JP2007098490A - Combined electric and magnetic machining method and apparatus and tool used in the method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a new machining method, micro-machining the inner surface difficult to machine in the prior art, and an apparatus and a tool used in the method. <P>SOLUTION: A machining tool 1 where a current I flows is disposed in a magnetic field, electromagnetic force F is applied to the machining tool 1 according to the Fleming's rule, and the electromagnetic force is varied to apply motion to the machining tool 1. Thus, the problem is solved by the combined electric and magnetic machining method of machining a workpiece 1 utilizing the above motion. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an electric / magnetic combined machining method and an apparatus and tool used therefor, and more specifically, an electromagnetic force in accordance with Fleming's left-hand rule generated by a magnetic field acting on a conducting wire in an energized state is applied to the machining force of the tool. The present invention relates to a novel electric / magnetic combined machining method, and an apparatus and tool used therefor.

  Conventionally, a “magnetic polishing method”, which is a precision processing technique incorporating the action of a magnetic field, is known. This processing method realizes precise surface processing by applying a processing force and a kinetic force to magnetic abrasive grains through the lines of magnetic force. For example, the polishing of the inner surface of the circular tube by this magnetic polishing method is performed by rotating the magnetic abrasive grains while attracting the inner surface of the circular tube with a permanent magnet, and the inner surface of the circular tube can be finished precisely. Such a magnetic polishing method has been put into practical use and applied in the semiconductor manufacturing industry.

  However, for example, when the diameter of the circular tube becomes 3 mm or less, the magnetic field acting on the magnetic abrasive grains is reduced because the magnetic field in the processing region in the circular tube is not uniform and concentrated, and the polishing pressure is significantly reduced and the rotating permanent magnet On the other hand, the magnetic abrasive grains did not rotate and could not be polished.

  On the other hand, for example, the inner surface of a capillary (capillary tube) having an inner diameter of 0.05 to 1 mm and a length of about 100 to 200 mm, or the inner surface of a comb-like slit having a slit width of 0.1 to 1 mm and a length of about 10 to 30 mm is mirror-finished. There are many social needs to finish. In particular, with the recent miniaturization and complexity of precision parts, the need for this type of processing technology is increasing. However, as described above, it has been impossible to realize such fine processing with the conventional polishing technique. Heretofore, there has been no known study of applying the Fleming law to the polishing technique.

  The present invention has been made in order to solve the above-mentioned problems, and its object is to provide a novel processing method that enables fine processing of a narrow inner surface and the like, which are difficult to be processed by conventional techniques, and an apparatus and a tool used therefor. Is to provide.

  In the process of earnestly researching and studying to solve the above problems, the present inventors have applied Fleming's left-hand rule in which electromagnetic force is generated by a combination of a magnetic field and current as a principle that can be applied as a machining force. I got the idea that it could be used. For example, if a conducting wire is inserted into a narrow and narrow part to be processed and a strong magnetic field is applied from the side, a force is generated in the conducting wire in a direction in which the direction of the magnetic field and the direction of the current are orthogonal to each other. Has been found to be usable as a processing force, leading to the present invention.

  That is, in the electric / magnetic combined machining method of the present invention, a machining tool in which an electric current is passed is placed in a magnetic field, an electromagnetic force is applied to the machining tool according to Fleming's law, and the electromagnetic force is varied to the machining tool. It is characterized by giving a motion and machining the workpiece using the motion.

  The electrical / magnetic combined machining method of the present invention is characterized in that the variation of the electromagnetic force is (1) performed by a change in the current, or (2) performed by a change in a magnetic field. is there.

  In the electric / magnetic combined machining method of the present invention, it is preferable that (a) an abrasion resistant layer is formed on at least the surface of the machining tool, and (b) the surface of the machining tool, Abrasive grains are preferably fixed, and (c) the processing tool is preferably used in the presence of a loose abrasive.

