JP4027110B2 - Substrate processing apparatus schedule creation method and program thereof - Google Patents

Description

【００３４】
レシピは、ａ処理工程からｅ処理工程までであって、一部を複数回行なう７つの処理工程から構成されているが、上述した許容時間を有する処理工程で区切るようにしてＡ〜Ｃの三つのブロックに分けている。
【００３５】
『Ａブロック』は、第１搬送機構１１が投入部３側からカセット１を取り出し、第２搬送機構１３がそのカセット１からロット（複数枚の基板Ｗ）を取り出し、第１処理部１９の薬液処理部１９ｂがそのロットを薬液処理してから純水洗浄処理部１９ａに至るまでの処理である。なお、その間に実行されるカセット洗浄部２３による空のカセット１の洗浄処理については省略してある。
【００３６】
詳細には、第１搬送機構１１が投入部３のカセット１を取り込んで第２搬送機構１３に渡し、第２搬送機構１３がカセット１からロットを構成する複数枚の基板Ｗを取り出すまでがａ処理工程であり、ロットを第３搬送機構１５が受け取って所定位置で待機するまでがｂ処理工程であり、第３搬送機構１５からロットを受け取り、このロットを純水洗浄処理部１９ａで純水洗浄し、副搬送機構１９ｃによりロットを薬液処理部１９ｂに搬送して薬液処理し、その後、再び副搬送機構１９ｃを経て純水洗浄処理部１９ａに搬送して純水洗浄処理を終えるまでがｃ処理工程である。なお、表中の数字は前作業、本作業、後作業に要する時間（分）の一例を示している。
【００３７】
『Ｂブロック』は、第３搬送機構１５が純水洗浄処理部１９ａから処理済みのロットを取り出し、乾燥処理部１７に搬送して乾燥処理を終えるまでの処理である。
【００３８】
詳細には、純水洗浄処理されたロットを第３搬送機構１５が受け取って所定位置で待機するまでがｂ処理工程であり、ロットを乾燥処理部１７に搬送して乾燥処理を終えるまでがｄ処理工程である。
【００３９】
『Ｃブロック』は、第３搬送機構１５が乾燥処理されたロットを取り出し、第２搬送機構１３がカセット１にロットを収納した後、カセット１ごと第１搬送機構１１が払出部７に搬送するまでの処理である。
【００４０】
詳細には、乾燥処理されたロットを第３搬送機構１５が受け取って所定位置で待機するまでがｂ処理工程であり、第２搬送機構１３がロットを受け取り、複数枚の基板Ｗをカセット１に収納するとともにカセット１ごと第１搬送機構１１に渡して払出部７に払い出しするまでがｅ処理工程である。
【００４１】
なお、上述したブロックＡ，Ｂにおける最後の処理工程、つまりｃ処理工程とｄ処理工程とが、速やかに次の処理を施すことなく次の処理まである程度の時間を空けてもよい許容時間を有する処理工程である。
【００４２】
次に、図３ないし図８を参照しながら、二つのロットを同じレシピで順次に処理する場合を例に採って説明する。
【００４３】
これらのうち図３はスケジュールの組み合わせ例を示した図であり、図４ないし図８はスケジュール作成の過程を示す図である。また、図４ないし図８では、処理工程を「ロット−ブロック」の符号で示している。つまり、図３中の「１−Ａ」は第１のロットのブロックＡの処理工程を表している。
【００４４】
まず、制御部２７は、最初に二つのロットのうち、いずれかを先にスケジュールするかを決定する。
【００４５】
簡単には、第１のロットの方を先にスケジュールするようにする。この場合、スケジュールのタイムチャートは図４に示すように、第１のロットのブロックＡが基準時刻（後述する「スケジュール基準時刻」と同じである）から配置される。このように予めスケジュールを作成するようにしたので、先の処理工程の本作業が終わった時点で次なる処理工程の本作業が開始されるように処理工程を配置することができる。すなわち、終了信号ｅが出力される時点でロットの払い出し（符号ｍ）が行なわれるのである。以下、本作業が終わる時点を払出予定時刻と称する。
【００４６】
上記のように二つのロットのうち第１のロットのブロックＡ（符号１−Ａ）を配置したので、図３の組み合わせから明らかなように、次に選択可能なのは「第１のロットのブロックＢ」か「第２のロットのブロックＡ」である。
【００４７】
制御部２５は、まずこれらのブロックＡ，Ｂをタイムチャート上に配置してみる。
【００４８】
つまり、この例では、図４に示すように、第１のロットのブロックＢを第１のロットＡの払出予定時刻に合わせて配置するとともに、第２のロットのブロックＡを、そのｃ処理工程が第１のロットのｃ処理工程に隣接するように配置する。そして、それらの前の処理工程における終了予定時刻、すなわち第１のロットのブロックＡにおける終了予定時刻Ｅ１と、第２のロットのブロックＡの前の処理工程の終了予定時刻Ｅ２とを比較する。ここでは、第２のロットのブロックＡには前の処理工程が存在しないので、仮にブロックＡの開始予定時刻を終了予定時刻として扱っている。その結果、第２のロットの終了予定時刻Ｅ２の方が早いので、第２のロットのブロックＡを配置する。
【００４９】
しかし、第２のロットの前の処理工程における終了予定時刻Ｅ２が早くても、上述したルールＡの適用により、第２のロットのブロックＡに代えて第１のロットのブロックＢが配置されることになる。
【００５０】
つまり、第１のロットのブロックＡはｃ処理工程が許容時間を有する工程であるので、このｃ処理工程は図４中に点線で示すように後ろに延びる可能性があり、このｃ処理工程におけるロットの正確な払出予定時刻が未定となっている。したがって、このｃ処理工程で使用している第１処理部１９が使用可能となる時刻が未定であるので、第１のロットのブロックＡの後に、第１処理部１９を使用するｃ処理工程を含む第２のロットのブロックＡを配置することは好ましくないのである。そこでルールＡによってこのような配置を回避する。
【００５１】
第１のロットのブロックＢ（符号１−Ｂ）を配置したので、図３の組み合わせから次に配置可能な処理工程は、「第１のロットのブロックＣ」か「第２のロットのブロックＡ」のいずれかである。
【００５２】
そこで上述したように、それらをタイムチャート上に配置してみる（図５参照）。
【００５３】
