JPWO2006137453A1 - Polishing equipment using ultrasonic vibration - Google Patents

Abstract

A support table (32) on which an object to be polished (31) is supported and fixed on the upper surface, a rotatable shaft (34) disposed above the support table, a driving device (35) for driving the lifting and lowering of the rotating shaft, and rotation A drive device (36) for driving the rotation of the shaft, an elastic body (37) fixed to the base of the rotation shaft, an annular grindstone (38) provided at the lower portion of the elastic body, and a plurality of super wheels attached to the elastic body A polishing apparatus using ultrasonic vibration comprising a ultrasonic vibrator (39) and a transmission device (41) for transmitting electric energy to the ultrasonic vibrator, wherein the elastic body is an annular elastic body, A connecting plate (42) is arranged between the elastic body and the base of the rotating shaft, and the connecting plate and the annular elastic body are connected to each other by connecting means (a plurality of connecting portions and space portions) formed alternately. 45) and the above plural By using the polishing apparatus in which the ultrasonic transducers are arranged at a predetermined position of the elastic body (30), it is possible to polish the polishing object with high accuracy.

Description

  The present invention relates to a polishing apparatus that uses ultrasonic vibration and is used to smoothly polish the surface of an object to be polished formed of glass, silicon, or the like.

  Conventionally, various substrates such as a glass substrate, a silicon substrate, and a silicon nitride substrate have been used to form a thin film electronic device. The surfaces of these substrates are polished smoothly using a polishing apparatus. In addition, it may be necessary to smoothly polish the surface of optical components such as lenses and prisms. In order to polish the surface of such various polishing objects, or to process the polishing object to a predetermined thickness while repeating the polishing of the surface, it is possible to use a polishing apparatus using ultrasonic vibration Already known.

  FIG. 1 is a front view of a conventional polishing apparatus described in Patent Document 1, and FIG. 2 is a cross-sectional view of a polishing apparatus 10 cut along a cutting line I-I written in FIG. is there. In FIG. 2, the description of the polishing object 11, the support table 12, and the pipe 21 for supplying the polishing liquid shown in FIG. 1 is omitted.

  A polishing apparatus 10 shown in FIGS. 1 and 2 is arranged above a support table 12 and a rotatable disk-shaped support table (work fixing base) 12 on which a polishing object (polishing object) 11 is supported and fixed. A polishing shaft 14 that can be moved up and down and reciprocated in the horizontal direction, an elastic body 17 fixed to the base of the polishing shaft 14, an annular grindstone 18 provided below the elastic body 17, and an upper surface of the elastic body 17. And a pair of laminated piezoelectric actuators 19 and the like. Further, Patent Document 1 also discloses other aspects, but in any case, the laminated piezoelectric actuator is disposed on the upper surface of the elastic body.

  In this polishing apparatus 10, first, the polishing object 11 is fixed on the support table 12, and the ultrasonic vibration generated by each of the stacked piezoelectric actuators 19 is applied to the elastic body 17 while rotating the support table 12. By applying to the grindstone 18 via the, the polishing object 11 is polished.

In this document, the polishing apparatus 10 generates ultrasonic vibrations that generate in-plane vibrations of standing waves on the polishing surface (lower surface) of the grindstone 18 or generate elliptical vibrations perpendicular to the polishing surface. Since the laminated piezoelectric actuator 19 (or Langevin vibrator) is used as a means, the grindstone 18 can be vibrated with a large amplitude. Therefore, it is described that the object 11 can be polished with high accuracy and in a short time. Yes.
Japanese Patent Laid-Open No. 5-200659

  By using the polishing apparatus of Patent Document 1, the object to be polished can be polished with high accuracy and in a short time. However, according to the study of the present inventor, in this polishing apparatus, a part of the ultrasonic vibration generated by the laminated piezoelectric actuator is easily transmitted to the polishing shaft via the elastic body, and a sufficiently large ultrasonic vibration is applied to the grindstone. It turned out to be difficult to do.

  If the ultrasonic vibration applied to the grindstone is insufficient, the frictional resistance between the grindstone and the object to be polished increases, and unnecessary mechanical vibration occurs when the two rub against each other, resulting in a decrease in polishing accuracy. It was also found that the surface roughness of the polished object after polishing is increased.

  An object of the present invention is to provide a polishing apparatus using ultrasonic vibration, which can polish an object to be polished with high accuracy.

  As a result of further investigations, the present inventor has arranged a connection plate between an annular elastic body having a grindstone at the lower portion and a base of a rotating shaft for rotating the grindstone, and this connection plate and the annular elastic body. Are connected to each other through a connecting means composed of a plurality of connecting portions and space portions formed alternately, so that the annular elastic body portion between the connecting portion and the connecting portion is connected to the connecting portion. Compared to the ring-shaped elastic body portion, the ultrasonic vibration is greatly increased, and when the ultrasonic vibrator is fixed to the former ring-shaped elastic body portion to generate the ultrasonic vibration, this ultrasonic vibration is It has been found that the accuracy of polishing the object to be polished is improved because it is difficult to be transmitted to the rotating shaft via (and the connecting plate), and most of it is applied to the grindstone via the annular elastic body.

The present invention relates to a support table on which an object to be polished is supported and fixed on an upper surface, a rotatable shaft arranged above and below the support table, a driving device that drives raising and lowering of the rotating shaft, and a driving device that drives rotation of the rotating shaft , An elastic body fixed to the base of the rotating shaft, an annular grindstone provided at the lower portion of the elastic body, a plurality of ultrasonic vibrators attached to the elastic body, and a transmission device for transmitting electrical energy to the ultrasonic vibrator A polishing apparatus that utilizes ultrasonic vibration consisting of:
The elastic body is an annular elastic body, a connecting plate is disposed between the annular elastic body and the base of the rotating shaft, and a lower surface of the peripheral edge of the connecting plate and an upper surface of the annular elastic body are The upper elastic surface of the annular elastic body or the plurality of ultrasonic transducers facing the space portion of the connecting means, the connecting means comprising a plurality of connecting portions and space portions formed alternately. Arranged on the outer side surface or inner side surface of the annular elastic body below the space portion, or
The elastic body is an annular elastic body, a connecting plate is disposed between the annular elastic body and the base of the rotating shaft, and the outer side surface of the peripheral portion of the connecting plate and the inner side surface of the annular elastic body are: Inner side surface or inner side of the annular elastic body, which are connected by connecting means composed of a plurality of connecting parts and space parts formed alternately, and the plurality of ultrasonic transducers face the space part of the connecting means The polishing apparatus is disposed on the outer side surface opposite to the side surface or the upper surface of the annular elastic body adjacent to the space portion.

