JP2007238289A - Work conveying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a work conveying device capable of air-conveying a plurality of works so as not to make the works contact with each other without physically applying a braking and control force to the work. <P>SOLUTION: The work conveying device is provided with a work conveying mechanism 4 for conveying the plurality of works by air in a state that a clearance exists in a conveying direction by guiding the work to a work conveying passage 2; and a plurality of intermediate part drop air means 5 arranged above the work conveying mechanism 4 and blowing air to the respective clearances of the plurality of conveyed works from above to maintain the respective clearances. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a workpiece transfer device that transfers a plurality of workpieces with air while maintaining each gap.

2. Description of the Related Art Conventionally, as this type of workpiece transfer device, there is known a device that floats a workpiece placed on a workpiece transfer path with air and transfers the workpiece (see Patent Document 1).
Japanese Patent Laid-Open No. 10-157851

  By the way, when a plurality of workpieces are transferred by the workpiece transfer device, the workpiece is transferred on the workpiece transfer path with a gap between the plurality of workpieces. At this time, when the preceding workpiece has stagnated on the workpiece conveyance path, it is necessary to maintain a gap so that the following workpiece does not contact the preceding workpiece. At this time, if an attempt is made to maintain a gap between a plurality of workpieces by physical contact, the workpiece may be damaged in some way. For example, when a glass substrate or the like is used as a workpiece, there is a possibility that a crack or the like that cannot be visually confirmed can occur at the contact portion. In particular, this type of crack may be overlooked at the inspection stage and has a problem such as being discovered after being manufactured.

  It is an object of the present invention to provide a work transfer device that can air-transfer a plurality of works so as not to contact each other without physically applying a braking / stopping force to the work.

  A workpiece transfer device according to the present invention guides a workpiece transfer path and transfers a plurality of workpieces by air with a gap in the transfer direction, and is disposed and transferred above the workpiece transfer mechanism. A plurality of intermediate drop air means for blowing air from above to the gaps of the plurality of workpieces to maintain the gaps.

  According to this configuration, since the gaps between the workpieces can be maintained by the air of the intermediate drop air means, the workpieces do not come into contact with each other even when any one or a plurality of workpieces stagnate. Further, since each gap is maintained by air, the work is not damaged by physical contact. Note that air may be blown when the workpiece is being conveyed or during conveyance suspension, or may be constantly blown.

  In this case, it is preferable that the plurality of intermediate portion drop air means spray air evenly so that the plurality of gaps are even.

  According to this configuration, since the gaps between the plurality of workpieces can be made uniform, the conveyance interval can be made constant, and the workpiece can be easily positioned.

  In this case, air is blown from above into the gap between the baffle plate that is disposed at the end of the conveyance end of the workpiece conveyance path and extends in a direction orthogonal to the conveyance direction, and the workpiece that has reached the conveyance end position. It is preferable that the apparatus further comprises an end drop air means for positioning the workpiece at the transfer end position.

  Similarly, the end drop air means is disposed at the end of the transfer end position of the work transfer path, and air is blown obliquely backward from above to the work that has reached the transfer end position to position the work at the transfer end position. It is preferable to further include

  According to this configuration, since the work can be positioned at the transfer end position, work such as picking up the work can be easily performed at the transfer end position.

  In this case, it is preferable that the plurality of intermediate drop air means and end drop air means each have a slit-like air nozzle extending in a direction orthogonal to the transport direction.

  According to this configuration, since air can be evenly blown to the front surface of the workpiece to be conveyed, it is possible to appropriately maintain and position the gaps of the plurality of workpieces.

  In this case, it is preferable that the plurality of middle drop air means and the end drop air means each have a plurality of air nozzles arranged in a direction orthogonal to the transport direction.

  According to this configuration, since air can be evenly blown to the front surface of the workpiece to be conveyed, it is possible to appropriately maintain and position the gaps of the plurality of workpieces. In addition, the amount of air consumption can be reduced as compared with the slit-shaped air nozzle.

  In this case, it is preferable that each intermediate portion drop air means blows air in the oblique conveyance direction.

  According to this configuration, particularly when the workpiece is being conveyed, the air can be blown relative to the workpiece from above by matching the workpiece conveyance speed and the air blowing angle. For this reason, in particular, the gap between the workpieces being conveyed can be appropriately maintained.

  In this case, the work transport mechanism is disposed on both sides of the work transport path, and a pair of side air means for imparting a propulsive force for transport to the work by blowing air evenly from both sides to the work on the work transport path, It is preferable to further include

  According to this structure, since air is blown so that a propulsive force is equally applied to both side surfaces of the work, the work can be transported while bringing the work to the center of the work transport path. Therefore, the workpiece can be conveyed while maintaining the posture of the workpiece without the workpiece being detached from the workpiece conveyance path.