  Further, in the electric / magnetic combined machining method of the present invention, (i) the machining tool is preferably selected at least one of shape, size and hardness according to the machining location of the workpiece, (ii) The machining tool is capable of machining the workpiece by suction / repulsion motion, rotational motion, vibration motion, or wave motion with respect to the workpiece, and (iii) a narrow portion or gap of the workpiece. It can be used for precision machining of the part, inner surface part or concealing part.

  In the combined electric / magnetic machining method of the present invention, (a) a relatively soft tool can be used as the machining tool, and the free-form surface of the workpiece or the surface machining of a soft workpiece can be performed. (B) The workpiece is a mold, and it is possible to perform precision machining of the mold surface using a plate coil type machining tool, and (c) a wave motion is given to the machining tool. It is possible to carry out processing by promoting the flow characteristics of the free abrasive.

  Furthermore, in the electric / magnetic combined machining method of the present invention, the waveform of the current that gives electromagnetic force to the machining tool in accordance with Fleming's law is an alternating current or pulse waveform, and the fluctuation of the frequency that can resonate with the natural frequency of the conductive tool. It is preferable to perform machining while applying an electromagnetic force to the conductive tool and causing a resonance phenomenon in the conductive tool by the applied variable electromagnetic force to cause a vibration having a large amplitude.

  An electric / magnetic combined machining apparatus of the present invention for solving the above-mentioned problems is an electric / magnetic combined machining apparatus used in the above-described electric / magnetic combined machining method of the present invention, And a power source for supplying a current to the machining tool, and a magnetic field forming means for forming a magnetic field capable of applying an electromagnetic force in accordance with Fleming's law to the machining tool when the machining tool is energized.

  In addition, a processing tool of the present invention for solving the above-mentioned problems is a processing tool used in the above-described electric / magnetic composite processing method of the present invention, and is characterized in that it can be energized.

  According to the electric / magnetic combined machining method and the apparatus used therefor of the present invention, an electromagnetic force is applied to the machining tool in accordance with Fleming's law by placing the energized machining tool in a magnetic field. The electromagnetic force can generate various machining forces on the machining tool by the interaction of the positive / negative of the current and its waveform and magnetic field. Since the machining tool can be miniaturized and thinned within the allowable range of current density, it is possible to realize precision machining technology such as grooves and inner surfaces of fine holes, which could not be realized by conventional machining methods.

  Hereinafter, the electric / magnetic combined machining method of the present invention and the apparatus and tool used therefor will be described in detail based on specific embodiments.

  In the electric / magnetic combined machining method of the present invention, a machining tool through which an electric current is passed is placed in a magnetic field, an electromagnetic force is applied to the machining tool according to Fleming's law, and the machining force is moved by changing the electromagnetic force. It is characterized by processing a workpiece using such movement. In this way, the application of the framing law of electromagnetics to the processing technique has not been performed at all so far, and is a very new technique proposed for the first time by the present invention.

  When a machining tool with an electric current is placed in a magnetic field, the machining tool receives an electromagnetic force according to Fleming's law. This electromagnetic force varies depending on the interaction between the positive / negative of the current and its waveform and the magnetic field, and various movements can be given to the machining tool by the variation of the electromagnetic force. The movement of the machining tool becomes a machining force on the workpiece, and the machining behavior is not particularly limited, and examples thereof include suction / repulsion motion, rotational motion, vibration motion, or wave motion on the workpiece. It is done. Furthermore, depending on the case, as will be described later, there is also a motion due to the vibration resonance phenomenon of the machining tool.

  The fluctuation of the electromagnetic force can be performed by changing the current supplied to the machining tool, or can be performed by changing the magnetic field. It is also possible to combine both of these.

  Various currents such as direct current, alternating current, pulse current, high frequency current, ultrasonic current, etc., and temporal fluctuation speed can be applied as current to be applied to the machining tool. The change of the electromagnetic force by the current control can be easily performed if there is a power source, and therefore has an advantage over the case of changing the magnetic field.

  On the other hand, a static magnetic field, a variable magnetic field, a rotating magnetic field, or the like can be used as the magnetic field. However, when an electromagnetic coil is used, there is a limit to the time responsiveness to fluctuations in the energization current due to the coil inductance. In addition, even when a permanent magnet is mechanically rotated to generate a variable magnetic field, there is a mechanical restriction on increasing the rotational speed.