Preferred embodiments of the polishing apparatus of the present invention are as follows.
(1) Both the connecting plate and the connecting portion are elastic bodies.
(2) The connecting plate and the connecting portion are both elastic bodies, and the connecting plate and the connecting portion are integrally formed with the annular elastic body.
(3) The ratio of the length of the connecting portion and the space portion along the periphery of the connecting plate in the connecting means is in the range of 1: 1 to 1:20 as the ratio of the length of the connecting portion to the length of the space portion. .
(4) A transmission device that transmits electrical energy to the ultrasonic transducer is a rotary transformer.
(5) The plurality of connecting portions and the space portions of the connecting means are arranged symmetrically with respect to the rotation axis.
(6) Each of the plurality of ultrasonic transducers is arranged symmetrically with respect to the rotation axis.
(7) The support table is further rotatable, and further includes a drive device that rotationally drives the support table.

  In the polishing apparatus of the present invention, a connecting plate is disposed between an annular elastic body having a grindstone at a lower portion and a base of a rotating shaft that rotates the grindstone, and the connecting plate and the annular elastic body are alternately arranged. It is connected via a connecting means comprising a plurality of connecting portions and space portions formed. Then, the ultrasonic vibration generated by each ultrasonic vibrator fixed at a predetermined position of the annular elastic body is connected to the connecting portion by the annular elastic body portion between the connecting portion and the connecting portion. Compared with the ring-shaped elastic body part, it is easy to vibrate ultrasonically greatly, so that it is difficult to be transmitted to the rotating shaft through each connecting part (and connection plate), and most of it is applied to the grindstone through the ring-shaped elastic body. The For this reason, by using the polishing apparatus of the present invention, the object to be polished can be polished with high accuracy.

  Next, the polishing apparatus of the present invention will be described with reference to the accompanying drawings. FIG. 3 is a front view showing a configuration example of the polishing apparatus of the present invention. FIG. 4 is an enlarged view of the polishing tool 40 including the connection plate 42, the coupling means 45, the annular elastic body 37, the ultrasonic vibrator 39, and the grindstone 38 provided in the polishing apparatus 30 shown in FIG. 5 is an exploded perspective view of the polishing tool 40 shown in FIG. 6 is a plan view of the annular elastic body 37, the ultrasonic vibrator 39, and the grindstone 38 included in the polishing tool 40 of FIG. 4, and FIG. 7 is a cutting line II-II line written in FIG. It is sectional drawing of the cyclic | annular elastic body 37, the ultrasonic transducer | vibrator 39, and the grindstone 38 cut | disconnected along.

  As shown in FIGS. 3 to 7, the polishing apparatus 30 includes a support table 32 on which an object to be polished 31 is supported and fixed, a rotary shaft 34 that can be moved up and down arranged above the support table 32, and a rotary shaft 34. A driving device 35 for driving up and down, a driving device 36 for driving the rotation of the rotating shaft 34, an elastic body 37 fixed to the base of the rotating shaft 34, an annular grindstone 38 provided below the elastic body 37, and an elastic body 37 A plurality of ultrasonic transducers 39 attached to the ultrasonic transducer 39, a transmission device 41 for transmitting electrical energy to the ultrasonic transducers 39, and the like.

  In the polishing apparatus 30 of the present invention, the elastic body 37 is an annular elastic body, and a connection plate 42 is disposed between the annular elastic body 37 and the base of the rotating shaft 34. The lower surface of the peripheral portion and the upper surface of the annular elastic body 37 are connected by connecting means 45 including a plurality of connecting portions 43 and space portions 44 formed alternately, and the plurality of ultrasonic waves described above. A vibrator 39 is arranged on the upper surface of the annular elastic body 37 facing the space 44 of the connecting means 45.

  Although there is no restriction | limiting in particular in the kind of grinding | polishing target object 31 grind | polished with the grinding | polishing apparatus 30, As a typical example, a glass substrate, a silicon substrate (silicon wafer), a silicon nitride substrate, and a lithium niobate substrate are mentioned.

  The polishing object 31 is fixed and supported on the surface of the support table 32 by using, for example, a hot melt adhesive. The object to be polished may be supported and fixed indirectly on the surface of the support table, for example, by holding it in a separately prepared holder and fixing the holder to the support table. For example, the support table and the holder may be fixed by bolts, or may be fixed using electromagnetic force.

  It is preferable that the support table 32 is rotationally driven by, for example, a drive device (for example, an electric motor) 33 installed on the base 51 and connected to the lower surface of the support table 32. The rotation speed of the support table 32 is normally set within a range of 50 to 500 rotations / minute. The support table 32 and the drive device 33 may be connected to each other via a power transmission component such as a gear or a belt, for example. The support table 32 may be moved linearly (for example, reciprocating) along the surface thereof, for example.

  The planar shape (top surface shape) of the support table 32 is preferably a circle or a regular polygon in order to rotate the table 32 stably.

  The rotary shaft 34 disposed above the support table 32 is driven up and down by a drive device 35 and is driven to rotate by a drive device 36.

  The drive device 35 includes a rotation drive device 52 installed on the base 51, a feed screw 53 connected to the rotation shaft 52 a of the rotation drive device 52, and a base 51 connected to a nut 53 a of the feed screw 53. A bearing 55 that can be moved up and down along a support 54 erected on the arm, an arm 56 connected to a nut 53a of a feed screw 53, and a rotary shaft 34 provided near the tip of the arm 56 are supported. The bearing 57 is configured. As the bearing 57, a bearing that supports the rotating shaft 34 in a state in which the rotating shaft 34 can rotate and cannot move up and down relatively with respect to the bearing 57 is used.

  Accordingly, when the rotation drive device 52 of the drive device 35 is driven to rotate the rotation shaft 52 a forward or backward, the nut 53 a of the feed screw 53 connected to the rotation drive device 52 and the bearing 55 is moved up and down along the column 54. Accordingly, the rotating shaft 34 supported by the bearing 57 provided on the arm 56 connected to the nut 53a can be moved up and down.

  The drive device 36 is fixed around the rotation shaft 34, the rotation drive device 58 fixed to the nut 53 a of the feed screw 53 of the drive device 35, the pulley 59 a fixed to the tip of the rotation shaft 58 a of the rotation drive device 58, and the rotation shaft 34. Pulley 59b, and a belt 60 connecting the pulley 59a and the pulley 59b. The drive device 36 applies the driving force of the rotary drive device 58 to the rotary shaft 34 via the belt 60 to drive the rotary shaft 34 supported by the bearing 57 to rotate. The rotation speed of the rotary shaft 34 is normally set within a range of 1000 to 10,000 rotations / minute.

