JP2007143125A5 - - Google Patents

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Publication number
JP2007143125A5
JP2007143125A5 JP2006277941A JP2006277941A JP2007143125A5 JP 2007143125 A5 JP2007143125 A5 JP 2007143125A5 JP 2006277941 A JP2006277941 A JP 2006277941A JP 2006277941 A JP2006277941 A JP 2006277941A JP 2007143125 A5 JP2007143125 A5 JP 2007143125A5
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JP
Japan
Prior art keywords
piezoelectric
layer
support
lower electrode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006277941A
Other languages
English (en)
Japanese (ja)
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JP4846509B2 (ja
JP2007143125A (ja
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Priority to JP2006277941A priority Critical patent/JP4846509B2/ja
Priority claimed from JP2006277941A external-priority patent/JP4846509B2/ja
Publication of JP2007143125A publication Critical patent/JP2007143125A/ja
Publication of JP2007143125A5 publication Critical patent/JP2007143125A5/ja
Application granted granted Critical
Publication of JP4846509B2 publication Critical patent/JP4846509B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006277941A 2005-10-20 2006-10-11 圧電共振器及び圧電共振器の製造方法 Expired - Fee Related JP4846509B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006277941A JP4846509B2 (ja) 2005-10-20 2006-10-11 圧電共振器及び圧電共振器の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005305485 2005-10-20
JP2005305485 2005-10-20
JP2006277941A JP4846509B2 (ja) 2005-10-20 2006-10-11 圧電共振器及び圧電共振器の製造方法

Publications (3)

Publication Number Publication Date
JP2007143125A JP2007143125A (ja) 2007-06-07
JP2007143125A5 true JP2007143125A5 (enrdf_load_stackoverflow) 2010-09-02
JP4846509B2 JP4846509B2 (ja) 2011-12-28

Family

ID=38205366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006277941A Expired - Fee Related JP4846509B2 (ja) 2005-10-20 2006-10-11 圧電共振器及び圧電共振器の製造方法

Country Status (1)

Country Link
JP (1) JP4846509B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4917481B2 (ja) * 2007-06-13 2012-04-18 太陽誘電株式会社 フィルタ
JP5054491B2 (ja) * 2007-11-21 2012-10-24 パナソニック株式会社 圧電振動子およびその製造方法
JP4935965B2 (ja) * 2010-05-14 2012-05-23 コニカミノルタホールディングス株式会社 電気機械変換素子
US9935609B2 (en) * 2014-05-17 2018-04-03 Kyocera Corporation Piezoelectric component

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3825736B2 (ja) * 2002-09-30 2006-09-27 株式会社東芝 薄膜圧電共振器および高周波フィルタ
KR100485702B1 (ko) * 2003-05-29 2005-04-28 삼성전자주식회사 지지대를 갖는 박막 벌크 음향 공진기 및 그 제조방법
JP2005210681A (ja) * 2003-11-07 2005-08-04 Matsushita Electric Ind Co Ltd 圧電共振器、その製造方法、それを用いたフィルタ、共用器、および通信機器
JP4554337B2 (ja) * 2003-11-20 2010-09-29 パナソニック株式会社 圧電素子、および複合圧電素子、ならびにそれらを用いたフィルタ、共用器、通信機器

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