JP6768755B2 - Slit nozzle and substrate processing equipment - Google Patents

Description

The present invention relates to a slit nozzle having a slit-shaped discharge port at the tip portion and a substrate processing apparatus that supplies a processing liquid to a substrate using the slit nozzle. The above substrates include a semiconductor substrate, a photomask substrate, a liquid crystal display substrate, an organic EL display substrate, a plasma display substrate, a FED (Field Emission Display) substrate, an optical disk substrate, a magnetic disk substrate, and an optical disk. Includes substrates for magnetic disks.

In the manufacturing process of electronic components such as semiconductor devices and liquid crystal display devices, a substrate processing device is used in which a processing liquid is supplied to the surface of a substrate and the processing liquid is applied to the substrate. The substrate processing apparatus feeds the processing liquid to the slit nozzle while transporting the substrate in a floating state, discharges the processing liquid from the discharge port of the slit nozzle to the surface of the substrate, and applies the processing liquid to almost the entire substrate. To do. In addition, another substrate processing device is relative to the substrate in a state where the processing liquid sent from the pump is discharged from the discharge port of the slit nozzle toward the surface of the substrate while adsorbing and holding the substrate on the stage. The treatment liquid is applied to almost the entire substrate by moving it.

In recent years, with the improvement of product quality, it has become important to improve the uniformity of the film thickness of the treatment liquid applied by the substrate processing apparatus. Therefore, in the device described in Patent Document 1, an adjusting means for adjusting the opening size of the discharge port of the slit nozzle (the opening width of the discharge port in the relative movement direction of the slit nozzle) is provided, and the slit nozzle extends over the entire longitudinal direction of the slit nozzle. The opening size of the discharge port is adjusted.

Patent No. 452726

By the way, when the coating film thickness is thick or the viscosity of the treatment liquid is low, the influence of the liquid flow due to the transportation after the coating is large, and the influence is particularly strong at the end portion in the longitudinal direction of the discharge port. In addition, liquid repelling of the treatment liquid tends to occur at the end in the longitudinal direction. Therefore, when the opening dimensions of the discharge port in the longitudinal direction are set to be the same, the film thickness of the coating film differs between the central region and both end regions in the longitudinal direction, and the film thickness becomes non-uniform.

In order to deal with this, it is one of the effective countermeasures to widen the adjustable range of the opening size at both ends of the discharge port in the longitudinal direction. However, the apparatus described in Patent Document 1 mainly aims to make the opening size of the discharge port uniform over the entire longitudinal direction, and it is difficult to adopt the above countermeasures.

The present invention has been made in view of the above problems, and a slit nozzle capable of expanding the adjustable range of the opening size at both ends of the discharge port to improve the uniformity of the film thickness and a good treatment using the slit nozzle. An object of the present invention is to provide a substrate processing apparatus capable of forming a liquid film on a substrate.

The first aspect of the present invention is a slit nozzle having a slit-shaped discharge port at the tip portion, and is arranged so as to face the first main body portion extending in the longitudinal direction of the discharge port and the first main body portion. In the central region of the second main body and the second main body in the longitudinal direction, the tip of the second main body is displaced with respect to the first main body to open the opening in the central region of the discharge port. A central adjustment mechanism that adjusts the dimensions, and the tip of the second main body is displaced with respect to the first main body in the regions at both ends of the second main body in the longitudinal direction to adjust the opening dimensions at both ends of the discharge port. Both ends adjustment mechanism is provided, and both the center adjustment mechanism and both ends adjustment mechanism are provided so that the displacement amount of the tip portion of the second main body portion can be adjusted by the screwing amount of the adjustment screw with respect to the rear end portion of the second main body portion. In the opening dimension direction of the discharge port, the region at both ends of the second main body is finished thinner than the central region of the second main body, so that the displacement ability to displace the tip of the second main body by the both end adjustment mechanism is the central adjustment mechanism. It is characterized in that it is higher than the displacement ability to displace the tip portion of the second main body portion.
A second aspect of the present invention is a slit nozzle having a slit-shaped discharge port at the tip portion, so that the first main body portion extending in the longitudinal direction of the discharge port faces the first main body portion. In the central region of the second main body and the central region of the second main body in the longitudinal direction, the tip of the second main body is displaced with respect to the first main body to form the discharge port. A central adjustment mechanism that adjusts the opening size of the second main body, and a displacement of the tip of the second main body with respect to the first main body in both ends of the second main body in the longitudinal direction to adjust the opening size in both ends of the discharge port. It is equipped with an adjustment mechanism for both ends, and both the central adjustment mechanism and the adjustment mechanism at both ends are provided so that the amount of displacement of the tip of the second main body can be adjusted by the amount of screwing of the adjustment screw into the rear end of the second main body. By providing a notch at the boundary between both ends region and the central region in the second main body portion, the displacement ability to displace the tip portion of the second main body portion by the both end adjustment mechanism is increased by the central adjustment mechanism at the tip portion of the second main body portion. It is characterized by being higher than the displacement ability to displace.
A third aspect of the present invention is a slit nozzle having a slit-shaped discharge port at the tip portion, so that the first main body portion extending in the longitudinal direction of the discharge port faces the first main body portion. In the central region of the second main body and the central region of the second main body in the longitudinal direction, the tip of the second main body is displaced with respect to the first main body to form the discharge port. A central adjustment mechanism that adjusts the opening size of the second main body, and a displacement of the tip of the second main body with respect to the first main body in both ends of the second main body in the longitudinal direction to adjust the opening size in both ends of the discharge port. It is equipped with an adjustment mechanism for both ends, and both the central adjustment mechanism and the adjustment mechanism at both ends are provided so that the amount of displacement of the tip of the second main body can be adjusted by the amount of screwing of the adjustment screw into the rear end of the second main body. The second main body is arranged so as to face the central region of the first main body in the longitudinal direction, and the first main body is adjacent to the central facing member on one side in the longitudinal direction. The first end facing member is arranged so as to face the one end region, and the first end facing member is arranged so as to face the second end region of the first main body while being adjacent to the center facing member on the other side in the longitudinal direction. It has a second end facing member, and the first end facing member, the center facing member, and the second end facing member are arranged separately from each other, so that the tip portion of the second main body portion is provided by the both end adjustment mechanism. The displacement ability to displace the second main body is higher than the displacement ability to displace the tip of the second main body by the central adjustment mechanism.