そして、それぞれの前の処理工程である第１のロットのブロックＢにおける終了予定時刻Ｅ１と、第２のロットに関するブロックＡの前の処理工程における終了予定時刻Ｅ２（上述した理由から開始予定時刻）とを比較する。その結果、第２のロットの方が早いので、第２のロットのブロックＡを、そのｂ処理工程が第１のロットのｂ処理工程に隣接するように配置する。
【００５４】
なお、ここでｄ処理工程における許容時間ＴＬを第１のロットについてだけ図示しておく。
【００５５】
次に、図３の組み合わせから、「第１のロットのブロックＣ」と「第２のロットのブロックＢ」とを配置してみる（図６参照）。それぞれの前の処理工程（１−Ｂ，２−Ａ）における終了予定時刻Ｅ１，Ｅ２の比較結果から、第１のロットのブロックＣを配置することになる。
【００５６】
なお、ここで仮に第２のロットの終了予定時刻Ｅ２の方が早かった場合について説明する。
【００５７】
この場合には、第２のロットのブロックＢを配置することになるが、このようにすると第１のロットのブロックＣの配置が第１のロットのｄ処理工程に設定されている許容時間ＴＬを越えることになる。すると第１のロットに悪影響が生じる恐れがあるが、上述したルールＢを適用することでそれを回避することができる。つまり、第１のロットのｃ処理工程に設定されている許容時間ＴＬを越えないように、次のｂ処理工程を配置することになるので、第１のロットのブロックＣを優先して配置する。
【００５８】
次に、図３の組み合わせに基づき、第２のロットのブロックＢを配置し（図７参照）、最後に第２のロットのブロックＣを配置（図８参照）してスケジュール作成を終える。このようにして作成されたスケジュールは記憶部２７に格納され、実際の処理時に処理プログラムによって参照されることになる。なお、上記の過程を組み合わせ上で示したのが図３中の点線及び実線で示した矢印である。
【００５９】
このようにしてスケジュールを作成するが、非常に待機時間（図中の黒塗り部分）が少なくなっていることがわかる。このように上記のルールに沿って予めスケジュールを作成することにより、前の処理工程の後作業と後の処理工程の前作業とを重複させて配置することができるとともに、配置可能な処理工程のうち、前の処理工程が早く終わるロットの処理工程を次の処理工程として選択して配置することで、次の処理工程が終了するまでの時間を短縮することができる。したがって、基板処理装置の各処理部を有効利用でき、待機時間を抑制して稼働率を向上できる。
【００６０】
また、「ルールＡ」を考慮することにより、ロットの払出予定時刻が決まっていない処理工程の後ろには処理工程を配置しないので、既に配置したロットのスケジュールに影響を与えることなく各ロットの処理工程を配置することができる。
【００６１】
また、「ルールＢ」を考慮することによって、許容時間を有する処理工程の後ろには許容時間内にその次の処理工程が位置するように配置することにより、レシピにほぼ忠実に処理を施すことができるとともにロットに対する悪影響を抑制できるようになっている。
【００６２】
ここで、図９ないし１３を参照しながら「ルールＣ」を適用する例について説明する。なお、図９ないし１３は、「追い越し」が生じた場合におけるスケジュール作成の過程を示すタイムチャートである。
【００６３】
また、これらのタイムチャートにおける原点は現在時刻を示し、符号ｘは現在配置している各処理工程に関するスケジュール基準位置にあたり、スケジュール基準時刻を表している。したがって、以下の追い越しに関するスケジュールは、原点からｘ時刻までに完了しなければ、スケジュールを完了することができないことを意味する。なお、本来スケジュール基準時刻ｘと現在時刻との間隔は時間の経過に応じて狭まってゆくものであるが、図示の関係上、図９ないし図１３では一定に記載してある。
【００６４】
図９に示すように、例えば、第１のロットについて、ｇ処理工程及びｆ処理工程を含むブロックＡが時刻ｔ４からｔ７及び時刻ｔ６からｔ８に配置されていたとする（図中の符号１−Ａ）。次に配置される第２のロットについて、ｆ処理工程を含むブロックＡが、時刻ｔ１からｔ３に配置されたとする（図中の符号２−Ａ）。これにより、第１のロットのブロックＡよりも第２のロットのブロックＡが時間的に先に配置されることになる。つまり、本明細書で定義する「追い越し」が生じることになる。さらに、第２のロットのブロックＡに続くｇ処理工程を含むブロックＢが時刻ｔ２からｔ５に配置されるものとする。このような場合には、第２のロットのブロックＡを優先して配置するのである。このようなルールＣを考慮することによって、基本ルールと同様に基板処理装置の各処理部を最大限に活用できる。
【００６５】
しかしながら、ｇ処理工程において、第１のロットのブロックＡと第２のロットのブロックＢとが競合している。したがって、このままではスケジュールを確定することができない。そこで、この状況を打開するために、次のようにスケジュールを行う。
【００６６】
まず、図１０に示すように、第２のロットのブロックＡと第２のロットのブロックＢとが互いに及びその他のロットと競合することなく、確実に配置できる位置を探す。具体的には、第１のロットのブロックＡにおけるｆ処理工程の直後に配置することが例示される。そして、この位置を「確実配置位置」とすると、その位置を示す第２のロットのブロックＢの配置位置における時刻ｔ８と、スケジュール基準時刻ｘとの差を求める。このようにして求めた差をスケジュール時間差Ｔ１とする。そして、予め設定されて記憶部２７に記憶されている所定値ｎを読み出し、スケジュール時間差Ｔ１を所定値ｎで除算する。なお、説明の理解を容易にするために、ここでは所定値ｎを「３」とする。
【００６７】
スケジュール時間差Ｔ１を所定値ｎ＝３で除算した結果、ステップ時間Ｔｓが求まる。そして、スケジュール基準時刻ｘからステップ時間Ｔｓごとに、第２のロットのブロックＡ及び第２のロットのブロックＢが配置可能であるか否かを試行してゆく。換言すると、所定値ｎだけ試行を繰り返す。なお、その過程においては、第１のロットの各処理工程については配置位置を固定したままとし、そのスケジュールを安定させておくことが好ましい。
【００６８】
