JP2003288109A - Method and system for generating schedule for processing circuit board apparatus and program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method, a system and program, which can easily make scheduling of incoming lots repeated by taking advantage of the inherited flexibility of schedules. <P>SOLUTION: A system displays all lots, the schedules of which are temporarily set (step S4), and instructs schedule changes, if there is any schedule to be rescheduled (step S5). The system can easily change the schedules for incoming lots, by making the system flexible to change the schedules for the lots instructed for rescheduling at the time of the reschedule (step S3). <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for creating a schedule for a substrate processing apparatus for processing a substrate such as a semiconductor wafer or a glass substrate for liquid crystal display (hereinafter simply referred to as substrate). The present invention relates to a program, and more particularly, to a scheduling technique for deciding a resource use timing by a timetable.

[0002]

2. Description of the Related Art Conventionally, as a method of creating a schedule for a substrate processing apparatus of this type, there is, for example, the following method.

A cassette of a certain lot is placed on a mounting table, the operator instructs the recipe of the lot, and when the start button is pressed, the apparatus recognizes that the lot has been loaded. Then, the scheduling is first started, and the timetable is created prior to the actual processing based on the recipe that defines the usage timing of each resource. When the schedule of the timetable is created, when the time reaches the scheduled start time, the processing is actually performed according to the schedule of the timetable.

[0004]

However, the conventional example having such a structure has the following problems. That is, when a plurality of lots are sequentially loaded, even if the cassette is placed on the placing table, it is necessary to wait in that state until the time reaches the scheduled start time of the schedule in the timetable. Become. In other words, there is a problem in that the lot that has been carried in and a schedule has been created cannot be changed due to the schedule even if processing has not actually started.

For example, when the first to third lots are loaded, it is assumed that the processing order in the schedule is the order in which they were loaded. In the actual process, there may be a case where the third lot is processed before the second lot and the processing result of the second lot is urgently desired. However, the order of each lot cannot be changed because the schedule of each lot is already fixed. As described above, the processing may be urgently proceeded depending on the lot, but the conventional technology cannot deal with it.

The present invention has been made in view of the above circumstances, and the flexibility of the schedule allows the schedule of the loaded lot to be rescheduled to easily change the schedule. It is an object of the present invention to provide a method of creating a schedule for a substrate processing apparatus, an apparatus therefor, and a program therefor.

[0007]

The present invention has the following constitution in order to achieve such an object. That is, the invention according to claim 1 uses each resource before processing a lot while using each resource by a substrate processing apparatus having a plurality of resources for processing a substrate. In the method of creating a schedule for a substrate processing apparatus that determines timing with a timetable, (a) the process of placing a lot loaded into the substrate processing apparatus on the timetable, and (b) displaying the schedule of the lot placed on the timetable. And (c) when a schedule change is instructed, the lot is rescheduled and placed in the timetable.

(Operation / Effect) The loaded lot is arranged in the timetable and the schedule is temporarily displayed. When the schedule change is instructed based on this display, the scheduling is performed again for the lot.
In this way, the schedules are displayed for all the lots whose schedules have been once fixed, and if there is something that needs to be changed, instructions are given for that. By giving flexibility so that the designated lot is rescheduled from that point, the schedule of the introduced lot can be easily changed.

Further, it is preferable that the change of the schedule is limited to only the lots in which the process is in the non-execution state, which is carried into the substrate processing apparatus.

(Operation / Effect) The lots whose schedules can be changed are limited to those for which actual processing based on the timetable has not been executed. This is because if the lot that has already been processed is changed, problems such as impairing the reproducibility of the process and adversely affecting the quality may occur. Therefore, the reschedule can be performed without adversely affecting the quality.

Further, according to the invention described in claim 3, a substrate processing apparatus having a plurality of resources for processing a substrate is used to process each lot prior to processing a lot while using each resource. In a schedule processing apparatus for a substrate processing apparatus that determines the timing of using a time table, a schedule creating unit for arranging lots carried into the substrate processing apparatus in the time table and a time table created by the schedule creating unit are displayed. Display means, an instruction means for instructing a schedule change, and a schedule re-creation means for rescheduling the lot and arranging it in the timetable when the schedule change is instructed via the instructing means. , Is provided.

(Operation / Effect) The loaded lots are arranged on the timetable by the schedule creating means, and the timetable created in this way is once displayed on the display means. With respect to the schedule instructed to be changed by the instruction means, the schedule re-creation means reschedules the lot. Therefore,
The method invention according to claim 1 can be suitably implemented.

