JP2009291930A - Wire saw apparatus and cutting method using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reliable wire saw apparatus with a long service life of a wire and a high machining accuracy. <P>SOLUTION: The wire saw apparatus 1 has three multi-grooved rollers 3a, 3b and 3c for winding a single wire 2. A wire array for winding the wire 2 with a diameter of approximately 120 microns for example is structured in each roller, so that the wire 2 in the wire array is reciprocated by driving the multi-grooved roller 3a on a drive side to be driven by a wire driving motor 4. It also has bobbins 5a and 5b for taking up and feeding the wire 2. An ultrasonic vibrator 13 having a magnet 12 joined thereon is brought into contact with the wire 2 between a workpiece 9 and the multi-grooved rollers 3b and 3c. A vibration direction of the vibrator 13 is aligned with a cutting direction. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a wire saw device for cutting a brittle material such as an oxide single crystal material such as sapphire, a semiconductor material, a magnetic material, and ceramic with a wire, and a cutting method using the same.

  Generally, in a wire saw, a plurality of processing rollers are arranged at a predetermined interval, and a plurality of annular grooves are formed at a predetermined pitch on the outer periphery of the rollers, and one wire is interposed between the annular grooves. It is wound in order. Then, along with the rotation of the processing roller, while the wire is running, a slurry containing free abrasive grains is supplied onto the wire, and in this state, the object to be cut is pressed against the wire to contact the object. It is configured to cut.

In the wire saw configured as described above, various proposals have been made to improve the cutting ability. For example, in Patent Document 1, an auxiliary roller having a concavo-convex portion on the outer periphery is provided so as to come into contact with a wire in the vicinity of an object to be cut, and the rotation of this roller directly imparts vibration to the wire up and down. Yes.
JP-A-8-99262

  However, in the wire saw described above, when the wire and the auxiliary roller come into contact with each other, the uneven portion is flattened on the outer periphery of the auxiliary roller, so that the vibration of the wire is reduced. For this reason, frequent replacement of the auxiliary roller is necessary. Further, in order to efficiently cut the object to be cut, it is preferable to apply a vibration with a frequency of 15 KHz or more and an amplitude of 3 μm or more, but it is difficult to provide an auxiliary roller uneven portion.

Therefore, the wire saw of Patent Document 2 has been proposed. In this wire saw device, a pair of magnetic field generators are provided on both sides in the wire traveling direction in a processing area of a workpiece. Then, a predetermined drive output is supplied to the magnetic field generator, the magnetic field generator is operated, the wire is intermittently attracted, and vertical vibration is applied to the wire.
JP 2001-62700 A

  According to the present invention, since the vibration means for applying vibration to the wire through a minute interval is provided close to the wire row, a sufficient amount of slurry is generated between the wire and the workpiece by the vibration of the wire. It can be supplied and efficient cutting can be performed. Moreover, since the vibration applying means for applying vibration to the wire does not come into contact with the wire, the vibration applying means is not cut or worn by the wire, and the durability can be improved.

  In the wire saw described in Patent Document 2 described above, a vibration force that alternates between the AC power source and the magnetic field generator is applied from the AC power source in a non-contact manner with the wire. It is difficult.

  In addition, an AC power source for generating a magnetic field has low efficiency and generates heat in an ultrasonic region of 15 KHz or higher, which may increase the temperature of the wire. An increase in the temperature of the wire also causes deterioration of processing accuracy and shortens the life of the wire.

  Furthermore, there is a possibility that the wire may come off due to vibration from the annular groove provided on the outer periphery of the roller.

  An object of the present invention is to provide a wire saw with high processing accuracy and an improved cutting speed, and a cutting method using the same.

  The present invention relates to a wire saw that cuts a workpiece by pressing the workpiece against a traveling wire supplied with a slurry containing loose abrasive grains or a traveling wire having abrasive grains fixed thereto. A magnet joined with a sound wave vibrator is brought into contact, and an AC voltage is applied to the ultrasonic wave vibrator.

  In a wire saw that cuts a workpiece by pressing the workpiece against a traveling wire supplied with a slurry containing loose abrasive grains or a traveling wire with fixed abrasive grains, the magnetostrictive vibrator is brought into contact with the wire. Then, an AC voltage is applied to the magnetostrictive vibrator.

  By cutting using the wire saw device of the present invention, high-precision and high-speed processing becomes possible, and the wire has a long life.