図１１は、スケジュール基準時刻ｘに合わせて第２のロットのブロックＡを配置した状態を示す。しかし、この場合には、続いて配置される第２のロットのブロックＢがｆ処理工程において第１のロットと競合していることがわかる。したがって、このような位置には配置できないことになる。
【００６９】
図１２は、スケジュール基準時刻ｘからステップ時間Ｔｓだけ隔てた位置に第２のロットのブロックＡを配置した状態を示している。しかし、この場合においても、続いて配置される第２のロットのブロックＢがｆ処理工程において第１のロットと競合していることがわかる。したがって、このような位置にも配置することができない。
【００７０】
図１３は、さらにステップ時間Ｔｓだけ隔てた位置に第２のロットのブロックＡを配置した状態を示す。しかしながら、この場合にも上述した理由により、このような位置には配置できない。
【００７１】
したがって、所定値ｎに応じた回数だけ試行を繰り返した結果、いずれにも配置できないので、図１０に示す「確実配置位置」に第２のロットの各処理工程を配置することになる。
【００７２】
このようにしてスケジュールの状況が反映されたステップ時間Ｔｓごとに、スケジュール基準時刻ｘから次なるロットの処理工程について配置を試みる。したがって、状況に応じて変わるステップ時間Ｔｓごとに大まかに配置の試行が行われる。その結果、状況にかかわらずスケジュールに要する時間を短縮化することができる。
【００７３】
因みに、従来例の場合を図示すると、図９のｆ処理工程に点線で示すようになる。つまり、スケジュール基準時刻ｘから短い時間間隔でじわじわと試行を繰り返す。したがって、配置可能な位置が見つかるまでに長時間を要することがある。
【００７４】
なお、本発明は、上記の実施形態に限定されるものではなく、次のように変形実施が可能である。
【００７５】
（１）所定値ｎは、レシピや基板処理装置の特性等を勘案して５〜２０の範囲で設定すればよい。所定値ｎを小さくするとステップ時間が大きくなるので、スケジュール完了までを短くすることができる。また、所定値ｎを大きくするとステップ時間が小さくなるので、スケジュールの精度を高くすることができる。
【００７６】
（２）スケジュールの基本ルールとして、いずれか一つのロットについて最初の処理工程を配置した後に、各ロットの次なる処理工程のうち、それぞれの前の処理工程における終了予定時刻を求め、これらのうちで最も早いロットに対する処理工程を次の処理工程として配置するというものを例示した。しかし、作成されたスケジュールにより処理時間を短縮する目的以外のスケジュール作成方法において上述したように「追い越し」が生じる場合であっても、本発明を適用することによりスケジュール作成時間の短縮化を図ることができる。
【００７７】
（３）実施例では２つのロットを同時に処理してゆく場合を例にとって説明したが、３ロット以上を対象に処理する場合であっても本発明を適用することができる。
【００７８】
【発明の効果】
以上の説明から明らかなように、本発明によれば、「追い越し」が生じ、続く処理工程が配置不可能である場合には、まず、配置可能な位置を探す。次に、この確実配置位置における時刻と、スケジュール基準位置におけるスケジュール基準時刻との差をスケジュール時間差として求め、スケジュール時間差を５〜２０の範囲の所定値で除算したステップ時間を求める。そして、ステップ時間ごとにスケジュール基準時刻から次なるロットの処理工程について配置を試みる。したがって、状況に応じて変わるステップ時間ごとに大まかに配置の試行が行われるので、状況にかかわらずスケジュールに要する時間を短縮化可能である。なお、上記所定値を小さくするとステップ時間が大きくなるので、スケジュール完了までを短くすることができる。その一方、所定値を大きくするとステップ時間が小さくなるので、スケジュールの精度を高くすることができる。
【図面の簡単な説明】
【図１】実施例に係る基板処理装置の概略構成を示した平面図である。
【図２】実施例に係る基板処理装置の概略構成を示したブロック図である。
【図３】スケジュールの組み合わせ例を示した図である。
【図４】スケジュール作成の過程を示すタイムチャートである。
【図５】スケジュール作成の過程を示すタイムチャートである。
【図６】スケジュール作成の過程を示すタイムチャートである。
【図７】スケジュール作成の過程を示すタイムチャートである。
【図８】スケジュール作成の過程を示すタイムチャートである。
【図９】追い越しが生じた場合におけるスケジュール作成の過程を示すタイムチャートである。
【図１０】追い越しが生じた場合におけるスケジュール作成の過程を示すタイムチャートである。
【図１１】追い越しが生じた場合におけるスケジュール作成の過程を示すタイムチャートである。
【図１２】追い越しが生じた場合におけるスケジュール作成の過程を示すタイムチャートである。
【図１３】追い越しが生じた場合におけるスケジュール作成の過程を示すタイムチャートである。
【符号の説明】
Ｗ … 基板
１ … カセット
３ … 投入部
１９ … 第１処理部
２１ … 第２処理部
２３ … カセット洗浄部
Ｅ１ … 第１のロットの終了予定時刻
Ｅ２ … 第２のロットの終了予定時刻
ｘ … スケジュール基準時刻
Ｔ１ … スケジュール時間差
Ｔｓ … ステップ時間差
ｎ … 所定値[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a schedule creation method and program for a substrate processing apparatus for performing predetermined processing on a semiconductor wafer or a glass substrate for a liquid crystal display device (hereinafter simply referred to as a substrate), and in particular, before each actual processing, The present invention relates to a technique for determining an arrangement order in advance for a lot processing step.
