JP2007150012A - プラズマ処理装置および方法 - Google Patents

プラズマ処理装置および方法 Download PDF

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Publication number
JP2007150012A
JP2007150012A JP2005343251A JP2005343251A JP2007150012A JP 2007150012 A JP2007150012 A JP 2007150012A JP 2005343251 A JP2005343251 A JP 2005343251A JP 2005343251 A JP2005343251 A JP 2005343251A JP 2007150012 A JP2007150012 A JP 2007150012A
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JP
Japan
Prior art keywords
electrodes
electrode
frequency power
plasma processing
substrate
Prior art date
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Ceased
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JP2005343251A
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English (en)
Japanese (ja)
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JP2007150012A5 (enExample
Inventor
Takayuki Kai
隆行 甲斐
Hitoshi Miyakita
衡 宮北
Hisao Nagai
久雄 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2005343251A priority Critical patent/JP2007150012A/ja
Publication of JP2007150012A publication Critical patent/JP2007150012A/ja
Publication of JP2007150012A5 publication Critical patent/JP2007150012A5/ja
Ceased legal-status Critical Current

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JP2005343251A 2005-11-29 2005-11-29 プラズマ処理装置および方法 Ceased JP2007150012A (ja)

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JP2005343251A JP2007150012A (ja) 2005-11-29 2005-11-29 プラズマ処理装置および方法

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JP2007150012A true JP2007150012A (ja) 2007-06-14
JP2007150012A5 JP2007150012A5 (enExample) 2008-10-09

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010532565A (ja) * 2007-06-29 2010-10-07 ラム リサーチ コーポレーション 単一の平面アンテナを備えた誘導結合二重ゾーン処理チャンバ
WO2012119700A1 (de) * 2011-03-09 2012-09-13 Manz Ag Vorrichtung und verfahren zum plasmaunterstützten behandeln zumindest zweier substrate
US20130272930A1 (en) * 2009-02-17 2013-10-17 Mcalister Technologies, Llc Induction for thermochemical processes, and associated systems and methods
US8771636B2 (en) 2008-01-07 2014-07-08 Mcalister Technologies, Llc Chemical processes and reactors for efficiently producing hydrogen fuels and structural materials, and associated systems and methods
US8821602B2 (en) 2011-08-12 2014-09-02 Mcalister Technologies, Llc Systems and methods for providing supplemental aqueous thermal energy
US8911703B2 (en) 2011-08-12 2014-12-16 Mcalister Technologies, Llc Reducing and/or harvesting drag energy from transport vehicles, including for chemical reactors, and associated systems and methods
US8926908B2 (en) 2010-02-13 2015-01-06 Mcalister Technologies, Llc Reactor vessels with pressure and heat transfer features for producing hydrogen-based fuels and structural elements, and associated systems and methods
US8926719B2 (en) 2013-03-14 2015-01-06 Mcalister Technologies, Llc Method and apparatus for generating hydrogen from metal
US9188086B2 (en) 2008-01-07 2015-11-17 Mcalister Technologies, Llc Coupled thermochemical reactors and engines, and associated systems and methods
US9206045B2 (en) 2010-02-13 2015-12-08 Mcalister Technologies, Llc Reactor vessels with transmissive surfaces for producing hydrogen-based fuels and structural elements, and associated systems and methods
DE102014011933A1 (de) 2014-08-14 2016-02-18 Manz Ag Plasmabehandlungsvorrichtung und Verfahren zur Oberflächenbehandlung von Substraten
US9302681B2 (en) 2011-08-12 2016-04-05 Mcalister Technologies, Llc Mobile transport platforms for producing hydrogen and structural materials, and associated systems and methods
US9309473B2 (en) 2011-08-12 2016-04-12 Mcalister Technologies, Llc Systems and methods for extracting and processing gases from submerged sources
US9522379B2 (en) 2011-08-12 2016-12-20 Mcalister Technologies, Llc Reducing and/or harvesting drag energy from transport vehicles, including for chemical reactors, and associated systems and methods

