JP2007194624A - 銅でないメッキ可能層の上への銅の直接電気メッキのための方法 - Google Patents
銅でないメッキ可能層の上への銅の直接電気メッキのための方法 Download PDFInfo
- Publication number
- JP2007194624A JP2007194624A JP2006353015A JP2006353015A JP2007194624A JP 2007194624 A JP2007194624 A JP 2007194624A JP 2006353015 A JP2006353015 A JP 2006353015A JP 2006353015 A JP2006353015 A JP 2006353015A JP 2007194624 A JP2007194624 A JP 2007194624A
- Authority
- JP
- Japan
- Prior art keywords
- barrier layer
- layer
- forming
- copper
- ruthenium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010949 copper Substances 0.000 title claims abstract description 106
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 89
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 89
- 238000000034 method Methods 0.000 title claims abstract description 86
- 238000009713 electroplating Methods 0.000 title abstract description 8
- 230000004888 barrier function Effects 0.000 claims abstract description 72
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 63
- 239000001301 oxygen Substances 0.000 claims abstract description 63
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 63
- 229910052707 ruthenium Inorganic materials 0.000 claims abstract description 61
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims abstract description 60
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 29
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 15
- 229910052703 rhodium Inorganic materials 0.000 claims abstract description 15
- 239000010948 rhodium Substances 0.000 claims abstract description 15
- 229910052741 iridium Inorganic materials 0.000 claims abstract description 14
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 14
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims abstract description 14
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000000231 atomic layer deposition Methods 0.000 claims description 43
- 239000007789 gas Substances 0.000 claims description 27
- 238000005229 chemical vapour deposition Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 8
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical group [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 8
- 229910052736 halogen Inorganic materials 0.000 claims description 6
- 150000002367 halogens Chemical class 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims 3
- 230000007423 decrease Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 56
- 238000005240 physical vapour deposition Methods 0.000 description 24
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- 238000007747 plating Methods 0.000 description 18
- 238000000151 deposition Methods 0.000 description 17
- 230000008021 deposition Effects 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 11
- 229910052814 silicon oxide Inorganic materials 0.000 description 9
- -1 tungsten nitride Chemical class 0.000 description 9
- 239000003989 dielectric material Substances 0.000 description 8
- 239000004020 conductor Substances 0.000 description 7
- 229910052715 tantalum Inorganic materials 0.000 description 7
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 5
