JP2007173785A5 - - Google Patents
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- Publication number
- JP2007173785A5 JP2007173785A5 JP2006307392A JP2006307392A JP2007173785A5 JP 2007173785 A5 JP2007173785 A5 JP 2007173785A5 JP 2006307392 A JP2006307392 A JP 2006307392A JP 2006307392 A JP2006307392 A JP 2006307392A JP 2007173785 A5 JP2007173785 A5 JP 2007173785A5
- Authority
- JP
- Japan
- Prior art keywords
- abrasive slurry
- spray head
- dielectric coating
- controlling
- atomized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002002 slurry Substances 0.000 claims 14
- 238000000034 method Methods 0.000 claims 11
- 239000007921 spray Substances 0.000 claims 8
- 239000011248 coating agent Substances 0.000 claims 7
- 238000000576 coating method Methods 0.000 claims 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims 1
- 239000000292 calcium oxide Substances 0.000 claims 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims 1
- 230000000593 degrading effect Effects 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 1
- 239000008262 pumice Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/272,844 | 2005-11-14 | ||
| US11/272,844 US20070111642A1 (en) | 2005-11-14 | 2005-11-14 | Apparatus and methods for slurry cleaning of etch chambers |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007173785A JP2007173785A (ja) | 2007-07-05 |
| JP2007173785A5 true JP2007173785A5 (enExample) | 2010-01-28 |
| JP5031329B2 JP5031329B2 (ja) | 2012-09-19 |
Family
ID=37758692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006307392A Expired - Fee Related JP5031329B2 (ja) | 2005-11-14 | 2006-11-14 | エッチ室をスラリー洗浄するための装置と方法 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US20070111642A1 (enExample) |
| EP (1) | EP1785230B1 (enExample) |
| JP (1) | JP5031329B2 (enExample) |
| KR (1) | KR101301097B1 (enExample) |
| CN (1) | CN1970230A (enExample) |
| AT (1) | ATE464978T1 (enExample) |
| DE (1) | DE602006013768D1 (enExample) |
| IL (1) | IL178946A (enExample) |
| SG (1) | SG132602A1 (enExample) |
| TW (1) | TWI421935B (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101091132B1 (ko) | 2010-09-27 | 2011-12-09 | (주)제이솔루션 | 질소가스 이젝터장치 |
| US9815175B2 (en) * | 2012-09-25 | 2017-11-14 | G.D.O. Inc | Abrasive entrainment waterjet cutting |
| US9744645B2 (en) * | 2012-09-25 | 2017-08-29 | G.D.O. Inc. | Abrasive entrainment waterjet cutting |
| WO2014052407A1 (en) * | 2012-09-25 | 2014-04-03 | G.D.O. Inc. | Underwater abrasive entrainment waterjet cutting |
| US9687953B2 (en) * | 2014-06-27 | 2017-06-27 | Applied Materials, Inc. | Chamber components with polished internal apertures |
| US10010106B2 (en) * | 2015-04-30 | 2018-07-03 | Frito-Lay North America, Inc. | Method and apparatus for removing a portion of a food product with an abrasive stream |
| CN105904330A (zh) * | 2016-06-08 | 2016-08-31 | 重庆巨源不锈钢制品有限公司 | 自动抛光装置及其自动抛光方法 |
| US10076821B2 (en) * | 2016-08-15 | 2018-09-18 | G.D.O. Inc | Abrasive entrainment waterjet cutting |
| US10077966B2 (en) * | 2016-08-15 | 2018-09-18 | G.D.O. Inc. | Abrasive entrainment waterjet cutting |
| CN109210374B (zh) * | 2017-06-30 | 2021-06-08 | 北京北方华创微电子装备有限公司 | 进气管路及半导体加工设备 |