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09134906A (ja) * 1995-10-31 1997-05-20 Applied Materials Inc プラズマエッチング方法及び装置
JPH10154697A (ja) * 1996-11-25 1998-06-09 Fujitsu Ltd プラズマ処理装置及びその管理方法
JP2000353690A (ja) * 1999-06-11 2000-12-19 Sharp Corp プラズマリアクタ装置
JP2001524251A (ja) * 1997-04-16 2001-11-27 ラム リサーチ コーポレーション プラズマ加工処理システムのイオンエネルギーとプラズマ密度を制御するための方法と装置
JP2001338917A (ja) * 2000-03-24 2001-12-07 Hitachi Ltd 半導体製造装置および処理方法、およびウエハ電位プローブ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09134906A (ja) * 1995-10-31 1997-05-20 Applied Materials Inc プラズマエッチング方法及び装置
JPH10154697A (ja) * 1996-11-25 1998-06-09 Fujitsu Ltd プラズマ処理装置及びその管理方法
JP2001524251A (ja) * 1997-04-16 2001-11-27 ラム リサーチ コーポレーション プラズマ加工処理システムのイオンエネルギーとプラズマ密度を制御するための方法と装置
JP2000353690A (ja) * 1999-06-11 2000-12-19 Sharp Corp プラズマリアクタ装置
JP2001338917A (ja) * 2000-03-24 2001-12-07 Hitachi Ltd 半導体製造装置および処理方法、およびウエハ電位プローブ

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010532565A (ja) * 2007-06-29 2010-10-07 ラム リサーチ コーポレーション 単一の平面アンテナを備えた誘導結合二重ゾーン処理チャンバ
US9188086B2 (en) 2008-01-07 2015-11-17 Mcalister Technologies, Llc Coupled thermochemical reactors and engines, and associated systems and methods
US8771636B2 (en) 2008-01-07 2014-07-08 Mcalister Technologies, Llc Chemical processes and reactors for efficiently producing hydrogen fuels and structural materials, and associated systems and methods
US20130272930A1 (en) * 2009-02-17 2013-10-17 Mcalister Technologies, Llc Induction for thermochemical processes, and associated systems and methods
US9541284B2 (en) 2010-02-13 2017-01-10 Mcalister Technologies, Llc Chemical reactors with annularly positioned delivery and removal devices, and associated systems and methods
US8926908B2 (en) 2010-02-13 2015-01-06 Mcalister Technologies, Llc Reactor vessels with pressure and heat transfer features for producing hydrogen-based fuels and structural elements, and associated systems and methods
US9206045B2 (en) 2010-02-13 2015-12-08 Mcalister Technologies, Llc Reactor vessels with transmissive surfaces for producing hydrogen-based fuels and structural elements, and associated systems and methods
US9103548B2 (en) 2010-02-13 2015-08-11 Mcalister Technologies, Llc Reactors for conducting thermochemical processes with solar heat input, and associated systems and methods
WO2012119700A1 (de) * 2011-03-09 2012-09-13 Manz Ag Vorrichtung und verfahren zum plasmaunterstützten behandeln zumindest zweier substrate
US8821602B2 (en) 2011-08-12 2014-09-02 Mcalister Technologies, Llc Systems and methods for providing supplemental aqueous thermal energy
US9302681B2 (en) 2011-08-12 2016-04-05 Mcalister Technologies, Llc Mobile transport platforms for producing hydrogen and structural materials, and associated systems and methods
US9309473B2 (en) 2011-08-12 2016-04-12 Mcalister Technologies, Llc Systems and methods for extracting and processing gases from submerged sources
US9522379B2 (en) 2011-08-12 2016-12-20 Mcalister Technologies, Llc Reducing and/or harvesting drag energy from transport vehicles, including for chemical reactors, and associated systems and methods
US8911703B2 (en) 2011-08-12 2014-12-16 Mcalister Technologies, Llc Reducing and/or harvesting drag energy from transport vehicles, including for chemical reactors, and associated systems and methods
US9617983B2 (en) 2011-08-12 2017-04-11 Mcalister Technologies, Llc Systems and methods for providing supplemental aqueous thermal energy
US8926719B2 (en) 2013-03-14 2015-01-06 Mcalister Technologies, Llc Method and apparatus for generating hydrogen from metal
DE102014011933A1 (de) 2014-08-14 2016-02-18 Manz Ag Plasmabehandlungsvorrichtung und Verfahren zur Oberflächenbehandlung von Substraten

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