  An annular elastic body 37 is fixed to the base of the rotating shaft 34 via the connecting plate 42 and the connecting means 45 as described above, and an annular grindstone 38 is provided below the annular elastic body 37. Is provided.

  As the annular grindstone 38, for example, a grindstone formed by binding abrasive grains represented by diamond abrasive grains with metal bonds or resin bonds can be used. Usually, the average grain size of the abrasive grains is set in the range of 0.1 to 50 μm.

  The annular grindstone 38 of the polishing apparatus 30 is set to have a height of about 5 to 10 mm and a width of about 3 to 10 mm, for example.

  In the present specification, the “annular grindstone” includes one in which a plurality of grindstone pieces are arranged in a ring shape. When an annular grindstone is composed of a plurality of grindstone pieces, it becomes easy to produce an annular grindstone (especially one having a large size), and due to the application of ultrasonic vibration to the grindstone or friction with the object to be polished. Since the stress generated in the grindstone due to the thermal expansion of the grindstone is reduced, occurrence of breakage of the grindstone (eg, occurrence of cracks) can be suppressed.

  An annular elastic body 37 that supports the grindstone 38 is made of a material similar to that of an elastic body included in a known polishing apparatus, such as aluminum, bronze, stainless steel, or an aluminum alloy typified by duralumin. It is formed from a metal material with excellent transmission.

  Examples of the material of the connecting plate 42 disposed between the annular elastic body 37 and the base of the rotating shaft 34 include metals such as titanium and iron in addition to the metal material forming the annular elastic body 37. Materials.

  When the annular elastic body 37 and the connection plate 42 are formed of different materials, the connection plate 42 is made of a metal material such as titanium, iron, or stainless steel in order to increase its rigidity (mechanical strength). It is preferable to form. When the connecting plate 42 has high rigidity, the annular elastic body 37 is stably supported by the rotating shaft 34.

Furthermore, it is preferable that the annular elastic body 37 and the connection plate 42 are formed of materials having greatly different acoustic impedance values. For example, the annular elastic body 37 is made of aluminum (acoustic impedance: 17.3 × 10 ⁶ Ns / m ³ ), and the connecting plate 42 is made of stainless steel (acoustic impedance: 45.7 × 10 ⁶ Ns / m ³ ). Once formed, the acoustic impedance values of the two differ greatly, so that the ultrasonic vibration generated by the ultrasonic vibrator 39 is difficult to be transmitted to the rotating shaft 34 via the annular elastic body 37, the connecting means 45, and the connection plate 42. Become.

  The lower surface of the peripheral edge of the connecting plate 42 and the upper surface of the annular elastic body 37 are connected by connecting means 45 each having a plurality of connecting portions 43 and space portions 44 formed alternately. Yes. The connecting plate 42, the connecting portion 43 of the connecting means 45, and the annular elastic body 37 are connected, for example, by screwing a bolt 63 into a screw hole 62a formed in each of them. The example of the material of the connection part 43 is the same as that of the connection plate 42 described above.

  There is no particular limitation on the number of connecting portions 43 (or space portions 44) of the connecting means 45, but it is preferable that the number is in the range of 3 to 30 each. If the number of connecting portions 43 (or space portions 44) is less than three, the annular elastic body 37 is unstablely supported by the connection plate 42, so that the accuracy of polishing the object to be polished tends to decrease. On the other hand, if it exceeds 30, it takes time to produce the polishing tool 40.

  A plurality of ultrasonic transducers 39 that generate ultrasonic vibrations applied to the grindstone 38 are connected to the upper surface of the annular elastic body 37 facing the space 44 of the connecting means 45 (that is, connected to the connecting portions 43 adjacent to each other). It is arranged and fixed on the upper surface of the annular elastic body portion between the portion 43.

  Each of the ultrasonic transducers 39 includes, for example, a plate-like piezoelectric body that is curved along the annular elastic body 37 and a pair of electrode layers attached to each of the upper and lower surfaces of the piezoelectric body. A piezoelectric vibrator is used.

  A typical example of the piezoelectric material is a lead zirconate titanate piezoelectric ceramic material. The piezoelectric body is polarized in the thickness direction, for example. Examples of the material for the electrode layer include metal materials such as silver and phosphor bronze.

  In the plurality of ultrasonic transducers 39, the polarization directions of the piezoelectric bodies of adjacent ultrasonic transducers are opposite to each other (the polarization direction of the piezoelectric body of one transducer is vertical and upward, and the polarization direction of the other transducer is It is disposed at the predetermined position on the upper surface of the annular elastic body 37 so that the direction is vertical and downward).

  Each ultrasonic transducer 39 is fixed to the annular elastic body 37 using, for example, an epoxy resin. By this epoxy resin, the electrode layer on the lower surface of each ultrasonic transducer 39 and the annular elastic body 37 are electrically insulated from each other. In addition, by applying, for example, an insulating paint to the surface of each ultrasonic transducer 39, a pair of electrode layers of the ultrasonic transducer is used as a cooling liquid (eg, water) used for polishing. It is possible to prevent electrical short-circuiting with each other.

  The electrode layers on the upper surfaces of the plurality of ultrasonic transducers 39 are electrically connected to each other using the electrical wiring 64a, and the electrode layers on the lower surfaces are electrically connected to each other using the electrical wiring 64b.

  In the polishing apparatus 30, a rotary transformer is used as the transmission device 41 that transmits electrical energy to the plurality of ultrasonic transducers 39.

  8 is a plan view of the rotary transformer (transmission device) 41 shown in FIG. 3, and FIG. 9 is a cross-sectional view of the rotary transformer 41 cut along the cutting line III-III written in FIG. . Hereinafter, the configuration and operation of the rotary transformer 41 will be described with reference to FIGS. 3 to 9.

  The rotary transformer 41 is used to supply electric energy of the power source 65 to a plurality of ultrasonic transducers 39 that rotate together with the annular elastic body 37 when the polishing object 31 is polished.

  The rotary transformer 41 has a configuration in which a power supply unit 66a and a power receiving unit 66b are arranged close to each other with a slight space therebetween. The power supply unit 66a and the power receiving unit 66b are each set in an annular shape.

  The power supply unit 66a includes an annular stator core 67a and a stator coil 68a, and the power receiving unit 66b includes an annular rotor core 67b and a rotor coil 68b. Each of the stator core 67a and the rotor core 67b is made of, for example, a magnetic material such as ferrite, and an annular groove is formed along the circumferential direction thereof. Each of the stator coil 68a and the rotor coil 68b has a configuration in which a conducting wire is wound in a coil shape along the length direction (circumferential direction) of an annular groove formed in each of the stator core 67a and the rotor core 67b. Yes.