A fourth aspect of the present invention is a substrate processing apparatus, in which a slit nozzle having a slit-shaped discharge port at the tip thereof and a direction orthogonal to the longitudinal direction of the discharge port while facing the surface of the substrate to the discharge port. A moving mechanism for relatively moving the substrate and a processing liquid supply mechanism for supplying the processing liquid to the slit nozzle and discharging the processing liquid from the discharge port toward the surface of the substrate are provided, and the slit nozzle is provided in the longitudinal direction. A first main body that is extended, a second main body that is arranged so as to face the first main body and forms a discharge port, and a tip of the second main body in the central region of the second main body in the longitudinal direction. A central adjustment mechanism that displaces the portion with respect to the first main body portion to adjust the opening size in the central region of the discharge port, and a first portion of the tip portion of the second main body portion in both end regions of the second main body portion in the longitudinal direction. Both ends adjustment mechanism is provided to adjust the opening size in both ends region of the discharge port by displacing it with respect to the main body, and both the center adjustment mechanism and both ends adjustment mechanism are screwed with the adjustment screw to the rear end of the second main body. The amount of displacement of the tip of the second main body can be adjusted according to the amount of input, and both ends of the second main body are finished thinner than the central area of the second main body in the opening dimension direction of the discharge port. The displacement ability to displace the tip of the second main body by the both end adjustment mechanism is higher than the displacement ability to displace the tip of the second main body by the central adjustment mechanism.
A fifth aspect of the present invention is a substrate processing apparatus, in which a slit nozzle having a slit-shaped discharge port at the tip portion and a direction orthogonal to the longitudinal direction of the discharge port while facing the surface of the substrate to the discharge port. A moving mechanism for relatively moving the substrate and a processing liquid supply mechanism for supplying the processing liquid to the slit nozzle and discharging the processing liquid from the discharge port toward the surface of the substrate are provided, and the slit nozzle is provided in the longitudinal direction. A first main body that is extended, a second main body that is arranged so as to face the first main body and forms a discharge port, and a tip of the second main body in the central region of the second main body in the longitudinal direction. A central adjustment mechanism that displaces the portion with respect to the first main body portion to adjust the opening size in the central region of the discharge port, and a first portion of the tip portion of the second main body portion in both end regions of the second main body portion in the longitudinal direction. Both ends adjustment mechanism is provided to adjust the opening size in both ends region of the discharge port by displacing it with respect to the main body, and both the center adjustment mechanism and both ends adjustment mechanism are screwed with the adjustment screw to the rear end of the second main body. The amount of displacement of the tip of the second main body can be adjusted according to the amount of input, and the tip of the second main body is provided by the both end adjustment mechanism by providing a notch at the boundary between both end regions and the central region in the second main body. It is characterized in that the displacement ability to displace the portion is higher than the displacement ability to displace the tip portion of the second main body portion by the central adjustment mechanism.
A sixth aspect of the present invention is a substrate processing apparatus, in which a slit nozzle having a slit-shaped discharge port at the tip and a direction orthogonal to the longitudinal direction of the discharge port while facing the surface of the substrate to the discharge port. A moving mechanism for relatively moving the substrate and a processing liquid supply mechanism for supplying the processing liquid to the slit nozzle and discharging the processing liquid from the discharge port toward the surface of the substrate are provided, and the slit nozzle is provided in the longitudinal direction. A first main body that is extended, a second main body that is arranged so as to face the first main body and forms a discharge port, and a tip of the second main body in the central region of the second main body in the longitudinal direction. A central adjustment mechanism that displaces the portion with respect to the first main body portion to adjust the opening size in the central region of the discharge port, and a first portion of the tip portion of the second main body portion in both end regions of the second main body portion in the longitudinal direction. Both ends adjustment mechanism is provided to adjust the opening size in both ends region of the discharge port by displacing it with respect to the main body, and both the center adjustment mechanism and both ends adjustment mechanism are screwed with the adjustment screw to the rear end of the second main body. The displacement amount of the tip portion of the second main body portion can be adjusted according to the input amount, and the second main body portion is arranged so as to face the central region of the first main body portion in the longitudinal direction. A first end facing member arranged so as to face the first end region of the first main body while being adjacent to the center facing member on one side in the direction, and adjacent to the center facing member on the other side in the longitudinal direction. However, it has a second end facing member arranged so as to face the second end region of the first main body, and the first end facing member, the center facing member, and the second end facing member are separated from each other. The displacement ability to displace the tip of the second main body by the both end adjustment mechanism is higher than the displacement ability to displace the tip of the second main body by the central adjustment mechanism.