- 238000004070 electrodeposition Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000002203 pretreatment Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 101100445460 Arabidopsis thaliana EREX gene Proteins 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 150000003303 ruthenium Chemical class 0.000 description 2
- WYILUGVDWAFRSG-UHFFFAOYSA-N 2,4-dimethylpenta-1,3-diene;ruthenium(2+) Chemical compound [Ru+2].CC(C)=CC(C)=[CH-].CC(C)=CC(C)=[CH-] WYILUGVDWAFRSG-UHFFFAOYSA-N 0.000 description 1
- UPMXNNIRAGDFEH-UHFFFAOYSA-N 3,5-dibromo-4-hydroxybenzonitrile Chemical compound OC1=C(Br)C=C(C#N)C=C1Br UPMXNNIRAGDFEH-UHFFFAOYSA-N 0.000 description 1
- 244000132059 Carica parviflora Species 0.000 description 1
- 235000014653 Carica parviflora Nutrition 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 101100107923 Vitis labrusca AMAT gene Proteins 0.000 description 1
- NQZFAUXPNWSLBI-UHFFFAOYSA-N carbon monoxide;ruthenium Chemical group [Ru].[Ru].[Ru].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] NQZFAUXPNWSLBI-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910001502 inorganic halide Inorganic materials 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 150000002897 organic nitrogen compounds Chemical class 0.000 description 1
- 150000002898 organic sulfur compounds Chemical class 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
- H01L21/28562—Selective deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
- H01L21/76861—Post-treatment or after-treatment not introducing additional chemical elements into the layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
- H01L21/76861—Post-treatment or after-treatment not introducing additional chemical elements into the layer
- H01L21/76862—Bombardment with particles, e.g. treatment in noble gas plasmas; UV irradiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76873—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for electroplating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/948—Radiation resist
- Y10S438/952—Utilizing antireflective layer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
【解決手段】半導体構造物中に相互配線を形成するためのプロセスであって、基板の上に誘電体層を形成する工程と、誘電体層の上に第一の障壁層を形成する工程と、第一の障壁層の上に第二の障壁層を形成する工程であって、第二の障壁層は、ルテニウム、白金、パラジウム、ロジウムおよびイリジウムからなる群から選ばれ、第二の障壁層の形成は、第二の障壁層中の酸素のバルク濃度が20原子パーセントまたはそれ未満となるように操作される工程と、第二の障壁層の上に導電層を形成する工程と、を含むプロセス。本プロセスは、さらに、第二の障壁を処理して第二の障壁層の表面の酸化物の量を減少させる工程を含むことができる。
【選択図】図3
Description
基板の上に誘電体層を形成する工程と、
誘電体層の上に第一の障壁層を形成する工程と、
第一の障壁層の上に第二の障壁層を形成する工程であって、第二の障壁層は、ルテニウム、白金、パラジウム、ロジウムおよびイリジウムからなる群から選ばれ、第二の障壁層の形成は、第二の障壁層の中の酸素のバルク濃度が20原子パーセントまたはそれ未満となるように操作される工程と、
第二の障壁層の上に導電層を直接形成する工程と、
を含むプロセスが開示される。
基板の上に誘電体層を形成する工程と、
誘電体層の上に第一の障壁層を形成する工程と、
第一の障壁層の上に第二の障壁層を形成する工程であって、第二の障壁層は、ルテニウム、白金、パラジウム、ロジウムおよびイリジウムからなる群から選ばれ、第二の障壁層の形成は、第二の障壁層の中の酸素のバルク濃度が20原子パーセントまたはそれ未満となるように操作される工程と、
第二の障壁層を処理して第二の障壁層の表面上の酸化物の量を減少させる工程と、
第二の障壁層の上に導電層を直接形成する工程と、
を含むプロセスが開示される。
半導体構造物に相互配線を形成するプロセスであって、
基板の上に誘電体層を形成する工程と、
誘電体層の上に第一の障壁層を形成する工程と、