Further, the present invention may be in the form of a program corresponding to a method for creating a schedule of a substrate processing apparatus (claim 4).

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. 1 and 2 relate to an embodiment of the present invention. FIG. 1 is a plan view showing a schematic configuration of a substrate processing apparatus, and FIG. 2 is a block diagram thereof.

This substrate processing apparatus is, for example, an apparatus for subjecting a substrate W to chemical treatment, cleaning treatment and drying treatment. A plurality of (e.g., 25) substrates W are stored in the cassette 1 in an upright posture. Untreated substrate W
The cassette 1 containing the is placed on the loading unit 3. The loading unit 3 includes two mounting tables 5 on which the cassette 1 is mounted. A payout unit 7 is provided on the opposite side of the input unit 3 with the central portion of the substrate processing apparatus sandwiched therebetween. The dispensing unit 7 stores the processed substrate W in the cassette 1 and dispenses the cassette 1 together. The payout unit 7 functioning in this way is provided with two mounting bases 9 for mounting the cassette 1 similarly to the loading unit 3.

At a position along the input section 3 and the payout section 7, a first transfer mechanism 11 is arranged so as to be movable between them. The first transport mechanism 11 transports a plurality of substrates W together with the cassette 1 placed on the loading unit 3 to the second transport mechanism 13.

The second transfer mechanism 13 takes out all the stored substrates W from the cassette 1 and then transfers all the substrates W to the third transfer mechanism 15. After receiving the processed substrate W from the third transfer mechanism 15, the substrate W is accommodated in the cassette 1 and transferred to the first transfer mechanism 11. The third transfer mechanism 15 is configured to be movable in the longitudinal direction of the substrate processing apparatus.

A drying processing section 17 for accommodating a plurality of substrates W in a low-pressure chamber and drying them is provided on the most front side in the moving direction of the third transfer mechanism 15.

A first processing unit 19 is provided at a position adjacent to the drying processing unit 17 in the moving direction of the third transport mechanism 15. The first processing unit 19 is a pure water cleaning processing unit 2 for performing a pure water cleaning process on a plurality of substrates W.
1, and a chemical liquid processing unit 23 for performing chemical liquid processing on a plurality of substrates W with a processing liquid. Further, a first sub-transport mechanism 25 for transporting the substrate W between them is provided. The first sub transport mechanism 25 is
In addition to the substrate transfer in the first processing unit 19, the third transfer mechanism 1
The substrate W is transferred to and from 5.

At a position adjacent to the first processing section 19, a second
A processing unit 27 is provided. The second processing unit 27
It has the same configuration as the first processing unit 19 described above.

The cassette cleaning section 35 attached to the second transfer mechanism 13 has a function of cleaning the empty cassette 1 after the second transfer mechanism 13 has taken out all the substrates W.

The substrate processing apparatus configured as described above is controlled by the control unit 37 as a whole as shown in the block diagram of FIG.

The control unit 37 includes a CPU and the like, and has a scheduling function unit 39 and a schedule display function unit 41.
And a schedule change request processing unit 43.
These operate based on a procedure corresponding to the schedule creation program described below.

The scheduling function unit 39 determines the use timing of the resources of each of the above-mentioned components according to the recipe in advance in the time table, and therefore executes the process of arranging the lots in advance in the time table before actually starting the process. To do.

The schedule display function unit 41 displays the schedules of all lots created by the scheduling function unit 39 based on the created timetable.

The schedule change request processing unit 43 detects from the displayed timetable that the operator of the apparatus has requested a schedule change, and informs the scheduling function unit 39 of this, and
Reschedule lots for which changes have been requested.

The timetable created by the control unit 37 is displayed on the display unit 4 including a liquid crystal display device, a CRT display device and the like.
4 is displayed. Further, the schedule change instruction requested by the operator is given by the keyboard 45 or the mouse 47 which is an input device.

The scheduling function unit 3 described above is used.
Reference numeral 9 corresponds to the schedule creating means and schedule recreating means in the present invention, and the display section 44 and the schedule display function section 41 correspond to the display means. The keyboard 45, the mouse 47, and the schedule change request processing unit 43 correspond to the instructing means in the present invention.