In the invention configured in this way, a central adjustment mechanism and both ends adjustment mechanism are provided as a mechanism for adjusting the opening size of the discharge port, and the displacement ability for displacementing the tip portion of the second main body portion is controlled by the central adjustment mechanism and both ends. It is different from the adjustment mechanism. More specifically, the displacement capacity of the both end adjustment mechanism is higher than the displacement capacity of the central adjustment mechanism, and the adjustable range of the opening dimension at both ends of the discharge port in the longitudinal direction is larger than the central region of the discharge port. It has spread. For this reason, it is possible to adjust the opening dimensions at both ends of the discharge port in a wider range than in the central region in consideration of the influence of the liquid flow and the liquid approach due to the repelling of the treatment liquid.

As described above, according to the present invention, the displacement ability to displace the tip of the second main body by the both end adjustment mechanism is higher than the displacement ability to displace the tip of the second main body by the central adjustment mechanism. , The adjustable range of the opening size is widened at both ends of the discharge port, and the uniformity of the film thickness can be improved.

It is a figure which shows typically the whole structure of the coating apparatus which is one Embodiment of the substrate processing apparatus which concerns on this invention. It is an exploded view which shows typically the main structure of the 1st Embodiment of the slit nozzle used in the coating apparatus of FIG. It is a front view of the slit nozzle shown in FIG. It is sectional drawing in the XZ plane of the slit nozzle in the state which the 1st main body part and the 2nd main body part are fastened. It is an exploded view which shows typically the main structure of the 2nd Embodiment of the slit nozzle which concerns on this invention. It is a front view of the slit nozzle shown in FIG. It is an exploded view which shows typically the main structure of the 2nd Embodiment of the slit nozzle which concerns on this invention. It is a front view of the slit nozzle shown in FIG. 7.

FIG. 1 is a diagram schematically showing an overall configuration of a coating apparatus according to an embodiment of the substrate processing apparatus according to the present invention. The coating device 1 is a slit coater that applies a coating liquid to the surface Sf of the substrate S that is conveyed in a horizontal posture from the left-hand side to the right-hand side in FIG. In each of the following figures, in order to clarify the arrangement relationship of each part of the device, the transport direction of the substrate S is referred to as "X direction", and the horizontal direction from the left hand side to the right hand side of FIG. 1 is referred to as "+ X direction". , The reverse direction is referred to as "-X direction". Further, of the horizontal directions Y orthogonal to the X direction, the front side of the device is referred to as "-Y direction", and the back side of the device is referred to as "+ Y direction". Further, the upward direction and the downward direction in the vertical direction Z are referred to as "+ Z direction" and "-Z direction", respectively.

First, an outline of the configuration and operation of the coating device 1 will be described with reference to FIG. 1, and then a detailed structure of the slit nozzle having the technical features of the present invention and an operation of adjusting the opening size will be described. In the coating device 1, the input conveyor 100, the input transfer unit 2, the levitation stage unit 3, the output transfer unit 4, and the output conveyor 110 are close to each other in this order along the transport direction Dt of the substrate S, that is, (+ X direction). As described in detail below, a transport path for the substrate S extending in a substantially horizontal direction is formed by these.

The substrate S to be processed is carried into the input conveyor 100 from the left hand side of FIG. The input conveyor 100 includes a roller conveyor 101 and a rotation drive mechanism 102 that rotationally drives the roller conveyor 101, and the rotation of the roller conveyor 101 causes the substrate S to be conveyed in a horizontal posture on the downstream side, that is, in the (+ X) direction. The input transfer unit 2 includes a roller conveyor 21 and a rotation / elevation drive mechanism 22 having a function of rotationally driving the roller conveyor 21 and a function of raising and lowering the roller conveyor 21. As the roller conveyor 21 rotates, the substrate S is further conveyed in the (+ X) direction. Further, the vertical position of the substrate S is changed by moving the roller conveyor 21 up and down. The substrate S is transferred from the input conveyor 100 to the levitation stage unit 3 by the input transfer unit 2 configured in this way.

The levitation stage portion 3 includes a flat plate-shaped stage divided into three along the transport direction Dt of the substrate. That is, the levitation stage portion 3 includes an inlet levitation stage 31, a coating stage 32, and an outlet levitation stage 33, and the surfaces of each of these stages form a part of the same plane. A large number of ejection holes for ejecting compressed air supplied from the levitation control mechanism 35 are provided in a matrix on the surfaces of the inlet levitation stage 31 and the outlet levitation stage 33, and the buoyancy applied from the ejected airflow causes the buoyancy. The substrate S floats. In this way, the back surface Sb of the substrate S is supported in a horizontal posture in a state of being separated from the stage surface. The distance between the back surface Sb of the substrate S and the front surface of the stage, that is, the amount of levitation can be set to, for example, 10 micrometers to 500 micrometers.