| KR102577058B1 (ko) * | 2021-04-30 | 2023-09-11 | 남근식 | 표면연마용 워터젯 가공장치 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2200587A (en) * | 1937-02-25 | 1940-05-14 | Hydroblast Corp | Method and apparatus for sand blasting |
| US2369576A (en) * | 1943-12-20 | 1945-02-13 | Pangborn Corp | Blast gun |
| US2372957A (en) * | 1943-12-23 | 1945-04-03 | Pangborn Corp | Hydraulic sand feeder |
| GB1105984A (en) * | 1966-02-24 | 1968-03-13 | Abrasive Dev | Improvements in and relating to abrasive guns |
| US4330968A (en) * | 1980-05-02 | 1982-05-25 | Fuji Seiki Machine Works, Ltd. | Two-tank high water pressure wet blasting machine with separate supply reservoir for abrasive particles |
| US4776794A (en) * | 1986-06-03 | 1988-10-11 | Moshe Meller | Cleaning instrument using premixed abrasive liquid |
| EP0332328B1 (en) * | 1988-03-03 | 1992-09-16 | Yoshino Seiki Inc. | Mist-spouting type drilling device |
| US5575705A (en) * | 1993-08-12 | 1996-11-19 | Church & Dwight Co., Inc. | Slurry blasting process |
| US5384990A (en) * | 1993-08-12 | 1995-01-31 | Church & Dwight Co., Inc. | Water blasting process |
| WO1997034737A1 (fr) * | 1996-03-18 | 1997-09-25 | Honda Giken Kogyo Kabushiki Kaisha | Procede et appareil assurant un important renforcement d'un element metallique |
| US6010546A (en) * | 1997-07-24 | 2000-01-04 | Asahi Glass Company, Ltd. | Blasting medium and blasting method employing such medium |
| US5827114A (en) * | 1996-09-25 | 1998-10-27 | Church & Dwight Co., Inc. | Slurry blasting process |
| ATE365443T1 (de) * | 1998-04-24 | 2007-07-15 | Matsushita Electric Industrial Co Ltd | Verfahren zur herstellung eines keramischen mehrschichtigen substrats |
| US6224463B1 (en) * | 1998-11-02 | 2001-05-01 | J.C.J. Metal Processing, Incorporated | Workpiece finishing system and method of operating same |
| JP2000343435A (ja) * | 1999-03-29 | 2000-12-12 | Asahi Glass Co Ltd | ブラストメディア及びブラスト方法 |
| FR2801689B1 (fr) * | 1999-11-29 | 2001-12-28 | Air Liquide | Robinet detendeur avec dispositif de reglage de la basse pression et comportant un systeme d'arret d'urgence |
| JP2002319556A (ja) * | 2001-04-19 | 2002-10-31 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
| US6554909B1 (en) * | 2001-11-08 | 2003-04-29 | Saint-Gobain Ceramics & Plastics, Inc. | Process for cleaning components using cleaning media |
| US20040202980A1 (en) * | 2003-04-14 | 2004-10-14 | Policicchio Piero A. | Dental prophylaxis and air appliance |
| JP2005108889A (ja) * | 2003-09-26 | 2005-04-21 | Kyocera Corp | 半導体基板の製造方法 |
-
2005
- 2005-11-14 US US11/272,844 patent/US20070111642A1/en not_active Abandoned
-
2006
- 2006-10-31 AT AT06255599T patent/ATE464978T1/de not_active IP Right Cessation
- 2006-10-31 IL IL178946A patent/IL178946A/en active IP Right Grant
- 2006-10-31 DE DE602006013768T patent/DE602006013768D1/de active Active
- 2006-10-31 EP EP06255599A patent/EP1785230B1/en not_active Ceased
- 2006-11-02 SG SG200607533-7A patent/SG132602A1/en unknown
- 2006-11-13 CN CNA2006101464827A patent/CN1970230A/zh active Pending
- 2006-11-13 KR KR1020060111696A patent/KR101301097B1/ko not_active Expired - Fee Related
- 2006-11-14 TW TW095141986A patent/TWI421935B/zh active
- 2006-11-14 JP JP2006307392A patent/JP5031329B2/ja not_active Expired - Fee Related
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