JP2007124500A5 - - Google Patents

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Publication number
JP2007124500A5
JP2007124500A5 JP2005316594A JP2005316594A JP2007124500A5 JP 2007124500 A5 JP2007124500 A5 JP 2007124500A5 JP 2005316594 A JP2005316594 A JP 2005316594A JP 2005316594 A JP2005316594 A JP 2005316594A JP 2007124500 A5 JP2007124500 A5 JP 2007124500A5
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JP
Japan
Prior art keywords
acoustic sensor
circuit board
manufacturing
electroacoustic transducer
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005316594A
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English (en)
Japanese (ja)
Other versions
JP2007124500A (ja
JP4642634B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2005316594A priority Critical patent/JP4642634B2/ja
Priority claimed from JP2005316594A external-priority patent/JP4642634B2/ja
Publication of JP2007124500A publication Critical patent/JP2007124500A/ja
Publication of JP2007124500A5 publication Critical patent/JP2007124500A5/ja
Application granted granted Critical
Publication of JP4642634B2 publication Critical patent/JP4642634B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005316594A 2005-10-31 2005-10-31 音響センサの製造方法 Expired - Fee Related JP4642634B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005316594A JP4642634B2 (ja) 2005-10-31 2005-10-31 音響センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005316594A JP4642634B2 (ja) 2005-10-31 2005-10-31 音響センサの製造方法

Publications (3)

Publication Number Publication Date
JP2007124500A JP2007124500A (ja) 2007-05-17
JP2007124500A5 true JP2007124500A5 (enExample) 2010-01-14
JP4642634B2 JP4642634B2 (ja) 2011-03-02

Family

ID=38147807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005316594A Expired - Fee Related JP4642634B2 (ja) 2005-10-31 2005-10-31 音響センサの製造方法

Country Status (1)

Country Link
JP (1) JP4642634B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101008399B1 (ko) * 2007-09-03 2011-01-14 주식회사 비에스이 내벽을 금속성 혹은 전도성 물질로 감싼 세라믹 패키지를이용한 콘덴서 마이크로폰
CN101237719B (zh) * 2007-12-28 2012-05-23 深圳市豪恩电声科技有限公司 一种硅电容式麦克风及其制作方法
WO2017170457A1 (ja) * 2016-03-28 2017-10-05 国立大学法人東北大学 圧力センサ
CN111422825B (zh) * 2020-06-11 2020-09-22 潍坊歌尔微电子有限公司 传感器的制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4129042A (en) * 1977-11-18 1978-12-12 Signetics Corporation Semiconductor transducer packaged assembly
JPH05259478A (ja) * 1992-03-12 1993-10-08 Fuji Electric Co Ltd 半導体圧力センサの製造方法
JP3374620B2 (ja) * 1995-10-25 2003-02-10 松下電工株式会社 半導体圧力センサ
JPH11287723A (ja) * 1998-04-01 1999-10-19 Yazaki Corp 半導体圧力センサ
JP2001054196A (ja) * 1999-08-11 2001-02-23 Kyocera Corp エレクトレットコンデンサマイクロホン
US7166910B2 (en) * 2000-11-28 2007-01-23 Knowles Electronics Llc Miniature silicon condenser microphone
JP2002359445A (ja) * 2001-03-22 2002-12-13 Matsushita Electric Ind Co Ltd レーザー加工用の誘電体基板およびその加工方法ならび半導体パッケージおよびその製作方法
US6781231B2 (en) * 2002-09-10 2004-08-24 Knowles Electronics Llc Microelectromechanical system package with environmental and interference shield
DE10303263B4 (de) * 2003-01-28 2012-01-05 Infineon Technologies Ag Mikrophonanordnung
JP2004254138A (ja) * 2003-02-20 2004-09-09 Sanyo Electric Co Ltd コンデンサマイクロホン
JP2005150652A (ja) * 2003-11-20 2005-06-09 Aoi Electronics Co Ltd 回路基板
JP4419563B2 (ja) * 2003-12-25 2010-02-24 パナソニック株式会社 エレクトレットコンデンサー
JP2005262353A (ja) * 2004-03-17 2005-09-29 Sony Corp 電子部品および電子部品の製造方法
SG131039A1 (en) * 2005-09-14 2007-04-26 Bse Co Ltd Condenser microphone and packaging method for the same

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