  Therefore, in the present invention, it is preferable to vary the electromagnetic force under the condition of no change in the magnetic field or low-speed magnetic field change while adopting a method of controlling the current on the processing tool side.

  Next, various embodiments of the electric / magnetic composite machining method according to the present invention will be specifically described with reference to the drawings. First, the processing principle when a static magnetic field is used as the magnetic field will be described.

  FIG. 1 is an explanatory diagram of a machining principle when a machining tool in which a direct current is passed in a static magnetic field. As shown in FIG. 1 (A), a lead wire 1 having a length L [m] placed in a static magnetic field in the vertical direction in the figure consisting of a magnetic flux density B [T] formed by permanent magnets 3 and 3; As shown in the figure, when the current I [A] flows toward the right side that is the X direction, the direction of the electromagnetic force that follows the Fleming law acting on the conducting wire 1 is the Y direction, and the magnitude is F [N]. . Here, F is given by the following equation.

  In the above equation, θ is the angle between the magnetic field and the conducting wire. By changing the direction of the magnetic field, it is possible to change the direction of the electromagnetic force (machining force) acting on the machining tool through which a current is passed. Accordingly, as shown in FIG. 1B, if the arrangement of the permanent magnets 3 and 3 is changed and a magnetic field acting in the horizontal direction in the figure is applied, the machining force F is directed in the vertical direction, and is arranged immediately below the conductor 1. A machining force F acting perpendicularly to the surface of the workpiece 2 can be applied. Then, if current control is performed on the direct current flowing through the conducting wire 1 so as to vary on / off or strength with time, the workpiece 2 can be machined by the machining tool (conducting wire 1). Of course, the magnetic field direction at this time is not limited to that shown in FIG. 1B as long as the machining force F is applied to the workpiece 2 at an appropriate angle. Further, if the arrangement position of the workpiece 2 with respect to the machining tool (conductor 1) is changed, it is easy to perform predetermined machining even when the magnetic field direction as shown in FIG. 1A is formed. Can understand.

  FIG. 2 is an explanatory diagram of a machining principle when a machining tool in which an alternating current is passed in a static magnetic field. As described with reference to FIG. 1 (A), a lead wire having a length L [m] placed in a static magnetic field in the vertical direction in the figure, comprising a magnetic flux density B [T] formed by the permanent magnets 3 and 3. First, when an alternating current I [A] is flowing, the direction of the force acting on the conducting wire vibrates in the + Y direction and the -Y direction. The magnitude of the processing force F appears in the above formula (1). In this case as well, as described with reference to FIG. 1, if the direction of the magnetic field is changed, the direction of the oscillating motion of the machining tool through which an electric current is passed can be changed.

  FIG. 3 is an explanatory diagram of the machining principle when a variable magnetic field is used as the magnetic field and a machining tool in which a direct current is passed in the variable magnetic field. As shown in FIG. 3, a direct current I [A] flows through a conducting wire 1 having a length L [m] placed in a variable magnetic field formed by electromagnets 4 and 4 through which an alternating current flows. The direction of the force acting on the conducting wire 1 varies in the + Y direction and the −Y direction, and the conducting wire 1 can be vibrated. This vibration direction is also related to the direction in which the magnetic field is placed. Therefore, similarly to the case described with reference to FIG. 1, if the direction of the magnetic field is adjusted, it is possible to control the vibration direction of the machining tool through which a current is passed.

  FIG. 4 is an explanatory diagram of a machining principle when a rotating magnetic field is used as a magnetic field and a machining tool in which a direct current is passed in the rotating magnetic field is arranged. As shown in FIG. 4, when a direct current I [A] flows through a conductor 1 having a length L [m], a permanent magnet or an electromagnet (not shown) arranged in the radial direction of the conductor 1 is connected to the conductor 1. When rotating around the axis of 1 and applying a rotating magnetic field consisting of magnetic flux density B [T], the conducting wire 1 rotates by receiving rotating electromagnetic force according to the Fleming law. Therefore, for example, if a cylindrical workpiece 5 is arranged coaxially with the conductive wire 1, the inner surface of the workpiece 5 can be processed.

