JP2007103593A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2007103593A JP2007103593A JP2005290206A JP2005290206A JP2007103593A JP 2007103593 A JP2007103593 A JP 2007103593A JP 2005290206 A JP2005290206 A JP 2005290206A JP 2005290206 A JP2005290206 A JP 2005290206A JP 2007103593 A JP2007103593 A JP 2007103593A
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- H01L24/02—Bonding areas ; Manufacturing methods related thereto
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- H01L2224/0212—Auxiliary members for bonding areas, e.g. spacers
- H01L2224/02122—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body
- H01L2224/02163—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body on the bonding area
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
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- H01L2924/01022—Titanium [Ti]
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- H01L2924/049—Nitrides composed of metals from groups of the periodic table
- H01L2924/0494—4th Group
- H01L2924/04941—TiN
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- H01L2924/05042—Si3N4
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
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Abstract
【解決手段】 アルミ膜とアルミ膜上に堆積されたTi,TiN等の反射防止膜を含む導電膜の上に堆積した保護膜と前記反射防止膜を除去して前記アルミ膜を露出させたボンディングパッド等の保護膜開口を有し、前記保護膜の除去領域が、前記反射防止膜の除去領域の内側となるように、前記反射防止膜を除去するエッチング工程が、前記保護膜の堆積前に行われる。
【選択図】 図1
Description
2 バリアメタル膜
3 アルミ膜
4 反射防止膜
5 導電膜
6 保護膜
7 保護膜の開口
8 ボンディングパッド
9 ボンディングパッドに生じた腐食穴
10 水酸化アルミ
11 絶縁膜
12 側壁保護膜
13 反射防止膜の開口
Claims (3)
- 第1の金属膜と第1の金属膜上に堆積された第1の金属膜とは異なる第2の金属膜とを含む導電膜と、
前記導電膜の上部に堆積した絶縁膜からなる保護膜と、
前記保護膜及び前記第2の金属膜を除去して前記第1の金属膜を露出させた開口を有し、前記保護膜の除去領域が、前記第2の金属膜における除去領域の内側となることを特徴とする半導体装置。 - 第1の金属膜と第1の金属膜上に堆積された第1の金属膜とは異なる第2の金属膜とを含む導電膜とを形成する工程と、
前記第2の金属膜を除去して前記第1の金属膜を露出させるための第1の開口を形成する工程と、
前記開口を有する前記導電膜に絶縁膜からなる保護膜を堆積する工程と、
前記第1の開口の上に堆積された前記保護膜を除去して前記第1の金属膜を露出させた第2の開口を形成する工程とからなり、前記第2の開口は前記第1の開口の内側に位置することを特徴とする半導体装置の製造方法。 - 前記第1の金属膜はアルミニウムを主とする低抵抗の金属膜であり、前記第2の金属膜はチタンあるいは窒化チタン等の比較的高抵抗の反射防止膜であることを特徴とする請求項1に記載の半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005290206A JP2007103593A (ja) | 2005-10-03 | 2005-10-03 | 半導体装置及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005290206A JP2007103593A (ja) | 2005-10-03 | 2005-10-03 | 半導体装置及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
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JP2007103593A true JP2007103593A (ja) | 2007-04-19 |
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JP2005290206A Withdrawn JP2007103593A (ja) | 2005-10-03 | 2005-10-03 | 半導体装置及びその製造方法 |
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JP (1) | JP2007103593A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009117464A (ja) * | 2007-11-02 | 2009-05-28 | Kyocera Corp | 半導体素子及び該半導体素子の実装構造体 |
CN101866866A (zh) * | 2009-04-16 | 2010-10-20 | 瑞萨电子株式会社 | 半导体集成电路器件及其制造方法 |
US8390134B2 (en) | 2009-05-20 | 2013-03-05 | Renesas Electronics Corporation | Semiconductor device having surface protective films on bond pad |
CN103646883A (zh) * | 2013-11-28 | 2014-03-19 | 上海华力微电子有限公司 | 一种铝衬垫制备方法 |
CN109166838A (zh) * | 2018-08-29 | 2019-01-08 | 上海华虹宏力半导体制造有限公司 | 顶层金属键合垫的引出结构及其制造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01312670A (ja) * | 1988-06-13 | 1989-12-18 | Mitsubishi Electric Corp | 図面処理装置 |
JPH02205323A (ja) * | 1989-02-03 | 1990-08-15 | Seiko Epson Corp | 半導体装置の製造方法 |
JP2001007148A (ja) * | 1999-06-23 | 2001-01-12 | Seiko Epson Corp | 半導体装置及びその製造方法 |
JP2006303452A (ja) * | 2005-03-25 | 2006-11-02 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
-
2005
- 2005-10-03 JP JP2005290206A patent/JP2007103593A/ja not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01312670A (ja) * | 1988-06-13 | 1989-12-18 | Mitsubishi Electric Corp | 図面処理装置 |
JPH02205323A (ja) * | 1989-02-03 | 1990-08-15 | Seiko Epson Corp | 半導体装置の製造方法 |
JP2001007148A (ja) * | 1999-06-23 | 2001-01-12 | Seiko Epson Corp | 半導体装置及びその製造方法 |
JP2006303452A (ja) * | 2005-03-25 | 2006-11-02 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009117464A (ja) * | 2007-11-02 | 2009-05-28 | Kyocera Corp | 半導体素子及び該半導体素子の実装構造体 |
CN101866866A (zh) * | 2009-04-16 | 2010-10-20 | 瑞萨电子株式会社 | 半导体集成电路器件及其制造方法 |
JP2010251537A (ja) * | 2009-04-16 | 2010-11-04 | Renesas Electronics Corp | 半導体集積回路装置および半導体集積回路装置の製造方法 |
US8373270B2 (en) | 2009-04-16 | 2013-02-12 | Renesas Electronics Corporation | Semiconductor integrated circuit device and method of manufacturing same |
US20130065330A1 (en) * | 2009-04-16 | 2013-03-14 | Renesas Electronics Corporation | Semiconductor integrated circuit device and method of manufacturing same |
US9048200B2 (en) | 2009-04-16 | 2015-06-02 | Renesas Electronics Corporation | Semiconductor integrated circuit device and method of manufacturing same |
CN104835795A (zh) * | 2009-04-16 | 2015-08-12 | 瑞萨电子株式会社 | 半导体器件 |
US9536821B2 (en) | 2009-04-16 | 2017-01-03 | Renesas Electronics Corporation | Semiconductor integrated circuit device having protective split at peripheral area of bonding pad and method of manufacturing same |
US8390134B2 (en) | 2009-05-20 | 2013-03-05 | Renesas Electronics Corporation | Semiconductor device having surface protective films on bond pad |
US8716122B2 (en) | 2009-05-20 | 2014-05-06 | Renesas Electronics Corporation | Method of manufacturing semiconductor device having surface protective films on bond pad |
CN103646883A (zh) * | 2013-11-28 | 2014-03-19 | 上海华力微电子有限公司 | 一种铝衬垫制备方法 |
CN109166838A (zh) * | 2018-08-29 | 2019-01-08 | 上海华虹宏力半导体制造有限公司 | 顶层金属键合垫的引出结构及其制造方法 |
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