[0002]
[Prior art]
Conventionally, as a method for creating a schedule for this type of substrate processing apparatus, when a plurality of lots are processed by a substrate processing apparatus having a plurality of processing units, each lot is sequentially processed by each processing unit based on a recipe. In some cases, the arrangement order is determined in advance for the processing steps of each lot.
[0003]
In such a schedule creation method, first, after processing a process step for one lot, a process step for the next lot is arranged by arranging a process step for the next lot. In the case where an overtaking where the process is located before occurs and a subsequent processing process cannot be arranged for the processing process of the next lot, a schedule is attempted as follows.
[0004]
That is, the arrangement of the next process step of the lot is attempted at a preset time interval from the schedule reference time at the schedule reference position for the currently arranged process step at a preset time interval. For example, it tries to arrange only 5 times at 1 minute intervals.
[0005]
[Problems to be solved by the invention]
However, the conventional example having such a configuration has the following problems.
In other words, the conventional scheduling method tries for a preset number of times at a preset time interval, and the schedule may not be completed only with that number of times. In addition, when the number of times is significantly increased, there is a problem that it may take a long time to complete the schedule depending on the situation.
[0006]
The present invention has been made in view of such circumstances, and it is possible to shorten the time until the schedule is completed regardless of the situation by roughly trying the arrangement positions at intervals according to the situation. An object of the present invention is to provide a schedule creation method for a substrate processing apparatus and a program therefor.
[0007]
[Means for Solving the Problems]
As a result of intensive studies to solve the above-described problems, the present inventors have found the above cause.
That is, it has been found that the conventional scheduling method tries to rearrange under the same conditions in any situation, so that it may take a long time to complete the schedule. The present invention based on such knowledge is configured as follows.
[0008]
  That is, according to the first aspect of the present invention, when a plurality of lots are processed by a substrate processing apparatus provided with a plurality of processing units for processing a substrate, each lot is based on a recipe including a plurality of processing steps. In the substrate processing apparatus schedule creation method for pre-determining the arrangement order for the processing steps of each lot before the actual processing in order for each processing unit to sequentially process the processing steps of any lot By arranging the next lot processing step, an overtaking occurs in which the next lot processing step precedes the previously arranged lot processing step, and the next lot processing step When subsequent processing steps cannot be arranged, determine the position where each processing step of the next lot can be arranged, and if the arrangement position is a certain arrangement position, Serial and time in reliable positions, determined as the schedule time difference the difference between the scheduled reference time in the schedule a reference position of the processing steps that are currently located, are set this in advanceIn the range of 5-20A value obtained by dividing by a predetermined value is obtained as a step time, and placement is attempted for each processing step of the next lot for each step time from the schedule reference time.
[0009]
(Operation / Effect) When a “passing” occurs in which the processing process of the next lot is positioned before the processing process of the previously placed lot, and the subsequent processing process cannot be arranged, A position where each processing step of the next lot can be arranged is searched. The difference between the time at this certain arrangement position and the schedule reference time at the schedule reference position (the time scheduled to start execution of what is currently scheduled in the future than the current time) is obtained as the schedule time difference. This schedule time difference reflects the schedule status at that time. Then, a step time obtained by dividing the schedule time difference by a predetermined value is obtained. In this way, for each step time in which the schedule status is reflected, an attempt is made to place the next lot processing step from the schedule reference time. Therefore, since the placement is roughly attempted every step time that changes depending on the situation, the time required for the schedule can be shortened regardless of the situation.
[0010]
  (Delete)
[0011]
  The aboveIf the predetermined value is decreased, the step time is increased, so that the time until completion of the schedule can be shortened. On the other hand, if the predetermined value is increased, the step time is reduced, so that the accuracy of the schedule can be increased.
[0012]
  In addition, in the arrangement of the lot processing steps, the arrangement position of the previous lot processing steps may be fixed in order to stabilize other schedules (claims).2) In order to complete the processing in a short time, when the next processing step of each lot is arranged, the processing step for the lot with the earliest scheduled end time in each previous processing step is arranged as the next processing step (invoice) Term3) Is preferable.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention will be described below with reference to the drawings.
1 and 2 relate to one embodiment of the present invention, FIG. 1 is a plan view showing a schematic configuration of a substrate processing apparatus according to the embodiment, and FIG. 2 is a block diagram thereof.
[0014]
This substrate processing apparatus is an apparatus for performing chemical liquid processing on the substrate W, for example. A plurality of (for example, 25) substrates W are stacked on the cassette 1 and stored. The cassette 1 in which the unprocessed substrates W are stacked and stored is placed on the input unit 3. The input unit 3 includes two mounting tables 5 on which the cassette 1 is mounted. On the opposite side of the loading unit 3 across the center of the substrate processing apparatus, a dispensing unit 7 is provided. The dispensing unit 7 stores the processed substrate W in the cassette 1 and dispenses the cassette 1 together. The payout unit 7 includes two mounting tables 9 for mounting the cassette 1, similarly to the loading unit 3.