  FIG. 5 is an explanatory diagram of a machining principle when a machining tool in which a direct current flows is arranged in a variable magnetic field formed by a predetermined arrangement of magnets. As shown in FIG. 5, with respect to the conducting wire 1 through which the direct current I [A] flows, N magnets / S magnets 3 having polarities alternately reversed in the side surface direction are arranged in several places, and the N / S direction is When a variable magnetic field is applied by changing, the conductive wire 1 can be waved at places where the polarities are alternately reversed, as shown in the lower part of FIG.

  The above-described embodiments shown in FIGS. 1 to 5 show only a part of the processing principle of the electric / magnetic composite processing method according to the present invention, and the present invention is not limited to these illustrated embodiments. The present invention is not limited, and the machining behavior of the machining tool can be freely selected by applying an appropriate magnetic field in accordance with the current characteristics given to the machining tool.

  Furthermore, in the present invention, as described above, a workpiece is machined by applying an electromagnetic force according to the Fleming law to the machining tool, and the frequency of fluctuation of this electromagnetic force (framing force) is used as the machining tool to be used. It is desirable to set and fluctuate the same frequency as the natural frequency. In this way, when a fluctuating electromagnetic force having a frequency that can resonate with the natural frequency of the machining tool is applied to the machining tool, the machining tool generates a sufficient amplitude necessary for machining by causing a resonance phenomenon with the electromagnetic force. Energy can be used efficiently and effective microfabrication can be realized.

  The shape of the processing tool used in the present invention is not limited to the linear shape as shown in the above-described embodiment shown in FIGS. 1 to 5, but includes a plate shape, a wire bundle, a winding coil type, a plate coil, and the like. Various shapes can be used, and the shape, size, and hardness of the processing tool can be appropriately selected according to the processing location. Here, the thickness of the processing tool may be a plate-like width in the sense of increasing the current value, and on the other hand, it may be thin or thin within the allowable range of current density. Specifically, for example, it can be a fine wire having a diameter of 2 mm or less, more preferably about 0.02 to 1 mm, and it is possible to realize precision processing technology such as grooves and fine holes and precision deburring. Further, the material is not particularly limited as long as it has good conductivity, and an appropriate material can be selected according to the thickness of the processing tool as described above, and the material of the workpiece. And it can set to the arbitrary hardness according to the processing behavior of a processing tool. Although not particularly limited, examples of the material constituting the processing tool include attaching electrodeposited diamond around the conductive wire.

  In the present invention, as described above, the machining tool is moved by applying electromagnetic force in accordance with the Fleming law, and the workpiece is machined using the movement. In this machining, the machining tool is directly applied to the workpiece. It may be performed by contact, or the movement of the processing tool is transmitted to a processing medium such as an abrasive disposed around the processing tool, and the processing medium comes into contact with the workpiece. It may be performed. Of course, it may be performed by combining both of these.

In an embodiment in which the machining tool performs machining by directly contacting the workpiece, an abrasion-resistant layer is formed on at least the surface of the machining tool, or abrasive grains are fixed or anti-fixed. It is desirable that As the wear-resistant layer and the abrasive grains, those made of various conventionally known materials can be used. As an abrasive grain, for example, Al ₂ O ₃ , SiC, ZrO ₂ , B ₄ C, diamond, cubic boron nitride including A, WA, GC, SA, MA, C, MD, CBN in JIS display MgO, CeO ₂ , fumed silica, or the like can be exemplified. Further, examples of the wear resistant layer include, but are not limited to, a sprayed layer made of the same material as the above-described abrasive grains, or a sprayed layer of a hard metal such as tungsten or an alloy.

  Moreover, in the embodiment in which the processing medium is in contact with the workpiece to perform processing, the above-described known abrasive grains (abrasive material) or the like can be used as the processing medium. Although it is possible to use a powdery processing medium, it is preferable to use a slurry or a dispersion in a liquid because the movement of the processing tool is easily transmitted to the processing medium. Is desirable.

