In the processing step of the batch-w surface, the method is scheduled to be completed, and the steps of the processing step are configured in the following steps: the basic configuration method is used to configure the processing steps; the spear is straight and used according to the configuration of the silk screen. Method configuration processing step, sue that the processing step is difficult to produce _ more than can be transferred in the processing unit; _ in the case of October, avoid the configuration of the processing step, and from the processing step ^ 1 fulcrum before a branch Point to the special configuration method to start exploring again; ^ The step of scheduling. Shui Yucheng 97126028 95 200912581 47. - A computer-readable information recording medium, recording the schedule processing program of the substrate processing device 'When using When a plurality of batches are processed by the substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit determines the processing order of each batch based on the processing order including the plurality of processing steps, and uses each of the processing units. Each of the batches is processed sequentially; the above program includes the following steps: The control unit executes: corresponding to the processing order according to the respective processing steps of the respective batches (Combined pedigree map, after the initial processing step for any batch configuration, using the two processing steps as the base point, according to the above pedigree map, from the processing steps of each batch, explore and configure each front The processing step in the processing step in which the earliest reduction of the predetermined completion time is taken as the basis of the next processing step: the method of configuring the processing step is configured by the method 1; and - and the processing step is used according to the configuration of the upper-level configuration, when When the waiting phase generated by the processing step ride exceeds the allowable time of the processing component, the configuration of the processing step is avoided, and the special configuration is started from the upstream of the processing step as the fulcrum. Method to schedule the steps. The scheduling method of the hunger-type substrate processing apparatus is to process a plurality of batches by using a base reduction unit having a processing unit having a large number of substrate application portions. According to the processing sequence of a plurality of processing steps, the processing sequence of each batch is determined, and each batch is sequentially processed by each processing unit; the above method includes the following steps: 97126028 96 200912581 The above control unit performs: The table is not combined with the processing sequence of each processing step of each batch, and after the first processing step of the arbitrary-batch configuration, the above processing step is used as a base point, and each batch is explored and configured according to the above pedigree map. The steps of the next processing step; and after exploring and configuring the next processing step, according to the initial processing sequence of the batches specified initially, after configuring the initial processing steps for each batch, under each (under the batch) In the processing steps, the processing steps of the preceding batch processing sequence are preferentially configured to be scheduled. 49. A computer-readable information recording medium, and a schedule processing program for recording the substrate processing device is recorded. When a plurality of batches are processed by a substrate processing apparatus including a plurality of processing units for applying a substrate to the substrate, The processing unit determines the processing order of each batch based on the processing sequence including the plurality of processing steps, and sequentially processes each batch by each processing unit; the program includes the following steps: ϋ The control unit performs: Corresponding to the processing sequence of each processing step of each batch, after the first processing step of the arbitrary-batch configuration, using the above processing steps as a base point, according to the above pedigree map, the next batch is explored and configured. Steps of the processing steps; and when exploring and configuring the next processing step, following the initial processing sequence of each batch originally specified, after configuring the initial processing steps for each batch, the processing steps in each batch In the above, the processing sequence of the first batch is 97126028 97 200912581, and the processing step (4) is the step of scheduling. 50. - Substrate processing device = substrate application processing Zou's base plate processing = appliance: how much :Time: The manufacturing department according to the processing sequence including multiple processing steps, the method includes the following steps The above-mentioned control unit performs: :: each: the processing order of each processing step corresponds to the first processing step of the combined μ person configuration, and the above processing + step is used as a base point, according to the upper line 吟 'y steps Steps; and the figure 'financial configuration of the next batch of each part ^ explore the ship down step _, the material processing in the batch configuration step of the first configuration of the batch processing steps Steps of prioritizing the processing steps of the above batches to form a schedule. 51. - A computer-readable information recording medium, recorded with a substrate processing device f, and a process 4 for the application of the substrate to the substrate When the substrate of the processing unit is disposed at a plurality of times, the control (four) transfer includes a processing sequence of a plurality of processing steps, and the order of processing is determined, and each batch is sequentially processed by each processing unit; The program includes the steps of the town: The control unit executes: according to the genre map corresponding to the processing order of each processing step of each batch, after the first processing step is configured for any batch, As a basis point, according to the above pedigree diagram, the steps of the next processing steps of each batch are explored and configured, and the next processing step is explored and configured, and there is a batch that can be connected to the previous configuration. In the case of the processing steps of the above-described batches configured in the next processing step, the processing steps of the above batches are preferentially arranged to perform the scheduling step. 52. A method for preparing a substrate processing apparatus, wherein when a plurality of batches j are processed by a substrate processing apparatus including a processing unit for processing a plurality of (four) substrates, the control unit performs processing according to a plurality of processing steps The processing sequence of each batch is used to sequentially process each batch by each processing unit; the above method includes the following steps: The control unit performs: 1 艮 According to each processing step of each batch The processing sequence corresponds to the combination of the map 'After the initial processing steps for any batch, the above processing steps as the base point' depends on the material, turn over, and configure the various steps (4); # 4 / in the f cable and configuration In the next processing step, the step of preferentially arranging the scheduling with the allowable _ (4) processing step red processing step waiting for processing in the processing unit is preferentially configured. The information recording medium of the computer can be recorded, and the scheduling processing of the substrate processing apparatus is recorded. When the plurality of batches are processed by the substrate processing apparatus having a plurality of processing units for processing the substrate, the control unit includes a plurality of batches. The processing steps are in the order of the processing, and the processing sequences are processed sequentially. Each of the processing units sequentially processes the respective batches; the above program includes the following steps: 97126028 99 200912581 The above-mentioned control unit executes: According to the representation and the various slaves The processing sequence of each process (4) corresponds to the combined pedigree, and after the initial processing steps are configured for any batch, the above processing is used as the base point, and the steps of the next processing steps of each batch are explored and configured according to the above pedigree map. And when the next processing step is explored and configured, the processing steps of the batch having the processing steps that can be waited for by the processing unit are preferentially configured to be scheduled. 97126028 100