  A power source 65 is electrically connected to the stator coil 68a of the power supply unit 66a, and each ultrasonic transducer 39 is electrically connected to the rotor coil 68b of the power receiving unit 66b via an electric wiring 64c. Connected. The upper end of the electric wiring 64c is connected to the rotor coil 68b, and the lower end passes through a through hole formed in the hollow rotation shaft 34 and then in the center of the connection plate 42. The ultrasonic transducer 39 is electrically connected.

  Then, by supplying the electric energy generated by the power source 65 to the stator coil 68a of the rotary transformer 41, the stator coil 68a and the rotor coil 68b are magnetically coupled to each other. For this reason, the electric energy supplied to the stator coil 68a is transmitted to the rotor coil 68b even when the rotor coil 68b (that is, the power receiving unit 66b) rotates together with the rotating shaft 34. Therefore, the electric energy generated by the power supply 65 can be applied to each of the ultrasonic transducers 39 that rotate together with the rotating shaft 34 and the annular elastic body 37 when the polishing object 31 is polished.

  Ultrasonic vibration generated by applying electrical energy (eg, AC voltage) generated by the power supply 65 to each of the ultrasonic vibrators 39 (to each electrode layer of the piezoelectric vibrator used as the ultrasonic vibrator). Is applied to an annular grindstone 38 via an annular elastic body 37.

  For example, a slip ring can be used as a transmission device for transmitting electrical energy to the ultrasonic transducer instead of the rotary transformer. The above-described rotary transformer transmits electric energy through the power supply unit and the power receiving unit that are arranged in a non-contact manner. Therefore, the rotary transformer rotates with the rotary shaft until the rotational speed of the rotary shaft is about 10,000 rpm. There is an advantage that power can be stably supplied to the ultrasonic vibrator. On the other hand, when the rotational speed of the rotating shaft exceeds about 5000 revolutions / minute, it becomes difficult for the slip ring to stably supply power to the rotating ultrasonic transducer.

  Next, a procedure for polishing the polishing object 31 by the polishing apparatus 30 will be briefly described.

  First, the polishing object 31 is temporarily fixed to a steel holder using, for example, a hot melt adhesive. And the holder to which the said grinding | polishing target object 31 was temporarily fixed to the upper surface of the support table 32 of the grinding | polishing apparatus 30 is fixed using an electromagnetic force, for example.

  Next, the drive device 36 is operated, and the rotary shaft is rotationally driven at a rotational speed of, for example, 5000 rpm. Next, electrical energy generated by the power supply 65 is applied to the plurality of ultrasonic transducers 39 of the polishing tool 40 via the rotary transformer 41. Thereby, the ultrasonic vibration generated by each ultrasonic transducer 39 is applied to the annular grindstone 38 via the annular elastic body 37.

  On the other hand, during polishing, the frictional resistance between the grindstone 38 and the object to be polished 31 is reduced to suppress generation of unnecessary mechanical vibration, and the temperature rise of the object to be polished due to friction with the grindstone is suppressed to reduce the polishing. In order to increase the accuracy, for example, a cooling liquid (for example, water) is ejected from the nozzle 61a, rotates with the support table 32 during polishing, and moves to the surface of the polishing object 31 that has moved below the nozzle 61a. A cooling liquid is jetted. Similarly, a cooling liquid is dropped from the nozzle 61 b into the rotary shaft 34, and this liquid passes through a through hole formed in the rotary shaft 34 and in the center of the connection plate 42 during polishing. It rotates with 32 and falls to the surface of the polishing object 31 that has moved below the rotating shaft 34 so as to come into contact therewith.

  Then, the drive device 33 is operated, the support table 32 is rotationally driven, for example, at a rotational speed of 300 rotations / minute, the drive device 35 is operated, and the rotating shaft 34 is gradually lowered to thereby ultrasonically vibrate. The vicinity of the lower end of the side surface of the grindstone 38 to which is applied comes into contact with the vicinity of the upper end of the side surface of the polishing object 31, and then the entire surface (upper surface) of the polishing object 31 is polished (ground). Then, while the rotating shaft 34 is further lowered, the polishing of the object 31 is continued until a predetermined thickness is reached.

  As described above, in the polishing apparatus 30 of the present invention, the connection plate 42 is disposed between the annular elastic body 37 having the grindstone 38 in the lower portion and the base portion of the rotating shaft 34 that rotates the grindstone 38. The plate 42 and the annular elastic body 37 are connected to each other via connecting means 45 including a plurality of connecting portions 43 and space portions 44 formed alternately. The ultrasonic vibration generated by each ultrasonic transducer 39 fixed at a predetermined position of the annular elastic body 37 is caused by the annular elastic body portion between the connecting portion 43 and the connecting portion 43 being connected. Compared with the ring-shaped elastic body portion connected to the portion 43, the ultrasonic vibration is large and easy to be transmitted to the rotating shaft 34 via each connecting portion 43 (and the connection plate 42), and most of the ring-shaped elastic body is elastic. It is applied to the grindstone 38 via the body 37. For this reason, the polishing object 31 can be polished with high accuracy by using the polishing apparatus 30 of the present invention.

In the polishing apparatus of the present invention, the ratio of the length along the periphery of the connecting plate between the connecting portion and the space portion in the connecting means is 1: 1 as the ratio between the length of the connecting portion and the length of the space portion. Or in the range of 1:20. In the case of the above-described polishing apparatus 30, as shown in FIG. 5, the ratio of the length of the connecting portion 43 (L ₁₎ and the length of the space portion 44 (L ₂₎ is approximately 1: set to 8 Has been.

When the ratio of the length of the coupling portion 43 and (L ₁₎ the length of the space portion 44 and the (L _2), i.e., the value of (L ₂ / L ₁₎ is less than 1, the connection plate 42 and the annular elastic Since the body 37 is firmly coupled to each other and the ultrasonic vibrations are easily formed as an integral structure, the ultrasonic vibration generated in each ultrasonic vibrator 39 is coupled to the coupling portion 43 of the coupling means 45 and the connection plate. It becomes easy to be transmitted to the rotating shaft 34 via 42. Therefore, the ultrasonic vibration is not sufficiently applied to the grindstone 38, and the accuracy of polishing the object to be polished is lowered. On the other hand, if the value of (L ₂ / L ₁ ) exceeds 20, the rigidity of each connecting portion 43 decreases, and the grindstone 38 is supported in an unstable state with respect to the rotating shaft 34. The accuracy of polishing the object is reduced.