The timetable created as described above is stored in the storage unit 49. The storage unit 49 stores a program defining the operation of the control unit 37 and a created timetable. Further, various recipes defining the processing procedure are also stored in advance.

The created timetable is finally read from the storage unit 49, and the control unit 37 executes processing according to the recipe while using each resource at the timing described in the control unit 37 based on the timetable. Apply to all lots.

Next, the flow of processing in the above-described substrate processing apparatus will be described with reference to FIGS.
3 is a flow chart showing the flow of scheduling, and FIGS. 4 to 7 are time tables showing the process of scheduling.

Here, a case where three lots are sequentially processed with the same recipe will be described as an example.

In order to facilitate understanding of the explanation, the recipe is simplified as compared with the actual recipe as shown in Table 1 below. That is, although the above-described substrate processing apparatus includes the first processing unit 19 and the second processing unit 27, the second processing unit 27 among these is processed by a recipe that is not used.

[0034]

[Table 1]

The above-mentioned recipe is composed of seven processing steps from the processing step a to the processing step e, a part of which is performed a plurality of times. It is divided into three blocks A to C so as to be divided according to the processing steps.

In the "A block", the first transport mechanism 11 takes out the cassette 1 from the loading section 3 side, and the second transport mechanism 13
Is a process in which a lot (a plurality of substrates W) is taken out from the cassette 1 and the chemical liquid processing unit 23 of the first processing unit 19 performs the chemical liquid processing on the lot to the pure water cleaning processing unit 21. The cassette cleaning unit 35 executed during that time
The cleaning processing of the empty cassette 1 by the method is omitted.

More specifically, the first transfer mechanism 11 takes in the cassette 1 of the loading section 3 and transfers it to the second transfer mechanism 13,
The process a is until the transfer mechanism 13 takes out a plurality of substrates W forming the lot from the cassette 1, and the process b is the process until the third transfer mechanism 15 receives the lot and waits at a predetermined position. 3 Receives the lot from the transport mechanism 15, cleans the lot with pure water in the pure water cleaning processing section 21, transports the lot to the chemical solution processing section 23 by the sub transport mechanism 25 to process the chemical solution, and then again the sub transport mechanism 25. The process c is carried to the pure water cleaning processing section 21 through the above to complete the pure water cleaning processing. The numbers in the table show examples of the time (minutes) required for the pre-work, the main work, and the post-work.

"B block" is a process in which the third transfer mechanism 15 takes out the processed lot from the pure water cleaning processing unit 21, transfers it to the drying processing unit 17, and finishes the drying process.

More specifically, the process b is until the third transfer mechanism 15 receives the lot cleaned with pure water and waits at a predetermined position, and the lot is transferred to the drying processing unit 17 to complete the drying process. Up to the d treatment step.

The "C block" takes out the lot dried by the third transfer mechanism 15 and stores the lot in the cassette 1 by the second transfer mechanism 13, and then the first transfer mechanism 11 of the cassette 1 sends the lot together. It is a process until it is transported to.

In detail, the process b is a process in which the third transport mechanism 15 receives the dried lot and waits at a predetermined position, and the second transport mechanism 13 receives the lot.
The e-processing step is a process of accommodating a plurality of substrates W in the cassette 1 and passing the cassette 1 together with the cassette 1 to the first transport mechanism 11 to dispense it to the dispensing unit 7.

The last processing step in the blocks A and B described above, that is, the c processing step and the d processing step, may be allowed a certain waiting time until the next processing without immediately performing the next processing. It is a processing step having an allowable time.

Step S1 The lot is loaded. The operator mounts the first lot on the mounting table 5. And the keyboard 45 and mouse 47
Is operated to instruct the above recipe, and instruct the start of processing. Further, it is assumed that the second lot is placed on the other placing table 5 and the same instruction is given.

Step S2 The processing data is read. The scheduling function unit 39 of the control unit 37 associates the loaded first lot with the recipe instructed at that time, and reads the processing data regarding the recipe from the storage unit 49. The same applies to the second lot.

Step S3 The scheduling function unit 39 starts scheduling. First, the first lot loaded first is scheduled, and then the second lot is scheduled.

Specifically, as shown in FIG. 4, the first lot is arranged on the timetable. In addition, here
The current time is indicated by the symbol PT. In this case, the schedule timetable is as shown in FIG.
Block A of the first lot (reference numeral 1-A) is set based on a time (scheduled start time of the first lot) that is separated from T by a time with a margin for the time required for scheduling.
Will be arranged. Following Block A of the first lot,
Block B (reference 1-B) and block C (reference 1-)
Place C).