  As described above, the electric / magnetic combined machining method according to the present invention can move a machining tool by applying an electromagnetic force according to the Fleming law, and can machine the workpiece using the movement. And the movement direction of a processing tool can be fluctuate | varied to arbitrary directions by changing the magnetic field direction with respect to the electric current direction applied to a processing tool to a predetermined direction. Therefore, if it is a place where a magnetic field acts, it is possible to suitably perform precision machining of parts that are difficult to machine by conventional machining methods such as narrow parts, gap parts, inner surface parts or concealed parts of workpieces. There are advantages.

  Furthermore, as shown in the examples described later, if a relatively soft tool is used as the processing tool, it is possible to perform a free-form surface of a workpiece or surface processing of a soft workpiece. Moreover, as shown in the Example mentioned later, it is also possible to perform the precision process of the die surface as a workpiece using a plate coil type processing tool.

  As described above, the electric / magnetic composite processing method of the present invention can be expected to be applied in various fields as a new precision polishing technique for narrow portions of fine parts. For example, it is used for manufacturing processes in the next-generation semiconductor and medical fields. It is effective for polishing products such as super clean pipes that require precision polishing and products that require high-precision polishing of a minute space such as in a pipe. In addition, for example, application to texture processing of a hard disk substrate surface of a hard disk device can be mentioned. Further, for example, application as an alternative process of chemical mechanical polishing (CMP) used in a damascene process for forming a copper wiring on a semiconductor substrate can be expected. The damascene process is a process of removing unnecessary copper on the surface after forming a barrier layer and a copper plating layer in a wiring groove on an insulating film. Of course, the electric / magnetic composite machining method of the present invention is not limited to the applications in the fields exemplified above, and can be widely applied to various uses.

  Hereinafter, the present invention will be described more specifically with reference to examples. In addition, the Example shown below is only a part of the specific illustration of this invention shown in order to make the understanding of the content of this invention easy, and this invention is not limited to these at all.

(Example 1: Precision finishing of the inner surface of a fine tube)
As shown in FIG. 6, a conductive wire 1 serving as a processing tool is coaxially arranged inside a fine tube that is a workpiece 5. Furthermore, when the permanent magnets 3 and 3 arranged in the radial direction of the conducting wire 1 are rotated around the axis of the conducting wire 1 to form a rotating magnetic field and a direct current is passed through the conducting wire 1, the permanent magnet 3 is rotated to the machining tool (conducting wire 1). The machining behavior of the movement occurs. With such processing behavior, it is possible to achieve fine internal polishing of the fine tube. Actually, the experimental device as shown in Fig. 7 was assembled, the conductor was inserted into the rotating magnetic field using the motor stator, and the direct current 2A was passed through the conductor. As a result, the conductor vibrated vigorously at 50Hz. It was confirmed that the method of the invention can be realized.

(Example 2: Precision finishing of the inner surface of a fine tube)
As shown in FIG. 8, a conducting wire 1 serving as a processing tool is coaxially arranged inside a fine tube that is a workpiece 5. Furthermore, permanent magnets 3 and 3 are fixedly arranged in the radial direction of the conducting wire 1 to form a static magnetic field. When an alternating current is passed through the conducting wire 1, an electromagnetic force pulsating in a static magnetic field is received, and the conducting wire 1 has a vibrational machining behavior as shown in the lower part of FIG. With such processing behavior, it is possible to achieve fine internal polishing of the fine tube. This processing behavior is characterized in that it can promote the flow of slurry-like or liquid abrasive or magnetic fluid disposed around the conductor 1, that is, inside the micropipe, and facilitates precise machining of the inner surface of the micropipe. Have.