  Further, it is preferable that the plurality of connecting portions 43 and the space portions 44 of the connecting means 45 are arranged symmetrically with respect to the rotation axis (FIG. 3: 34). By arranging the plurality of connecting portions 43 in this way and adjusting the frequency of ultrasonic vibration generated by each ultrasonic transducer 39, the annular elastic body 37 is provided with, for example, one point written in FIG. It becomes easy to generate ultrasonic vibration (natural vibration called in-plane bending vibration) that is displaced as shown by a two-dot chain line around the chain line. This ultrasonic vibration shows the displacement indicated by the two-dot chain line in FIG. 6 and then, after a half cycle of the vibration period, the displacement having a symmetrical shape with respect to the displacement indicated by the two-dot chain line around the one-dot chain line. Indicates.

  Each of the plurality of ultrasonic transducers 39 is preferably arranged symmetrically with respect to the rotation axis (FIG. 3: 34). With such an arrangement, the annular elastic body 37 is further subjected to ultrasonic vibration that is displaced symmetrically with respect to the rotation axis (FIG. 3: 34) (for example, ultrasonic vibration that is displaced as indicated by the two-dot chain line in FIG. 6). This is because it tends to occur.

  When ultrasonic vibration that is displaced as shown by a two-dot chain line in FIG. 6 is generated in the annular elastic body 37, almost no displacement (vibration) is generated in the annular elastic body portion connected to each connecting portion 43. The ultrasonic vibration generated by each ultrasonic transducer 39 is hardly transmitted to the connection plate via each connecting portion 43, and most of the ultrasonic vibration is applied to the grindstone 38 via the annular elastic body 37. . Therefore, it becomes possible to polish the object to be polished with higher accuracy.

  In order to adjust the frequency of the ultrasonic vibration generated in the annular elastic body 37 (for example, the natural vibration displaced as shown by the two-dot chain line in FIG. 6), the natural frequency of the polishing tool is determined by the finite element method. And the shape of the connection plate 42, the coupling means 45, the annular elastic body 37, or the grindstone 38 may be adjusted.

  In addition, the space 44 of the connecting means 45 has a material that is difficult to transmit the ultrasonic vibration generated in the annular elastic body 37 to the connection plate 42 (for example, the acoustic impedance is greatly different from that of the metal material forming the annular elastic body. Silicone rubber or the like) may be filled.

  FIG. 10 is a front view showing another configuration example of the polishing tool used in the polishing apparatus of the present invention, and FIG. 11 is an exploded perspective view of the polishing tool 100 shown in FIG. In the configuration of the polishing tool 100 shown in FIGS. 10 and 11, each connecting portion 43 of the connecting means 45 is fixed in advance to the annular elastic body 37, and the connecting plate 42 and each connecting portion 43 are respectively formed. The polishing tool 40 is the same as the polishing tool 40 of FIG. 4 except that bolts are screwed into the screw holes 62a and are fixed to each other.

  Further, by adjusting the frequency of ultrasonic vibration generated by each ultrasonic vibrator 39 of the polishing tool 100, the two-dot chain line centered on the one-dot chain line shown in FIG. It is also possible to generate an ultrasonic vibration (natural vibration different from the natural vibration described with reference to FIG. 6 described above) that is displaced as shown in FIG. This ultrasonic vibration shows a displacement indicated by a two-dot chain line in FIG. 10, and then shows a displacement having a symmetrical shape with respect to the two-dot chain line around the one-dot chain line after a half cycle of the vibration period.

  Then, when an ultrasonic vibration that is displaced as indicated by a two-dot chain line in FIG. 10 is generated in the annular elastic body 37, a displacement (vibration) is almost generated in the annular elastic body portion connected to each of the connecting portions 43. Therefore, the ultrasonic vibration generated by each ultrasonic transducer 39 hardly transmits to the connection plate 42 via each connecting portion 43, and most of the ultrasonic vibration is transmitted through the annular elastic body 37 to the grindstone 38. To be granted. Therefore, it becomes possible to polish the object to be polished with higher accuracy.

  In addition, by adjusting the frequency of the ultrasonic vibration generated by each ultrasonic vibrator 39 of the polishing tool 100, the ultrasonic vibration that is displaced in the annular body 37 similarly to the displacement indicated by the two-dot chain line in FIG. Can also be generated.

  FIG. 12 is a perspective view showing still another configuration example of a polishing tool used in the polishing apparatus of the present invention. In the configuration of the polishing tool 120 in FIG. 12, the connection plate 42 and the connecting portion 43 are both elastic bodies (formed of the same metal material as the material of the annular elastic body 37). 4 is the same as the polishing tool 40 of FIG. 4 except that is formed integrally with the annular elastic body 37.

  Thus, when the connection plate 42 and the connecting portion 43 are formed integrally with the annular elastic body 37, for example, a disk-shaped metal member is drilled in the axial direction, and then connected in the diametrical direction. The polishing tool 120 can be easily manufactured by cutting a plurality of through holes used as the space portion 44 and fixing the ultrasonic vibrator 39 and the grindstone 38. In addition, as the cyclic | annular grindstone 38 of the grinding | polishing tool 120, the thing in which the some grindstone piece 38a was arrange | positioned cyclically | annularly is used.

  The polishing tool 120 is fixed to the base of the rotating shaft (FIG. 3: 34) via a disk-shaped attachment member (not shown). A screw hole 62b is formed in the connection plate 42 in order to fix the disk-shaped attachment member and the polishing tool 120 with, for example, a bolt.

  Then, by adjusting the frequency of ultrasonic vibration generated by each ultrasonic vibrator 39 of the polishing tool 120, ultrasonic vibration that is displaced similarly to the displacement indicated by the two-dot chain line in FIG. 6 or FIG. 10 is generated. Can be made. FIG. 12 shows the displacement of vibration when an annular elastic body 37 of the polishing tool 120 is caused to generate ultrasonic vibration similar to that of the polishing tool 100 of FIG. 10 using a one-dot chain line and a two-dot chain line. It was.

  FIG. 13 is a perspective view showing still another configuration example of the polishing tool used in the polishing apparatus of the present invention. The configuration of the polishing tool 130 of FIG. 13 is the same as that of the polishing tool shown in FIG. 12 except that a plurality of ultrasonic transducers 39 are arranged on the outer side surface of the annular elastic body 37 below the space 44 of the connecting means 45. The same as 120.

  Thus, the plurality of ultrasonic transducers 39 may be arranged on the outer side surface (or the inner side surface) of the annular elastic body 37 below the space portion 44 of the connecting means 45.

