JP2007198896A5 - - Google Patents

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Publication number
JP2007198896A5
JP2007198896A5 JP2006017561A JP2006017561A JP2007198896A5 JP 2007198896 A5 JP2007198896 A5 JP 2007198896A5 JP 2006017561 A JP2006017561 A JP 2006017561A JP 2006017561 A JP2006017561 A JP 2006017561A JP 2007198896 A5 JP2007198896 A5 JP 2007198896A5
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JP
Japan
Prior art keywords
gravity
amount
center
acquiring
fast axis
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2006017561A
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English (en)
Japanese (ja)
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JP2007198896A (ja
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Publication date
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Priority to JP2006017561A priority Critical patent/JP2007198896A/ja
Priority claimed from JP2006017561A external-priority patent/JP2007198896A/ja
Priority to US11/627,153 priority patent/US7468798B2/en
Priority to EP07001652A priority patent/EP1813988A3/en
Priority to CNA2007100047309A priority patent/CN101008792A/zh
Priority to KR1020070008207A priority patent/KR100873531B1/ko
Priority to TW096103023A priority patent/TW200741814A/zh
Publication of JP2007198896A publication Critical patent/JP2007198896A/ja
Publication of JP2007198896A5 publication Critical patent/JP2007198896A5/ja
Withdrawn legal-status Critical Current

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JP2006017561A 2006-01-26 2006-01-26 計測方法 Withdrawn JP2007198896A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2006017561A JP2007198896A (ja) 2006-01-26 2006-01-26 計測方法
US11/627,153 US7468798B2 (en) 2006-01-26 2007-01-25 System and method for polarization characteristic measurement of optical systems via centroid analysis
EP07001652A EP1813988A3 (en) 2006-01-26 2007-01-25 Measurement method
CNA2007100047309A CN101008792A (zh) 2006-01-26 2007-01-26 测量方法
KR1020070008207A KR100873531B1 (ko) 2006-01-26 2007-01-26 측정방법
TW096103023A TW200741814A (en) 2006-01-26 2007-01-26 Measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006017561A JP2007198896A (ja) 2006-01-26 2006-01-26 計測方法

Publications (2)

Publication Number Publication Date
JP2007198896A JP2007198896A (ja) 2007-08-09
JP2007198896A5 true JP2007198896A5 (https=) 2009-04-09

Family

ID=37951862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006017561A Withdrawn JP2007198896A (ja) 2006-01-26 2006-01-26 計測方法

Country Status (6)

Country Link
US (1) US7468798B2 (https=)
EP (1) EP1813988A3 (https=)
JP (1) JP2007198896A (https=)
KR (1) KR100873531B1 (https=)
CN (1) CN101008792A (https=)
TW (1) TW200741814A (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007198896A (ja) * 2006-01-26 2007-08-09 Canon Inc 計測方法
US7705998B2 (en) * 2007-09-12 2010-04-27 Infineon Technologies Ag Method for evaluating an optical imaging process
JP5055141B2 (ja) * 2008-01-10 2012-10-24 キヤノン株式会社 評価方法、調整方法、露光装置、およびプログラム
JP5176876B2 (ja) * 2008-10-31 2013-04-03 富士通セミコンダクター株式会社 シミュレーション方法、シミュレーション装置、及びシミュレーションプログラム
JP5359397B2 (ja) * 2009-03-10 2013-12-04 株式会社ニコン 光学部材及び光学機器
DE102009015393B3 (de) * 2009-03-20 2010-09-02 Carl Zeiss Smt Ag Messverfahren und Messsystem zur Messung der Doppelbrechung
CN103528688B (zh) * 2013-07-07 2015-08-19 浙江大学 一种全偏振高光谱干涉成像装置及方法
CN104296676B (zh) * 2014-09-29 2017-04-26 中国科学院光电研究院 基于低频差声光移频器移相的外差点衍射干涉仪
CN104635241B (zh) * 2015-03-05 2018-02-27 北京航空航天大学 一种艇载多光谱高光谱对地观测装置
JP6447637B2 (ja) * 2015-06-25 2019-01-09 Ｊｆｅスチール株式会社 表面欠陥検出装置、表面欠陥検出方法、及び鋼材の製造方法
NL2017222A (en) 2015-08-21 2017-02-27 Asml Netherlands Bv Lithographic Method and Apparatus
DE102018211853A1 (de) 2018-07-17 2020-01-23 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zur Charakterisierung der Oberflächenform eines optischen Elements
CN111176075B (zh) * 2018-11-13 2021-08-10 上海微电子装备（集团）股份有限公司 偏振像差检测装置、物镜测试台及光刻设备
KR102047123B1 (ko) * 2019-05-20 2019-11-20 한국해양과학기술원 시간 영역에서의 계층 식별 방법
CN111999042B (zh) * 2019-06-28 2022-06-28 苏州维纳仪器有限责任公司 检测光学系统任意波长透射波前的方法
CN112880987B (zh) * 2019-11-29 2022-05-03 上海微电子装备（集团）股份有限公司 光学元件的偏振性能检测方法及检测系统
US11341620B2 (en) 2020-05-05 2022-05-24 Microsoft Technology Licensing, Llc Background correction for birefringence measurements
US11422086B2 (en) 2020-05-05 2022-08-23 Microsoft Technology Licensing, Llc Efficient reading of birefringent data
US12501177B2 (en) * 2021-12-02 2025-12-16 Duke University Method and system of polarization microscopy imaging