On the other hand, on the surface of the coating stage 32, ejection holes for ejecting compressed air and suction holes for sucking air between the back surface Sb of the substrate S and the surface of the stage are alternately arranged. The levitation control mechanism 35 controls the amount of compressed air ejected from the ejection hole and the amount of suction from the suction hole, so that the distance between the back surface Sb of the substrate S and the front surface of the coating stage 32 is precisely controlled. As a result, the vertical position of the surface Sf of the substrate S passing above the coating stage 32 is controlled to a specified value. As a specific configuration of the levitation stage portion 3, for example, the one described in Japanese Patent No. 5346643 can be applied. The amount of levitation on the coating stage 32 is calculated by the control unit 9 based on the detection results by the sensors 61 and 62, which will be described in detail later, and can be adjusted with high accuracy by airflow control.

The inlet levitation stage 31 is provided with a lift pin not shown in the drawing, and the levitation stage portion 3 is provided with a lift pin drive mechanism 34 for raising and lowering the lift pin.

The substrate S carried into the levitation stage unit 3 via the input transfer unit 2 is given a propulsive force in the (+ X) direction by the rotation of the roller conveyor 21 and is conveyed onto the entrance levitation stage 31. The inlet levitation stage 31, the coating stage 32, and the outlet levitation stage 33 support the substrate S in a levitation state, but do not have a function of moving the substrate S in the horizontal direction. The substrate S in the levitation stage portion 3 is conveyed by the substrate transport portion 5 arranged below the inlet levitation stage 31, the coating stage 32, and the outlet levitation stage 33.

The substrate transport portion 5 is provided on a chuck mechanism 51 that supports the substrate S from below by partially contacting the lower peripheral edge portion of the substrate S, and a suction pad (not shown) provided on the suction member at the upper end of the chuck mechanism 51. It is provided with a suction / running control mechanism 52 having a function of applying a negative pressure to suck and hold the substrate S and a function of reciprocating the chuck mechanism 51 in the X direction. When the chuck mechanism 51 holds the substrate S, the back surface Sb of the substrate S is located at a position higher than the surface of each stage of the levitation stage portion 3. Therefore, the substrate S maintains the horizontal posture as a whole by the buoyancy applied from the buoyancy stage portion 3 while the peripheral portion is attracted and held by the chuck mechanism 51. A sensor 61 for measuring the plate thickness is arranged near the roller conveyor 21 in order to detect the vertical position of the surface of the substrate S at the stage where the back surface Sb of the substrate S is partially held by the chuck mechanism 51. .. By locating a chuck (not shown) in a state where the substrate S is not held directly below the sensor 61, the sensor 61 can detect the surface of the suction member, that is, the vertical position of the suction surface.

The chuck mechanism 51 holds the substrate S carried from the input transfer unit 2 to the levitation stage unit 3, and the chuck mechanism 51 moves in the (+ X) direction in this state, so that the substrate S moves above the inlet levitation stage 31. Is conveyed above the outlet levitation stage 33 via above the coating stage 32. The conveyed substrate S is delivered to the output transfer unit 4 arranged on the (+ X) side of the outlet levitation stage 33.

The output transfer unit 4 includes a roller conveyor 41 and a rotation / elevation drive mechanism 42 having a function of rotationally driving the roller conveyor 41 and a function of raising and lowering the roller conveyor 41. By rotating the roller conveyor 41, a propulsive force is applied to the substrate S in the (+ X) direction, and the substrate S is further conveyed along the transfer direction Dt. Further, the vertical position of the substrate S is changed by moving the roller conveyor 41 up and down. The operation realized by raising and lowering the roller conveyor 41 will be described later. The output transfer unit 4 transfers the substrate S to the output conveyor 110 from above the outlet levitation stage 33.

The output conveyor 110 includes a roller conveyor 111 and a rotation drive mechanism 112 that rotationally drives the roller conveyor 111. The rotation of the roller conveyor 111 further conveys the substrate S in the (+ X) direction, and finally outside the coating device 1. Will be paid out to. The input conveyor 100 and the output conveyor 110 may be provided as a part of the configuration of the coating device 1, but may be separate from the coating device 1. Further, for example, a substrate dispensing mechanism of another unit provided on the upstream side of the coating device 1 may be used as the input conveyor 100. Further, a substrate receiving mechanism of another unit provided on the downstream side of the coating device 1 may be used as the output conveyor 110.

A coating mechanism 7 for applying the coating liquid to the surface Sf of the substrate S is arranged on the transport path of the substrate S transported in this way. The coating mechanism 7 has a slit nozzle 71. Further, although not shown, a positioning mechanism is connected to the slit nozzle 71, and the slit nozzle 71 is positioned above the coating stage 32 by the positioning mechanism (position shown by a solid line in FIG. 1) and a maintenance position. Positioned to. Further, a coating liquid supply mechanism 8 is connected to the slit nozzle 71, the coating liquid is supplied from the coating liquid supply mechanism 8, and the coating liquid is discharged from a discharge port that opens downward to the lower part of the nozzle. The slit nozzle 71 will be described in detail later.

As shown in FIG. 1, the slit nozzle 71 is provided with a levitation height detection sensor 62 for detecting the levitation height of the substrate S in a non-contact manner. The levitation height detection sensor 62 can measure the separation distance between the levitation substrate S and the surface of the stage surface of the coating stage 32, and according to the detected value, the levitation height detection sensor 62 is used via the control unit 9. The position where the slit nozzle 71 descends can be adjusted. As the levitation height detection sensor 62, an optical sensor, an ultrasonic sensor, or the like can be used.