  When arranging a plurality of ultrasonic transducers on the outer side surface (or inner side surface) of the annular elastic body, for example, an ultrasonic transducer having the following configuration may be used as each ultrasonic transducer. preferable.

  14 and 15 are a front view and a plan view, respectively, showing the configuration of the ultrasonic transducer 39 provided in the polishing tool 130 of FIG.

  An ultrasonic transducer 39 shown in FIGS. 14 and 15 includes a piezoelectric body 39e having a curved shape along the peripheral edge of the annular elastic body 37, and a pair of electrodes arranged so as to sandwich the upper portion of the piezoelectric body 39e in the thickness direction. The layers 39a and 39a and a pair of electrode layers 39b and 39b arranged so as to sandwich the lower portion. The piezoelectric part sandwiched between the pair of electrode layers 39a and 39a is polarized in the direction from the front side to the back side of the paper surface of FIG. 14, and the piezoelectric body sandwiched between the pair of electrode layers 39b and 39b. The portion is polarized in a direction from the back side to the near side of the paper surface of FIG. A pair of electrode layers 39a and 39a and a piezoelectric portion not sandwiched between any of the pair of electrode layers 39b and 39b are not polarized (not used as an ultrasonic transducer).

  A set of electrode layers (provided on the outer surface of the vibrator) composed of the electrode layer 39a and the electrode layer 39b on the front side of the paper surface of FIG. One of the electrode layer sets (provided on the inner surface of the vibrator) composed of the electrode layer 39a and the electrode layer 39b in the electrode is a positive electrode and the other electrode layer set is a negative electrode. By supplying an AC voltage to the sound wave vibrator 39, the piezoelectric vibrator 39 generates ultrasonic vibration that is displaced as shown by a two-dot chain line, for example, with the one-dot chain line written in FIG. This ultrasonic vibration shows a displacement indicated by a two-dot chain line in FIG. 12, and then shows a displacement having a symmetrical shape with respect to the two-dot chain line around the one-dot chain line after a half cycle of the vibration cycle.

  Then, in each of the plurality of ultrasonic transducers 39 of the polishing tool 130 of FIG. 13, the phase of the AC voltage supplied to the transducers adjacent to each other is reversed (for example, the outer surface of one transducer) When the electrode layer set provided in the positive electrode is used as the positive electrode, by supplying an alternating voltage (with the electrode layer set provided on the outer surface of the other vibrator as the negative electrode), the annular elastic body 37 is supplied as described above. In addition, it is possible to generate ultrasonic vibration that is displaced as shown by a two-dot chain line in FIG.

  16 is a front view showing still another configuration example of the polishing tool used in the polishing apparatus of the present invention, FIG. 17 is a plan view of the polishing tool 160 of FIG. 16, and FIG. It is sectional drawing of the grinding | polishing tool 160 cut | disconnected along the cut line IV-IV entered.

  The configuration of the polishing tool 160 in FIG. 16 is the same as that of the polishing tool 130 in FIG. 13 except that the shape of the outer peripheral edge of each of the connection plate 42 and the annular elastic body 37 is set to an octagon.

  Thus, when the shape of the outer peripheral edge (or inner peripheral edge) of the annular elastic body 37 is set to a polygon (in particular, a regular polygon that can stably rotate the annular elastic body), the space 44 of the connecting means 45 The outer side surface (or the inner side surface) of the lower annular elastic body 37 is a flat surface, and a flat plate-like vibrator that can be easily manufactured can be used as the ultrasonic vibrator attached to the outer side surface (or the inner side surface). It becomes like this. The shape of the outer peripheral edge or the inner peripheral edge of the connection plate 42 is not particularly limited, but if the same shape as the annular elastic body 37 is set, the polishing tool 160 can be easily manufactured.

  In addition, as shown in FIG. 17, by supplying an AC voltage to a plurality of ultrasonic transducers 39 so that the phase difference of AC voltages supplied to adjacent ultrasonic transducers is 90 degrees, For example, ultrasonic vibrations (traveling waves of ultrasonic vibrations) that are displaced in the same manner as the displacement indicated by the two-dot chain line in FIG. When the traveling wave of this ultrasonic vibration is applied to the annular grindstone 38 (each grindstone piece 38a), each grindstone piece 38a vibrates in the vertical direction and also vibrates in the horizontal direction (circumferential direction of the annular elastic body). Therefore, it is possible to increase the speed at which the object to be polished is polished.

  In order to apply an AC voltage having a phase difference of 90 degrees as described above to the plurality of ultrasonic transducers 39, for example, the rotary transformer 41 and the rotary shaft 41 of the polishing apparatus 30 in FIG. Is provided with a separate rotary transformer, and a power source different from the power source 65 is electrically connected to the power supply unit, and a sine wave (sin wave) AC voltage is supplied by one power source and the rotary transformer, and the other is supplied. A cosine wave (cos wave) AC voltage may be supplied to each ultrasonic transducer 39 by a power source and a rotary transformer.

  For example, “sin” written with an arrow in FIG. 17 supplies a sine wave AC voltage to the ultrasonic transducer indicated by the arrow with the outer electrode layer as a positive electrode and the inner electrode layer as a negative electrode. "-Sin" written with an arrow means that a sinusoidal AC voltage is supplied to the ultrasonic transducer indicated by the arrow with the outer electrode layer serving as a negative electrode and the inner electrode layer serving as a positive electrode. means.

  As another method, the rotary transformer 41 shown in FIG. 3 is divided into two channels (for example, two sets of coils arranged opposite to each other on the power supply unit and the power receiving unit of the rotary transformer are attached, AC voltage can be transmitted independently from each other by a coil), and a sinusoidal AC voltage via one channel and a cosine AC voltage via the other channel to each ultrasonic transducer. You may supply.

  FIG. 19 is a perspective view showing still another configuration example of a polishing tool used in the polishing apparatus of the present invention, and FIG. 20 is a polishing tool 190 cut along the cutting line V-V written in FIG. FIG.

  The configuration of the polishing tool 190 of FIG. 19 is a connecting means in which the outer side surface of the peripheral portion of the connection plate 42 and the inner side surface of the annular elastic body 37 are each formed of a plurality of connecting portions 43 and space portions 44. 4 and the polishing tool 40 shown in FIG. 4 except that the plurality of ultrasonic transducers 39 are arranged on the upper surface of the annular elastic body 37 adjacent to the space portion 44 of the connecting means. It is the same.