化学的蒸着法(CVD)および原子層堆積法(ALD即ちAtomic Layer Deposition)のうちの一つによって第一の障壁層の上に第二の障壁層を形成する工程であって、第二の障壁層は、ルテニウム、白金、パラジウム、ロジウムおよびイリジウムからなる群から選ばれ、第二の障壁層の形成は、第二の障壁層の中の酸素のバルク濃度が、次の工程で形成される導電層の外観が明るく、光沢を有するレベルに低下するように操作される工程と、
第二の障壁層の上に導電層を直接形成する工程であって、第二の障壁層の中の酸素のバルク濃度の上記のように低下したレベルに起因して導電層は明るく光沢を有する工程と、
を含むプロセスが開示される。
Claims (22)
- 半導体構造物中に相互配線を形成するプロセスであって、
基板の上に誘電体層を形成する工程と、
前記誘電体層の上に第一の障壁層を形成する工程と、
前記第一の障壁層の上に第二の障壁層を形成する工程であって、前記第二の障壁層は、ルテニウム、白金、パラジウム、ロジウムおよびイリジウムからなる群から選ばれ、前記第二の障壁層中の酸素のバルク濃度が20原子パーセントまたはそれ未満である工程と、
前記第二の障壁層の上に導電層を直接形成する工程と、
を含むプロセス。 - 前記導電層は銅または銅合金である、請求項1に記載のプロセス。
- 前記第二の障壁層はルテニウムである、請求項1に記載のプロセス。
- 前記第一の障壁層は、窒化タンタル、チタンおよび窒化チタンからなる群から選ばれる、請求項1に記載のプロセス。
- 半導体構造物中に相互配線を形成するプロセスであって、
基板の上に誘電体層を形成する工程と、
前記誘電体層の上に第一の障壁層を形成する工程と、
前記第一の障壁層の上に第二の障壁層を形成する工程であって、前記第二の障壁層は、ルテニウム、白金、パラジウム、ロジウムおよびイリジウムからなる群から選ばれ、前記第二の障壁層中の酸素のバルク濃度が20原子パーセントまたはそれ未満である工程と、
前記第二の障壁層を処理して前記第二の障壁層の表面の上の酸化物の量を減少させる工程と、
前記第二の障壁層の上に導電層を直接形成する工程と、
を含むプロセス。 - 前記導電層は銅または銅合金である、請求項5に記載のプロセス。
- 前記酸化物の量を減少させる工程は、前記第二の障壁層の上の前記酸化物を減少させるかまたは除去する物質に前記第二の障壁層の前記表面を曝露することを含む、請求項5に記載のプロセス。
- 前記物質は、還元性ガス、ハロゲン化物イオン溶液またはハロゲン・ガスからなる群から選ばれる、請求項7に記載のプロセス。
- 前記還元性ガスは、フォーミング・ガスおよび水素プラズマからなる群から選ばれる、請求項8に記載のプロセス。
- 前記ハロゲン化物イオン溶液はCl−、Br−またはI−を含む、請求項8に記載のプロセス。
- 前記ハロゲン・ガスはCl2、Br2またはI2である、請求項8に記載のプロセス。
- 前記第二の障壁層はルテニウムである、請求項5に記載のプロセス。
- 半導体構造物中に相互配線を形成するプロセスであって、
基板の上に誘電体層を形成する工程と、
前記誘電体層の上に第一の障壁層を形成する工程と、
化学的蒸着(CVD)法又は原子層堆積(ALD)法によって前記第一の障壁層の上に第二の障壁層を形成する工程であって、前記第二の障壁層は、ルテニウム、白金、パラジウム、ロジウムおよびイリジウムからなる群から選ばれ、前記第二の障壁層中の酸素のバルク濃度が、続いて形成される導電層の外観を明るく光沢性にする値である工程と、
前記第二の障壁層の上に導電層を直接形成する工程であって、前記導電層の外観は、前記第二の障壁層中の酸素のバルク濃度の値によって、明るく光沢性である工程と、
を含むプロセス。 - 前記第二の障壁層中の酸素の前記バルク濃度は、20原子パーセントまたはそれ未満である、請求項13に記載のプロセス。
- 前記導電層は銅または銅合金である、請求項13に記載のプロセス。
- 導電層を直接形成する工程の前に、前記第二の障壁層を処理して前記第二の障壁層の表面の上の酸化物の量を減少させる工程をさらに含む、請求項13に記載のプロセス。
- 前記酸化物の量を減少させる工程は、前記第二の障壁層の上の前記酸化物を減少させるかまたは除去する物質に前記第二の障壁層の前記表面を曝露することを含む、請求項16に記載のプロセス。
- 前記物質は、還元性ガス、ハロゲン化物イオン溶液またはハロゲン・ガスからなる群から選ばれる、請求項17に記載のプロセス。
- 前記還元性ガスは、フォーミング・ガスおよび水素プラズマからなる群から選ばれる、請求項18に記載のプロセス。
- 前記ハロゲン化物イオン溶液はCl−、Br−またはI−を含む、請求項18に記載のプロセス。
- 前記ハロゲン・ガスはCl2、Br2またはI2である、請求項18に記載のプロセス。
- 前記第二の障壁層は、ルテニウムである、請求項13に記載のプロセス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/306,932 US7405153B2 (en) | 2006-01-17 | 2006-01-17 | Method for direct electroplating of copper onto a non-copper plateable layer |
US11/306932 | 2006-01-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007194624A true JP2007194624A (ja) | 2007-08-02 |
JP5203602B2 JP5203602B2 (ja) | 2013-06-05 |
Family
ID=38263769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006353015A Expired - Fee Related JP5203602B2 (ja) | 2006-01-17 | 2006-12-27 | 銅でないメッキ可能層の上への銅の直接電気メッキのための方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7405153B2 (ja) |
JP (1) | JP5203602B2 (ja) |
CN (1) | CN101016638A (ja) |
TW (1) | TW200741965A (ja) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7405153B2 (en) * | 2006-01-17 | 2008-07-29 | International Business Machines Corporation | Method for direct electroplating of copper onto a non-copper plateable layer |
JP2009147137A (ja) * | 2007-12-14 | 2009-07-02 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2009266999A (ja) * | 2008-04-24 | 2009-11-12 | Renesas Technology Corp | 半導体装置、およびその製造方法 |