  In this case, each side air means preferably has a plurality of propulsion nozzles that blow air from the oblique conveyance direction on the side surface of the work and are arranged in the conveyance direction.

  According to this configuration, air can be blown so that a vector in the conveyance direction functions as a driving force for the workpiece and a vector orthogonal to the conveyance direction functions as a center alignment of the workpiece.

  In this case, it is preferable that the distance between the plurality of propulsion nozzles of each side air means is ½ or less of the length of the side surface of the workpiece.

  According to this configuration, air can be blown to the side surface of the workpiece by at least two sets of the propulsion nozzles, and thus it is possible to apply a propulsive force in the transport direction while appropriately bringing the workpiece to the center and maintaining the posture.

  In this case, each side air means has a plurality of propulsion nozzles that blow air on the side surface of the workpiece from an oblique conveyance direction, and a plurality of controls that blow the air on the side surface of the workpiece from a direction orthogonal to the conveyance direction to control the posture of the workpiece. It is preferable that the plurality of propulsion nozzles and the plurality of control nozzles are arranged in the transport direction in a mixed state.

  According to this configuration, the control nozzle can position the workpiece in the center of the workpiece conveyance path in a posture substantially parallel to the conveyance direction, and the workpiece can be conveyed in this state by the propulsion nozzle.

  In this case, it is preferable that each propulsion nozzle and each control nozzle are disposed to face each other between the pair of side air means.

  According to this configuration, since the air is always blown from the propulsion nozzle to the work, the conveyance speed can be stabilized.

  In this case, it is preferable that the interval between the plurality of propulsion nozzles and the plurality of control nozzles of each side air means is ½ or less of the length of the side surface of the workpiece.

  According to this configuration, air can be blown to the side surface of the workpiece by the control nozzle, so even if the workpiece is misaligned with respect to the transport direction, the workpiece is corrected in position and positioned in the center of the belt. can do. Moreover, since air can be blown on the side surface of the workpiece by the propulsion nozzle, a propulsive force can be applied in the transport direction while properly bringing the workpiece to the center.

  In this case, the work conveyance path is composed of a plurality of working air plates composed of a perforated plate and an air chamber communicating with the perforated plate in the conveyance direction so that the work is floated through the perforated plate. It is preferable that air supply means for supplying air to the air chamber is further provided.

  According to this configuration, since the workpiece can be lifted, the frictional force generated between the workpiece and the workpiece conveyance path can be extremely reduced, and the posture of the workpiece can be easily controlled by air and the workpiece can be conveyed. It can be.

  In this case, it is preferable to further include a vacuum suction means for sucking air from the air chamber to suck the work through the perforated plate, and a switching control means for switching between the air supply means and the vacuum suction means. .

  According to this structure, a workpiece | work can be vacuum-sucked and it can fix on a workpiece conveyance path. For this reason, for example, when a workpiece is picked up at the conveyance end position, it can be sucked and fixed in a pre-aligned state, and can be picked up without causing a positional shift in the workpiece at the time of picking up.

  In this case, it is preferable that the perforated plate is composed of a porous plate.

  According to this configuration, air can be uniformly blown from the entire surface of the porous plate with a relatively small amount of air.

  Hereinafter, a workpiece transfer apparatus according to the present embodiment will be described with reference to the accompanying drawings. By the way, in order to mount components such as a flexible substrate (FOG) and driver chip (COG) on a glass substrate or the like, each component and the glass substrate are pre-aligned (accuracy of ± 0.1 mm) as a previous step, and then in the next step. Using an image recognition device and a precision stage, etc., each component and each alignment mark formed on the glass substrate are image-recognized. Based on the image recognition result, high-precision alignment (± 0.002 mm Accuracy). Thereafter, each component is bonded to the glass substrate, and each component is mounted on the glass substrate. At this time, the pre-alignment performed as a previous step is an operation for projecting the alignment mark on the image recognition apparatus. Here, the workpiece transfer device performs pre-alignment of the workpiece while being conveyed by air while maintaining a gap between a plurality of workpieces such as a glass substrate used for a liquid crystal panel placed on the workpiece conveyance path.