(Example 3: Precision finishing of surface-external polishing)
As for the surface finishing of a workpiece having a free-form surface or a soft workpiece 2, it is possible to uniformly contact a relatively wide area with good follow-up without locally contacting the surface of such a workpiece. Furthermore, as shown in FIG. 9, a flexible plate-like processing tool 6 having a predetermined area or more, for example, an area of 1 mm ² or more is used. By using such a plate-like processing tool and controlling the electromagnetic force (machining force), precise machining of the workpiece surface is realized. In addition, as an operation principle of the plate-like processing tool 6, any of those described above with reference to FIGS. 1 to 3 and the like can be used.

Further, as shown in FIG. 10, a flexible wire bundle 7 having a predetermined area or more, for example, an area of 1 mm ² or more may be used, and a machine having a free curved surface by controlling electromagnetic force (working force). Surface precision machining of a workpiece or soft workpiece 2 can be realized.

(Example 4: Internal polishing)
When polishing the inner surface of the workpiece 2 having a relatively large diameter as shown in FIG. 11, for example, a coil tool 8 as shown in FIGS. 11A and 11C is used as a processing tool. Then, a direct current is allowed to flow as shown in FIG. Then, the inner surface polishing process can be efficiently realized by forming a fluctuating magnetic field or a rotating magnetic field with the magnet 3 arranged outside the workpiece 2 and applying an electromagnetic force to the coil tool 8. Also, a direct current is passed through the wire bundle tool 7 as shown in FIG. Then, the inner surface polishing process can be efficiently realized by forming a variable magnetic field or a rotating magnetic field with the magnets 3 and 3 disposed inside and outside the workpiece 2 and applying an electromagnetic force to the wire bundle tool 7.

(Example 5: Mold polishing)
When polishing the mold surface of the mold as the workpiece 2, as shown in FIG. 12, a flexible plate coil 9 having various shapes corresponding to the mold surface of the mold is used as a processing tool, and a variable magnetic field is used. Put in. When a direct current is passed through the plate coil 9, a magnetic field is generated in the direction perpendicular to the coil surface. Since the magnetic field generated by the plate coil 9 is in a variable magnetic field, it repeatedly moves in a suction and repulsion manner. Since the plate coil 9 is vibrated by suction and repulsion of the plate coil 9, the plate coil can be repeatedly brought into contact with the mold that is the workpiece 2, and precise machining can be realized. According to this embodiment, a magnetic field is easily generated in a relatively narrow portion, and the coil can be made thin and small as much as possible. Therefore, the method of this embodiment is considered to be effective for polishing a fine mold.

(Example 6: Clearance processing)
The clearance machining of the workpiece 2 can be easily performed by using the plate coil 9 as a machining tool as in the fifth embodiment. That is, as shown in FIG. 13, the plate coil 9 is placed in the gap between the workpieces 2 and placed in a variable magnetic field. When a direct current is passed through the plate coil 9, a magnetic field is generated at the tip of the plate coil 9. The magnetic field of the plate coil 9 changes in the same period as the changing magnetic field by attraction and repulsion in the changing magnetic field. In this way, when the plate coil 9 is vibrated, the plate coil 9 is repeatedly brought into contact with both side surfaces of the workpiece 2 forming a gap, thereby realizing precision machining. According to this embodiment, a magnetic field can be easily applied to a small portion, and the plate coil 9 can be made as thin as possible. Therefore, it is considered that the method of this embodiment is effective for fine gap processing.

