JP2009238916A - Scheduling method and program of substrate processing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent excessive processing to a lot by performing scheduling while considering maintenance at a safety processing section. <P>SOLUTION: When maintenance M1 is performed at a drying processing section LPD, the use of a virtual resource VIL can excluded for a series of processing processes P2-P5, thus preventing the resources of a chemical liquid processing section CHB1 from being used in parallel with the maintenance M1 of the drying processing section LPD and hence preventing excessive processing to a lot even if the maintenance M1 at the drying processing section LPD is extended timewise. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a schedule creation method for a substrate processing apparatus for performing a predetermined process on a glass substrate (hereinafter simply referred to as a substrate) for a semiconductor wafer or a liquid crystal display device, and a program therefor.

  Conventionally, as a method of this type, for example, in a processing unit such as a chemical solution processing unit, a pure water cleaning processing unit, a drying processing unit, and a substrate processing apparatus that performs processing on a lot by transferring a lot between them, There is one in which a schedule is created in advance before starting, and then actual processing is started according to the schedule.

  As a schedule method for such a substrate processing apparatus, the processing steps of each lot are arranged according to the recipe, but after the first processing step is arranged for any lot, each previous processing of each lot is processed. There is one that arranges a processing step for a lot with the earliest scheduled end time in the step (for example, see Patent Document 1). In such a method, since the processing steps are arranged in front-packing, standby time can be suppressed and the operating rate of the apparatus can be improved.

  By the way, there are two types of processing units, for example, those in which a lot can be made to wait even if an apparatus abnormality occurs and those that cannot be made to wait. For example, the chemical processing unit cannot wait for the lot because excessive processing by the chemical occurs in the lot, but the drying processing unit does not cause such a problem, and therefore can wait for the lot. The former is referred to as a non-safe processing unit, and the latter is referred to as a safety processing unit.

In the substrate processing apparatus including the non-safe processing unit, the safety processing unit, and the transport unit that transports the lot as described above, a space where the transport units interfere with each other is defined as a resource, and the transport unit moves. In some cases, scheduling is performed in consideration of simultaneous use of the resources (see, for example, Patent Document 2). In such a method, when one transport unit is used, since the other transport unit cannot use the interference space, the processing steps in the non-safe processing unit are performed so that the transport is not performed at that timing. Therefore, it is possible to prevent the occurrence of excessive processing for the lot processed by the non-safe processing unit.
Japanese Patent No. 3758992 JP 2003-31453 A

However, the conventional example having such a configuration has the following problems.
That is, depending on the safety processing unit, it is necessary to perform maintenance every predetermined time or every predetermined number of times of use, so that it is necessary to arrange maintenance in the schedule. Maintenance includes, for example, internal cleaning of the drying processing unit.

  In the conventional method, the schedule is performed in consideration of the interference space by the transport unit. However, when the schedule for placing maintenance in the safety processing unit is performed, processing in the non-safe processing unit is placed in parallel with the maintenance. In addition, after the maintenance is completed, the lot is moved from the non-safe processing unit arranged in parallel to the safety processing unit that has completed the maintenance. Therefore, if the maintenance is prolonged for some reason, the lot cannot be moved from the non-safe processing unit to the safe processing unit, and the lot may be excessively processed in the non-safe processing unit. There is a problem that there is.

  The present invention has been made in view of such circumstances, and a scheduling method for a substrate processing apparatus capable of preventing excessive processing for a lot by scheduling in consideration of maintenance in a safety processing unit, and The purpose is to provide the program.

In order to achieve such an object, the present invention has the following configuration.
That is, the invention according to claim 1 is a substrate processing apparatus including a processing unit including a safety processing unit capable of waiting a substrate and a non-safe processing unit capable of waiting a substrate. When the control unit processes a plurality of lots using the resources of each processing unit, in the substrate processing apparatus schedule creation method for determining the use timing of each resource by the lot, the resource corresponding to the maintenance for the safety processing unit In the process of defining a common virtual resource with a resource corresponding to a series of processing that performs processing by the safety processing unit following processing by the non-safe processing unit, and when using the resource of the safety processing unit in maintenance, The process of using the resources of the safety processing unit and the virtual resource, and the resources of the non-safe processing unit and the safety processing unit in that order Use the resources of the non-safe processing unit and the safety processing unit, use the virtual resource, and determine the use timing of each resource by eliminating duplication of virtual resources. It is characterized by that.