  Referring to FIG. 1, a workpiece transfer apparatus 1 is provided with a workpiece transfer path 2 that serves as a transfer path for a plurality of workpieces W and a pair of sides that are provided so as to extend along both sides of the workpiece transfer path 2 and give a propulsive force to the workpiece W. A work transport mechanism 4 comprising an air unit 3, a plurality of intermediate drop air units 5 disposed above the work transport path 2 and maintaining a gap between the plurality of works W being transported, and transport of the work transport path An end drop that blows air from above into the gap between the baffle plate 6 that is disposed at the end of the end position Pe and extends in a direction orthogonal to the transport direction and the work plate 6 that has reached the transport end position Pe. And an air unit 7. The pair of side air units 3 extends along the workpiece conveyance path 2 from the conveyance start position Ps to the conveyance end position Pe somewhat shorter than the length of the workpiece conveyance path 2 and is conveyed by the workpiece conveyance path 2. Air is blown so as to give propulsive force to the workpiece W.

  The work conveyance path 2 forms a conveyance path by connecting a plurality of working air plates 10, and each working air plate 10 is fitted to a rectangular frame frame 12 as a base and an upper portion of the frame frame 12. The air chamber 11 is formed on the lower side of the porous plate 13. Each air chamber 11 has an air connection port 14 opened on the lower side thereof, and the air connection port 14 can be switched to a compressed air supply facility and an air suction facility in a factory via a switching valve (not shown). It is connected. When air is supplied from the compressed air supply facility, air is blown evenly upward from the entire surface of the porous plate 13 to float the workpiece W, and when the switching valve is switched and connected to the air suction facility, The workpiece W is vacuum-sucked by the porous plate 13. Thereby, in the conveyance from the conveyance end position Pe to the conveyance start position Ps of the plurality of workpieces W, the work W of the processing apparatus disposed at the conveyance end position Pe or at the intermediate position of the conveyance of the workpiece W at the conveyance end position Pe. When the conveyance is stopped due to access or the like, vacuum suction is performed to attract and fix the workpiece W, and when the conveyance is performed again, air is blown out to float the workpiece W. Note that the air blowing amount may be such that the work W is slightly lifted.

  The pair of side air units 3 are disposed along both sides of the work transfer path 2 and each have a pair of rectangular air boxes 20 extending from the transfer start position Ps to the transfer end position Pe. A plurality of control nozzles 22 which are provided so as to face each other across the workpiece conveyance path 2 and which blows air in an orthogonal direction orthogonal to the conveyance direction, and a plurality of air which blows air in an inclined direction between the conveyance direction and the orthogonal direction The propulsion nozzle 23 is provided.

  Each air box 20 is divided into a plurality of parts in the longitudinal direction, and each of the divided boxes 21 is provided with three (plural) control nozzles 22 or propulsion nozzles 23. That is, the plurality of division boxes 21 are composed of two types of control division boxes 21a provided with control nozzles 22 and propulsion division boxes 21b provided with propulsion nozzles 23. The respective propulsion division boxes 21b are arranged to face each other with the workpiece conveyance path 2 interposed therebetween. The plurality of divided boxes 21 are connected to compressed air supply facilities (all of which are not shown) in the factory via flow control valves, etc., and the air supplied from the compressed air supply facilities is supplied to each divided box. The air is adjusted and blown from the control nozzles 22 and the propulsion nozzles 23 via the air 21 so that the air is blown evenly to both side surfaces of the workpiece W. In addition, it is more preferable to provide a flow rate adjusting valve or the like for each control nozzle 22 and propulsion nozzle 23.

  The plurality of control nozzles 22 and the propulsion nozzles 23 of each air box 20 are arranged in a row from the transfer start position Ps to the transfer end position Pe at the upper part of each air box 20 so that the arrangement pitch is equal. The control nozzle 22 has an air blowing angle adjusted so as to be orthogonal to the conveyance direction of the workpiece conveyance path 2, and the propulsion nozzle 23 has an air inclination direction between the conveyance direction and the orthogonal direction. The spray angle is adjusted. The arrangement pitch of the plurality of nozzles 22 and 23 is arranged at a pitch of ½ or less of the length of the side surface of the workpiece W, and air is blown onto the workpiece W by at least two sets of nozzles 22 and 23. It has become.

  Air is evenly blown onto both side surfaces of the workpiece W by the side air unit 3 on both side surfaces of the workpiece W placed on the workpiece conveyance path 2. That is, the plurality of sets of propulsion nozzles 23 of the side air unit 3 convey the workpiece W while moving it toward the center, and the plurality of sets of control nozzles 22 control the posture of the workpiece W in a posture that follows the conveyance direction. As a result, the workpiece W is conveyed while being gradually pre-aligned, and finally reaches the conveyance end position Pe in a pre-aligned state. Note that the three control nozzles 22 and the propulsion nozzles 23 of each division box 21 may be integrally formed in a slit shape. Further, the control division boxes 21a and the propulsion division boxes 21b may be provided in a staggered manner. Thereby, since the propulsion nozzle 23 always faces the workpiece W, a propulsive force is always applied to the workpiece W, and the speed at which the workpiece W is conveyed can be made constant. Further, the side air unit 3 may be configured by only the propulsion nozzle 23 (propulsion division box 21b).