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
US6404482B1 (en) * 1992-10-01 2002-06-11 Nikon Corporation Projection exposure method and apparatus
US6829041B2 (en) 1997-07-29 2004-12-07 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus having the same
JP3413067B2 (ja) 1997-07-29 2003-06-03 キヤノン株式会社 投影光学系及びそれを用いた投影露光装置
US6342945B1 (en) * 1999-03-31 2002-01-29 Corning Incorporated System and method for measuring polarization mode dispersion suitable for a production environment
JP3339468B2 (ja) 1999-06-24 2002-10-28 ミノルタ株式会社 プリンタ一体型デジタルカメラ
US6683710B2 (en) * 2001-06-01 2004-01-27 Optical Research Associates Correction of birefringence in cubic crystalline optical systems
JP3634782B2 (ja) 2001-09-14 2005-03-30 キヤノン株式会社 照明装置、それを用いた露光装置及びデバイス製造方法
US6970232B2 (en) * 2001-10-30 2005-11-29 Asml Netherlands B.V. Structures and methods for reducing aberration in integrated circuit fabrication systems
US7453641B2 (en) * 2001-10-30 2008-11-18 Asml Netherlands B.V. Structures and methods for reducing aberration in optical systems
US6995908B2 (en) * 2001-10-30 2006-02-07 Asml Netherlands B.V. Methods for reducing aberration in optical systems
US6844972B2 (en) * 2001-10-30 2005-01-18 Mcguire, Jr. James P. Reducing aberration in optical systems comprising cubic crystalline optical elements
DE10329360B4 (de) 2002-07-01 2008-08-28 Canon K.K. Doppelbrechungsmessgerät, Spannungsentfernungseinrichtung, Polarimeter und Belichtungsgerät
JP2004061515A (ja) * 2002-07-29 2004-02-26 Cark Zeiss Smt Ag 光学系による偏光状態への影響を決定する方法及び装置と、分析装置
US6862377B2 (en) * 2002-10-15 2005-03-01 Agilent Technologies, Inc. System and method for PMD measurement from coherent spectral analysis
AU2003304304A1 (en) * 2003-07-05 2005-01-21 Carl Zeiss Smt Ag Device for the polarization-specific examination of an optical system
JP2007198896A (ja) * 2006-01-26 2007-08-09 Canon Inc 計測方法
EP1818658A1 (en) 2006-02-08 2007-08-15 Carl Zeiss SMT AG Method for approximating the influence of an optical system on the state of polarisation of optical radiation

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