JP2001062700A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To supply a sufficient quantity of slurry between a wire and a workpiece to permit efficient cutting by providing a vibration imparting means coming close to a wire row to impart vibration to the wire through a micro clearance. SOLUTION: Driving output from a driving output generating circuit 44 is supplied to magnetic field generators 21, 22. A wire 7 is drawn downward by the magnetic field from the magnetic field generators 21, 22, and the supply of driving output is stopped to return the wire 7 upward by its own elasticity, thereby imparting a specified cycle of vertical vibration to the wire 7. Vertical progressive waves are therefore generated to the wire 7, and more slurry is led in between the wire 7 and the cut part of a workpiece 11 by the progressive waves to carry out efficient cutting. Since the wire 7 and the magnetic field generators 21, 22 never come in contact with each other, the magnetic field generators 21, 22 are not cut or damaged by the wire 7.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting a brittle material such as a semiconductor material, a magnetic material, and a ceramic with a wire.

[0002]

2. Description of the Related Art In general, a wire saw has a plurality of processing rollers arranged at a predetermined interval, and a plurality of annular grooves formed at an outer periphery of the rollers at a predetermined pitch. One wire is wound in order. Then, with the rotation of the processing roller, while running the wire, a slurry containing loose abrasive grains is supplied on the wire, and in this state, the work is pressed against the wire and brought into contact with the wire to cut the work. It is configured.

Various proposals have been made for the wire saw configured as described above in order to improve the cutting ability. For example, in Japanese Patent Application Laid-Open No. 8-99262, an auxiliary roller having an uneven portion on the outer periphery is provided so as to be in contact with a wire in the vicinity of a work, and rotation of the roller directly applies vertical vibration to the wire. ing.

[0004]

However, in the above-mentioned wire saw, since the auxiliary roller is brought into direct contact with the wire, the auxiliary roller itself is easily cut or worn by the wire. For this reason, in such a state, since the processing accuracy is greatly reduced, frequent replacement of the auxiliary roller is necessary. Further, it is preferable to adjust the frequency and amplitude of the wire according to the material and shape of the work. However, in the configuration in which the auxiliary roller applies vibration, the auxiliary roller is a part of the device, and thus the auxiliary roller is used alone. It is difficult to make such adjustments.

[0005] The present invention has been made by paying attention to such problems existing in the prior art. An object of the present invention is to provide a wire saw having a vibration imparting mechanism that can appropriately improve a wire cutting function and has excellent durability.

[0006]

In order to achieve the above object, according to the first aspect of the present invention, there is provided a semiconductor device which is close to a wire row,
The gist of the invention is to provide a vibration applying means for applying vibration to the wire through an interval.

According to a second aspect of the present invention, in the wire saw according to the first aspect, the vibration applying means uses an electromagnet as a drive source and attracts the wire with excitation.

According to a third aspect of the present invention, in the wire saw according to the first aspect, the vibration applying means is an ultrasonic vibrator, and transmits vibration to the wire via air or a machining fluid. And

According to the fourth aspect of the invention, the first to third aspects are provided.
In the wire saw according to any one of the above, the gist is that the vibration applying means is provided on both sides in the wire advancing direction in the work area of the workpiece.

According to the invention described in claim 5, according to claim 1,
2. The wire saw according to any one of 2, 4, wherein the wire train is configured to reciprocate at a constant cycle, and the vibration applying means applies the vibration at least once every time the running direction of the wire is reversed. Make a summary.

[0011] According to the invention described in claim 6, according to claims 1 to 5,
In the wire saw according to any one of the above, the gist is that at least one of the frequency and the amplitude is changed in accordance with the cut portion of the work.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 and 2, a cutting mechanism 2 is mounted on a device base 1 via a bracket 3. The cutting mechanism 2 includes a plurality of processing rollers 4, 5, 6 extending in parallel at a predetermined interval,
On the outer periphery thereof, annular grooves 4a, 5a, 6a (the annular groove 6a of the processing roller 6 is not shown) are formed at a predetermined pitch.

Each of the annular grooves 4 of the processing rollers 4, 5, 6
A wire 7 made of one wire is continuously wound around a, 5a, and 6a. As the wire 7, a steel wire which is a magnetic material is used. The bracket 3 is provided with a wire traveling motor 8 capable of changing the rotating direction and the rotating speed. The motor 8 rotates the processing rollers 4, 5, and 6 via a transmission mechanism (not shown). Then, by the rotation of the processing rollers 4, 5, and 6, the wire 7 moves forward by a certain amount (for example, 10 m) and retreats by a certain amount (for example, 9 m).
m) is repeated, and the vehicle moves forward step by step.

A slurry supply mechanism 9 is provided on the bracket 3, and an aqueous or oily slurry containing free abrasive grains is provided on the wire 7 between the upper processing rollers 4 and 5 from the slurry supply mechanism 9. Supplied.