  Each middle drop air unit 5 is provided downward above the workpiece conveyance path 2 and is arranged at equal intervals so as to face the front and rear of the workpiece W to be conveyed. In addition, as each space | interval, it is the length which match | combined the length of the conveyance direction of the workpiece | work W, and the clearance gap between the workpiece | work W which should be maintained, for example. Each of the intermediate drop air units 5 has a plurality of drop air nozzles 30 arranged in a direction perpendicular to the transport direction and blowing air in the vertical direction downward, and a drop air box 31 connected thereto. Each drop air box 31 is connected with a compressed air facility in the factory via a flow rate adjusting valve (not shown). Thereby, the amount of air blown from the plurality of drop air nozzles 30 can be adjusted by the flow rate adjustment valve so that the gaps of the plurality of workpieces W are equalized.

  The end drop air unit 7 has the same configuration as the intermediate drop air unit 5 described above, and includes a baffle plate 6 provided at the end of the work transport path 2 and a work W facing the transport end position Pe. It is arrange | positioned so that air may be blown in the perpendicular direction downward. In this case, by the air blown between the baffle plate 6 and the work W, the position in the transport direction (front-rear direction) can be pre-aligned at the stop position (transfer position) of the work W. That is, the work W is stopped at a predetermined transfer position by adjusting the position of the baffle plate 6 or adjusting the air strength of the end drop air unit 7.

  When the workpiece W is placed at the conveyance start position Ps on the workpiece conveyance path 7, side air is blown to both side surfaces of the workpiece W by the side air unit 3, and the loaded workpiece W is conveyed while being pre-aligned. Is done. After the placed work W moves in the transport direction, the work W following the work start position Ps is placed in a state where a certain gap exists in the preceding work W placed first, and the work W is Move in the transport direction. When the preceding work W reaches the conveyance end position Pe in a pre-aligned state, the end drop air unit 7 blows drop air toward the work conveyance path 2 from above. When the drop air is blown onto the work conveyance path 2, the drop air flows in a branched direction toward the front and rear in the conveyance direction, the front air blows against the baffle plate 6, and the rear air is the front surface of the preceding work W. I hit it. At the same time, drop air is blown toward the work conveyance path 2 from above by the intermediate drop air unit 5, and the branched forward air blows against the rear surface of the preceding work W.

  As a result, the preceding work W is about to be pushed back, but the propelling force by the side air and the blowing force by the intermediate drop air are applied, so that the blowing force of the end drop air and the side At a position where the propulsive force of the air and the drop air of the intermediate portion is balanced, the positioning is performed with a gap between the baffle plate 6 and the preceding work W is stopped (stagnation) at the transfer end position Pe. In other words, the preceding work W is pre-aligned in front, rear, left and right of the work W by the pair of side air units 3, the intermediate drop air unit 5 and the end drop air unit 7. Thereafter, when the succeeding workpiece W comes close to the preceding workpiece W, the drop air unit 5 causes the drop air unit 5 to drop air from above into the gap between the preceding workpiece W and the following workpiece W. Spray. As described above, the drop air branches and flows to the front and rear in the transport direction, the front air blows against the rear surface of the preceding work W that acts in the same way as the baffle plate 6, and the rear air follows. It blows on the front of the workpiece W. As a result, the succeeding workpiece W enters a stopped state (stagnation) in a state where there is a gap between the preceding workpiece W and the succeeding workpiece W.

  According to the above configuration, even when one or a plurality of workpieces W are stagnant, the gaps between the plurality of workpieces W can be maintained without physical contact by air, so that the workpieces W come into contact with each other. There is nothing. Further, the workpiece W at the conveyance end position Pe is in a pre-aligned state by the end drop air unit 7 and the side air units 3 and 3. Here, since it is once adsorbed to the working air plate 10 of the work conveyance path 2 and waiting for transfer, the pre-aligned work W can be transferred to the processing apparatus or the like as it is.

