JP2007108194A5 - - Google Patents

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Publication number
JP2007108194A5
JP2007108194A5 JP2005295848A JP2005295848A JP2007108194A5 JP 2007108194 A5 JP2007108194 A5 JP 2007108194A5 JP 2005295848 A JP2005295848 A JP 2005295848A JP 2005295848 A JP2005295848 A JP 2005295848A JP 2007108194 A5 JP2007108194 A5 JP 2007108194A5
Authority
JP
Japan
Prior art keywords
substrate
multilayer
shape
manufacturing
multilayer film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005295848A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007108194A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005295848A priority Critical patent/JP2007108194A/ja
Priority claimed from JP2005295848A external-priority patent/JP2007108194A/ja
Priority to EP20060122024 priority patent/EP1775604B1/en
Priority to US11/548,107 priority patent/US7543948B2/en
Publication of JP2007108194A publication Critical patent/JP2007108194A/ja
Publication of JP2007108194A5 publication Critical patent/JP2007108194A5/ja
Pending legal-status Critical Current

Links

JP2005295848A 2005-10-11 2005-10-11 多層膜ミラーの製造方法、光学系の製造方法、露光装置、及びデバイス製造方法 Pending JP2007108194A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005295848A JP2007108194A (ja) 2005-10-11 2005-10-11 多層膜ミラーの製造方法、光学系の製造方法、露光装置、及びデバイス製造方法
EP20060122024 EP1775604B1 (en) 2005-10-11 2006-10-10 Multilayer mirror manufacturing method, optical system manufacturing method, exposure apparatus, and device manufacturing method
US11/548,107 US7543948B2 (en) 2005-10-11 2006-10-10 Multilayer mirror manufacturing method, optical system manufacturing method, exposure apparatus, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005295848A JP2007108194A (ja) 2005-10-11 2005-10-11 多層膜ミラーの製造方法、光学系の製造方法、露光装置、及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2007108194A JP2007108194A (ja) 2007-04-26
JP2007108194A5 true JP2007108194A5 (enExample) 2008-11-27

Family

ID=37600760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005295848A Pending JP2007108194A (ja) 2005-10-11 2005-10-11 多層膜ミラーの製造方法、光学系の製造方法、露光装置、及びデバイス製造方法

Country Status (3)

Country Link
US (1) US7543948B2 (enExample)
EP (1) EP1775604B1 (enExample)
JP (1) JP2007108194A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008109060A (ja) * 2005-11-10 2008-05-08 Asahi Glass Co Ltd Ｅｕｖリソグラフィ用反射型マスクブランクの多層反射膜を成膜する方法、ならびにｅｕｖリソグラフィ用反射型マスクブランクの製造方法
US20100246036A1 (en) * 2007-07-27 2010-09-30 Lagana Paolo Preliminary Controlled Pre-Deformation Treatment for the Production of Mirrors
JP2010152096A (ja) * 2008-12-25 2010-07-08 Canon Inc ミラー基板、ミラー、露光装置、デバイス製造方法、およびミラーの製造方法
DE102014201622A1 (de) * 2014-01-30 2015-08-20 Carl Zeiss Smt Gmbh Verfahren zum Herstellen eines Spiegelelements
DE102015225510A1 (de) * 2015-12-16 2017-01-12 Carl Zeiss Smt Gmbh Spiegelelement, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage
US10468149B2 (en) * 2017-02-03 2019-11-05 Globalfoundries Inc. Extreme ultraviolet mirrors and masks with improved reflectivity
US11605478B2 (en) * 2019-11-22 2023-03-14 Zygo Corporation Method of reducing roughness and/or defects on an optical surface and mirror formed by same
CN112577475A (zh) * 2021-01-14 2021-03-30 天津希格玛微电子技术有限公司 一种能够有效降低功耗的视频测距方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4066344A (en) * 1976-08-30 1978-01-03 Dipak Chandra Talapatra Light-weight arch type structures for large reflective mirrors
JPH06186418A (ja) * 1992-06-30 1994-07-08 Victor Co Of Japan Ltd ダイクロイックミラーの製造方法
JPH1138192A (ja) 1997-07-17 1999-02-12 Nikon Corp 多層膜反射鏡
US6011646A (en) * 1998-02-20 2000-01-04 The Regents Of The Unviersity Of California Method to adjust multilayer film stress induced deformation of optics
JP2001027700A (ja) 1999-07-14 2001-01-30 Nikon Corp 多層膜反射鏡、多層膜反射鏡の製造方法、多層膜反射鏡の応力の制御方法および露光装置
US6319635B1 (en) * 1999-12-06 2001-11-20 The Regents Of The University Of California Mitigation of substrate defects in reticles using multilayer buffer layers
JP4320970B2 (ja) * 2001-04-11 2009-08-26 株式会社ニコン 多層膜反射鏡の製造方法
JP2004273926A (ja) * 2003-03-11 2004-09-30 Canon Inc 露光装置
WO2004109778A1 (ja) * 2003-06-02 2004-12-16 Nikon Corporation 多層膜反射鏡及びｘ線露光装置
JP4095566B2 (ja) * 2003-09-05 2008-06-04 キヤノン株式会社 光学素子を評価する方法
JP2005308629A (ja) * 2004-04-23 2005-11-04 Canon Inc ミラーユニット及びそれの製造方法

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