  Hereinafter, an embodiment of a wire saw apparatus according to the present invention will be described with reference to the perspective view of FIG. The wire saw device 1 has three multi-groove rollers 3a, 3b, 3c around which one wire 2 is wound, and configures a wire row around which the wire 2 having a diameter of, for example, about 120 microns is wound around each multi-groove roller The wire 2 of this wire row is reciprocated by driving a drive-side multi-groove roller 3a driven by a wire drive motor 4. Further, it has bobbins 5a and 5b for winding and feeding the wire 2. A plurality of grooves provided on the surfaces of the multi-groove rollers 3a, 3b, and 3c are omitted for convenience of drawing. Also, means for applying ultrasonic vibration to the wire is omitted because the drawing becomes complicated.

  Next, means for applying ultrasonic vibration to the wire 2 will be described with reference to the plan view of FIG. 2 and the side view of FIG. An ultrasonic vibrator 13 having a magnet 12 bonded thereto is brought into contact with the wire 2 between the workpiece 9 and the multi-groove rollers 3b and 3c. The vibration direction of the ultrasonic vibrator 13 is made to coincide with the cutting direction.

  The ultrasonic vibrator 13 is called a Langevin type ultrasonic vibrator. Piezoelectric ceramics 16a and 16b are fastened together by bolts (not shown) between an aluminum alloy front mass 14 and an aluminum alloy rear mass 15 as shown in FIG. It has become. The magnet 12 is joined to the front mass 14 by an epoxy resin. The phosphor bronze electrodes are electrically connected by lead wires. The other end of the lead wire is connected to an ultrasonic oscillator.

  The magnet 12 is a neodymium iron-based permanent magnet. The magnet 12 may be an electromagnet. In the case of an electromagnet, the magnetic force can be adjusted by the magnitude of the current.

  Since the wire 2 is a magnetic body, it is attracted by the magnet 12. Since the magnet 12 is ultrasonically vibrated by the ultrasonic vibrator 13, the wire 2 vibrates ultrasonically while being attracted by the magnet 12. Since the wire 2 and the magnet 12 vibrate ultrasonically, the frictional force between the wire 2 and the magnet 12 becomes small, so there is almost no risk of the wire 2 being worn or cut.

  Since the vibration of the ultrasonic vibrator 13 propagates almost directly to the wire 2, the vibration amplitude of the wire 2 can be adjusted by adjusting the amplitude amount of the ultrasonic vibrator 13. For this reason, an unnecessary large vibration is not given to the wire 2.

  Further, a feed unit 7 having a feed motor 6 and feeding a workpiece 9 is provided above the wire row, and the workpiece 9 bonded to the carbon base 8 of the feed unit 7, for example, The sapphire ingot is pressed against the wire row and cut by polishing.

  A slurry supply device 10 having a slurry pump for supplying the slurry 11 to the wire row between the multi-groove rollers 3b and 3c and the workpiece 9 is provided.

  Next, a method for cutting a sapphire ingot using the wire saw device 1 of the present invention will be described.

  First, as shown in FIG. 1, a sapphire ingot that is a workpiece 9 is bonded to the carbon base 8. The wire drive motor 4 is rotated to move the wire train at high speed, and the ultrasonic waves from the ultrasonic oscillator are applied to the piezoelectric ceramics 16a and 16b of the Langevin type ultrasonic vibrator 13 to which the magnet 12 shown in FIGS. Apply AC voltage. If you want to drive many Langevin type ultrasonic transducers using a single ultrasonic oscillator, the natural frequency of each Langevin type ultrasonic transducer is different. A voltage having a sweep frequency including the voltage may be applied.

  Furthermore, the slurry supply device 10 is operated to supply the wire row to supply the slurry 11, the feed motor 6 is rotated to bring the sapphire ingot into contact with the wire row, the cutting is started, and the cutting is continued.

  Here, in order not to damage the wire 2 at the tip of the magnet 12 that contacts the wire 2, as shown in the side view of FIG. You may join. When plastic wear is large, a composite material in which the plastic is reinforced with fibers such as a carbon fiber composite material is suitable.

  The friction between the wire 2 and the object to be cut is reduced by the ultrasonic vibration of the wire 2, so that the wear of the wire 2 is reduced and the risk of cutting the wire 2 is also reduced. Furthermore, since the frictional heat between the wire 2 and the workpiece 9 is reduced, the processing accuracy is also improved. In addition, the cutting speed is improved by the effect of ultrasonic vibration.