Since the present invention is not an event-driven scheduling method which has been most widely used in the past but a method of scheduling prior to processing, the next processing step after the main work of the previous processing step is completed. The processing steps can be arranged so that the main work of (1) is started. In the figure,
The symbol e attached to the arrow is an end signal indicating that the processing is finished, and the symbol m indicates the lot payout. The above can be easily understood from the fact that these are emitted at the same time.

Subsequent to the first lot, the scheduling function unit 39 arranges the second lot in the timetable. Specifically, as shown in FIG. 5, the first lot is arranged so as to sew between the intervals where the resources are not used. In detail, since the processing of the first lot has not started, while moving the first lot back and forth in block units,
Block A (reference 2-A) and block B of the second lot
(Code 2-B) and block C (code 2-C) are arranged. The current time PT moves as time passes as shown in FIGS. 4 to 5.

It is assumed that the time lapses and the current time PT reaches the scheduled start time of the first lot as shown in FIG.
Then, the processing such as the first transport mechanism 11 taking in the cassette 1 of the first lot of the input unit 3 and passing it to the second transport mechanism 13 is started according to the recipe and the timetable described above. Here, since the mounting table 5 is empty, it is assumed that the operator mounts the cassette 1 of the third lot on the mounting table 1 and instructs the keyboard 45 to start the recipe and the process.

As a result, as shown in FIG. 6, block A (reference numeral 3-A) and block B (reference numeral 3-) of the third lot.
B) and block C (reference numeral 3-C) are arranged. Each schedule created as described above,
It is sequentially stored in the storage unit 49.

Step S4 The schedule is displayed for all lots. Specifically, the schedule display function unit 41 displays all the schedules stored in the storage unit 49 on the display unit 44. In this example, the display is made according to the timetable shown in FIG.

Step S5 The process branches depending on whether or not there is a schedule change request. When there is a change request, the keyboard 45 or the mouse 47 is operated by the operator to instruct the lot to be changed in processing order and the change order. In this example, it is assumed that the third lot is instructed and the instruction is given to process the second lot which is not actually started.

It is preferable that the lot of which the schedule can be changed is limited to the non-execution state in which the actual processing is not executed. This is because if the lot that has already been processed is changed, problems such as impairing the reproducibility of the process and adversely affecting the quality may occur. Therefore, the reschedule can be performed without adversely affecting the quality. However, even if the lot has already been processed, the movement change of the block having the allowable time may be permitted. This allows more flexible schedule creation for changing lots.

If there is no change request, the process proceeds to step S6 to start the process based on the schedule or continue the process based on the already started schedule.

When the operator's change request gives an instruction via the keyboard 45 or the mouse 47, the schedule change request processing unit 43 detects it and issues a rescheduling request to the scheduling function unit 39. To do. At this time, change information indicating which lot has been requested and how to be changed is transmitted.

In consideration of the current time PT, the time required for scheduling, etc., the scheduling function section 39 makes adjustments such as moving blocks of a lot for which processing has not been started to the front and back, and executes operator change requests.

As shown in FIG. 7, in this example, blocks A to C (reference numerals 2-A to 2-C) of the second lot are shifted later, and blocks A to C (reference numeral 3) of the third lot. -A to 3-C) will be placed between the first lot in which the treatment has already been carried out.

Then, in step S4, all schedules (timetable shown in FIG. 7) are displayed again, and step S
If there is no change request in 5, the process is started or continued based on the schedule in step S6.

As described above, according to the present embodiment, the schedules are displayed for all the lots (first to third lots) whose schedules have been once fixed, and if there is any desired change, the instruction is given. . Then, by giving flexibility so that the designated lot is rescheduled from that point, it is possible to easily change the schedule of the loaded first to third lots.

The present invention is not limited to the above embodiment, but can be modified as follows.

(1) In the embodiment, the case where three lots are sequentially processed has been described as an example, but the present invention is applicable even when processing four lots or more or two lots. Can be applied.

(2) The substrate processing apparatus described in the embodiment is an apparatus for sequentially performing the chemical liquid treatment, the water washing treatment, and the drying treatment on the substrate. The invention can be applied. For example, an apparatus that applies a photoresist solution to a substrate, spins it into a thin film, and forms a film by a baking process may be used.