It is explanatory drawing of the processing principle in one Embodiment of the electric / magnetic composite processing method which concerns on this invention. It is explanatory drawing of the processing principle in another embodiment of the electric / magnetic composite processing method which concerns on this invention. It is explanatory drawing of the process principle in another embodiment of the electric / magnetic composite processing method which concerns on this invention. It is explanatory drawing of the process principle in another embodiment of the electric / magnetic composite processing method which concerns on this invention. It is explanatory drawing of the process principle in another embodiment of the electric / magnetic composite processing method which concerns on this invention. It is explanatory drawing of the apparatus structure used for the inner surface process of the microtube performed as one Example of the electrical / magnetic compound processing method which concerns on this invention. It is a figure which shows the experimental apparatus used in the Example. It is explanatory drawing of the apparatus structure used for the inner surface process of the microtube performed as another Example of the electrical / magnetic compound processing method which concerns on this invention. It is explanatory drawing of the apparatus structure used for the outer surface processing method in one Example of the electrical / magnetic compound processing method which concerns on this invention. It is explanatory drawing of another apparatus structure used for the outer surface processing method in the Example of the electrical / magnetic compound processing method which concerns on this invention. It is explanatory drawing of each apparatus structure used for the inner surface processing method in one Example of the electrical / magnetic compound processing method which concerns on this invention. It is explanatory drawing of the apparatus structure used for the metal mold | die surface processing method in one Example of the electrical / magnetic compound processing method which concerns on this invention. It is explanatory drawing of the apparatus structure used for the clearance gap processing method in one Example of the electrical / magnetic compound processing method which concerns on this invention.

Explanation of symbols

1 Lead wire (machining tool)
2 Workpiece 3 Magnet 4 Electromagnet 5 Workpiece (fine tube)
6 Plate processing tool (machining tool)
7 Conductor bundle (processing tool)
8 Coil tool (machining tool)
9 Plate coil (processing tool)

Claims (15)

  A machining tool through which an electric current is passed is placed in a magnetic field, an electromagnetic force is applied to the machining tool in accordance with Fleming's law, the electromagnetic force is varied to impart motion to the machining tool, and the motion is used to An electric / magnetic composite processing method characterized by performing processing.   The electric / magnetic combined machining method according to claim 1, wherein the fluctuation of the electromagnetic force is performed by the change of the current.   2. The combined electrical and magnetic processing method according to claim 1, wherein the electromagnetic force is changed by a magnetic field change.   The electric / magnetic combined machining method according to claim 1, wherein a wear-resistant layer is formed on at least a surface of the machining tool.   The electric / magnetic combined machining method according to claim 1, wherein abrasive grains are fixed to a surface of the machining tool.   The electric / magnetic composite machining method according to claim 1, wherein the machining tool is used in the presence of a loose abrasive.   The electric / magnetic component according to any one of claims 1 to 6, wherein at least one of a shape, a size, and a hardness is selected as the processing tool according to a processing portion of the workpiece. Compound processing method.   8. The electric machine according to claim 1, wherein the machining tool processes the workpiece by suction / repulsion motion, rotational motion, vibration motion, or wave motion with respect to the workpiece. Magnetic composite processing method.   9. The electric / magnetic combined machining method according to claim 1, wherein the machining method is used for precision machining of a narrow part, a gap part, an inner surface part or a concealing part of the workpiece.   The electric / magnetic composite according to any one of claims 1 to 8, wherein a relatively soft tool is used as the processing tool, and a free-form surface of the workpiece or a surface processing of a soft workpiece is performed. Processing method.   The electrical / magnetic composite according to any one of claims 1 to 8, wherein the workpiece is a mold, and precision processing of the mold surface is performed using a plate coil type processing tool. Processing method.   The electric / magnetic combined machining method according to any one of claims 6 to 8, wherein the machining tool is subjected to a wave motion to promote flow characteristics of the free abrasive material.   A waveform of a current that gives an electromagnetic force in accordance with Fleming's law to the machining tool is set to an alternating current or a pulse waveform, and a frequency fluctuation electromagnetic force that can resonate with the natural frequency of the conductive tool is applied to the conductive tool. 13. The electric / magnetic combined machining method according to claim 1, wherein machining is performed while causing a resonance phenomenon in the conductive tool by electromagnetic force and causing vibration with a large amplitude.   An electrical / magnetic composite machining apparatus used in the electrical / magnetic composite machining method according to any one of claims 1 to 13, wherein the machining tool can be energized, a power source for supplying current to the machining tool, An electric / magnetic combined machining apparatus, comprising: a magnetic field forming unit configured to form a magnetic field capable of applying an electromagnetic force in accordance with Fleming's law to the machining tool when the machining tool is energized.   A machining tool used in the electric / magnetic composite machining method according to claim 1, wherein the machining tool is formed to be energized.

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