JP2007142189A - ウエハ等精密基板収納容器 - Google Patents
ウエハ等精密基板収納容器 Download PDFInfo
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- JP2007142189A JP2007142189A JP2005334460A JP2005334460A JP2007142189A JP 2007142189 A JP2007142189 A JP 2007142189A JP 2005334460 A JP2005334460 A JP 2005334460A JP 2005334460 A JP2005334460 A JP 2005334460A JP 2007142189 A JP2007142189 A JP 2007142189A
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- 239000000758 substrate Substances 0.000 title claims abstract description 44
- 238000003860 storage Methods 0.000 title claims abstract description 26
- 230000007246 mechanism Effects 0.000 claims abstract description 35
- 238000003780 insertion Methods 0.000 claims abstract description 7
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- 235000012431 wafers Nutrition 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 abstract description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052782 aluminium Inorganic materials 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract description 2
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 2
- 239000012530 fluid Substances 0.000 abstract 1
- 230000003749 cleanliness Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- -1 polybutylene terephthalate Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packaging Frangible Articles (AREA)
Abstract
【解決手段】容器本体の開口縁部にカム挿入口を設け、一方、蓋体10の中空状ラッチ室3内には扇形の締め付けカム8は回動するラッチ機構20を装着させたもので、カムとカム挿入口との接触面積を大きくしてロック力を大にした。また、ラッチ機構20を回動させる回転駆動用プレート7に表面プレートより突出する指掛け突起7c、7cを形成して、該ラッチ駆動装置のない場所においても容易に開蓋できるものにした。さらには、ロックを維持するためのノッチ機構7n、洗浄液の排出口などを設けた。
【選択図】図9
Description
2 凸部
3 ラッチ室
4 表面プレート
4a キー孔
4d 切り欠き部
5 ベース板
5a 円形軸受け部
5b 円形タブ
5c 弾性フック
5e 係止溝
5g カム軸
5r ガイドレール
6 アーム
7 回転駆動用プレート
7c 指掛け用突起
7n ノッチ
8 締め付けカム
10 蓋体
10B 蓋基板
11 フロントリテーナー
20 ラッチ機構
30 基板収納容器
Claims (4)
- ウエハ等の精密基板複数枚を等間隔に収容する容器本体(1)と、その容器本体の開口部周縁にガスケット(12)を介して内嵌合する蓋体(10)と、その蓋体の内面に取り付けて蓋閉じ時に精密基板の外周縁を押圧するフロントリテーナー(11)から構成される精密基板収納容器(30)において、前記容器本体(1)の開口部内周縁にカム挿入口(1b)が4箇所以上開設され、一方、前記蓋体(10)には蓋閉じ時に前記カム挿入口(1b)に対向する側壁面に開口(3a)を設けると共に、該蓋体にはラッチ機構(20)に組み込まれて回動しその円弧状部を前記開口(3a)部に出没させるほぼ扇形の締め付け用カム(8)が内蔵され、該蓋体(10)の表面プレート(4)に露出形成したキー溝(7a)を介して扇形の締め付け用カムを作動させることを特徴とするウエハ等精密基板収納容器。
- ウエハ等の精密基板複数枚を等間隔に収容する容器本体(1)と、その容器本体の開口部周縁にガスケット(12)を介して内嵌合する蓋体(10)と、その蓋体の内面に取り付けて蓋閉じ時に精密基板の外周縁を押圧するフロントリテーナー(11)から構成される精密基板収納容器(30)において、蓋体(10)の中心を挟む両側のラッチ室(3)にベース板(5)を装着し、そのベース板(5)上に回転駆動用プレート(7)とラッチキー溝付き回転主軸(7b)と扇形の締め付けカムを有するラッチ機構が装着され、さらに、表面プレートでこれを被覆した蓋体(10)の表面に指掛け突起(7c)、7c)が突出していることを特徴とする請求項1記載の精密基板収納容器。
- ベース板(5)上に軸支された回転駆動用プレート(7)には、その中心を挟み対向する周縁にV字形ノッチ(7n,7n)が設けられ、該回転駆動用プレートが所定回動位置にあるときに前記ベース板に形成された弾性フック(5c、5c)と該ノッチ部とが係合して回転駆動用プレート(7)の回動をロックすることを特徴とする請求項1記載の精密基板収納容器の蓋。