  [Operation / Effect] According to the invention described in claim 1, when the control unit uses resources in a series of processes by the non-safety processing unit and the safety processing unit, the control unit uses these resources and uses them. Also use virtual resources. Furthermore, when performing maintenance of the safety processing unit, the resources of the safety processing unit are used and the virtual resources are also used at the same time. Then, the use timing of each resource is determined so that there is no duplication of virtual resources. Therefore, when maintenance is performed in the safety processing unit, the use of virtual resources can be excluded from a series of processes, so resources in the non-safe processing unit are used in parallel with maintenance of the safety processing unit. Can be prevented. As a result, even if the maintenance in the safety processing unit extends backward in time, excessive processing on the lot in the non-safe processing unit can be prevented.

  The “resource” in the present invention refers to a pure water cleaning processing unit, a chemical processing unit, a drying processing unit, a coating processing unit, a plating processing unit, an etching processing unit, a transporting unit that transports a substrate, and a posture of the substrate. This indicates a posture conversion unit that converts.

  In the present invention, it is preferable that the safety processing unit is a drying processing unit that performs a drying process on a lot, and the non-safety processing unit is a chemical processing unit that performs processing with a chemical on a lot (claim). Item 2). Although the drying processing unit is maintained for reasons such as cleaning the inside, even if the time is longer than planned, a waiting time occurs while the lot is using the chemical processing unit, Over-treatment can be prevented.

  In the present invention, it is preferable that the control unit defines a virtual resource for each processing unit with reference to a definition file that describes whether each processing unit is a safety processing unit or a non-safe processing unit. (Claim 3). The control unit can determine whether each processing unit is a safety processing unit or a non-safe processing unit by referring to the definition file.

  According to the schedule creation method for a substrate processing apparatus according to the present invention, the control unit determines the use timing of each resource so that there is no duplication of virtual resources. Therefore, when maintenance is performed in the safety processing unit, the use of virtual resources can be excluded from a series of processes, so resources in the non-safe processing unit are used in parallel with maintenance of the safety processing unit. Can be prevented. As a result, even if the maintenance in the safety processing unit extends backward in time, excessive processing on the lot can be prevented.

An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is a plan view illustrating a schematic configuration of the substrate processing apparatus according to the embodiment, and FIG. 2 is a block diagram illustrating a schematic configuration of the substrate processing apparatus according to the embodiment.

  This substrate processing apparatus is an apparatus for performing chemical liquid processing, cleaning processing, and drying processing on the substrate W, for example. A plurality of substrates (for example, 25 substrates) are stored in a standing posture with respect to the cassette 1. The cassette 1 storing the unprocessed substrates W is placed on the input unit 3. The input unit 3 includes two mounting tables 5 on which the cassette 1 is mounted. A payout unit 7 is provided at a position adjacent to the input unit 3. The dispensing unit 7 stores the processed substrate W in the cassette 1 and dispenses the cassette 1 together. Similar to the loading unit 3, the payout unit 7 includes two mounting tables 9 for mounting the cassette 1.

  A first transport mechanism CTC configured to be movable between these is provided at a position along the input unit 3 and the payout unit 7. The first transport mechanism CTC takes out all the substrates W stored in the cassette 1 placed on the input unit 3 and then transports them to the second transport mechanism WTR. The first transport mechanism CTC stores the processed substrate W from the second transport mechanism WTR and then stores the substrate W in the cassette 1. The second transport mechanism WTR is configured to be movable along the longitudinal direction of the substrate processing apparatus.

  A drying processing unit LPD for storing a plurality of substrates W in a low-pressure chamber and drying them is provided on the most front side in the moving direction of the second transport mechanism WTR.

