JP2007142076A5 - - Google Patents

Download PDF

Info

Publication number
JP2007142076A5
JP2007142076A5 JP2005332567A JP2005332567A JP2007142076A5 JP 2007142076 A5 JP2007142076 A5 JP 2007142076A5 JP 2005332567 A JP2005332567 A JP 2005332567A JP 2005332567 A JP2005332567 A JP 2005332567A JP 2007142076 A5 JP2007142076 A5 JP 2007142076A5
Authority
JP
Japan
Prior art keywords
substrate
nozzle
processing
supply mechanism
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005332567A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007142076A (ja
JP4632934B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005332567A priority Critical patent/JP4632934B2/ja
Priority claimed from JP2005332567A external-priority patent/JP4632934B2/ja
Publication of JP2007142076A publication Critical patent/JP2007142076A/ja
Publication of JP2007142076A5 publication Critical patent/JP2007142076A5/ja
Application granted granted Critical
Publication of JP4632934B2 publication Critical patent/JP4632934B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005332567A 2005-11-17 2005-11-17 基板処理装置 Expired - Fee Related JP4632934B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005332567A JP4632934B2 (ja) 2005-11-17 2005-11-17 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005332567A JP4632934B2 (ja) 2005-11-17 2005-11-17 基板処理装置

Publications (3)

Publication Number Publication Date
JP2007142076A JP2007142076A (ja) 2007-06-07
JP2007142076A5 true JP2007142076A5 (cg-RX-API-DMAC7.html) 2008-10-23
JP4632934B2 JP4632934B2 (ja) 2011-02-16

Family

ID=38204603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005332567A Expired - Fee Related JP4632934B2 (ja) 2005-11-17 2005-11-17 基板処理装置

Country Status (1)

Country Link
JP (1) JP4632934B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4841451B2 (ja) 2007-01-31 2011-12-21 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP5480617B2 (ja) * 2009-12-25 2014-04-23 大日本スクリーン製造株式会社 基板処理装置
JP5706981B2 (ja) * 2014-02-13 2015-04-22 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002086039A (ja) * 2000-09-13 2002-03-26 Tokyo Electron Ltd 液処理装置
JP2003015529A (ja) * 2001-06-28 2003-01-17 Hitachi Ltd プラズマディスプレイパネル表示装置
JP4179593B2 (ja) * 2002-08-21 2008-11-12 大日本スクリーン製造株式会社 基板周縁処理装置および基板周縁処理方法
JP4112996B2 (ja) * 2003-01-28 2008-07-02 大日本スクリーン製造株式会社 基板処理装置
JP4398215B2 (ja) * 2003-10-10 2010-01-13 エス・イー・エス株式会社 ベベルエッチング処理法および処理装置
JP4191009B2 (ja) * 2003-11-05 2008-12-03 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP4409312B2 (ja) * 2004-02-18 2010-02-03 大日本スクリーン製造株式会社 基板周縁処理装置および基板周縁処理方法

Similar Documents

Publication Publication Date Title
USD551814S1 (en) High pressure cleaning apparatus
USD583395S1 (en) Cover for a heater stage of a plasma processing apparatus
USD582949S1 (en) Cover for a heater stage of a plasma processing apparatus
EP3248738B1 (fr) Dispositif de préhension à membrane et ventouse
USD557425S1 (en) Cover ring for a plasma processing apparatus
USD574866S1 (en) Apparatus for repairing punctured tires
JP2007142077A5 (cg-RX-API-DMAC7.html)
USD583394S1 (en) Cover for a heater stage of a plasma processing apparatus
JP5944724B2 (ja) チャックテーブル
JP2006198488A5 (cg-RX-API-DMAC7.html)
JP2007142076A5 (cg-RX-API-DMAC7.html)
KR101469055B1 (ko) 양각 금형 및 이를 포함하는 양각 금형 장치
JP5934514B2 (ja) 真空吸着ヘッドを有する物品供給装置
USD544895S1 (en) Apparatus for repairing punctured tires
JP2012064800A5 (cg-RX-API-DMAC7.html)
JP5695472B2 (ja) シート貼付装置及びその調整方法
JP2010267746A5 (cg-RX-API-DMAC7.html)
JP2006247212A5 (cg-RX-API-DMAC7.html)
JP2008042023A5 (cg-RX-API-DMAC7.html)
JP2007244973A5 (cg-RX-API-DMAC7.html)
JP2009206523A5 (cg-RX-API-DMAC7.html)
JP2012218753A (ja) シート貼付装置及びその調整方法
CN103249496A (zh) 具有风向导流器及快速启闭结构的送漆桶
JP2011134913A5 (cg-RX-API-DMAC7.html)
JP2011042006A (ja) 吸着装置及びこの吸着装置を用いた吸着方法