As shown in FIG. 1, the coating mechanism 7 is provided with a nozzle cleaning standby unit 72 in order to perform predetermined maintenance on the slit nozzle 71. The nozzle cleaning standby unit 72 mainly includes a roller 721, a cleaning unit 722, a roller butt 723, and the like. Then, with the slit nozzle 71 positioned at the maintenance position, nozzle cleaning and liquid pool formation are performed by these, and the discharge port of the slit nozzle 71 is adjusted to a state suitable for the next coating process.

In addition, the coating device 1 is provided with a control unit 9 for controlling the operation of each part of the device. The control unit 9 includes a storage unit that stores a predetermined program and various recipes, an arithmetic processing unit such as a CPU that causes each unit of the device to execute a predetermined operation by executing the program, a display unit such as a liquid crystal panel, a keyboard, and the like. It has an input unit of.

Next, the configuration of the slit nozzle 71 and the method of adjusting the opening size of the discharge port will be described in detail with reference to FIGS. 2 to 4.

FIG. 2 is an exploded assembly view schematically showing the main configuration of the first embodiment of the slit nozzle used in the coating apparatus of FIG. 1, and FIG. 3 is a front view of the slit nozzle. The slit nozzle 71 according to the present embodiment employs the same adjustment mechanism as the slit nozzle described in Patent Document 1, but in FIG. 2, the adjusting screw 719, the opening adjusting screw hole group 717, and the closing adjusting screw are used. The illustration of the hole group 718 is omitted, and in FIG. 3, the fixing bolt 715 is also omitted in addition to the above configuration.

The slit nozzle 71 has a first main body portion 711, a second main body portion 712, a first side plate 713, and a second side plate 714. The second main body 712 is provided with a first screw hole group 716a for screwing a plurality of fixing bolts 715. Further, in the first main body portion 711 arranged so as to face the second main body portion 712, a second screw hole group for screwing a plurality of fixing bolts 715 at positions facing the first screw hole group 716a. 716b is provided. Both the first screw hole group 716a and the second screw hole group 716b are provided as substantially cylindrical holes in the X direction, and although details are not shown, screws for screwing with the fixing bolt 715 are provided on the inner surface of the cylinder. Crests and threads are formed. The first screw hole group 716a and the second screw hole group 716b, which face each other, form one screw hole when the first main body portion 711 and the second main body portion 712 are arranged to face each other. Hereinafter, the screw hole group formed by the first screw hole group 716a and the second screw hole group 716b are collectively referred to as a fixing screw hole group 716.

Further, as shown in FIG. 2, a step portion 711a is provided at a lower end portion (end portion on the −Z direction side) on the facing surface of the first main body portion 711 facing the second main body portion 712. On the other hand, of the second main body 712, the facing surface facing the first main body 711 has no notch and is finished as a flat surface. Then, the first main body portion 711 and the second main body portion 712 are fastened to each other by screwing the fixing bolt 715 into the fixing screw hole group 716 with the facing surfaces in close contact with each other. As a result, the fastening body is formed. Further, the first side plate 713 is brought into close contact with the side surface of the fastening body in the X direction on the -Y direction side, and is fastened to the fastening body by a fixing bolt (not shown). Further, on the + Y direction side as well, the second side plate 714 is brought into close contact with the fastening body and fastened with the fixing bolt (not shown). In this way, the slit nozzle 71 is assembled, and inside the nozzle, the stepped portion 711a of the first main body portion 711 forms a manifold (reference numeral 711b in FIG. 4) and a land (reference numeral 711c in FIG. 4), and a step portion at the tip of the nozzle. A discharge port 710 having the same width Wn as the dimension of the portion 711a in the Y direction is provided.

In this embodiment, unlike the slit nozzle described in Patent Document 1, the thickness of the second main body portion 712 in the X direction is the longitudinal direction of the discharge port 710, that is, the central region and the both end regions in the Y direction. It's different. More specifically, the thickness Ta of the second main body 712 at the end region on the −Y direction side (hereinafter referred to as “first end region”) 712a and the end region on the + Y direction side (hereinafter referred to as “second end”). The second main body portion 712 is finished so that the thickness at 712b (referred to as “part region”) (reference numeral Tb in FIG. 4) is thinner than the thickness at central region 712c (reference numeral Tc in FIG. 4).

FIG. 4 is a cross-sectional view of the slit nozzle in a state where the first main body portion and the second main body portion are fastened in the XZ plane, and in the column (a) of the figure, the cross-sectional structure of the slit nozzle 71 in the central region is shown. It is illustrated, and in the column (b) of the figure, the cross-sectional structure of the slit nozzle 71 at both ends is illustrated. As described above, by inserting the fixing bolt 715 into the fixing screw hole group 716, the first main body portion 711 and the second main body portion 712 are integrated in both the central region and both end regions of the slit nozzle 71. It has been transformed. Further, the slit nozzle 71 has a discharge port 710 formed at the lower end portion by the lower opening of the land 711c. In the present specification, among the discharge ports 710, the discharge ports corresponding to the first end region 712a, the second end region 712b, and the central region 712c of the second main body 712 are referred to as “first end discharge ports 710a”. , "Second end discharge port 710b" and "central discharge port 710c". Further, the opening dimensions of the first end discharge port 710a, the second end discharge port 710b, and the central discharge port 710c are referred to as "opening size Da", "opening size Db", and "opening size Dc", respectively.