  In the present embodiment, the end drop air unit 7 blows air from above into the gap between the workpiece W and the baffle plate 6, but the baffle plate 6 is abolished as shown in FIG. The part drop air unit 7 may be disposed at the front side in the transport direction, and the drop air may be blown from the upper side to the oblique rear side. Further, instead of the plurality of drop air nozzles 30 arranged in a row, a slit-like drop air nozzle may be used. Further, as shown in FIG. 2 (b), each intermediate drop air unit 5 may blow the drop air in the oblique forward conveyance direction. Thereby, for example, when air is blown onto the workpiece W being conveyed, the air can be blown relatively upward from the workpiece W by matching the conveyance speed of the workpiece W and the blowing angle of the air. Therefore, the gap between the workpieces W being conveyed can be appropriately maintained. Further, the plurality of middle drop air units 5 and end drop air units 7 may be constantly blowing air, or may be blown when the preceding workpiece W is stagnant and the following workpiece W approaches. Good.

It is explanatory drawing of the workpiece conveyance apparatus which concerns on this embodiment. It is explanatory drawing of the modification of the workpiece conveyance apparatus which concerns on this embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Work conveyance apparatus 2 ... Work conveyance path 3 ... Side air unit 4 ... Work conveyance mechanism 5 ... Middle part drop air unit 6 ... Baffle plate 7 ... End part drop air unit 10 ... Actuation air plate 11 ... Air chamber 13 ... Porous Plate 22 ... Control nozzle 23 ... Propulsion nozzle Ps ... Conveying start position Pe ... Conveying end position W ... Workpiece

Claims (16)

A work transport mechanism that guides the work transport path and transports a plurality of works by air with a gap in the transport direction;
A plurality of intermediate drop air means for maintaining the gaps by blowing air from above to the gaps of the plurality of works that are disposed and conveyed above the workpiece transfer mechanism; A workpiece transfer device.   2. The work conveying apparatus according to claim 1, wherein the plurality of intermediate drop air units uniformly blow air so that the plurality of gaps are even. A baffle plate disposed at the end of the transport end position of the work transport path and extending in a direction orthogonal to the transport direction;
End drop air means for positioning the work at the transfer end position by blowing air from above into the gap between the baffle plate and the work reaching the transfer end position is further provided. The workpiece conveyance apparatus of Claim 1 or 2.   An end drop that is disposed at the end of the transport end position of the work transport path and blows air from above to the rear of the work that has reached the transport end position to position the work at the transport end position. The work conveying apparatus according to claim 1, further comprising an air unit.   5. The plurality of intermediate drop air means and the end drop air means each have a slit-like air nozzle extending in a direction orthogonal to the transport direction. The workpiece conveyance apparatus in any one.   5. The plurality of intermediate drop air means and the end drop air means each have a plurality of air nozzles arranged in a direction orthogonal to the transport direction. Crab transport device.   7. The workpiece transfer apparatus according to claim 1, wherein each of the intermediate portion drop air means blows air in an oblique transfer direction.   The work transport mechanism is disposed on both sides of the work transport path, and a pair of side airs that apply a propulsive force for transport to the work by blowing air evenly from both sides to the work on the work transport path. The work conveying apparatus according to claim 1, further comprising means.   9. The workpiece transfer apparatus according to claim 8, wherein each of the side air means has a plurality of propulsion nozzles that blow air from the oblique transfer direction on the side surface of the workpiece and are arranged in the transfer direction.   The work conveying apparatus according to claim 9, wherein a distance between the plurality of propulsion nozzles of each side air unit is ½ or less of a length of a side surface of the work. Each of the side air means includes a plurality of propulsion nozzles that blow air on the side surface of the workpiece from an oblique conveyance direction, and a plurality of nozzles that blow air on the side surface of the workpiece from a direction orthogonal to the conveyance direction to control the posture of the workpiece. A control nozzle, and
The work conveying apparatus according to claim 10, wherein the plurality of propulsion nozzles and the plurality of control nozzles are arranged in a mixed state in the conveying direction.   The workpiece transfer device according to claim 11, wherein the propulsion nozzles and the control nozzles are arranged to face each other between the pair of side air units.   The distance between the plurality of propulsion nozzles and the plurality of control nozzles of each side air means is ½ or less of the length of the side surface of the workpiece. Work transfer device. The work transport path is configured by connecting a plurality of working air plates, each having a perforated plate and an air chamber communicating with the perforated plate, in the transport direction,
14. The workpiece transfer apparatus according to claim 8, further comprising an air supply means for supplying air to the air chamber in order to float the workpiece through the perforated plate. Vacuum suction means for sucking air from the air chamber in order to suck the workpiece through the perforated plate;
The workpiece transfer apparatus according to claim 14, further comprising a switching control unit that switches between the air supply unit and the vacuum suction unit.   The workpiece transfer device according to claim 14, wherein the perforated plate is formed of a porous plate.

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