JP2007110050A - バンプ形成方法 - Google Patents
バンプ形成方法 Download PDFInfo
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- JP2007110050A JP2007110050A JP2005302144A JP2005302144A JP2007110050A JP 2007110050 A JP2007110050 A JP 2007110050A JP 2005302144 A JP2005302144 A JP 2005302144A JP 2005302144 A JP2005302144 A JP 2005302144A JP 2007110050 A JP2007110050 A JP 2007110050A
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- conductive resin
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- 238000000034 method Methods 0.000 title claims abstract description 57
- 229920005989 resin Polymers 0.000 claims abstract description 116
- 239000011347 resin Substances 0.000 claims abstract description 116
- 239000000758 substrate Substances 0.000 claims abstract description 60
- 239000011231 conductive filler Substances 0.000 claims description 7
- 238000007650 screen-printing Methods 0.000 claims description 7
- 229920001187 thermosetting polymer Polymers 0.000 claims description 7
- 229920005992 thermoplastic resin Polymers 0.000 claims description 4
- 238000007747 plating Methods 0.000 abstract description 8
- 239000000126 substance Substances 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 4
- 238000004806 packaging method and process Methods 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 73
- 239000004065 semiconductor Substances 0.000 description 17
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- 229910052737 gold Inorganic materials 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 230000001678 irradiating effect Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000005012 migration Effects 0.000 description 5
- 238000013508 migration Methods 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 239000010949 copper Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 235000010724 Wisteria floribunda Nutrition 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000007646 gravure printing Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229920003026 Acene Polymers 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
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- 238000010030 laminating Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
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- 238000007761 roller coating Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laser Beam Processing (AREA)
- Wire Bonding (AREA)
Abstract
【解決手段】 基板及び基板上の電極表面を覆う導電性樹脂層を形成した後、基板上の電極表面上の導電性樹脂層を残して、基板上の導電性樹脂層をレーザで除去し、導電性樹脂のバンプを形成するバンプ形成方法を提供する。
【選択図】 図1
Description
Oh, K W; Alm, C H"REGULAR PAPERS - Interconnects - A New Flip-Chip Bonding Technique Using Micromachined Conductive Polymer Bumps" IEEE Transactions on Advanced Packaging.P224-229, 1998 Richard H.Estes, "Flip-Chip Packaging With Polymer Bumps", Semiconductor International, P103-108, February 1997
また、本発明に係るバンプ形成方法として、(b)工程の基板上の導電性樹脂層をレーザで除去する工程が、レーザビームを走査するもの、または、レーザビームを走査偏向して描画するものであることが好ましい。
さらに、導電性樹脂層が、導電性フィラーを含む熱可塑性樹脂で形成される層または熱硬化性樹脂で形成される層であることが好ましい。
なお、導電性樹脂層201は、スクリーン印刷やグラビア印刷あるいはディスペンサーで形成することができる。また、インクジェットも利用可能である。
102 電極
103 導電性樹脂層
104 光学系
105 レーザ
106 バンプ
301 マスク
302 レーザ
Claims (8)
- 基板上の電極表面にバンプを形成する方法であって、
(a)基板及び基板上の電極表面を覆う導電性樹脂層を形成する工程と、
(b)基板上の電極表面上の導電性樹脂層を残して、基板上の導電性樹脂層をレーザで除去し、導電性樹脂のバンプを形成する工程と、
を含むことを特徴とするバンプ形成方法。 - (a)工程がスクリーン印刷により導電性樹脂層を形成するものである、請求項1記載のバンプ形成方法。
- (b)工程の基板上の導電性樹脂層をレーザで除去する工程が、導電性樹脂層の上に、開口部分を有するレーザ遮蔽マスクを介してレーザを照射するものである、請求項1又は2記載のバンプ形成方法。
- レーザ遮蔽マスクが導電性樹脂層の上に載置される、請求項3記載のバンプ形成方法。
- (b)工程の基板上の導電性樹脂層をレーザで除去する工程が、レーザビームを走査するものである、請求項1又は2記載のバンプ形成方法。
- (b)工程の基板上の導電性樹脂層をレーザで除去する工程が、レーザビームを走査偏向して描画するものである、請求項1又は2記載のバンプ形成方法。
- 導電性樹脂層が、導電性フィラーを含む熱可塑性樹脂で形成された層である、請求項1から6のいずれか1項記載のバンプ形成方法。
- 導電性樹脂層が、導電性フィラーを含む熱硬化性樹脂で形成された層である、請求項1から6のいずれか1項記載のバンプ形成方法。
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JP2005302144A JP4684843B2 (ja) | 2005-10-17 | 2005-10-17 | バンプ形成方法 |
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---|---|---|---|
JP2005302144A JP4684843B2 (ja) | 2005-10-17 | 2005-10-17 | バンプ形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007110050A true JP2007110050A (ja) | 2007-04-26 |
JP4684843B2 JP4684843B2 (ja) | 2011-05-18 |
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JP2005302144A Active JP4684843B2 (ja) | 2005-10-17 | 2005-10-17 | バンプ形成方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014110113A (ja) * | 2012-11-30 | 2014-06-12 | Toshio Okuno | 電子デバイス検査用コンタクトシートのバンプ付リード形成方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6360540A (ja) * | 1986-09-01 | 1988-03-16 | Seiko Epson Corp | 接続端子の製造方法 |
JPH031540A (ja) * | 1989-05-29 | 1991-01-08 | Hitachi Cable Ltd | 半導体素子及びその製造方法 |
JPH106065A (ja) * | 1996-06-25 | 1998-01-13 | Canon Inc | レーザー加工装置、該レーザー加工装置により溝加工されたインクジェット記録ヘッド |
JP2001291721A (ja) * | 2000-04-06 | 2001-10-19 | Nec Corp | 配線構造、導電パターンの形成方法、半導体装置および半導体装置の製造方法 |
JP2003133690A (ja) * | 2001-10-26 | 2003-05-09 | Matsushita Electric Works Ltd | 超短パルスレーザを用いた回路形成方法 |
-
2005
- 2005-10-17 JP JP2005302144A patent/JP4684843B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6360540A (ja) * | 1986-09-01 | 1988-03-16 | Seiko Epson Corp | 接続端子の製造方法 |
JPH031540A (ja) * | 1989-05-29 | 1991-01-08 | Hitachi Cable Ltd | 半導体素子及びその製造方法 |
JPH106065A (ja) * | 1996-06-25 | 1998-01-13 | Canon Inc | レーザー加工装置、該レーザー加工装置により溝加工されたインクジェット記録ヘッド |
JP2001291721A (ja) * | 2000-04-06 | 2001-10-19 | Nec Corp | 配線構造、導電パターンの形成方法、半導体装置および半導体装置の製造方法 |
JP2003133690A (ja) * | 2001-10-26 | 2003-05-09 | Matsushita Electric Works Ltd | 超短パルスレーザを用いた回路形成方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014110113A (ja) * | 2012-11-30 | 2014-06-12 | Toshio Okuno | 電子デバイス検査用コンタクトシートのバンプ付リード形成方法 |
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