(3) The present invention is applicable if a timetable is created in advance before processing and then the actual processing is carried out. Among them, the following schedule creation method is preferable. The processing steps in this method also include the case of the blocks described above.

That is, when a plurality of lots are processed by a substrate processing apparatus having a plurality of processing units for processing a substrate, each lot is sequentially processed by each processing unit based on a recipe including a plurality of processing steps. In the method of creating a schedule for a substrate processing apparatus that determines the processing order of each lot for processing, after arranging the first processing step for any lot, the next processing step of each lot The processing step for the lot having the earliest scheduled end time in the processing step is arranged as the next processing step.

According to this method, it is possible to arrange the post-work of the previous processing step and the pre-work of the subsequent processing step in an overlapping manner by scheduling in advance, and at the same time among the process steps that can be arranged. By selecting and arranging the processing step of the lot whose processing step ends early as the next processing step, the time until the completion of the next processing step can be shortened. Therefore, since the processing unit of the substrate processing apparatus can be effectively used, the standby time can be suppressed and the operating rate can be improved.

[0066]

As is apparent from the above description, according to the present invention, the schedules are displayed for all the lots whose schedules have been once fixed, and if any of them is desired to be changed, the instruction is given. Then, by giving flexibility so that the instructed lot is scheduled again from that point, it is possible to easily change the schedule of the introduced lot.

[Brief description of drawings]

FIG. 1 is a plan view showing a schematic configuration of a substrate processing apparatus.

FIG. 2 is a block diagram showing a schematic configuration of a substrate processing apparatus.

FIG. 3 is a flowchart showing the flow of scheduling.

FIG. 4 is a time table showing a scheduling process.

FIG. 5 is a time table showing a scheduling process.

FIG. 6 is a time table showing a scheduling process.

FIG. 7 is a time table showing a scheduling process.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Cassette 3 ... Input part 11 ... 1st conveyance mechanism 13 ... 2nd conveyance mechanism 15 ... 3rd conveyance mechanism 17 ... Drying process part 19 ... 1st process part 21 ... Pure water cleaning process part 23 ... Chemical liquid process part 25 ... First sub-transport mechanism 27 ... Second processing unit 29 ... Pure water cleaning treatment unit 31 ... Chemical solution processing unit 33 ... Second sub-transport mechanism 37 ... Control unit 39 ... Scheduling function unit (schedule creating means, schedule recreating means) 41 ... Schedule display function unit (display unit) 43 ... Schedule change request processing unit (instruction unit) 44 ... Display unit (display unit) 45 ... Keyboard (instruction unit) 47 ... Mouse (instruction unit) 49 ... Storage unit PT ... Current time

Claims (4)

[Claims] 1. A substrate processing apparatus having a plurality of resources for processing a substrate determines a timing for using each resource in a timetable before processing a lot while using each resource. In the method for creating a schedule for a substrate processing apparatus, the steps of: (a) arranging lots carried into the substrate processing apparatus on a timetable; (b) displaying a schedule of lots arranged on the timetable; ) A method of creating a schedule for a substrate processing apparatus, comprising: when a schedule change is instructed, a process of rescheduling the lot and arranging the lot in a timetable. 2. The method of creating a schedule for a substrate processing apparatus according to claim 1, wherein the lot of which the schedule can be changed is only loaded into the substrate processing apparatus and scheduled, and the processing is in a non-execution state. A method for creating a schedule for a substrate processing apparatus, comprising: 3. A substrate processing apparatus having a plurality of resources for processing a substrate determines the timing of using each resource in a timetable before processing a lot while using each resource. In the apparatus for creating a schedule of a substrate processing apparatus, a schedule creating means for arranging lots carried into the substrate processing apparatus on a timetable, a display means for displaying the timetable created by the schedule creating means, and a schedule change An instruction means for instructing, and a schedule re-creating means for rescheduling the lot and arranging it in the timetable when a schedule change is instructed via the instruction means. Substrate processing device schedule creation device. 4. A substrate processing apparatus having a plurality of resources for processing substrates determines the timing of using each resource in a timetable before processing a lot while using each resource. In the schedule creation program for the substrate processing equipment, the process of placing the lots loaded into the substrate processing equipment in the timetable, the process of displaying the schedule of the lots placed in the timetable, and the schedule change instruction Is a process of rescheduling the lot and arranging it in the timetable, and a computer for controlling the computer to execute the process.