Further, although not shown in FIG. 3, the second main body portion 712 and the first main body portion 711 are further provided with adjusting screw hole groups 717a, b, 718a, b as holes extending in the X direction. There is. Of these, the adjusting screw hole group 717a and the adjusting screw hole group 717b are provided at opposite positions of the second main body portion 712 and the first main body portion 711, respectively. Therefore, in a state where the first main body portion 711 and the second main body portion 712 form a fastening body, the adjusting screw hole group 717a and the adjusting screw hole group 717b are screw holes for inserting the adjusting screw 719 (hereinafter referred to as the screw holes). , Referred to as "opening adjustment screw hole group 717"). Similarly, the adjusting screw hole group 718a and the adjusting screw hole group 718b are provided at opposite positions of the second main body portion 712 and the first main body portion 711, respectively, and the screw holes for inserting the adjusting screw 719 (hereinafter, "" It constitutes a closing adjustment screw hole group 718 ").

In the slit nozzle 71 configured as described above, for example, as shown in the column (a) of FIG. 4, the adjusting screw 719 is screwed in through the opening adjusting screw hole group 717a provided in the central region 712c. The opening size Dc can be widened. On the contrary, the opening size Dc can be narrowed by screwing the adjusting screw 719 through the closing adjusting screw hole group 718 provided in the central region 712c. The adjusting screw 719 screwed into the central region 712c in this way functions as a central adjusting mechanism for adjusting the opening dimension Dc of the central discharge port 710c. That is, by adjusting the screwing amount of the adjusting screw 719 in the central adjusting mechanism, the displacement amount of the tip portion of the second main body portion 712 in the central region 712c can be adjusted and the opening dimension Dc can be controlled. There is.

As shown in the figure, two adjusting screws 719 can be screwed side by side in the direction from the front end to the rear end of the second main body 712, that is, in the height direction Z with respect to the central region 712c. ing. Then, in actual use, the screwing amount of each adjusting screw 719 is adjusted with the two adjusting screws 719 being screwed in at the same time. The same applies to the first end region 712a and the second end region 712b, which will be described below.

Further, for example, as shown in the column (b) of FIG. 4, the adjusting screw 719 is screwed in through the opening adjusting screw hole group 717 provided in the first end region 712a (second end region 712b). The opening size Da (Db) can be widened. On the contrary, the opening size Da (Db) can be narrowed by screwing the adjusting screw 719 through the closing adjusting screw hole group 718 provided in the first end region 712a (second end region 712b). it can. In this way, the adjusting screw 719 screwed into the first end region 712a and the second end region 712b has the opening dimensions Da of both ends (= first end discharge port 710a + second end discharge port 710b). It functions as a double-ended adjustment mechanism for adjusting Db. That is, by adjusting the screwing amount of the adjusting screw 719 in the both end adjustment mechanism, the displacement amount of the tip portion of the second main body portion 712 in the first end region region 712a and the second end region region 712b is adjusted, and the opening size is adjusted. It is possible to control Da and Db.

Moreover, in the present embodiment, the first end region 712a and the second end region 712b are finished thinner than the central region 712c. Therefore, the displacement ability of the both-end adjusting mechanism that displaces the tip of the second main body 712 is higher than that of the central adjusting mechanism, and the adjustable range of the opening dimensions Da and Db is wider than the adjustable range of the opening dimension Dc. For this reason, the opening dimensions Da and Db at both ends of the discharge port 710 (= first end discharge port 710a, second end discharge port 710b) are taken into consideration in consideration of the influence of the liquid flow and the liquid approach due to the repelling of the treatment liquid. Can be adjusted in a wider range than the central region 712c. As a result, a coating film having a uniform film thickness can be formed on the surface Sf of the substrate S by applying the coating liquid using the slit nozzle 71 having such technical features.

As described above, in the above embodiment, the coating liquid corresponds to an example of the "treatment liquid" of the present invention. Further, the Y direction corresponds to the "longitudinal direction of the discharge port" of the present invention, and the X direction corresponds to the "direction orthogonal to the longitudinal direction of the discharge port" and the "opening dimension direction of the discharge port" of the present invention. .. Further, the adsorption / travel control mechanism 52 and the coating liquid supply mechanism 8 correspond to an example of the "movement mechanism" and the "treatment liquid supply mechanism" of the present invention, respectively.

The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the first embodiment, the displacement ability to displace the tip of the second main body 712 by controlling the thickness of the second main body 712 is different between the central region and both end regions, but the displacement capacity change setting means. Is not limited to this. For example, as shown in FIGS. 5 and 6, while keeping the thickness of the second main body portion 712 in the X direction constant, a cut portion 712d is provided at the boundary between the first end region 712a and the central region 712c, and the central region is provided. A notch 712e may be provided at the boundary between the 712c and the second end region 712b (second embodiment). The first end region 712a and the second end region 712b are simply separated from the central region 712c by these cut portions 712d and 712e, and the connection range with the central region 712c is reduced. Therefore, the tip portion of the second main body portion 712 corresponding to the first end portion region 712a and the second end portion region 712b is more easily displaced than that of the central region 712c. As a result, the adjustable range of the opening dimensions Da and Db is wider than the adjustable range of the opening dimensions Dc, and the same effect as that of the first embodiment can be obtained.

Further, as a means for setting the change of the displacement capacity, for example, as shown in FIGS. 7 and 8, the first end region 712a and the second end region 712b may be completely separated from the central region 712c (third embodiment). form). In FIG. 7, dots are added to the first end region 712a and the second end region 712b so that the first end region 712a, the second end region 712b, and the central region 712c become clearer. ..