Above the cutting mechanism 2, a work supporting mechanism 1 is provided.
A work 11 made of a hard and brittle material is detachably set at a lower portion of the work 11. The work support mechanism 10 is moved up and down by a work lifting motor (not shown).

As shown in FIGS. 1 to 4, the cutting mechanism 2 is located on both front and rear sides of the wire 7 in the running direction of the wire 7 with the work 11 as a boundary.
A pair of magnetic field generators 21 and 22 are arranged at positions facing downward from the front. A predetermined minute interval is provided between the wire 7 and the magnetic field generators 21 and 22 so as to be sufficiently narrow and not contact. The magnetic field generators 21 and 22 are provided as means for applying vibration to the wire 7, and each of the magnetic field generators 21 and 22 has, for example, a configuration in which a plurality of electromagnets are linearly integrated.

FIG. 3 shows the configuration of the magnetic field generators 21 and 22. In FIG. 2, reference numeral 23 denotes a magnetic core having a high magnetic permeability. A coil 24 is wound around the magnetic core 23 to form one electromagnet, and the electromagnets having the same configuration are linearly connected and integrated by a connecting member 25 made of a magnetic material. As shown in FIG. 4, a drive output from a drive output generation circuit 44 connected to the control unit 41 is supplied to the coil of each electromagnet. Therefore, the magnetic field generators 21 and 22
Are supplied with a drive output, the magnetic field generator 2
A magnetic field is generated in the wires 11 and 22, and the wire 7
It is sucked in the direction away from.

When the work 11 is cut by the wire saw configured as described above, the work supporting mechanism 10 moves toward the cutting mechanism 2 while the wire 7 is running between the processing rollers 4, 5 and 6 of the cutting mechanism 2. The workpiece 11 is pressed down against the wire 7 to make contact therewith, and the slurry is supplied from the slurry supply mechanism 9 onto the wire 7.
Therefore, the work 11 is cut into slices by the lapping action of the abrasive grains in the slurry.

At this time, the drive output from the drive output generation circuit 44 is supplied to the magnetic field generators 21 and 22. The wire 7 is drawn downward by the magnetic field from the magnetic field generators 21 and 22, and then the supply of the drive output is stopped and the wire 7 returns upward due to its own elasticity. Is given. For this reason, a traveling wave in the vertical direction is generated in the wire 7, and more traveling slurry is introduced between the wire 7 and the cut portion of the work 11 by the traveling wave, so that efficient cutting is performed.

In addition, the wire 7 and the magnetic field generators 21 and 22
Are not in contact with each other, so that the magnetic field generators 21 and 22 are not cut or damaged by the wire 7.

In this case, if the wire 7 is sucked or released when the wire 7 reverses its moving direction in conjunction with the reversal timing of the wire 7, the vibration of the wire 7 having a large amplitude is generated. Can be provided. That is, when the wire 7 reverses, the tension of the wire 7 fluctuates. Therefore, if at least one vibration is applied to the wire 7 at this timing, the amplitude can be increased. Therefore, in this case, the slurry can be effectively introduced between the wire 7 and the work 11, and more efficient cutting can be performed. Naturally, vibration is continuously applied even when the wire 7 is not inverted.

Further, at least one of the vibration frequency and the amplitude of the wire 7 may be changed according to the cut portion of the work 11. That is, as shown in FIGS. 5 (a) and 5 (b), when the work 11 has a columnar shape, the cutting area is wider when cutting near the center of the work 11 than when cutting other parts. Therefore, when cutting near the center of the work 11, the wire 7 is supplied so that more slurry is supplied between the work 11 and the wire 7.
The operation of the magnetic field generators 21 and 22 is controlled so that the vibration frequency of the magnetic field generator becomes higher or the amplitude becomes larger. In this way, suitable processing conditions can be set according to the shape of the work 11, and good cutting efficiency can always be obtained regardless of the shape of the work 11.

In the above description of the embodiment of the present invention, the material of the wire 7 is a magnetic material, and the magnetic field generators 21 and 22 for attracting the magnetic material are provided. On the other hand, when a non-magnetic conductor is used as the wire 7, it is possible to energize the wire 7, dispose the magnetic field generators 21 and 22 at positions according to Fleming's law, and vibrate the wire 7. It is.

As shown in FIG. 6, the magnetic field generator 2
The wires 1 and 22 may be arranged on both front and rear sides in the traveling direction of the wire 7 on the workpiece 11 side with respect to the wire 7. Furthermore, in this embodiment, the case where the magnetic field generators 21 and 22 are used as the vibration applying means has been described.
As the vibration applying means, an ultrasonic generator arranged at a very small distance from the wire 7 may be used.
In this case, vibration can be applied to the wire 7 regardless of the material of the wire 7. In addition, as an ultrasonic transducer, for example, lead zirconate titanate (PZT)
And the like are used. Further, an electroacoustic transducer other than the ultrasonic transducer may be used.