- ウエハ等の精密基板複数枚を等間隔に収容して保管し、運搬するための容器本体の開口部に内嵌合する中空の蓋体において、ラッチ機構(20)を内蔵した中空状のラッチ室(3)を覆う表面プレート(4)の2隅に切り欠き(4e,4e)を形成したことを特徴とするウエハ等精密基板収納容器の蓋。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005334460A JP4482656B2 (ja) | 2005-11-18 | 2005-11-18 | ウエハ等精密基板収納容器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005334460A JP4482656B2 (ja) | 2005-11-18 | 2005-11-18 | ウエハ等精密基板収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007142189A true JP2007142189A (ja) | 2007-06-07 |
JP4482656B2 JP4482656B2 (ja) | 2010-06-16 |
Family
ID=38204693
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005334460A Active JP4482656B2 (ja) | 2005-11-18 | 2005-11-18 | ウエハ等精密基板収納容器 |
Country Status (1)
Country | Link |
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JP (1) | JP4482656B2 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011016583A (ja) * | 2009-06-08 | 2011-01-27 | Gold Kogyo Kk | 精密基板収納容器およびその製造方法 |
JP2011061107A (ja) * | 2009-09-14 | 2011-03-24 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
US8342327B1 (en) | 2011-07-07 | 2013-01-01 | Samsung Display Co., Ltd. | Cassette for accommodating substrates |
KR101451477B1 (ko) * | 2011-12-13 | 2014-10-15 | 구뎅 프리시젼 인더스트리얼 코포레이션 리미티드 | 래치 구조물을 갖는 전방 개방 통합 포드 |
JP2022106217A (ja) * | 2021-01-06 | 2022-07-19 | 天昇電気工業株式会社 | 可動板ロック機構、可動板の可動制御構造及び板体収納用ラック |
CN116646286A (zh) * | 2023-05-04 | 2023-08-25 | 北京鑫跃微半导体技术有限公司 | 晶圆盒闩锁机构及晶圆盒 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101350196B1 (ko) | 2013-06-24 | 2014-01-13 | (주)상아프론테크 | 웨이퍼 캐리어 |
-
2005
- 2005-11-18 JP JP2005334460A patent/JP4482656B2/ja active Active
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011016583A (ja) * | 2009-06-08 | 2011-01-27 | Gold Kogyo Kk | 精密基板収納容器およびその製造方法 |
JP2011061107A (ja) * | 2009-09-14 | 2011-03-24 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
US8342327B1 (en) | 2011-07-07 | 2013-01-01 | Samsung Display Co., Ltd. | Cassette for accommodating substrates |
KR101451477B1 (ko) * | 2011-12-13 | 2014-10-15 | 구뎅 프리시젼 인더스트리얼 코포레이션 리미티드 | 래치 구조물을 갖는 전방 개방 통합 포드 |
JP2022106217A (ja) * | 2021-01-06 | 2022-07-19 | 天昇電気工業株式会社 | 可動板ロック機構、可動板の可動制御構造及び板体収納用ラック |
JP7220239B2 (ja) | 2021-01-06 | 2023-02-09 | 天昇電気工業株式会社 | 可動板ロック機構および可動板の可動制御構造 |
CN116646286A (zh) * | 2023-05-04 | 2023-08-25 | 北京鑫跃微半导体技术有限公司 | 晶圆盒闩锁机构及晶圆盒 |
CN116646286B (zh) * | 2023-05-04 | 2024-01-30 | 北京鑫跃微半导体技术有限公司 | 晶圆盒闩锁机构及晶圆盒 |
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Publication number | Publication date |
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JP4482656B2 (ja) | 2010-06-16 |
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