  A first processing unit 19 is disposed at a position adjacent to the drying processing unit LPD in the moving direction of the second transport mechanism WTR. The first processing unit 19 includes a pure water cleaning processing unit ONB1 for performing a pure water cleaning process on a plurality of substrates W, and a processing liquid containing a chemical solution for the plurality of substrates W. A chemical treatment unit CHB1 for performing chemical treatment is provided. Further, the first processing unit 19 delivers the substrate W to and from the second transport mechanism WTR, and the substrate between the lifter LF1 that can be lifted and lowered only by the pure water cleaning processing unit ONB1 and the second transport mechanism WTR. A lifter LF2 is provided which can transfer only W and can be moved only by the chemical treatment unit CHB1.

  A second processing unit 21 is provided at a position adjacent to the first processing unit 19, and a third processing unit 23 is provided at a position adjacent to the second processing unit 21. The second processing unit 21 has the same configuration as the first processing unit 19 described above. That is, the apparatus includes a pure water cleaning processing unit ONB2, a chemical solution processing unit CHB2, and lifters LF3 and LF4. Similarly, the third processing unit 23 includes a pure water cleaning processing unit ONB3, a chemical solution processing unit CHB3, and lifters LF5 and LF6.

  The substrate processing apparatus configured as described above is comprehensively controlled by the control unit 31 as shown in the block diagram of FIG. The control unit 31 corresponds to the computer in the present invention.

  The control unit 31 includes a CPU, a timer, and the like, and includes a scheduling unit 33, a virtual resource processing unit 34, and a process execution instruction unit 35. A storage unit 37 connected to the control unit 31 is prepared in advance by a user of the substrate processing apparatus, and includes a recipe including a plurality of processing steps that define how to process the substrate W, and a schedule generation program And a processing program for executing the created schedule, a definition file to be described later, and the like are stored in advance.

  The scheduling unit 33 handles a plurality of substrates W stored in the cassette 1 and placed on the input unit 3 as one lot, and stores the recipe stored in advance in the storage unit 37 instructed by the operator of the apparatus. Accordingly, before actually starting processing, a schedule is created so that processing steps for each lot can be efficiently arranged in time series. The created schedule is stored in the storage unit 37. Note that when creating a schedule, virtual resources described later are taken into consideration.

  The virtual resource processing unit 34 refers to a definition file that describes whether each processing unit of the device is a safety processing unit or a non-safe processing unit, and includes maintenance of the processing unit corresponding to the safety processing unit and a safety processing unit. Add virtual resources for a series of processing steps. Note that the safety processing unit is a processing unit that can make a substrate stand by, and the non-safe processing unit means a processing unit that cannot make a substrate stand by. Specifically, there are dry processing units LPD and pure water cleaning processing units ONB1 to 3 as safety processing units, and chemical solution processing units CHB1 to CHB3 as non-safety processing units. In this example, it is assumed that a virtual resource VIL is defined for maintenance in the drying processing unit LPD.

  The resources referred to here are under the control of the control unit 31, such as the first transport mechanism CTC, the second transport mechanism WTR, the drying processing unit LPD, the pure water cleaning processing units ONB1 to 3 and the chemical solution processing units CHB1 to 3. Refers to resources used for lot processing. Further, the virtual resource here is a resource that is treated as being virtually present although there is no entity, unlike the entity of the processing unit such as the first transport mechanism CTC. In this embodiment, the resources corresponding to the maintenance in the drying processing unit LPD corresponding to the safety processing unit, the second transport mechanism WTR, the chemical processing unit CHB1 (˜3), the second transport mechanism WTR, and the drying processing unit LPD A virtual resource VIL is defined as a resource that is common to resources corresponding to a series of processes according to.

  The process execution instructing unit 35 instructs an operation related to the processing of each processing unit at an appropriate timing based on the schedule created by the scheduling unit 33 and stored in the storage unit 37.

  Next, specific scheduling will be described with reference to FIGS. 3 is a flowchart showing the schedule operation, FIG. 4 is a time chart showing an example of a single batch schedule, FIG. 5 is a time chart showing maintenance, and FIG. 6 is a virtual diagram for a single batch. FIG. 7 is a time chart illustrating an example in which resources are added, FIG. 7 is a time chart illustrating an example in which virtual resources are added to maintenance, and FIG. 8 is a time chart illustrating an example in which an overall schedule is performed.