When an ultrasonic wave is generated in the ultrasonic generator, the vibration propagates to the wire 7 through the air, and the wire 7 vibrates up and down. For this reason,
The slurry is efficiently sent to the contact surface between the work 11 and the wire 7 and cutting is performed. When the ultrasonic vibrator is used in this way, by bringing the ultrasonic vibrator sufficiently close to the wire 7, the vibration of the ultrasonic vibrator is directly transmitted to the slurry above the wire 7, and the slurry is transmitted to the upper slurry. If the wire is made to vibrate through the wire, the wire 7 can be vibrated efficiently.

In the embodiment, the case where the aqueous or oily slurry containing free abrasive grains is used in the cutting process has been described. However, in the present invention, the surface of the wire 7 is coated with the abrasive grains, The present invention can be easily applied to a wire saw of a type in which a cut portion is cooled by using no processing fluid.

Further, in the embodiment, the case where the traveling of the wire 7 is performed such that the traveling of the wire 7 is stepped forward as a whole by repeating forward and backward movements is described. It can be easily applied to the wire saw.

Further, as the vibration applying means, vibration may be generated by intermittently spraying a high-pressure fluid onto the wire 7. In addition, at least one of the frequency and the amplitude of the vibration applying means may be adjusted according to the material of the work.

[0029]

The present invention is configured as described above, and has the following effects. According to the first and second aspects of the present invention, since the vibration applying means is provided near the wire row and applies vibration to the wire through a very small interval, the vibration of the wire causes the vibration between the wire and the workpiece. A sufficient amount of slurry can be supplied, and efficient cutting can be performed. Moreover, since the vibration applying means for applying vibration to the wire does not contact the wire, the vibration applying means is not cut or worn by the wire, and the durability can be improved. Also,
Since the vibration applying means can be electrically controlled irrespective of the operation of the wire saw, the vibration frequency and amplitude can be arbitrarily set according to the cut portion of the work, the material, and the like, and appropriate processing conditions can be set.

According to the third aspect of the present invention, since the ultrasonic vibrator is used as the vibration applying means, the wire does not need to be iron-based, and can be effectively applied to the wire regardless of the material of the wire. Vibration can be applied.

According to the fourth aspect of the present invention, since the vibration imparting means is provided on both sides in the wire traveling direction in the work area of the work, the slurry can be effectively supplied from both front and rear sides of the work cutting area, and the work can be cut. Efficiency can be improved.

According to the fifth aspect of the present invention, the wire train is configured to reciprocate at a constant period, and the wire is vibrated by the vibration applying means at least once each time the running direction of the wire is reversed. In addition, it is possible to effectively vibrate the wire by detecting the fluctuation in the tension of the wire, and it is possible to improve the cutting efficiency of the work.

According to the sixth aspect of the present invention, since the frequency is changed in accordance with the cut portion of the work, it is possible to set optimum cutting conditions in accordance with the shape of the work, thereby further improving the cutting efficiency. Can be done.

[Brief description of the drawings]

FIG. 1 is an external view showing a configuration of a main part of an embodiment of the present invention.

FIG. 2 is a partial plan view.

FIG. 3 is a sectional view showing a magnetic field generator.

FIG. 4 is an explanatory diagram showing an electrical configuration.

FIG. 5 is an explanatory view showing a cutting state.

FIG. 6 is an explanatory view showing a different embodiment.

[Explanation of symbols]

4, 5, 6: Processing roller, 7: Wire, 21, 22, ...
Magnetic generator

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C047 FF09 3C058 AA05 AA11 AA16 AA18 AC01 AC04 CA04 CA05 CB03 DA03 DA10 DA11 3C069 AA01 BA06 BB03 BC01 CA03 CA04 CB01 CB03 DA00 EA01

Claims (6)

[Claims] A wire array is formed by winding a large number of wires between processing rollers arranged opposite to each other, and a wire array is run by rotation of the processing roller, and a work is pressed against the wire array. What is claimed is: 1. A wire saw configured to cut a workpiece, comprising: a vibration applying unit that applies vibration to a wire through a minute interval in proximity to the wire row. 2. The wire saw according to claim 1, wherein the vibration applying means uses an electromagnet as a drive source and attracts the wire in accordance with the excitation. 3. The wire saw according to claim 1, wherein the vibration applying means is an ultrasonic vibrator, and transmits the vibration to the wire via air or a machining fluid. 4. The wire saw according to claim 1, wherein the vibration applying means is provided on both sides of the workpiece processing direction in the wire traveling direction. 5. The wire saw according to claim 1, wherein the wire train is reciprocated at a constant cycle, and the vibration applying means is provided for each time the running direction of the wire is reversed. A wire saw that applies vibration at least once. 6. The wire saw according to claim 1, wherein at least one of a frequency and an amplitude is changed according to a cut portion of the work.