As described above, in the third embodiment, instead of the second main body portion 712, the first end facing member 712A, the center facing member 712C, and the second end facing member 712B are arranged to face the first main body portion 711, respectively. The first end region 712a, the central region 712c, and the second end region 712b are formed. For this reason, the tip of the second main body 712 corresponding to the first end region 712a and the second end region 712b is completely separated from that of the central region 712c, and is more easily displaced than in the second embodiment. It has become. As a result, the adjustable range of the opening dimensions Da and Db is wider than the adjustable range of the opening dimensions Dc, and the same effect as that of the first embodiment can be obtained.

Further, in the above embodiment, the same adjustment mechanism as the slit nozzle described in Patent Document 1 is adopted, but the present invention is also applied to a slit nozzle that adjusts the opening size of the discharge port by another adjustment mechanism. Can be applied.

Further, in the above embodiment, the present invention is applied to the coating device 1 that supplies the coating liquid to the surface Sf of the substrate S, but the application target of the present invention is not limited to this, and the slit nozzle. By supplying the treatment liquid to the slit nozzle, the treatment liquid is supplied from the slit nozzle to the surface of the substrate and moved relative to the slit nozzle to perform a predetermined treatment, which can be applied to all the substrate processing techniques.

The present invention can be applied to a slit nozzle having a slit-shaped discharge port at the tip portion and a general substrate processing apparatus that supplies a processing liquid to a substrate using the slit nozzle.

1 ... Coating device (board processing device)
8 ... Coating liquid supply mechanism (treatment liquid supply mechanism)
52 ... Adsorption / running control mechanism (movement mechanism)
71 ... Slit nozzle 719 ... Adjusting screw 710 ... Discharge port 710a ... First end discharge port 710b ... Second end discharge port 710c ... Central discharge port 712A ... First end facing member 712B ... Second end facing member 712C ... Central facing member 712a ... 1st end region 712b ... 2nd end region 712c ... Central region 712d, 712e ... Notches Da, Db, Dc ... Opening dimensions S ... Substrate X ... Conveying direction (opening dimension direction)
Y ... Horizontal direction (longitudinal direction of discharge port)
Z ... Vertical direction (height direction)

Claims (7)