  Further, since the slurry 11 is sufficiently supplied between the wire 2 and the workpiece 9 due to the ultrasonic vibration of the wire 2, the cutting speed is improved. Further, since the cutting powder of the workpiece 9 and the consumable powder of the wire 2 are quickly eliminated, the processing accuracy is improved and the cutting speed is also improved.

Note that ultrasonic cutting is described in detail in Non-Patent Document 1, for example. Ultrasonic cutting has the advantages that the frictional resistance between the workpiece and the tool is reduced, so that the thermal distortion of the machined surface is reduced, the machining accuracy is increased, and the life of the cutting tool is extended. is doing. Further, it is described in detail in Non-Patent Document 2 that the processing speed is doubled or more.
Ultrasonic Handbook Editorial Committee, “Ultrasonic Handbook”, Maruzen Co., Ltd., August 1999, p679-684 Japan Electromechanical Industry Association, "Ultrasonic Engineering", Corona Co., Ltd., 1993, p218-229

  As described above, by applying ultrasonic vibration to the wire, it is possible to provide a highly reliable wire saw device having a long life, high machining accuracy, and high reliability.

Another means for generating ultrasonic vibration is a magnetostrictive vibrator. A magnetostrictive vibrator as means for generating ultrasonic vibration is described in detail in Non-Patent Document 3.
Japan Electromechanical Industry Association, "Ultrasonic Engineering", Corona Co., Ltd., 1993, p28-40

  An example in which ultrasonic vibration is applied to the wire 2 by the magnetostrictive vibrator 17 will be described using the side view of FIG. Since the magnetostrictive vibrator 17 is of course also an electromagnet, the wire 2 is attracted. And of course, since ultrasonic vibration is also performed, the ultrasonic vibration can be generated simultaneously with the suction of the wire 2. When no current is passed through the coil of the magnetostrictive vibrator 17, the wire 2 is not attracted. Therefore, when it is unnecessary, no stress is applied to the wire 2, so that the wire 2 is not damaged at all.

  In order not to damage the wire 2 at the tip of the magnetostrictive vibrator 17 in contact with the wire 2, a sliding plate 18 made of a fluorine plastic having a lower hardness than the wire 2 is provided as shown in the side view of FIG. You may join. When plastic wear is large, a composite material in which the plastic is reinforced with fibers such as a carbon fiber composite material is suitable.

  Of course, the present invention can also be applied to a fixed abrasive wire in which superabrasive grains are fixed on a peripheral surface of a high-strength core wire by a bond layer (adhesive layer).

  The wire saw device of the present invention can be used for cutting brittle materials such as semiconductor materials, magnetic materials, and ceramics.

It is a perspective view which shows the wire saw apparatus of the structure of this invention. It is a top view which shows the ultrasonic transducer | vibrator which has a wire and a magnet at the front-end | tip. It is a side view which shows the ultrasonic transducer | vibrator which has a wire and a magnet at the front-end | tip. FIG. 4 is a side view of the configuration of FIG. 3 having a sliding plate at the tip. It is a side view which shows a wire and a magnetostrictive vibrator. FIG. 6 is a side view of the configuration of FIG. 5 having a sliding plate at the tip.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Wire saw apparatus 2 Wire 3 Multi-groove roller 4 Wire drive motor 5 Bobbin 6 Feed motor 7 Feed unit 8 Carbon base 9 Object 10 Slurry supply apparatus 11 Slurry 12 Magnet 13 Ultrasonic vibrator 14 Front mass 15 Rear mass 16 Piezoelectric ceramic 17 Magnetostrictive vibrator 18 Slide plate

Claims (2)

In a wire saw that cuts a workpiece by pressing the workpiece against a traveling wire supplied with a slurry containing loose abrasive grains or a traveling wire fixed with abrasive grains, an ultrasonic vibrator is attached to the wire. A bonded magnet is brought into contact, and an AC voltage is applied to the ultrasonic transducer. In a wire saw that cuts a workpiece by pressing the workpiece against a traveling wire supplied with a slurry containing loose abrasive grains or a traveling wire with fixed abrasive grains, the magnetostrictive vibrator is brought into contact with the wire. And an AC voltage is applied to the magnetostrictive vibrator.

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