  In the following, in order to facilitate understanding of the description, a case where only a single lot is scheduled will be described as an example. However, a plurality of lots can be similarly scheduled.

In addition, it is assumed that the recipe in this example is as shown in FIG.
That is, the process step P1 is a transfer process by the first transfer mechanism CTC (resource a), the process step P2 is a transfer process by the second transfer mechanism WTR (resource b), and the process step P3 is, for example, The chemical processing by the chemical processing unit CHB1 (resource c), the processing step P4 is, for example, the transport processing by the second transport mechanism WTR (resource b), and the processing step P5 is the drying processing unit LPD (resource d). The process P6 is a transport process by the second transport mechanism WTR (resource b), and the process process P7 is a transport process by the first transport mechanism CTC (resource a). Further, in each of the processing steps P1 to P7, the portion corresponding to the hatched portion is a pre-operation for preparing for using the resource, and the portion corresponding to the hatched portion is a post-operation for cleaning up the used resource. is there. The resource f is a virtual resource VIL.

Steps S1-S3
The operator of the apparatus places the cassette 1 storing the unprocessed substrates W on the placing table 5 of the loading table 3 (Step S1). The above-described recipe is instructed from an instruction unit (not shown) (step S2). Then, the control unit 31 reads recipe data stored in the storage unit 37 (step S3).

Step S4
The scheduling unit 33 calculates the time of each processing step P1 to P7 based on the read recipe data, and creates a schedule based on the time required for each processing step P1 to P7 as shown in FIG. To do. At this time, since the schedule for only one processing step P1 to P7 of one lot is performed, it is referred to as a single batch schedule. If a plurality of lots are carried in, a single batch schedule is created for each lot at this point. Further, as shown in FIG. 5, a schedule is also created for the maintenance M1 of the drying processing unit LPD. Incidentally, the maintenance M1 cleans and dries the tank etc. inside the drying processing unit LPD, and is longer in time (for example, about 40 minutes) than the processing steps P1 to P7. is there.

Step S5
As illustrated in FIG. 7, the virtual resource processing unit 34 adds a virtual resource VIL in accordance with the maintenance M1 of the drying processing unit LPD that is a safety processing unit.

Step S6
The virtual resource processing unit 34 adds the virtual resource VIL when there is a processing step (P5) by the drying processing unit LPD that is the safety processing unit in the schedule of the single batch. Specifically, as shown in FIG. 6, resources (second transport mechanism WTR, chemical treatment unit CHB1, second transport mechanism WTR, and the like) used in a series of processing steps P2 to P5 (excluding pre-work and post-work). A common virtual resource VIL is added between the drying processing unit LPD) and the resources used in the maintenance M1 of the drying processing unit LPD, which is a safety processing unit.

Step S7
The scheduling unit 33 performs the entire schedule with the single batch schedule (FIG. 6) to which the virtual resource VIL is added and the maintenance M1. Specifically, as shown in FIG. 8, a schedule is created while avoiding duplication of common virtual resources VIL in a single batch schedule and maintenance. In this example, the lot processing is performed after the dry processing section LPD is first maintained.

  In this way, when the maintenance M1 is performed in the drying processing unit LPD that is a safety processing unit, the use of the virtual resource VIL can be excluded from the series of processing steps P2 to P5. It is possible to prevent the resources of the chemical solution processing unit CHB1, which is a non-safe processing unit, from being used in parallel with the maintenance M1 of the drying processing unit LPD. As a result, even if the maintenance M1 in the drying processing unit LPD, which is a safety processing unit, extends backward in time, excessive processing on the lot can be prevented.

  When the entire schedule is completed as described above, the process execution instructing unit 35 controls each resource according to the schedule and actually performs the process on the lot sequentially.

  Incidentally, when the maintenance M1 is delayed from the scheduled time t1 and reaches the time t2, the schedule is adjusted as shown in FIG.

  In other words, the transfer of the lot from the first transfer mechanism CTC to the second transfer mechanism WTR is set in a standby state, and the lot is waited in the first transfer mechanism CTC. Then, when the maintenance M1 is completed (t2), the lot is transported to the second transport mechanism WTR, and the subsequent time is sequentially shifted backward by the waiting time wt from the scheduled time.