  Also in the polishing apparatus of the present invention having the polishing tool 190 of FIG. 19, the ultrasonic vibration generated by each ultrasonic transducer 39 fixed at a predetermined position on the upper surface of the annular elastic body 37 Since the annular elastic body portion between 43 and the connecting portion 43 is more likely to vibrate ultrasonically compared to the annular elastic body portion connected to the connecting portion 43, each connecting portion 43 (and the connecting plate 42). ) Is hardly transmitted to the rotating shaft (FIG. 3: 34), and most of it is applied to the grindstone 38 via the annular elastic body 37. For this reason, by using the polishing apparatus of the present invention provided with the polishing tool 190 of FIG. 19, the object to be polished can be polished with high accuracy.

  Then, by adjusting the frequency of ultrasonic vibration generated by each ultrasonic vibrator 39 of the polishing tool 190, ultrasonic vibration that is displaced similarly to the displacement indicated by the two-dot chain line in FIG. 6 or FIG. 10 is generated. Can be made. In FIG. 19, the vibration displacement in the case where ultrasonic vibration similar to that in the case of the polishing tool 100 of FIG. 10 is generated in the annular elastic body 37 of the polishing tool 190 is shown using a one-dot chain line and a two-dot chain line. It was.

  19, the connecting plate 42 and the connecting portion 43 are both elastic bodies, and the connecting plate 42 and the connecting portion 43 are annular elastic bodies 37, as in the case of the polishing tool 120 of FIG. It is integrally formed. The polishing tool 190 of FIG. 19 has an advantage that it is easy to form a plurality of through holes used as the plurality of space portions 44 of the connecting means 45.

  As each ultrasonic transducer 39 of the polishing tool 190 of FIG. 19, for example, an ultrasonic transducer having the following configuration is used.

  FIGS. 21 and 22 are a plan view and a front view of a plurality of ultrasonic transducers 39 provided in the polishing tool 190 of FIG. 19, respectively.

  A plurality of ultrasonic transducers 39 shown in FIG. 21 and FIG. 22 includes an annular piezoelectric body 39e and a total of four pairs of electrode layers (electrode layers 39a, 39a arranged so as to sandwich the piezoelectric body 39e in the thickness direction thereof. A pair of electrode layers 39b and 39b, a pair of electrode layers 39c and 39c, and a pair of electrode layers 39d and 39d). The piezoelectric layers sandwiched between the pair of electrode layers 39a and 39a and the pair of electrode layers 39c and 39c are polarized in a direction from the front side to the back side of the sheet of FIG. 21, and the electrode layer 39b , 39b and each piezoelectric body portion sandwiched between the electrode layers 39d, 39d are polarized in a direction from the back side to the front side of the sheet of FIG. And the piezoelectric material part which is not pinched | interposed into any of these four pairs of electrode layers is not polarization-processed (it is not used as an ultrasonic transducer | vibrator).

  Then, for example, electrode layers 39a, 39b, 39c, and 39d on the near side of the paper surface of FIG. 21 are used as positive electrodes and the four electrode layers on the far side of the paper surface are used as negative electrodes. By supplying a voltage, it is possible to cause the annular elastic body 37 to generate ultrasonic vibration that is displaced as indicated by a two-dot chain line in FIG.

  FIG. 23 is a plan view showing still another configuration example of the polishing tool used in the polishing apparatus of the present invention, and FIG. 24 is a view of the polishing tool cut along the cutting line VI-VI written in FIG. It is sectional drawing.

  The configuration of the polishing tool 230 shown in FIGS. 23 and 24 includes an inner side surface of the annular elastic body 37 in which a plurality of ultrasonic transducers 39 face the space 44 of the connecting means 45, and an outer side opposite to the inner side surface. Except for being attached to the side surface, it is the same as the polishing tool 190 of FIG. Thus, the plurality of ultrasonic transducers may be attached to the side surface of the annular elastic body. In addition, as each ultrasonic transducer | vibrator 39, the thing similar to the ultrasonic transducer | vibrator shown in FIG.14 and FIG.15 is used.

  FIG. 25 is a plan view showing still another configuration example of the polishing tool used in the polishing apparatus of the present invention. The configuration of the polishing tool 250 of FIG. 25 is that the shape of the outer peripheral edge (and the inner peripheral edge) of the annular elastic body 37 is an octagon, and a plurality of ultrasonic transducers 39 are arranged in the space 44 of the connecting means 45. It is the same as the polishing tool 230 of FIG. 23 except that it is attached to the outer side surface opposite to the inner side surface of the annular elastic body 37 facing.

  FIG. 26 is a perspective view showing still another configuration example of the polishing tool used in the polishing apparatus of the present invention. The configuration of the polishing tool 260 in FIG. 26 is such that three ultrasonic transducers 39 are fixed to the outer side surface opposite to the inner side surface of the annular elastic body 37 facing each space 44 of the connecting means 45, and the above-mentioned 23 is the same as the polishing tool 230 of FIG. 23 except that a through hole 44a reaching the space 44 of the connecting means 45 is formed in the upper part of each vibrator 39 on the outer side surface of the annular elastic body.

  When such a through hole 44a is provided, the through hole 44a functions in the same manner as the space portion 44 of the connecting means 45, and the connecting portion 43a between the through hole 44a and the through hole 44a is connected to the connecting means. It functions similarly to the connecting portion 43 of 45. For this reason, the ultrasonic vibration generated by each ultrasonic transducer 39 is difficult to be transmitted to the portion of the annular elastic body 37 above the through hole 44a. Therefore, by using the polishing apparatus of the present invention provided with the polishing tool 260 of FIG. 26, it is possible to polish the object to be polished with higher accuracy.

  In this specification, “the upper surface, the inner side surface, or the outer side surface of the annular elastic body on which a plurality of ultrasonic transducers are arranged” has through holes (for example, the annular elastic body 37 shown in FIG. 26). When the through hole 44a) or the groove is formed, the inner surface of the through hole or groove is also included. That is, for example, in the polishing tool 260 of FIG. 26, each ultrasonic transducer 39 is arranged on the outer side surface opposite to the inner side surface of the annular elastic body 37 facing each space portion 44 of the connecting means 45. However, the “outer side surface” referred to herein also includes the inner surface of the through hole 44a formed in the outer side surface. That is, each ultrasonic transducer 39 shown in FIG. 26 can be arranged on the inner surface of the through hole 44a.