A slit nozzle having a slit-shaped discharge port at the tip.
The first main body extending in the longitudinal direction of the discharge port and
A second main body that is arranged so as to face the first main body and forms the discharge port,
With a central adjustment mechanism that adjusts the opening size in the central region of the discharge port by displacing the tip of the second main body with respect to the first main body in the central region of the second main body in the longitudinal direction. ,
An both-end adjusting mechanism that adjusts the opening size in both ends of the discharge port by displacing the tip of the second main body with respect to the first main body in both ends of the second main body in the longitudinal direction. Equipped with
Both the central adjustment mechanism and the both end adjustment mechanism are provided so that the displacement amount of the tip portion of the second main body portion can be adjusted by the screwing amount of the adjustment screw with respect to the rear end portion of the second main body portion.
Displacement that displaces the tip of the second main body by the both end adjustment mechanism by finishing the both end regions of the second main body thinner than the central region of the second main body in the opening dimension direction of the discharge port. A slit nozzle having a higher capacity than a displacement capacity for displacing the tip of the second main body by the central adjustment mechanism. A slit nozzle having a slit-shaped discharge port at the tip.
The first main body extending in the longitudinal direction of the discharge port and
A second main body that is arranged so as to face the first main body and forms the discharge port,
With a central adjustment mechanism that adjusts the opening size in the central region of the discharge port by displacing the tip of the second main body with respect to the first main body in the central region of the second main body in the longitudinal direction. ,
An both-end adjusting mechanism that adjusts the opening size in both ends of the discharge port by displacing the tip of the second main body with respect to the first main body in both ends of the second main body in the longitudinal direction. Equipped with
Both the central adjustment mechanism and the both end adjustment mechanism are provided so that the displacement amount of the tip portion of the second main body portion can be adjusted by the screwing amount of the adjustment screw with respect to the rear end portion of the second main body portion.
By providing a notch at the boundary between the both end regions and the central region in the second main body portion, the displacement ability to displace the tip portion of the second main body portion by the both end adjusting mechanism is increased by the central adjusting mechanism. A slit nozzle characterized by having a higher displacement capacity than the displacement ability to displace the tip of the main body. A slit nozzle having a slit-shaped discharge port at the tip.
The first main body extending in the longitudinal direction of the discharge port and
A second main body that is arranged so as to face the first main body and forms the discharge port,
With a central adjustment mechanism that adjusts the opening size in the central region of the discharge port by displacing the tip of the second main body with respect to the first main body in the central region of the second main body in the longitudinal direction. ,
An both-end adjusting mechanism that adjusts the opening size in both ends of the discharge port by displacing the tip of the second main body with respect to the first main body in both ends of the second main body in the longitudinal direction. Equipped with
Both the central adjustment mechanism and the both end adjustment mechanism are provided so that the displacement amount of the tip portion of the second main body portion can be adjusted by the screwing amount of the adjustment screw with respect to the rear end portion of the second main body portion.
The first main body portion is adjacent to a central facing member arranged so as to face the central region of the first main body portion in the longitudinal direction and the central facing member on one side in the longitudinal direction. A first end facing member arranged so as to face the first end region of the main body, and a second end region of the first main body while being adjacent to the center facing member on the other side in the longitudinal direction. It has a second end facing member arranged so as to face the first end facing member, the center facing member, and the second end facing member are arranged separately from each other. A slit nozzle characterized in that the displacement ability to displace the tip of the second main body by the both end adjusting mechanism is higher than the displacement ability to displace the tip of the second main body by the central adjusting mechanism. The slit nozzle according to any one of claims 1 to 3 .
A plurality of the central adjustment mechanism and the both end adjustment mechanism are arranged along the height direction from the tip end portion to the rear end portion of the second main body portion to fasten the two main body portions and the first main body portion. A slit nozzle having a screw, in which at least a screw located on the front end side or a screw located on the rear end side of the plurality of screws functions as the adjusting screw. A slit nozzle with a slit-shaped discharge port at the tip,
A moving mechanism that relatively moves the substrate in a direction orthogonal to the longitudinal direction of the discharge port while facing the surface of the substrate with the discharge port.
It is provided with a processing liquid supply mechanism that supplies the processing liquid to the slit nozzle and discharges the processing liquid from the discharge port toward the surface of the substrate.
The slit nozzle
The first main body extending in the longitudinal direction and
A second main body that is arranged so as to face the first main body and forms the discharge port,
With a central adjustment mechanism that adjusts the opening size in the central region of the discharge port by displacing the tip of the second main body with respect to the first main body in the central region of the second main body in the longitudinal direction. ,
An both-end adjusting mechanism that adjusts the opening size in both ends of the discharge port by displacing the tip of the second main body with respect to the first main body in both ends of the second main body in the longitudinal direction. Equipped with
Both the central adjustment mechanism and the both end adjustment mechanism are provided so that the displacement amount of the tip portion of the second main body portion can be adjusted by the screwing amount of the adjustment screw with respect to the rear end portion of the second main body portion.
Displacement that displaces the tip of the second main body by the both end adjustment mechanism because both end regions of the second main body are finished thinner than the central region of the second main body in the opening dimension direction of the discharge port. A substrate processing apparatus characterized in that the capacity is higher than the displacement capacity for displacing the tip end portion of the second main body portion by the central adjustment mechanism. A slit nozzle with a slit-shaped discharge port at the tip,
A moving mechanism that relatively moves the substrate in a direction orthogonal to the longitudinal direction of the discharge port while facing the surface of the substrate with the discharge port.
It is provided with a processing liquid supply mechanism that supplies the processing liquid to the slit nozzle and discharges the processing liquid from the discharge port toward the surface of the substrate.
The slit nozzle
The first main body extending in the longitudinal direction and
A second main body that is arranged so as to face the first main body and forms the discharge port,
With a central adjustment mechanism that adjusts the opening size in the central region of the discharge port by displacing the tip of the second main body with respect to the first main body in the central region of the second main body in the longitudinal direction. ,
An both-end adjusting mechanism that adjusts the opening size in both ends of the discharge port by displacing the tip of the second main body with respect to the first main body in both ends of the second main body in the longitudinal direction. Equipped with
Both the central adjustment mechanism and the both end adjustment mechanism are provided so that the displacement amount of the tip portion of the second main body portion can be adjusted by the screwing amount of the adjustment screw with respect to the rear end portion of the second main body portion.
By providing a notch at the boundary between the both end regions and the central region in the second main body portion, the displacement ability to displace the tip portion of the second main body portion by the both end adjusting mechanism is increased by the central adjusting mechanism. A substrate processing device characterized in that it has a higher displacement capacity than the displacement ability of the tip of the main body. A slit nozzle with a slit-shaped discharge port at the tip,
A moving mechanism that relatively moves the substrate in a direction orthogonal to the longitudinal direction of the discharge port while facing the surface of the substrate with the discharge port.
It is provided with a processing liquid supply mechanism that supplies the processing liquid to the slit nozzle and discharges the processing liquid from the discharge port toward the surface of the substrate.
The slit nozzle
The first main body extending in the longitudinal direction and
A second main body that is arranged so as to face the first main body and forms the discharge port,
With a central adjustment mechanism that adjusts the opening size in the central region of the discharge port by displacing the tip of the second main body with respect to the first main body in the central region of the second main body in the longitudinal direction. ,
An both-end adjusting mechanism that adjusts the opening size in both ends of the discharge port by displacing the tip of the second main body with respect to the first main body in both ends of the second main body in the longitudinal direction. Equipped with
Both the central adjustment mechanism and the both end adjustment mechanism are provided so that the displacement amount of the tip portion of the second main body portion can be adjusted by the screwing amount of the adjustment screw with respect to the rear end portion of the second main body portion.
The first main body portion is adjacent to a central facing member arranged so as to face the central region of the first main body portion in the longitudinal direction and the central facing member on one side in the longitudinal direction. A first end facing member arranged so as to face the first end region of the main body, and a second end region of the first main body while being adjacent to the center facing member on the other side in the longitudinal direction. It has a second end facing member arranged so as to face the first end facing member, the center facing member, and the second end facing member are arranged separately from each other. A substrate processing apparatus characterized in that the displacement ability to displace the tip end portion of the second main body portion by the both end adjustment mechanism is higher than the displacement ability to displace the tip end portion of the second main body portion by the central adjustment mechanism.

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