  Of the series of processes described above, the second transport mechanism WTR (processing step P2) is included in order to use the virtual resource VIL when the second transport mechanism WTR waits in a state where a lot is received. This is because there is a possibility of adversely affecting the lot in the state.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) The recipe in the Example mentioned above is an example, and even if it is a recipe other than the above, there exists the same effect.

  (2) The configuration of the substrate processing apparatus in the above-described embodiment is an example, and the same effect can be obtained even with a substrate processing apparatus having a configuration other than the above.

  (3) In the above-described embodiment, the drying processing unit LPD is exemplified as the safety processing unit. However, for example, when the pure water cleaning processing units ONB1 to ONB3 corresponding to the safety processing unit perform maintenance, scheduling is performed as described above. The same effect can be achieved by performing.

It is the top view which showed schematic structure of the substrate processing apparatus which concerns on an Example. It is the block diagram which showed schematic structure of the substrate processing apparatus which concerns on an Example. It is a flowchart which shows schedule operation | movement. It is a time chart which shows the example of a schedule of a single batch. It is a time chart which shows a maintenance. It is a time chart which shows the example which added the virtual resource to the single batch. It is a time chart which shows the example which added the virtual resource to the maintenance. It is a time chart which shows the example which performed the whole schedule. It is a time chart explaining operation | movement when a maintenance is extended.

Explanation of symbols

W ... Substrate 1 ... Cassette CTC ... First transport mechanism WTR ... Second transport mechanism LPD ... Drying processing unit 19 ... First processing unit ONB1-ONB3 ... Pure water cleaning processing unit CHB1-CHB3 ... Chemical solution processing unit LF1-LF6 ... Lifter DESCRIPTION OF SYMBOLS 31 ... Control part 33 ... Scheduling part 34 ... Virtual resource process part 35 ... Process execution instruction | indication part 37 ... Memory | storage part P1-P7 ... Processing process VIL ... Virtual resource M1 ... Maintenance

Claims (4)

A control unit uses resources of each processing unit by a substrate processing apparatus including a processing unit including a safety processing unit capable of waiting for a substrate and a non-safe processing unit capable of not waiting for a substrate. However, when processing a plurality of lots, in the substrate processing apparatus schedule creation method for determining the use timing of each resource by lot,
A process of defining a common virtual resource by a resource corresponding to maintenance for the safety processing unit and a resource corresponding to a series of processing for performing processing by the safety processing unit following processing by the non-safe processing unit;
When using the resource of the safety processing unit for maintenance, the process of using the resource of the safety processing unit and the virtual resource,
When using the resources of the non-safe processing unit and the safe processing unit in that order, the process of using the virtual resource while using the non-safe processing unit and the resource of the safe processing unit,
The process of determining when to use each resource by eliminating duplication of virtual resources;
A method of creating a schedule for a substrate processing apparatus, comprising: In the schedule preparation method of the substrate processing apparatus of Claim 1,
The safety processing unit is a drying processing unit that performs a drying process on a lot,
The non-safe processing unit is a chemical processing unit that performs chemical processing on a lot. In the schedule preparation method of the substrate processing apparatus of Claim 1 or 2,
The control unit defines a virtual resource for each processing unit with reference to a definition file describing whether each processing unit is a safety processing unit or a non-safe processing unit. Schedule creation method. A control unit uses resources of each processing unit by a substrate processing apparatus including a processing unit including a safety processing unit capable of waiting for a substrate and a non-safe processing unit capable of not waiting for a substrate. However, when processing multiple lots, in the schedule creation program of the substrate processing apparatus that determines the use timing of each resource by lot,
Defining a common virtual resource between a resource corresponding to maintenance for the safety processing unit and a resource corresponding to a series of processing for performing processing by the safety processing unit following processing by the non-safe processing unit;
When using the resource of the safety processing unit for maintenance, using the resource of the safety processing unit and using the virtual resource,
When using the resources of the non-safe processing unit and the safety processing unit in that order, using the resources of the non-safe processing unit and the safe processing unit and using the virtual resource,
Determining when to use each resource by eliminating duplication of virtual resources;
Is executed by a computer which is the control unit.

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