JP2011149097A (ja) * | 2009-12-25 | 2011-08-04 | Ebara Corp | 金属膜形成方法および装置 |
WO2011114989A1 (ja) * | 2010-03-17 | 2011-09-22 | 東京エレクトロン株式会社 | 薄膜の形成方法 |
US8399353B2 (en) | 2011-01-27 | 2013-03-19 | Tokyo Electron Limited | Methods of forming copper wiring and copper film, and film forming system |
JP5371783B2 (ja) * | 2008-01-23 | 2013-12-18 | Jx日鉱日石金属株式会社 | バリア層上にルテニウム電気めっき層を有するulsi微細配線部材 |
JP2014140078A (ja) * | 2008-08-13 | 2014-07-31 | International Business Maschines Corporation | 金属相互接続構造体及び金属相互接続構造体の形成方法 |
US8859422B2 (en) | 2011-01-27 | 2014-10-14 | Tokyo Electron Limited | Method of forming copper wiring and method and system for forming copper film |
KR20150129288A (ko) | 2014-05-07 | 2015-11-19 | 도쿄엘렉트론가부시키가이샤 | 성막 방법 및 성막 장치 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100924865B1 (ko) * | 2007-12-27 | 2009-11-02 | 주식회사 동부하이텍 | 반도체 소자의 금속배선 형성방법 |
US8679970B2 (en) * | 2008-05-21 | 2014-03-25 | International Business Machines Corporation | Structure and process for conductive contact integration |
JP2010189693A (ja) | 2009-02-17 | 2010-09-02 | Tokyo Electron Ltd | Cu膜の成膜方法および記憶媒体 |
DE102009015718B4 (de) | 2009-03-31 | 2012-03-29 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Testsystem und Verfahren zum Verringern der Schäden in Saatschichten in Metallisierungssystemen von Halbleiterbauelementen |
TWI459507B (zh) * | 2009-06-18 | 2014-11-01 | United Microelectronics Corp | 一種製作矽貫通電極的方法 |
KR20140021628A (ko) * | 2011-03-30 | 2014-02-20 | 도쿄엘렉트론가부시키가이샤 | Cu 배선의 형성 방법 |
US20130307153A1 (en) | 2012-05-18 | 2013-11-21 | International Business Machines Corporation | Interconnect with titanium-oxide diffusion barrier |
US9704804B1 (en) | 2015-12-18 | 2017-07-11 | Texas Instruments Incorporated | Oxidation resistant barrier metal process for semiconductor devices |
US10049980B1 (en) | 2017-02-10 | 2018-08-14 | International Business Machines Corporation | Low resistance seed enhancement spacers for voidless interconnect structures |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04243134A (ja) * | 1991-01-18 | 1992-08-31 | Sony Corp | 銅系金属配線の形成方法 |
JP2003533880A (ja) * | 2000-05-15 | 2003-11-11 | エイエスエム マイクロケミストリ オーワイ | 集積回路の製造方法 |
JP2005347510A (ja) * | 2004-06-03 | 2005-12-15 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3951843A (en) * | 1973-01-09 | 1976-04-20 | Lfe Corporation | Fluorocarbon composition for use in plasma removal of photoresist material from semiconductor devices |
US6709562B1 (en) | 1995-12-29 | 2004-03-23 | International Business Machines Corporation | Method of making electroplated interconnection structures on integrated circuit chips |
KR100269326B1 (ko) | 1998-06-08 | 2000-10-16 | 윤종용 | 전기 도금으로 형성된 전극을 갖춘 커패시터및 그 제조방법 |
US6417062B1 (en) | 2000-05-01 | 2002-07-09 | General Electric Company | Method of forming ruthenium oxide films |
US7074640B2 (en) | 2000-06-06 | 2006-07-11 | Simon Fraser University | Method of making barrier layers |
US6696363B2 (en) | 2000-06-06 | 2004-02-24 | Ekc Technology, Inc. | Method of and apparatus for substrate pre-treatment |