It is a front view which shows the structural example of the conventional grinding | polishing apparatus. It is sectional drawing of the grinding | polishing apparatus 10 cut | disconnected along the cutting-line II line entered in FIG. However, the description of the polishing object 11, the support table 12, and the pipe 21 for supplying the polishing liquid shown in FIG. 1 is omitted. It is a front view which shows the structural example of the grinding | polishing apparatus of this invention. FIG. 4 is an enlarged view of a polishing tool 40 including a connection plate 42, a coupling means 45, an annular elastic body 37, an ultrasonic vibrator 39, and a grindstone 38, which are included in the polishing apparatus 30 shown in FIG. FIG. 5 is an exploded perspective view of the polishing tool 40 shown in FIG. 4. FIG. 5 is a plan view of an annular elastic body 37, an ultrasonic transducer 39, and a grindstone 38 included in the polishing tool 40 of FIG. It is sectional drawing of the cyclic | annular elastic body 37, the ultrasonic transducer | vibrator 39, and the grindstone 28 cut | disconnected along the cutting line II-II line entered in FIG. FIG. 4 is a plan view of the rotary transformer shown in FIG. 3. It is sectional drawing of the rotary transformer cut | disconnected along the cutting line III-III line entered in FIG. It is a front view which shows another structural example of the grinding | polishing tool used for the grinding | polishing apparatus of this invention. It is a disassembled perspective view of the polishing tool 100 shown in FIG. It is a perspective view which shows another structural example of the grinding | polishing tool used for the grinding | polishing apparatus of this invention. It is a perspective view which shows another structural example of the grinding | polishing tool used for the grinding | polishing apparatus of this invention. It is a front view which shows the structure of the ultrasonic transducer | vibrator 39 with which the polishing tool 130 of FIG. 13 is provided. It is a top view which shows the structure of the ultrasonic transducer | vibrator 39 with which the polishing tool 130 of FIG. 13 is provided. It is a front view which shows another structural example of the grinding | polishing tool used for the grinding | polishing apparatus of this invention. FIG. 17 is a plan view of the polishing tool of FIG. 16. It is sectional drawing of the grinding | polishing tool cut | disconnected along the cutting line IV-IV line entered in FIG. It is a perspective view which shows another structural example of the grinding | polishing tool used for the grinding | polishing apparatus of this invention. It is sectional drawing of the grinding | polishing tool 190 cut | disconnected along the cutting line VV line entered in FIG. FIG. 20 is a plan view showing a configuration of an ultrasonic transducer 39 provided in the polishing tool 190 of FIG. 19. FIG. 20 is a front view showing a configuration of an ultrasonic transducer 39 provided in the polishing tool 190 of FIG. 19. It is a top view which shows another structural example of the grinding | polishing tool used for the grinding | polishing apparatus of this invention. It is sectional drawing of the grinding | polishing tool cut | disconnected along the cutting line VI-VI line entered in FIG. It is a top view which shows another structural example of the grinding | polishing tool used for the grinding | polishing apparatus of this invention. It is a perspective view which shows another structural example of the grinding | polishing tool used for the grinding | polishing apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Polishing apparatus 11 Polishing target object 12 Support table 14 Polishing shaft 17 Elastic body 18 Grinding stone 19 Laminated piezoelectric actuator 21 Pipe 30 Polishing apparatus 31 Polishing target object 32 Support table 33 Driving device 34 Rotating shaft 35 Driving device 36 Driving device 37 Annular elastic Body 38 Grinding wheel 38a Grinding wheel piece 39 Ultrasonic vibrators 39a, 39b, 39c, 39d Electrode layer 39e Piezoelectric body 40 Polishing tool 41 Transmission device (rotary transformer)
42 connection plate 43 connection portion 43a connection portion 44 space portion 44a through hole 45 connection means 51 base 52 rotation drive device 52a rotation shaft 53 feed screw 53a nut 54 column 55 bearing 56 arm 57 bearing 58 rotation drive device 58a rotation shaft 59a, 59b Pulley 60 Belt 61a, 61b Nozzle 62a, 62b Screw hole 63 Bolt 64a, 64b, 64c Electrical wiring 65 Power supply 66a Power supply unit 66b Power receiving unit 67a Stator core 67b Rotor core 68a Stator coil 68b Rotor coils 100, 120, 130, 160, 190, 230, 250, 260 Abrasive tool

Claims (8)

A support table on which an object to be polished is supported and fixed, a rotary shaft that can be moved up and down arranged above the support table, a drive device that drives the lifting and lowering of the rotary shaft, a drive device that drives the rotation of the rotary shaft, An elastic body fixed to the base of the rotating shaft, an annular grindstone provided at the lower portion of the elastic body, a plurality of ultrasonic vibrators attached to the elastic body, and electric energy transmitted to the ultrasonic vibrator A polishing device that utilizes ultrasonic vibrations comprising a transmission device,
The elastic body is an annular elastic body, a connecting plate is disposed between the annular elastic body and the base of the rotating shaft, and the lower surface of the peripheral edge of the connecting plate and the upper surface of the annular elastic body are: The plurality of ultrasonic transducers are connected by connecting means each having a plurality of connecting portions and space portions that are alternately formed, and the upper surface of the annular elastic body facing the space portion of the connecting means or the Arranged on the outer side surface or the inner side surface of the annular elastic body below the space portion, or
The elastic body is an annular elastic body, a connection plate is disposed between the annular elastic body and the base of the rotating shaft, and the outer side surface of the peripheral portion of the connection plate and the inner side surface of the annular elastic body are alternately arranged. Are connected by connecting means each formed of a plurality of connecting portions and a space portion, and a plurality of ultrasonic vibrators face the space portion of the connecting means on the inner side surface or the inner side of the annular elastic body A polishing apparatus, wherein the polishing apparatus is disposed on an outer side surface opposite to a side surface or an upper surface of the annular elastic body adjacent to a space portion.   The polishing apparatus according to claim 1, wherein both the connection plate and the connecting portion are elastic bodies.   The polishing apparatus according to claim 1, wherein both the connection plate and the coupling portion are elastic bodies, and the connection plate and the coupling portion are formed integrally with the annular elastic body.   The ratio of the length along the periphery of the connecting portion between the connecting portion and the space portion in the connecting means is in the range of 1: 1 to 1:20 as the ratio of the length of the connecting portion to the length of the space portion. The polishing apparatus according to 1.   The polishing apparatus according to claim 1, wherein the transmission device that transmits electric energy to the ultrasonic vibrator is a rotary transformer.   The polishing apparatus according to claim 1, wherein each of the plurality of connecting portions and the space portion of the connecting means is arranged symmetrically with respect to the rotation axis.   The polishing apparatus according to claim 1, wherein each of the plurality of ultrasonic transducers is arranged symmetrically with respect to the rotation axis.   The polishing apparatus according to claim 1, further comprising a drive device that can rotate the support table and that rotationally drives the support table.

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