[0015]
A first transport mechanism 11 configured to be movable between these is disposed at a position along the input unit 3 and the payout unit 7. The first transport mechanism 11 transports a plurality of substrates W together with the cassette 1 placed on the input unit 3 to the second transport mechanism 13.
[0016]
The second transport mechanism 13 transports all the substrates W to the third transport mechanism 15 after taking out all the stored substrates W from the cassette 1. Further, after receiving the processed substrate W from the third transport mechanism 15, the substrate W is accommodated in the cassette 1 and transported to the first transport mechanism 11.
[0017]
The third transport mechanism 15 is configured to be movable in the longitudinal direction of the substrate processing apparatus. A drying processing unit 17 for storing a plurality of substrates W in a low-pressure chamber and drying them is provided on the most front side in the moving direction.
[0018]
A first processing unit 19 is disposed at a position adjacent to the drying processing unit 17 on the front side in the moving direction of the third transport mechanism 15, and a second processing unit 21 is disposed adjacent to the first processing unit 19. Yes.
[0019]
The first processing unit 19 includes a pure water cleaning processing unit 19a for performing pure water cleaning processing on a plurality of substrates W, and a chemical processing unit for performing chemical processing on the plurality of substrates W. 19b. Further, a sub-transport mechanism 19c for delivering a plurality of substrates W only between them is provided.
[0020]
The second processing unit 21 employs the same configuration as the first processing unit 19 described above. That is, the apparatus includes a pure water cleaning processing unit 21a, a chemical processing unit 21b, and a sub-transport mechanism 21c.
[0021]
The cassette cleaning unit 23 attached to the second transport mechanism 13 has a function of cleaning the empty cassette 1 after the second transport mechanism 13 has taken out all the substrates W.
[0022]
In addition, the 1st conveyance mechanism 11, the 2nd conveyance mechanism 13, the 3rd conveyance mechanism 15, the 1st process part 19, and the 2nd process part 21 which were mentioned above correspond to the process part in this invention.
[0023]
The substrate processing apparatus configured as described above is comprehensively controlled by the control unit 25 as shown in the block diagram of FIG.
[0024]
The control unit 25 is composed of a CPU and the like, and after creating a schedule in advance by a schedule creation program including the rules described below, each unit is controlled to perform processing for each of a plurality of lots according to the schedule. However, each unit is controlled to perform processing according to a predetermined recipe. The schedule is a time sequence of processing steps for each lot, and is created in advance before the substrate W is actually processed.
[0025]
The storage unit 27 executes a recipe that is created in advance by the user of the substrate processing apparatus and includes a plurality of processing steps that define how to process the substrate W, a schedule creation program, and the created schedule. A processing program to be executed is stored in advance. The created schedule is also stored. Furthermore, as will be described later, a predetermined value set in advance by the user or the like that is used in a schedule when “overtaking” occurs is stored. The predetermined value is appropriately set in the range of an integer of 5 to 20, for example.
[0026]
"basic rule"
After arranging the first processing step for any one of a plurality of lots, among the next processing steps of each lot, the “scheduled end time” in each previous processing step is obtained, and among these, The process for the earliest lot is arranged as the next process.
[0027]
In addition to the above “basic rules”, it is preferable to consider some rules as exemplified below.
[0028]
"Rule A"
・ Avoid placing it after the processing process of the scheduled payout time.
If the time at which the processing is scheduled to be carried out and the lot is scheduled to be carried out is referred to as “scheduled withdrawal time”, the lot whose “scheduled end time” is the earliest after the processing step in which this scheduled withdrawal time has not been determined Even so, it is a rule that the processing steps are not arranged.
[0029]
"Rule B"
-Arrange the next processing step within the allowable time.
Although the processing time in the processing unit is determined in advance, there may be no problem even after a certain waiting time until the next processing step after the processing is completed. For example, the substrate W may be kept in a state of being taken out from the cassette 1 in the transport process, the substrate W may be kept in pure water in the pure water cleaning process, and the substrate W may be kept in the dry process. There is no problem even if you wait after drying. However, it is not necessary to wait for a long time. If the standby is too long, there is a possibility that the substrate W may be adversely affected. Therefore, the rule is that the upper limit time is set as “allowable time”, which is set and the next processing step is arranged within the “allowable time”.
[0030]
"Rule C"
・ Priority of overtaking lot
In this specification, “overtaking” is defined as a process process for a lot arranged later than a process process for a lot arranged earlier. When such “overtaking” occurs, the rule is that the processing process of the lot that has been overtaken is prioritized.
[0031]
Hereinafter, a case where two lots are sequentially processed using the same recipe will be described as an example.
[0032]
In addition, although it demonstrates below taking the case where it processes with the board | substrate processing apparatus mentioned above as an example, in order to make an understanding of description easy, as shown in Table 1, the recipe is simplified rather than an actual thing. In other words, the substrate processing apparatus described above includes the first processing unit 19 and the second processing unit 21, but the second processing unit 21 among these is processed by a recipe that is not used.
[0033]
[Table 1]

[0034]
The recipe is from the processing step a to the processing step e, and is composed of seven processing steps that are partially performed a plurality of times. However, the recipes A to C are divided by the processing steps having the allowable time described above. Divided into two blocks.
[0035]
In the “A block”, the first transport mechanism 11 takes out the cassette 1 from the loading unit 3 side, the second transport mechanism 13 takes out a lot (a plurality of substrates W) from the cassette 1, and the chemical solution of the first processing unit 19 The processing from the chemical processing of the lot by the processing unit 19b to the pure water cleaning processing unit 19a. In addition, the cleaning process of the empty cassette 1 performed by the cassette cleaning unit 23 is omitted.
[0036]
In detail, the first transport mechanism 11 takes in the cassette 1 of the loading unit 3 and passes it to the second transport mechanism 13 until the second transport mechanism 13 takes out a plurality of substrates W constituting a lot from the cassette 1 a. It is a processing step, and the b processing step is that until the third transport mechanism 15 receives the lot and waits at a predetermined position. The lot is received from the third transport mechanism 15, and this lot is treated with pure water by the pure water cleaning processing unit 19a. After cleaning, the sub-transport mechanism 19c transports the lot to the chemical processing section 19b to perform chemical processing, and then transports the lot again to the pure water cleaning processing section 19a through the sub-transport mechanism 19c until the pure water cleaning process is completed. It is a processing step. The numbers in the table show an example of the time (minutes) required for the pre-work, the main work, and the post-work.
[0037]
The “B block” is a process from when the third transport mechanism 15 takes out a processed lot from the pure water cleaning processing unit 19a, transports it to the drying processing unit 17, and finishes the drying process.
[0038]
Specifically, the b processing step is a period from when the third transport mechanism 15 receives the lot subjected to the pure water cleaning process and waits at a predetermined position until the third transport mechanism 15 waits at a predetermined position, and d until the lot is transported to the drying processing unit 17 and the drying process is completed. It is a processing step.
[0039]
In the “C block”, the third transport mechanism 15 takes out the dried lot, the second transport mechanism 13 stores the lot in the cassette 1, and then the first transport mechanism 11 transports the entire cassette 1 to the dispensing unit 7. It is processing until.
[0040]
Specifically, the process b is a process from the time when the third transport mechanism 15 receives the dried lot until it waits at a predetermined position. The second transport mechanism 13 receives the lot and puts a plurality of substrates W into the cassette 1. The e processing step is the process until the cassette 1 is stored and handed over to the first transport mechanism 11 and delivered to the delivery unit 7.
[0041]
Note that the last processing steps in the blocks A and B described above, that is, the c processing step and the d processing step have an allowable time in which a certain amount of time may be taken until the next processing without performing the next processing promptly. It is a processing step.
[0042]
Next, a case where two lots are sequentially processed with the same recipe will be described with reference to FIGS.
[0043]
Among these, FIG. 3 is a diagram showing an example of combination of schedules, and FIGS. 4 to 8 are diagrams showing a process of creating a schedule. Also, in FIG. 4 to FIG. 8, the processing steps are indicated by the symbol “lot-block”. That is, “1-A” in FIG. 3 represents the processing step of the block A of the first lot.
[0044]
First, the control unit 27 first determines which of the two lots is scheduled first.
[0045]
For simplicity, the first lot is scheduled first. In this case, as shown in FIG. 4, in the time chart of the schedule, the block A of the first lot is arranged from the reference time (the same as “schedule reference time” described later). Since the schedule is created in advance as described above, the processing step can be arranged so that the main processing of the next processing step is started when the main processing of the previous processing step is completed. That is, when the end signal e is output, the lot is paid out (symbol m). Hereinafter, the time point at which this work is completed is referred to as a scheduled payout time.
[0046]
Since the block A (reference numeral 1-A) of the first lot among the two lots is arranged as described above, as is clear from the combination of FIG. 3, the next selectable is “block B of the first lot”. Or “block A of the second lot”.
[0047]
The control unit 25 first arranges these blocks A and B on the time chart.
[0048]
That is, in this example, as shown in FIG. 4, the block B of the first lot is arranged according to the scheduled payout time of the first lot A, and the block A of the second lot is processed in the c processing step. Are arranged adjacent to the c processing step of the first lot. Then, the scheduled end time in the previous processing step, that is, the planned end time E1 in the block A of the first lot is compared with the scheduled end time E2 in the processing step before the block A of the second lot. Here, since there is no previous processing step in the block A of the second lot, the scheduled start time of the block A is treated as the scheduled end time. As a result, since the scheduled end time E2 of the second lot is earlier, the block A of the second lot is arranged.
[0049]
However, even if the scheduled end time E2 in the processing step before the second lot is early, the block B of the first lot is arranged instead of the block A of the second lot by applying the rule A described above. It will be.
[0050]
That is, since the block A of the first lot is a process in which the c processing process has an allowable time, the c processing process may extend backward as indicated by a dotted line in FIG. The exact payout time for the lot has yet to be determined. Therefore, since the time at which the first processing unit 19 used in the c processing step can be used is undecided, the c processing step using the first processing unit 19 is performed after the block A of the first lot. It is not preferable to dispose the block A of the second lot that contains it. Therefore, rule A avoids such an arrangement.
[0051]
Since the block B (reference numeral 1-B) of the first lot is arranged, the processing steps that can be arranged next from the combination of FIG. 3 are “block C of the first lot” or “block A of the second lot”. Any of the above.
[0052]
Therefore, as described above, they are arranged on the time chart (see FIG. 5).
[0053]
Then, the scheduled end time E1 in the block B of the first lot, which is the previous processing step, and the planned end time E2 in the previous processing step of the block A relating to the second lot (scheduled start time for the reason described above). And compare. As a result, since the second lot is earlier, the block A of the second lot is arranged so that the b processing step thereof is adjacent to the b processing step of the first lot.
[0054]
Here, the permissible time TL in the d processing step is shown only for the first lot.
[0055]
Next, from the combination of FIG. 3, “block C of the first lot” and “block B of the second lot” are arranged (see FIG. 6). From the comparison result of the scheduled end times E1 and E2 in the respective previous processing steps (1-B, 2-A), the block C of the first lot is arranged.
[0056]
Here, a case will be described where the scheduled end time E2 of the second lot is earlier.
[0057]
In this case, the block B of the second lot is arranged. In this case, the allowable time TL in which the arrangement of the block C of the first lot is set in the d processing step of the first lot. Will be exceeded. Then, the first lot may be adversely affected, but can be avoided by applying the rule B described above. That is, since the next b processing step is arranged so as not to exceed the allowable time TL set for the c processing step of the first lot, the block C of the first lot is preferentially arranged. .
[0058]
Next, based on the combination of FIG. 3, the block B of the second lot is arranged (see FIG. 7), and finally the block C of the second lot is arranged (see FIG. 8) to complete the schedule creation. The schedule created in this way is stored in the storage unit 27 and is referred to by the processing program during actual processing. Note that the above processes are shown in combination by arrows shown by dotted lines and solid lines in FIG.
[0059]
Although the schedule is created in this way, it can be seen that the waiting time (the black portion in the figure) is very short. In this way, by creating a schedule in advance according to the above rules, it is possible to arrange the subsequent work of the previous processing process and the previous work of the subsequent processing process in an overlapping manner and Among them, by selecting and arranging the processing process of the lot that ends the previous processing process as the next processing process, the time until the next processing process is completed can be shortened. Therefore, each processing unit of the substrate processing apparatus can be used effectively, and the operating time can be improved by suppressing the standby time.
[0060]
In addition, by considering “Rule A”, the processing step is not arranged after the processing step for which the scheduled payout time of the lot is not determined, so that the processing of each lot can be performed without affecting the schedule of the already arranged lot. Processes can be arranged.
[0061]
In addition, by considering “Rule B”, processing is performed almost faithfully to the recipe by placing the next processing step within the allowable time after the processing step having the allowable time. It is possible to control adverse effects on lots.
[0062]
Here, an example in which “rule C” is applied will be described with reference to FIGS. FIGS. 9 to 13 are time charts showing the process of creating a schedule when “overtaking” occurs.
[0063]
Also, the origin in these time charts indicates the current time, and the symbol x corresponds to the schedule reference position for each processing step currently arranged, and represents the schedule reference time. Therefore, the following schedule regarding overtaking means that the schedule cannot be completed unless it is completed by the time x from the origin. Note that the interval between the schedule reference time x and the current time is originally narrowed with the passage of time, but is shown constant in FIGS. 9 to 13 for the sake of illustration.
[0064]
As shown in FIG. 9, for example, for the first lot, block A including the g processing step and the f processing step is arranged from time t4 to t7 and from time t6 to t8 (reference numeral 1-A in the drawing). ). For the second lot to be placed next, it is assumed that block A including the f processing step is placed from time t1 to time t3 (reference numeral 2-A in the figure). As a result, the block A of the second lot is arranged earlier in time than the block A of the first lot. That is, the “overtaking” defined in this specification occurs. Further, it is assumed that a block B including the g processing step following the block A of the second lot is arranged from time t2 to time t5. In such a case, the block A of the second lot is preferentially arranged. By considering such a rule C, each processing unit of the substrate processing apparatus can be utilized to the maximum as in the basic rule.
[0065]
However, in the g processing step, the block A of the first lot and the block B of the second lot are competing. Therefore, the schedule cannot be determined as it is. Therefore, in order to overcome this situation, a schedule is performed as follows.
[0066]
First, as shown in FIG. 10, a position where the block A of the second lot and the block B of the second lot can be reliably arranged without competing with each other and other lots is searched. Specifically, it is exemplified that it is arranged immediately after the f processing step in the block A of the first lot. Then, if this position is defined as “certain arrangement position”, the difference between the time t8 at the arrangement position of the block B of the second lot indicating the position and the schedule reference time x is obtained. The difference thus obtained is defined as a schedule time difference T1. Then, the predetermined value n set in advance and stored in the storage unit 27 is read, and the schedule time difference T1 is divided by the predetermined value n. In order to facilitate understanding of the description, the predetermined value n is set to “3” here.
[0067]
As a result of dividing the schedule time difference T1 by the predetermined value n = 3, the step time Ts is obtained. Then, it is tried whether the block A of the second lot and the block B of the second lot can be arranged every step time Ts from the schedule reference time x. In other words, the trial is repeated by a predetermined value n. In the process, it is preferable to keep the arrangement position fixed for each processing step of the first lot and to stabilize the schedule.
[0068]
FIG. 11 shows a state in which the block A of the second lot is arranged in accordance with the schedule reference time x. However, in this case, it can be seen that the block B of the second lot arranged subsequently competes with the first lot in the f processing step. Therefore, it cannot be arranged at such a position.
[0069]
FIG. 12 shows a state in which the block A of the second lot is arranged at a position separated from the schedule reference time x by the step time Ts. However, even in this case, it can be seen that the block B of the second lot arranged subsequently competes with the first lot in the f processing step. Therefore, it cannot be arranged at such a position.
[0070]
FIG. 13 shows a state in which the block A of the second lot is arranged at a position further separated by the step time Ts. However, even in this case, it cannot be arranged at such a position for the reason described above.
[0071]
Therefore, as a result of repeating the trials the number of times corresponding to the predetermined value n, it is impossible to place any of the trials, so that each processing step of the second lot is arranged at the “certain arrangement position” shown in FIG.
[0072]
In this way, for each step time Ts in which the status of the schedule is reflected, an attempt is made to arrange the processing process of the next lot from the schedule reference time x. Therefore, an attempt is made roughly for each step time Ts that changes depending on the situation. As a result, the time required for the schedule can be shortened regardless of the situation.
[0073]
Incidentally, when the case of the conventional example is illustrated, the f processing step in FIG. 9 is indicated by a dotted line. That is, the trial is gradually repeated at short time intervals from the schedule reference time x. Therefore, it may take a long time to find a position where it can be placed.
[0074]
In addition, this invention is not limited to said embodiment, A deformation | transformation implementation is possible as follows.
[0075]
  (1) The predetermined value n is set in the range of 5 to 20 in consideration of the characteristics of the recipe and the substrate processing apparatus.Just do. If the predetermined value n is decreased, the step time is increased, so that the time until completion of the schedule can be shortened. Further, when the predetermined value n is increased, the step time is reduced, so that the accuracy of the schedule can be increased.
[0076]
(2) As a basic rule of the schedule, after arranging the first processing step for any one lot, among the next processing steps of each lot, the scheduled end time in each previous processing step is obtained, and among these, The example of arranging the process for the earliest lot as the next process is illustrated. However, the schedule creation time can be shortened by applying the present invention even when “overtaking” occurs in the schedule creation method other than the purpose of reducing the processing time by the created schedule as described above. Can do.
[0077]
(3) In the embodiment, the case where two lots are processed simultaneously has been described as an example. However, the present invention can be applied to a case where three lots or more are processed.
[0078]
【The invention's effect】
  As is apparent from the above description, according to the present invention, when “overtaking” occurs and the subsequent processing steps cannot be arranged, first, a position where the arrangement can be made is searched. Next, the difference between the time at the certain arrangement position and the schedule reference time at the schedule reference position is obtained as a schedule time difference, and the schedule time difference is calculated.In the range of 5-20The step time divided by a predetermined value is obtained. Then, arrangement is attempted for the processing process of the next lot from the schedule reference time for each step time. Therefore, since the placement is roughly attempted every step time that changes depending on the situation, the time required for the schedule can be shortened regardless of the situation.Note that if the predetermined value is decreased, the step time is increased, so that the time until completion of the schedule can be shortened. On the other hand, if the predetermined value is increased, the step time is reduced, so that the accuracy of the schedule can be increased.
[Brief description of the drawings]
FIG. 1 is a plan view showing a schematic configuration of a substrate processing apparatus according to an embodiment.
FIG. 2 is a block diagram illustrating a schematic configuration of a substrate processing apparatus according to an embodiment.
FIG. 3 is a diagram showing an example of combination of schedules.
FIG. 4 is a time chart showing a process of creating a schedule.
FIG. 5 is a time chart showing a process of creating a schedule.
FIG. 6 is a time chart showing a process of creating a schedule.
FIG. 7 is a time chart showing a process of creating a schedule.
FIG. 8 is a time chart showing a process of creating a schedule.
FIG. 9 is a time chart showing a process of creating a schedule when overtaking occurs.
FIG. 10 is a time chart showing a process of creating a schedule when overtaking occurs.
FIG. 11 is a time chart showing a process of creating a schedule when overtaking occurs.
FIG. 12 is a time chart showing a process of creating a schedule when overtaking occurs.
FIG. 13 is a time chart showing a process of creating a schedule when overtaking occurs.
[Explanation of symbols]
W ... Substrate
1 ... cassette
3 ... Input section
19 ... 1st processing part
21 ... 2nd processing part
23… Cassette cleaning section
E1 ... Scheduled end time of the first lot
E2 ... Scheduled end time of the second lot
x ... Schedule reference time
T1 ... Schedule time difference
Ts ... Step time difference
n ... Predetermined value

Claims (4)

In order to process each lot sequentially in each processing unit based on a recipe including a plurality of processing steps in processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing a substrate. In the method for creating a schedule for a substrate processing apparatus for predetermining the arrangement order for the processing steps of each lot before actual processing,
After arranging the processing process of any lot, by arranging the processing process of the next lot, an overtaking occurs in which the processing process of the next lot is positioned before the processing process of the previously arranged lot, And, when it is impossible to arrange subsequent processing steps for the processing step of the next lot,
The position where each processing step of the next lot can be arranged is determined, and when the arrangement position is a certain arrangement position, the time at the certain arrangement position and the schedule reference at the schedule reference position for the currently arranged processing step The difference from the time is obtained as a schedule time difference, and a value obtained by dividing the difference by a predetermined value within a preset range of 5 to 20 is obtained as a step time. A method of creating a schedule for a substrate processing apparatus, wherein arrangement is attempted for each processing step. In the schedule preparation method of the substrate processing apparatus of Claim 1 ,
A method for creating a schedule for a substrate processing apparatus, characterized in that the arrangement position remains fixed for the processing process of the previous lot. In the schedule preparation method of the substrate processing apparatus of Claim 1 or 2 ,
A method of creating a schedule for a substrate processing apparatus, wherein when a next processing step of each lot is arranged, the processing step for the lot with the earliest scheduled end time in each previous processing step is arranged as the next processing step. . In order to process each lot sequentially in each processing unit based on a recipe including a plurality of processing steps when processing a plurality of lots by a substrate processing apparatus having a plurality of processing units for processing a substrate In the schedule creation program of the substrate processing apparatus for predetermining the arrangement order for the processing steps of each lot before the actual processing,
After arranging the processing process of any lot, by arranging the processing process of the next lot, an overtaking occurs in which the processing process of the next lot is positioned before the processing process of the previously arranged lot, And, when it is impossible to arrange subsequent processing steps for the processing step of the next lot,
The position where each processing process of the next lot can be arranged is determined, and the arrangement position is a certain arrangement position, and the time at the certain arrangement position and the schedule reference at the schedule reference position for the currently arranged processing process. The difference from the time is obtained as a schedule time difference, and a value obtained by dividing the difference by a predetermined value in the range of 5 to 20 set in advance is obtained as a step time. A program for creating a schedule for a substrate processing apparatus, wherein the computer is controlled so as to attempt arrangement for each processing step.

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