JP2002201162A (ja) | 2000-06-08 | 2002-07-16 | Jsr Corp | ルテニウム膜および酸化ルテニウム膜、ならびにその形成方法 |
AU2001295936A1 (en) | 2000-10-18 | 2002-04-29 | Jsr Corporation | Ruthenium film and ruthenium oxide film, and method for formation thereof |
US6455414B1 (en) * | 2000-11-28 | 2002-09-24 | Tokyo Electron Limited | Method for improving the adhesion of sputtered copper films to CVD transition metal based underlayers |
US6787912B2 (en) | 2002-04-26 | 2004-09-07 | International Business Machines Corporation | Barrier material for copper structures |
US6812143B2 (en) | 2002-04-26 | 2004-11-02 | International Business Machines Corporation | Process of forming copper structures |
US20040007473A1 (en) * | 2002-07-11 | 2004-01-15 | Applied Materials, Inc. | Electrolyte/organic additive separation in electroplating processes |
US6974531B2 (en) | 2002-10-15 | 2005-12-13 | International Business Machines Corporation | Method for electroplating on resistive substrates |
US6974768B1 (en) * | 2003-01-15 | 2005-12-13 | Novellus Systems, Inc. | Methods of providing an adhesion layer for adhesion of barrier and/or seed layers to dielectric films |
US7229911B2 (en) * | 2004-04-19 | 2007-06-12 | Applied Materials, Inc. | Adhesion improvement for low k dielectrics to conductive materials |
US7405153B2 (en) * | 2006-01-17 | 2008-07-29 | International Business Machines Corporation | Method for direct electroplating of copper onto a non-copper plateable layer |
-
2006
- 2006-01-17 US US11/306,932 patent/US7405153B2/en not_active Expired - Fee Related
- 2006-12-27 JP JP2006353015A patent/JP5203602B2/ja not_active Expired - Fee Related
-
2007
- 2007-01-12 TW TW096101220A patent/TW200741965A/zh unknown
- 2007-01-16 CN CN200710004205.7A patent/CN101016638A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04243134A (ja) * | 1991-01-18 | 1992-08-31 | Sony Corp | 銅系金属配線の形成方法 |
JP2003533880A (ja) * | 2000-05-15 | 2003-11-11 | エイエスエム マイクロケミストリ オーワイ | 集積回路の製造方法 |
JP2005347510A (ja) * | 2004-06-03 | 2005-12-15 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7405153B2 (en) * | 2006-01-17 | 2008-07-29 | International Business Machines Corporation | Method for direct electroplating of copper onto a non-copper plateable layer |
JP2009147137A (ja) * | 2007-12-14 | 2009-07-02 | Toshiba Corp | 半導体装置およびその製造方法 |
JP5371783B2 (ja) * | 2008-01-23 | 2013-12-18 | Jx日鉱日石金属株式会社 | バリア層上にルテニウム電気めっき層を有するulsi微細配線部材 |
JP2009266999A (ja) * | 2008-04-24 | 2009-11-12 | Renesas Technology Corp | 半導体装置、およびその製造方法 |
JP2014140078A (ja) * | 2008-08-13 | 2014-07-31 | International Business Maschines Corporation | 金属相互接続構造体及び金属相互接続構造体の形成方法 |
JP2011149097A (ja) * | 2009-12-25 | 2011-08-04 | Ebara Corp | 金属膜形成方法および装置 |
WO2011114989A1 (ja) * | 2010-03-17 | 2011-09-22 | 東京エレクトロン株式会社 | 薄膜の形成方法 |
US8399353B2 (en) | 2011-01-27 | 2013-03-19 | Tokyo Electron Limited | Methods of forming copper wiring and copper film, and film forming system |
US8859422B2 (en) | 2011-01-27 | 2014-10-14 | Tokyo Electron Limited | Method of forming copper wiring and method and system for forming copper film |
KR20150129288A (ko) | 2014-05-07 | 2015-11-19 | 도쿄엘렉트론가부시키가이샤 | 성막 방법 및 성막 장치 |
US9540733B2 (en) | 2014-05-07 | 2017-01-10 | Tokyo Electron Limited | Film forming method, film forming apparatus and recording medium |
Also Published As
Publication number | Publication date |
---|---|
JP5203602B2 (ja) | 2013-06-05 |
TW200741965A (en) | 2007-11-01 |
CN101016638A (zh) | 2007-08-15 |
US20070166995A1 (en) | 2007-07-19 |
US7405153B2 (en) | 2008-07-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5203602B2 (ja) | 銅でないメッキ可能層の上への銅の直接電気メッキのための方法 | |
US7135404B2 (en) | Method for applying metal features onto barrier layers using electrochemical deposition | |
US7405143B2 (en) | Method for fabricating a seed layer | |
US7405157B1 (en) | Methods for the electrochemical deposition of copper onto a barrier layer of a work piece | |
US6740221B2 (en) | Method of forming copper interconnects | |
US7694413B2 (en) | Method of making a bottomless via | |
US20110259750A1 (en) | Method of direct plating of copper on a ruthenium alloy | |
US8513124B1 (en) | Copper electroplating process for uniform across wafer deposition and void free filling on semi-noble metal coated wafers | |
US20070125657A1 (en) | Method of direct plating of copper on a substrate structure | |
US20030116439A1 (en) | Method for forming encapsulated metal interconnect structures in semiconductor integrated circuit devices | |
US7799684B1 (en) | Two step process for uniform across wafer deposition and void free filling on ruthenium coated wafers | |
US8703615B1 (en) | Copper electroplating process for uniform across wafer deposition and void free filling on ruthenium coated wafers | |
JP2001023989A (ja) | 化学気相堆積により堆積した銅の密着性を高める方法 | |
WO2005123988A1 (en) | Method of barrier layer surface treatment to enable direct copper plating on barrier metal | |
KR20150138087A (ko) | 반응성 금속 필름 상에 금속을 전기화학적으로 증착시키기 위한 방법 | |
US7442267B1 (en) | Anneal of ruthenium seed layer to improve copper plating | |
WO2016096390A1 (en) | Trench pattern wet chemical copper metal filling using a hard mask structure | |
KR20150138086A (ko) | 반응성 금속 필름 상에 금속을 전기화학적으로 증착시키기 위한 방법 | |
US7504335B2 (en) | Grafted seed layer for electrochemical plating | |
US20230282485A1 (en) | Electrolyte and Deposition of a Copper Barrier Layer in a Damascene Process | |
US20030146102A1 (en) | Method for forming copper interconnects | |
JP3715975B2 (ja) | 多層配線構造の製造方法 | |
Kelly et al. | Deposition of copper on ruthenium for Cu metallization | |
JP4937437B2 (ja) | めっき浴から堆積される金属層の特性改善方法 | |
WO2008134536A1 (en) | Method for electrochemically depositing metal onto a microelectronic workpiece |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20091026 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121010 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121016 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130110 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130129 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130214 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160222 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |