CN101242930B - Grinding device using ultrasonic vibration - Google Patents
Grinding device using ultrasonic vibration Download PDFInfo
- Publication number
- CN101242930B CN101242930B CN2006800299977A CN200680029997A CN101242930B CN 101242930 B CN101242930 B CN 101242930B CN 2006800299977 A CN2006800299977 A CN 2006800299977A CN 200680029997 A CN200680029997 A CN 200680029997A CN 101242930 B CN101242930 B CN 101242930B
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- Prior art keywords
- rotating shaft
- endless elastomeric
- connecting plate
- ultrasonic
- lapping device
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- 238000000227 grinding Methods 0.000 title claims abstract description 102
- 239000004575 stone Substances 0.000 claims abstract description 57
- 229920001971 elastomer Polymers 0.000 claims description 29
- 239000000806 elastomer Substances 0.000 claims description 29
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 238000003801 milling Methods 0.000 description 81
- 238000006073 displacement reaction Methods 0.000 description 29
- 230000012447 hatching Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 238000005498 polishing Methods 0.000 description 6
- 230000001105 regulatory effect Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010454 slate Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 235000010210 aluminium Nutrition 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000012943 hotmelt Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000010358 mechanical oscillation Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000737 Duralumin Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- GNKTZDSRQHMHLZ-UHFFFAOYSA-N [Si].[Si].[Si].[Ti].[Ti].[Ti].[Ti].[Ti] Chemical compound [Si].[Si].[Si].[Ti].[Ti].[Ti].[Ti].[Ti] GNKTZDSRQHMHLZ-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
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- IDBFBDSKYCUNPW-UHFFFAOYSA-N lithium nitride Chemical compound [Li]N([Li])[Li] IDBFBDSKYCUNPW-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
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- 229920005989 resin Polymers 0.000 description 1
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- 230000000630 rising effect Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
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- 239000007921 spray Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
- B24B41/0475—Grinding heads for working on plane surfaces equipped with oscillating abrasive blocks, e.g. mounted on a rotating head
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A grinding device using ultrasonic vibration (30) has a support table on the upper surface of which an object (31) to be ground is supported and fixed, a liftable rotating shaft (34) provided above the support table, a drive device (35) for vertically driving the rotating shaft, a drive device (36) for rotating the rotating shaft, an elastic body (37) fixed to a base section of the rotating shaft, an annular grind stone (38) provided at a lower part of the elastic body, ultrasonic vibrators (39) arranged on the elastic body, and a transmission device (41) for transmitting electric energy to the ultrasonic vibrators. The elastic body is an annular elastic body, a connection plate (42) is provided between the annular elastic body and the base section of the rotating shaft, and the connection plate and the annular elastic body are connected by connection means (45) each constructed from alternately formed connection sections and space sections. An object to be ground can be ground at high accuracy by using the grinding device having the ultrasonic vibrators arranged at predetermined positions of the elastic body.
Description
Technical field
The present invention relates to a kind of lapping device that utilizes ultrasonic vibration, be used for grinding smoothly the surface of the grinding object that forms by glass or silicon etc.
Background technology
In the past, in order to form the film-type electronic equipment, used the various substrates of glass substrate, silicon substrate or silicon nitride substrate etc.Use lapping device that the surface grinding of these substrates is got smoothly.In addition, the optics for lens or prism etc. also needs its surface grinding is got smoothly sometimes.For the surface or the one side of grinding so various grinding objects is processed as set thickness with it on one side to the grinding that the grinding object carries out the surface repeatedly, known meeting use utilizes the lapping device of ultrasonic vibration.
Fig. 1 is the front view of the lapping device in the past of record in the patent documentation 1, and Fig. 2 is the cutaway view of the lapping device 10 after cutting open along the hatching I-I among Fig. 1.In addition, in Fig. 2, the diagram of omitting grinding object 11 shown in Figure 1, supporting station 12 and supplying with the pipe 21 of lapping liquid.
Fig. 1 and lapping device 10 shown in Figure 2 comprise: supporting is fixing grind object (abrasive material) 11 the discoid supporting station that can rotate (workpiece fixed station) 12, be configured in supporting station 12 the top and can reciprocating grinding shaft 14 on lifting and the horizontal direction, be fixed on the base portion of grinding shaft 14 elastomer 17, be provided in elastomer 17 the bottom ring-type grinding stone 18, be installed in a pair of laminated piezoelectric actuator 19 on the upper surface of elastomer 17 etc.In addition, in patent documentation 1, also disclose the structure of other modes, but above-mentioned laminated piezoelectric actuator is configured in all on the elastomeric upper surface.
In this lapping device 10, at first will grind object 11 is fixed on the supporting station 12, while making supporting station 12 rotations will offer grinding stone 18 by the ultrasonic vibration that each laminated piezoelectric actuator 19 produces, grind the grinding of object thus then via elastomer 17.
In the document, record following content: above-mentioned lapping device 10, as the in plane vibration that in the abradant surface (lower surface) of grinding stone 18, produces standing wave or produce perpendicular to ultrasonic vibration generating mechanism and use laminated piezoelectric actuator 19 (perhaps langevin transducers (langevinvibrator)) to the elliptical vibration of abradant surface, so can make grinding stone 18 with than large-amplitude vibration, therefore, can high accuracy grind grinding object 11 in short time.
Patent documentation 1: the spy opens flat 5-200659 communique
Utilize the lapping device of patent documentation 1, can high accuracy grind grinding object in short time.But according to present inventor's research, in this lapping device, the part of the ultrasonic vibration that is produced by the laminated piezoelectric actuator is delivered to grinding shaft easily via elastomer, think to be difficult to provide enough big ultrasonic vibration to grinding stone.
And, size as if the ultrasonic vibration that offers grinding stone is not enough, then grinding stone becomes big with the frictional resistance that grinds object, thinks that the precision that produces unwanted mechanical oscillation and grind when both frictions reduces (it is big that the roughness on the surface of the grinding object after the grinding becomes).
Summary of the invention
The object of the present invention is to provide a kind of lapping device that utilizes ultrasonic vibration, can grind grinding object with high accuracy.
The present inventor finds following situation on the basis of further research, promptly by have the endless elastomeric of grinding stone in the bottom, and make between the base portion of rotating shaft of this grinding stone rotation and dispose connecting plate, and link this connecting plate and endless elastomeric via the connect mechanism that constitutes by a plurality of linking parts that alternatively form and clearance portion, above-mentioned linking part is compared with the annular resilient body portion on being connected linking part with the annular resilient body portion between the linking part and is carried out bigger ultrasonic vibration easily, and as if making it produce ultrasonic vibration on the annular resilient body portion that ultrasonic oscillator is fixed on the former, then this ultrasonic vibration is difficult for being delivered to rotating shaft via each linking part (and connecting plate), its major part offers grinding stone via endless elastomeric, so can improve grinding the precision that object grinds.
The present invention is a kind of lapping device that utilizes ultrasonic vibration, comprising: at the fixing supporting station that grinds object of upper surface upper support; Be configured in the liftable rotating shaft of supporting station top; Drive the drive unit of the lifting of rotating shaft; Drive the drive unit of the rotation of rotating shaft; Be fixed on the elastomer on the base portion of rotating shaft; Be provided in the grinding stone of the ring-type of elastomeric bottom; Be attached to a plurality of ultrasonic oscillators on the elastomer and transmit the transfer device of electric energy, it is characterized in that to ultrasonic oscillator,
Above-mentioned elastomer is endless elastomeric; Between the base portion of this endless elastomeric and rotating shaft, dispose connecting plate; The downside surface of the circumference of this connecting plate and the uper side surface of above-mentioned endless elastomeric link by the connect mechanism that is made of a plurality of linking parts that alternatively form and clearance portion; Above-mentioned a plurality of ultrasonic oscillator be configured in above-mentioned endless elastomeric on the uper side surface of the clearance portion of connect mechanism or be configured on the outer lateral side or inner side surface of above-mentioned endless elastomeric of downside of clearance portion; Perhaps
Above-mentioned elastomer is an endless elastomeric, between the base portion of this endless elastomeric and rotating shaft, dispose connecting plate, the outer lateral side of the circumference of this connecting plate and the inner side surface of above-mentioned endless elastomeric link by the connect mechanism that is made of a plurality of linking parts that alternatively form and clearance portion, above-mentioned a plurality of ultrasonic oscillators be configured in above-mentioned endless elastomeric on the upside side of the clearance portion of connect mechanism or be configured on the outer lateral side with the inner side surface opposition side or be configured on the uper side surface with the approaching above-mentioned endless elastomeric of clearance portion.
The optimal way of lapping device of the present invention is as follows.
(1) above-mentioned connecting plate and above-mentioned linking part all are elastomers.
(2) above-mentioned connecting plate and above-mentioned linking part all are elastomers, and connecting plate and linking part and above-mentioned endless elastomeric form.
(3) linking part of connect mechanism and clearance portion likens ratio for the length of linking part and the length of clearance portion in 1: 1 to 1: 20 scope along the length of the periphery of connecting plate.
(4) transfer device to ultrasonic oscillator transmission electric energy is a rotary transformer.
(5) a plurality of linking parts and the clearance portion of connect mechanism reciprocally dispose with respect to rotating shaft respectively symmetrically.
(6) a plurality of ultrasonic oscillators reciprocally dispose with respect to rotating shaft respectively symmetrically.
(7) supporting station can rotate, and has the drive unit that drives the supporting station rotation.
In the lapping device of the present invention, have in the bottom grinding stone ring-type elastomer and make between the base portion of rotating shaft of this grinding stone rotation and dispose connecting plate, and link this connecting plate and endless elastomeric by the connect mechanism that constitutes by a plurality of linking parts that alternatively form and clearance portion.And, because above-mentioned linking part is compared with the annular resilient body portion on being connected linking part with the annular resilient body portion between the linking part and is carried out bigger ultrasonic vibration easily, so the ultrasonic vibration that is produced by set locational each ultrasonic oscillator that is fixed on this endless elastomeric is difficult for being delivered to rotating shaft via each linking part (and connecting plate), its major part has offered grinding stone via endless elastomeric.Therefore, by utilizing lapping device of the present invention, can grind grinding object with high accuracy.
Description of drawings
Fig. 1 is a front view of representing the structure example of lapping device in the past.
Fig. 2 is the cutaway view of the lapping device 10 cut open along the hatching I-I line among Fig. 1.Wherein, the diagram of omitting grinding object 11 shown in Figure 1, supporting station 12 and supplying with the pipe 21 of lapping liquid.
Fig. 3 is the front view of the structure example of expression lapping device of the present invention.
Fig. 4 is the enlarged drawing of lapping device shown in Figure 3 milling tool 40 30 that had, that be made of connecting plate 42, connect mechanism 45, endless elastomeric 37, ultrasonic oscillator 39 and grinding stone 38.
Fig. 5 is the exploded perspective view of milling tool 40 shown in Figure 4.
Fig. 6 is the vertical view of the milling tool 40 of Fig. 4 endless elastomeric 37, ultrasonic oscillator 39 and the grinding stone 38 that are had.
Fig. 7 is the cutaway view of endless elastomeric 37, ultrasonic oscillator 39 and the grinding stone 28 cut open along the hatching II-II line among Fig. 6.
Fig. 8 is the vertical view of rotary transformer shown in Figure 3.
Fig. 9 is the cutaway view of the rotary transformer cut open along the hatching III-III line of Fig. 8.
Figure 10 is other the front view of structure example of the expression milling tool that is used for lapping device of the present invention.
Figure 11 is the exploded perspective view of milling tool 100 shown in Figure 10.
Figure 12 is other the stereogram of structure example of the expression milling tool that is used for lapping device of the present invention.
Figure 13 is the stereogram of other structure example again that expression is used for the milling tool of lapping device of the present invention.
Figure 14 is the front view of structure of the ultrasonic oscillator 39 that had of milling tool 130 of expression Figure 13.
Figure 15 is the front view of structure of the ultrasonic oscillator 39 that had of milling tool 130 of expression Figure 13.
Figure 16 is the front view of other structure example again of the milling tool that uses in the lapping device of the present invention of expression.
Figure 17 is the vertical view of the milling tool of Figure 16.
Figure 18 is the cutaway view of the milling tool cut open along the hatching IV-IV line among Figure 17.
Figure 19 is the stereogram of other structure example again of the milling tool that uses in the lapping device of the present invention of expression.
Figure 20 is the cutaway view of the milling tool 190 cut open along the hatching V-V line among Figure 19.
Figure 21 is the vertical view of structure of the ultrasonic oscillator 39 that had of milling tool 190 of expression Figure 19.
Figure 22 is the front view of structure of the ultrasonic oscillator 39 that had of milling tool 190 of expression Figure 19.
Figure 23 is the vertical view of other structure example again that expression is used for the milling tool of lapping device of the present invention.
Figure 24 is the cutaway view of the milling tool cut open along the hatching VI-VI line among Figure 23.
Figure 25 is the vertical view of other structure example again that is used for the milling tool of lapping device of the present invention.
Figure 26 is the stereogram of other structure example again that is used for the milling tool of lapping device of the present invention.
Description of reference numerals
10... lapping device
11... grinding object
12... supporting station
14... grinding shaft
17... elastomer
18... grinding stone
19... laminated piezoelectric actuator
21... pipe
30... lapping device
31... grinding object
32... supporting station
33... drive unit
34... rotating shaft
35... drive unit
36... drive unit
37... endless elastomeric
38... grinding stone
38a... polishing slate
39a, 39b, 39c, 39d... electrode layer
39e... piezoelectrics
40... milling tool
41... transfer device (rotary transformer)
42... connecting plate
43... linking part
43a... connecting portion
44... clearance portion
44a... open-work
45... connect mechanism
51... base station
52... rotating driving device
52a... rotating shaft
53... feed screw
53a... nut
54... pillar
55... bearing
56... arm
57... bearing
58... rotating driving device
58a... rotating shaft
59a, 59b... belt wheel
60... band
61a, 61b... nozzle
62a, 62b... screwed hole
63... bolt
64a, 64b, 64c... electric wiring
65... power supply
66a... electric power feed unit
66b... electric power receiving element
67a... stator core
67b... rotor core
68a... stator coil
68b... rotor coil
100,120,130,160,190,230,250,260... milling tool
The specific embodiment
Then, use description of drawings lapping device of the present invention.Fig. 3 is the front view of the structure example of expression lapping device of the present invention.Fig. 4 is the enlarged drawing of the milling tool 40 that comprises connecting plate 42, connect mechanism 45, endless elastomeric 37, ultrasonic oscillator 39 and grinding stone 38 that had of lapping device 30 shown in Figure 3, and Fig. 5 is the exploded perspective view of milling tool 40 shown in Figure 4.In addition, Fig. 6 is the vertical view of the milling tool 40 of Fig. 4 endless elastomeric 37, ultrasonic oscillator 39 and the grinding stone 38 that are had, and Fig. 7 is the cutaway view of endless elastomeric 37, ultrasonic oscillator 39 and the grinding stone 38 cut open along the hatching II-II line among Fig. 6.
As from Fig. 3 to shown in Figure 7, lapping device 30 comprises: the fixing supporting station 32 that grinds object 31 of upper surface upper support, be configured in supporting station 32 above liftable rotating shaft 34, drive the lifting of rotating shaft 34 drive unit 35, drive the rotation of rotating shaft 34 drive unit 36, be fixed on the base portion of rotating shaft 34 elastomer 37, be provided in the grinding stone 38, the transfer device 41 etc. that is attached to a plurality of ultrasonic oscillators 39 on the elastomer 37 and transmits electric energy to ultrasonic oscillator of ring-type of the bottom of elastomer 37.
And, in lapping device 30 of the present invention, above-mentioned elastomer 37 is elastomers of ring-type, between the base portion of this endless elastomeric 31 and rotating shaft 34, dispose connecting plate, the uper side surface of the downside surface of the circumference of connecting plate 42 and endless elastomeric 37 links by the connect mechanism 45 that is made of a plurality of linking parts 43 that alternatively form and clearance portion 44, and above-mentioned a plurality of ultrasonic oscillators 39 are configured on the uper side surface of the above-mentioned endless elastomeric 37 of the clearance portion 44 of connect mechanism 45.
The kind of the grinding object 31 that grinds in lapping device 30 is not particularly limited, and can enumerate glass substrate, silicon substrate (silicon wafer), silicon nitride substrate and lithium nitride substrate as its typical example.
Grinding object 31 for example uses hot-melt type adhesive and is fixedly supported upon on the surface of supporting station 32.Grind object and also can be kept by the keeper of for example preparing in addition, by this keeper being fixed on the supporting station and indirectly supporting is fixed on the surface of supporting station.Supporting station and keeper for example can be by bolting, perhaps also can utilize electromagnetic force and fix.
The drive unit (for example motor) 33 that supporting station 32 preferably for example is arranged on the base station 51 and is connected with the lower surface of supporting station 32 drives rotation.The rotating speed of supporting station 32 is set in 50 to 500 rev/mins the scope usually.Parts that supporting station 32 and drive unit 33 also can be used via the transmission of power of for example gear or band etc. and being connected.In addition, also can make supporting station 32 for example move (for example moving back and forth) point-blank along its surface.
The plan view shape of supporting station 32 (shape of upper surface) is circle or regular polygon preferably, so that can stably make platform 32 rotations.
Rotating shaft 34 driven devices 35 that are configured in the top of supporting station 32 drive lifting, and driven device 36 drives rotation.
Therefore, if the rotating driving device 52 of driver 35 and make rotating shaft 52a forward or reverse, the nut 53a that then can make the feed screw 53 that is connected with rotating driving device 52 and bearing 55 is along pillar 54 liftings, thus, can make rotating shaft 34 liftings that are bearing in the bearing 57 that the arm 56 that is connected in nut 53a is equipped with.
On the base portion of this rotating shaft 34, via connecting plate 42 and the connect mechanism 45 and fixing elastomer 37 of ring-type as described above, and, be equipped with the grinding stone 38 of ring-type in the bottom of this endless elastomeric 37.
As the grinding stone 38 of ring-type, for example can use the grinding stone that will form as the abrasive particle bonding of representative with diamond abrasive grain by metal hot melt or resin.Usually, the average grain diameter of abrasive particle is set in the scope of 0.1 to 50 μ m.
For example height setting is about 5～10mm for the grinding stone 38 of the ring-type of lapping device 30, and width is set in about 3～10mm.
In addition, in this specification, " ring-type grinding stone " comprises that a plurality of polishing slates are configured to the situation of ring-type.If constitute the grinding stone of ring-type by a plurality of polishing slates, then the making of the grinding stone of ring-type (the ring-type grinding stone that particularly size is big) becomes easy, in addition, owing to reduce owing to provide ultrasonic vibration or because the thermal expansion of the grinding stone that causes with the friction of grinding object and at the inner stress that produces of grinding stone, so can suppress the generation (for example cracking) of the damage of grinding stone to grinding stone.
The elastomer 37 of the ring-type of supporting grinding stone 38 by with known lapping device in the elastomeric material identical materials that possesses form for example aluminium, bronze, stainless steel or be the ultrasonic wave transitivity good metal material of the aluminium alloy etc. of representative with the duralumin, hard alumin ium alloy.
As the examples of material of the connecting plate 42 between the base portion that is configured in this endless elastomeric 37 and rotating shaft 34, except the metal material that forms above-mentioned ring-type truncated cone 37, also can enumerate the metal material of titanium and iron etc.
Under the situation that endless elastomeric 37 and connecting plate 42 are formed by different mutually materials, preferred metal material by titanium, iron or stainless steel etc. forms connecting plate 42 in order to improve its rigidity (mechanical strength).If the rigidity height of connecting plate 42, then endless elastomeric 37 is bearing on the rotating shaft 34 with being stabilized.
And then endless elastomeric 37 is preferably formed by the big different materials of mutual sound resistance with connecting plate 42.For example, if by aluminium (sound resistance: 17.3 * 10
6Ns/m
3) form endless elastomeric 37, by stainless steel (sound resistance: 45.7 * 10
6Ns/m
3) form connecting plate 42, then since the resistance of both sounds to greatly different, so the ultrasonic vibration that is produced by ultrasonic oscillator 39 is difficult for being delivered to rotating shaft 34 via endless elastomeric 37, connect mechanism 45 and connecting plate 42.
And the uper side surface of the downside surface of the circumference of above-mentioned connecting plate 42 and endless elastomeric 37 links by the connect mechanism 45 that is made of a plurality of linking parts 43 that alternatively form and clearance portion 44.The linking part 43 of connecting plate 42, connect mechanism 45 and endless elastomeric 37 by for example be formed on they separately in screwed hole 62a in be screwed into bolt 63 and link.The examples of material of linking part 43 is identical with the situation of above-mentioned connecting plate 42.
The number of the linking part 43 of connect mechanism 45 (perhaps clearance portion 44) does not limit especially, but preferred respectively in 3 to 30 scope.If discontented three of the number of linking part 43 (perhaps clearance portion 44), then endless elastomeric 37 is bearing on the connecting plate 42 astatically, so the precision of grinding object has the tendency of reduction, on the other hand, the number of linking part 43 (perhaps clearance portion 44) is if surpass 30, and then the making of milling tool 40 bothers.
And a plurality of ultrasonic oscillators 39 configuration that is used to produce the ultrasonic vibration that offers grinding stone 38 is fixed on and the uper side surface (linking part 43 that promptly adjoins each other and the uper side surface of the annular resilient body portion between the linking part 43) of the endless elastomeric 37 that the clearance portion 44 of connect mechanism 45 is faced.
As each ultrasonic oscillator 39, for example use to comprise along the tabular piezoelectrics of the shape of endless elastomeric 37 bendings and be attached to the upper surface of these piezoelectrics respectively and the piezoelectric vibrator of a pair of electrode layer on the lower surface.
As the typical example of the material of piezoelectrics, can enumerate the piezoceramic material of titanium silicate lead plumbate class.For example polarized processing on its thickness direction of piezoelectrics.As the examples of material of electrode layer, can enumerate the metal material of silver or phosphor bronze etc.
A plurality of ultrasonic oscillators 39, oppositely (polarised direction of the piezoelectrics of a side oscillator is for vertically upward mutually for the polarised direction of the piezoelectrics of the ultrasonic oscillator that order adjoins each other, and the polarised direction of the opposing party's oscillator is for vertically downward), be configured in the above-mentioned both allocations on the uper side surface of endless elastomeric 37.
Each ultrasonic oscillator 39 for example uses epoxy resin and is fixed on the endless elastomeric 37.Utilize this epoxy resin to make the electrode layer and the endless elastomeric 37 mutual electric insulations of the lower surface of each ultrasonic oscillator 39.In addition, apply for example coating of insulating properties on the surface of each ultrasonic oscillator 39, thus, the cooling that a pair of electrode layer that prevents ultrasonic oscillator uses when grinding is with liquid (for example water) electric short circuit mutually.
The electrode layer of the upper surface of these a plurality of ultrasonic oscillators 39 uses electric wiring 64a reciprocally to be electrically connected, and the electrode layer of lower surface uses electric wiring 64b and reciprocally is electrically connected.
In lapping device 30, the transfer device 41 as transmit electric energy to above-mentioned a plurality of ultrasonic oscillators 39 uses rotary transformer.
Fig. 8 is the vertical view of rotary transformer (transfer device) 41 shown in Figure 3, and Fig. 9 is the cutaway view of the rotary transformer 41 cut open along the hatching III-III line among Fig. 8.Below, the structure and the action of rotary transformer 41 are described with reference to Fig. 3 to Fig. 9.
Electric power feed unit 66a is made of circular stator core 67a and stator coil 68a, and electric power receiving element 66b is made of circular rotor core 67b and rotor coil 68b.And each freedom of stator core 67a and the rotor core 67b for example magnetic material of ferrite etc. forms, along forming circular groove on its all direction.Stator coil 68a and rotor coil 68b have lead is wound as coiled type along the length direction (Zhou Fangxiang) of the circular groove that go up to form separately of stator core 67a and rotor core 67b structure separately.
On the stator coil 68a of this electric power feed unit 66a, electrically connect power supply 65, and on the rotor coil 68b of electric power receiving element 66b, electrically connect each ultrasonic oscillator 39 via electric wiring 64c.In addition, the upper end of electric wiring 64c is connected with rotor coil 68b, the inside of the rotating shaft 34 by forming hollow form, the then open-work that forms of the centre by connecting plate 42, and lower end and a plurality of ultrasonic oscillator 39 are electrically connected.
And, supply with the electric energy that produces by power supply 65 to the stator coil 68a of rotary transformer 41, thus, stator coil 68a magnetically combines mutually with rotor coil 68b.Therefore, even if the electric energy that supplies among the said stator coil 68a also can be delivered to rotor coil 68b at rotor coil 68b (being electric power receiving element 66b) when rotating with rotating shaft 34.Therefore, the electric energy that is produced by power supply 65 can be offered each ultrasonic oscillator 39 that rotates with rotating shaft 34 and endless elastomeric 37 when grinding object 31.
By supplying with the electric energy that produces by power supply 65 to each ultrasonic oscillator 39 (each electrode layer of the piezoelectric vibrator that uses as ultrasonic oscillator) (for example, alternating voltage) ultrasonic vibration that produces offers the grinding stone 38 of ring-type via endless elastomeric 37.
In addition, as the transfer device that transmits electric energy to ultrasonic oscillator, also can replace above-mentioned rotary transformer and use for example collector ring.Above-mentioned rotary transformer is because via electric power feed unit that disposes non-contactly mutually and electric power receiving element transmission electric energy, so the rotating speed that has up to rotating shaft is 10000 rev/mins of advantages that electric power can both stably be provided to the ultrasonic oscillator that rotates with rotating shaft.On the other hand, collector ring is if the rotating speed of rotating shaft surpasses 5000 rev/mins, and then being difficult to stably provides electric power to the ultrasonic oscillator that rotates.
Then, the order of utilizing lapping device 30 to grind objects 31 is described simply.
At first, use the binding agent of heat molten type will grind on the keeper that object 31 is temporarily fixed at steel.Then, the temporary fixed keeper that above-mentioned grinding object 31 arranged is utilized electromagnetic force for example and be fixed on the upper surface of supporting station 32 of lapping device 30.
Then, make drive unit 36 actions, make rotating shaft with for example 5000 rev/mins rotating speed rotation.Then, will offer a plurality of ultrasonic oscillators 39 of milling tool 40 by the electric energy that power supply 65 produces via rotary transformer 41.Thus, the ultrasonic vibration that is produced by each ultrasonic oscillator 39 offers the grinding stone 38 of ring-type via endless elastomeric 37.
On the other hand, when grinding, in order to reduce grinding stone 38 suppresses unnecessary mechanical oscillation with the frictional resistance that grinds object 31 generation, and suppress to grind object owing to the temperature rising improves the precision of grinding with the friction of grinding stone, for example spray the liquid (for example water) of cooling usefulness, when grinding, rotate and move to the liquid of jet surface cooling usefulness of grinding object 31 of the below of nozzle 61a with supporting station 32 from nozzle 61a.Similarly, the liquid of cooling usefulness drips to the inside of rotating shaft 34 from nozzle 61b, and the inside of this liquid by rotating shaft 34 open-work of the central authorities by being formed on connecting plate 42 then drops to the surface that moves to the grinding object 31 below the rotating shaft 34 of supporting station 32 rotations when grinding and is in contact with it.
And, make drive unit 33 actions, drive supporting station 32 with for example 300 rev/mins rotating speed rotation, and make drive unit 35 action and make rotating shaft 34 descend gradually, thus, contact near having received near the lower end of side of grinding stone 38 of ultrasonic vibration the upper end with the side of grinding object 31, then the integral body on the surface (upper surface) of grinding (grind and cut) grinding object 31.Then, become set thickness while make rotating shaft 34 further declines continue to grind object 31 up to it.
As mentioned above, in lapping device 30 of the present invention, have the endless elastomeric 37 of grinding stone 38 in the bottom and make between the base portion of rotating shaft 34 of this grinding stone 38 rotations and dispose connecting plate 42, this connecting plate 42 links by the connect mechanism 45 that is made of a plurality of linking parts 43 that alternatively form and clearance portion 44 with ring-type spring shape body 37.And, because above-mentioned linking part 43 is compared with the annular resilient body portion on being connected linking part 43 with the annular resilient body portion between the linking part 43 and is carried out bigger ultrasonic vibration easily, so the ultrasonic vibration that is produced by set locational each ultrasonic oscillator 39 that is fixed on this endless elastomeric 37 is difficult for being delivered on the rotating shaft 34 via each linking part 43 (and connecting plate 42), its major part offers grinding stone via endless elastomeric 37.Therefore, the lapping device 30 of the application of the invention can grind object 31 with high accuracy.
In the lapping device of the present invention, the ratio along the length of the periphery of connecting plate of the linking part of above-mentioned connect mechanism and clearance portion is the ratio of length with the length of clearance portion of linking part, preferably in 1: 1 to 1: 20 scope.Under the situation of above-mentioned lapping device 30, as shown in Figure 5, the length (L of above-mentioned linking part 43
1) with the length (L of clearance portion 44
2) ratio be set at general 1: 8.
If the length (L of above-mentioned linking part 43
1) with the length (L of clearance portion 44
2) the i.e. (L of ratio
2/ L
1) value less than 1, then connecting plate 42 is combined securely with endless elastomeric 37, both carry out ultrasonic vibration easily as the works of one, so the ultrasonic vibration that is produced by each ultrasonic oscillator 39 is easily via the linking part 43 of connect mechanism 45, be delivered to rotating shaft 34 then via connecting plate 42.Therefore, can not provide enough ultrasonic vibrations to grinding stone 38, the precision of grinding object reduces.On the other hand, if above-mentioned (L
2/ L
1) value surpass 20, the less rigid of each linking part 43 then, grinding stone 38, reduces so grind the precision of object by with the unsure state supporting with respect to rotating shaft 34.
And then, a plurality of linking parts of preferred above-mentioned connect mechanism 45 43 and clearance portion 44 separately reciprocally with respect to rotating shaft (among Fig. 3 34) configuration symmetrically.Regulate the frequency of the ultrasonic vibration that produces by each ultrasonic oscillator 39 by disposing a plurality of linking parts 43 in this wise, for example on endless elastomeric 37, produce easily with the chain-dotted line among Fig. 6 be the center and shown in double dot dash line the ultrasonic vibration of displacement (being called as the intrinsic vibration of in-plane bending vibration) like that.This ultrasonic vibration, after the displacement shown in the double dot dash line that is shown as Fig. 6, after half period in cycle of vibration, be shown as with the chain-dotted line be the center and with the displacement of the displacement symmetry shown in the double dot dash line.
In addition, a plurality of ultrasonic oscillators 39 are preferred respectively reciprocally with respect to rotating shaft (among Fig. 3 34) configuration symmetrically.This is owing to utilize such configuration, can more easily produce the ultrasonic vibration with respect to the displacement of rotating shaft (among Fig. 3 34) symmetry on endless elastomeric 37.(for example, the ultrasonic vibration of displacement shown in the double dot dash line of above-mentioned Fig. 6).
If make endless elastomeric 37 produce shown in double dot dash line among Fig. 6 the ultrasonic vibration of displacement like that, then with on the annular resilient body portion that each linking part 43 is connected produce displacement (vibration) hardly, so the ultrasonic vibration that is produced by each ultrasonic oscillator 39 is delivered to connecting plate via each linking part 43 hardly, its major part offers grinding stone 38 via endless elastomeric 37.Therefore, can grind object with higher precision.
In addition.Make ultrasonic vibration that endless elastomeric 37 produces (for example in order to regulate, the intrinsic vibration of displacement like that shown in double dot dash line among above-mentioned Fig. 6) frequency, utilize FInite Element to carry out the Calculation of Natural Frequencies of milling tool, the shape of regulating connecting plate 42, connect mechanism 45, endless elastomeric 37 or grinding stone 38 gets final product.
In addition, in the clearance portion 44 of above-mentioned bindiny mechanism 45, also can fill the material (for example the sound resistance silicone rubber greatly different etc.) that ultrasonic vibration that order produces is difficult for being delivered to connecting plate 42 on endless elastomeric 37 with the metal material of formation endless elastomeric.
Figure 10 is the front view of other structure example of the milling tool that uses in the lapping device of the present invention of expression, and Figure 11 is the exploded perspective view of milling tool 100 shown in Figure 10.Structure milling tool 40 with Fig. 4 except following aspect of Figure 10 and milling tool 100 shown in Figure 11 is identical, difference is: each linking part 43 with connect mechanism 45 is fixed on the endless elastomeric 37 in advance, and by bolt being screwed among the screwed hole 62a that is formed on connecting plate 42 and each linking part 43 connecting plate 42 and each linking part 43 is interfixed.
In addition, the frequency of the ultrasonic vibration that produces by each ultrasonic oscillator 39 of regulating by milling tool 100, can make endless elastomeric 37 produce for example being scribed ss the center with Figure 10 mid point and as double dot dash line the ultrasonic vibration (being called as the different intrinsic vibration of the intrinsic vibration vibration of face vertical curve, that illustrated with the above-mentioned Fig. 6 of use) of displacement.This ultrasonic vibration after the displacement shown in the double dot dash line that is shown as Figure 10, after half period in cycle of vibration, be shown as with the chain-dotted line be the center and with the displacement of the shape of above-mentioned double dot dash line symmetry.
If make endless elastomeric 37 produce shown in double dot dash line among Figure 10 the ultrasonic wave of displacement like that, then with on the annular resilient body portion that above-mentioned each linking part 43 is connected produce displacement (vibration) hardly, so the ultrasonic vibration that is produced by each ultrasonic oscillator 39 is delivered to connecting plate 42 via each linking part 43 hardly, its major part offers grinding stone 38 via endless elastomeric 37.Therefore, can grind object with higher precision.
In addition, the frequency of the ultrasonic vibration that produces by each ultrasonic oscillator 39 of regulating by milling tool 100, can make endless elastomeric 37 produce with Fig. 6 in the ultrasonic vibration of displacement in the same manner of the displacement shown in the double dot dash line.
Figure 12 is the stereogram of other structure example again of the milling tool that uses in the lapping device of the present invention of expression.The structure of the milling tool 120 of Figure 12 milling tool 40 with Fig. 4 except following aspect is identical, difference is: connecting plate 42 all is elastomer (being formed by the metal material identical with the material of above-mentioned endless elastomeric 37) with linking part 43, and connecting plate 42 forms with linking part 43 and endless elastomeric 37.
Like this, if connecting plate 42 forms with linking part 43 and endless elastomeric 37, then, can make milling tool 120 simply by for example discoid metal member made being carried out the processing of perforate on its direction of principal axis, machining is used as the clearance portion 44 of connect mechanism 45 on diametric(al) then a plurality of open-works and mounting ultrasonic oscillator 39 and grinding stone 38.In addition, as the grinding stone 38 of the ring-type of milling tool 120, use the grinding stone that a plurality of polishing slate 38a is configured to ring-type.
Then, the frequency of the ultrasonic vibration that produces by each ultrasonic oscillator 39 of regulating by milling tool 120, can generation and Fig. 6 or Figure 10 in the ultrasonic vibration of the displacement displacement similarly shown in the double dot dash line.Among Figure 12, the displacement of the vibration when representing to make the endless elastomeric 37 of milling tool 120 to produce the identical ultrasonic vibration of situation with the milling tool 100 of Figure 10 with chain-dotted line and double dot dash line.
Figure 13 is the stereogram of other structure example again of the milling tool that uses in the lapping device of the present invention of expression.The structure of the milling tool 130 of Figure 13 milling tool 120 with shown in Figure 12 except following difference is identical, and difference is: a plurality of ultrasonic oscillators 39 are configured on the outer lateral side of endless elastomeric 37 of downside of clearance portion 44 of connect mechanism 45.
Like this, the outer lateral side (perhaps inner side surface) of the endless elastomeric 37 of the downside of the also configurable clearance portion 44 at connect mechanism 45 of a plurality of ultrasonic oscillator 39.
When the outer lateral side (perhaps inner side surface) that a plurality of ultrasonic oscillators is configured in endless elastomeric goes up, as each ultrasonic oscillator, the ultrasonic oscillator that preferred use for example has following structure.
Figure 14 and Figure 15 are to be respectively the front view and the vertical view of the structure of the ultrasonic oscillator 39 that had of the milling tool 130 of Figure 13.
Figure 14 and ultrasonic oscillator 39 shown in Figure 15 comprise: a pair of electrode layer 39b, the 39b that dispose along pair of electrode layers 39a, the 39a of the piezoelectrics 39e of the shape of the periphery bending of endless elastomeric 37, the upper portion ground configuration of these piezoelectrics of clamping 39e on thickness direction, in the mode of clamping lower portion.By the piezoelectrics of a pair of electrode layer 39a, 39a clamping parts in the polarized processing on the direction of inboard of side nearby from the paper of Figure 14, by the piezoelectrics of a pair of electrode layer 39b, 39b clamping part from the polarized processing on the direction of side nearby of the inboard of the paper of Figure 14.Both all there was not polarized processing (not using) as ultrasonic oscillator by the piezoelectrics of a pair of electrode layer 39b, 39b clamping part by a pair of electrode layer 39a, 39a clamping yet.
Constitute the group of the electrode layer of (outer surface that is provided in oscillator) with the electrode layer 39a and the electrode layer 39b by the side nearby of the paper that is positioned at Figure 14 of such ultrasonic oscillator 39, and a certain side's the group of electrode layer of group of electrode layer that is made of (inner surface that is provided in oscillator) the electrode layer 39a and the electrode layer 39b of the inboard that is positioned at paper is for anodal, with the group of the opposing party's electrode layer is negative pole and supply with alternating voltages to ultrasonic oscillator 39, thus, piezoelectric vibrator 39 is that the center produces shown in double dot dash line the ultrasonic vibration of displacement like that with the chain-dotted line among Figure 14 for example.This ultrasonic vibration is in being shown as Figure 12 after the displacement shown in the double dot dash line, and after the half period in cycle of vibration, being shown as with the chain-dotted line is center and with respect to the displacement of the shape of above-mentioned double dot dash line symmetry.
And, supply with alternating voltage separately so that to supply to the phase place of alternating voltage of the oscillator that adjoins each other anti-phase (for example when the group with the electrode layer on the outer surface of the oscillator that is provided in a side is positive pole to a plurality of ultrasonic oscillators 39 of the milling tool 130 of Figure 13, the group that is provided in the electrode layer on the opposing party's the outer surface of oscillator is a negative pole), thus, can make endless elastomeric 37 produce shown in double dot dash line among above-mentioned Figure 13 the ultrasonic vibration of displacement like that.
Figure 16 is the front view of other structure example again of the milling tool that uses in the lapping device of the present invention of expression, and Figure 17 is the vertical view of the milling tool 160 of Figure 16, and Figure 18 is the cutaway view of the milling tool 160 cut open along the hatching IV-IV line of Figure 17.
The structure of the milling tool 160 of Figure 16 milling tool 130 with Figure 13 except the shape set of the outboard peripheries separately of the elastomer 37 of connecting plate 42 and ring-type is octagon is identical.
If with the shape set of the outboard peripheries (perhaps inboard periphery) of endless elastomeric 37 be in this wise polygon (especially, the regular polygon that can make endless elastomeric stably rotate), then the outer lateral side of the endless elastomeric 37 of the downside of the clearance portion 44 of connect mechanism 45 (perhaps inner side surface) is the plane, as the ultrasonic oscillator that is attached on this outer lateral side (perhaps inner side surface), can use the flat oscillator of easy manufacturing.In addition, the outboard peripheries of connecting plate 42 or the shape of inboard periphery do not limit especially, but if be set at the shape identical with endless elastomeric 37, then the making of milling tool 160 becomes easy.
In addition, as shown in figure 17, by the phase difference with the alternating voltage supplied with to the ultrasonic oscillator that adjoins each other is that the modes of 90 degree are supplied with alternating voltages to a plurality of ultrasonic oscillators 39, can make endless elastomeric 37 produce and the displacement shown in the double dot dash line for example shown in Figure 13 displacement and the ultrasonic vibration (traveling wave of ultrasonic vibration) of advancing on the Zhou Fangxiang of endless elastomeric 37 in the same manner.The traveling wave of this ultrasonic vibration is if be provided for the grinding stone 38 (each polishing slate 38a) of ring-type, then each polishing slate 38a is at vertical vibration, and also vibration on (Zhou Fangxiang of endless elastomeric) in the horizontal direction is so can improve the speed of grinding object.
Add stream voltage for what provide as described above to a plurality of ultrasonic oscillators 39 that mutual phase difference is set at 90 degree, can be for example on the rotating shaft 34 of the lapping device 30 of Fig. 3, set up the rotary transformer different with rotary transformer 41, be electrically connected the power supply different with its electric power feed unit with power supply 65, utilize a side power supply and rotary transformer that sine wave (sin ripple) alternating voltage is supplied with to each ultrasonic oscillator 39, and utilize the opposing party's power supply and rotary transformer that cosine wave (cos ripple) alternating voltage is supplied with to each ultrasonic oscillator 39.
In addition, for example in Figure 17 with arrow mark into " sin " be that to point to the ultrasonic oscillator represented by this arrow serve as anodal and be that negative pole is supplied with sine wave AC voltage with its medial electrode layer with its lateral electrode layer, with arrow mark into " sin " be that to point to the ultrasonic oscillator represented by this arrow be negative pole and serve as the anodal sine wave AC voltage of supplying with the electrode layer of inboard with the electrode layer in its outside.
In addition, as other method, also can be with the rotary transformer shown in Figure 3 41 binary channelsization (group of on the electric power feed unit of rotary transformer and electric power receiving element, setting up two groups of coils that dispose opposed to each other for example, and can utilize the coil of each group to transmit alternating voltage independently of each other), via a side pass through sine wave AC voltage is supplied with to each ultrasonic oscillator, and via the opposing party pass through the cosine wave alternating voltage is supplied with to each ultrasonic oscillator.
Figure 19 is the stereogram of other structure example again of the milling tool that uses in the lapping device of the present invention, and Figure 20 is the cutaway view of the milling tool 190 cut open along the hatching V-V line of Figure 19.
The structure of the milling tool of Figure 19 milling tool 40 with shown in Figure 4 except following point is identical, difference is: the inner side surface of the outer lateral side of the circumference of connecting plate 42 and endless elastomeric 37 links by the connect mechanism that is made of a plurality of linking parts 43 that alternatively form and clearance portion 44 45, and above-mentioned a plurality of ultrasonic oscillators 39 are configured on the uper side surface near the above-mentioned endless elastomeric 37 of the clearance portion 44 of connect mechanism.
In the lapping device of the present invention of milling tool 190 with Figure 19, because above-mentioned linking part 43 is compared with the annular resilient body portion on being connected linking part 43 with the annular resilient body portion between the linking part 43 and is carried out bigger ultrasonic vibration easily, so be difficult for being delivered to via each linking part 43 (and connecting plate 42) rotating shaft (among Fig. 3 34) by the ultrasonic vibration that set locational each ultrasonic oscillator 39 produced of the uper side surface that is fixed on endless elastomeric 37, its major part offers grinding stone 38 via endless elastomeric 37.Therefore, have the lapping device of the present invention that uses milling tool 190, can grind object with high accuracy with Figure 19 by use.
And, the frequency of the ultrasonic vibration that produces by each ultrasonic oscillator 39 of regulating by milling tool 190, can generation and Fig. 6 or Figure 10 in the ultrasonic vibration of the displacement displacement similarly shown in the double dot dash line.Among Figure 19, the displacement of the vibration when representing to make the endless elastomeric 37 of milling tool 190 to produce the identical ultrasonic vibration of situation with the milling tool 100 of Figure 10 with chain-dotted line and double dot dash line.
In addition, the milling tool 190 of Figure 19, identical with the situation of the milling tool 120 of Figure 12, connecting plate 42 and linking part 43 all are elastomers, connecting plate 42 forms with linking part 43 and endless elastomeric 37.The milling tool 190 of Figure 19 has easy formation as a plurality of clearance portion 44 of connect mechanism 45 and the advantage of a plurality of open-works that use.
As each ultrasonic oscillator 39 of the milling tool 190 of Figure 19, use the ultrasonic oscillator that for example has following structure.
Figure 21 and Figure 22 are respectively the vertical view and the front views of a plurality of ultrasonic oscillators 39 of being had of the milling tool 190 of Figure 19.
Figure 21 and a plurality of ultrasonic oscillators 39 shown in Figure 22 comprise: circular piezoelectrics 39e, dispose in the mode of clamping piezoelectrics 39e on thickness direction four pairs electrode layer altogether ( electrode layer 39a, 39a to, electrode layer 39b, 39b to, electrode layer 39c, 39c to and electrode layer 39d, 39d to).Be clipped in electrode layer 39a, 39a to each piezoelectrics part of, the centering of electrode layer 39c, 39c in the polarized processing on the direction of inboard of side nearby from the paper of Figure 21, be sandwiched in the right of electrode layer 39b, 39b, and each piezoelectrics of the centering of electrode layer 39d, 39d part is from the polarized processing on the direction of side nearby of the inboard of the paper of Figure 14.And the piezoelectrics that are not sandwiched in any centering of these four pairs of electrode layers partly do not have polarized processing (not as ultrasonic oscillator).
And, for example electrode layer 39a, 39b, 39c, the 39d with the side nearby of the paper that is positioned at Figure 21 is positive pole, with four electrode layers of the inboard that is positioned at paper is negative pole and supply with alternating voltages to these ultrasonic oscillators 39, thus, can make endless elastomeric 37 produce shown in double dot dash line among above-mentioned Figure 19 the ultrasonic vibration of displacement like that.
Figure 23 is the vertical view of other structure example again of the milling tool that uses in the lapping device of the present invention of expression, and Figure 24 is the cutaway view of the milling tool cut open along the hatching VI-VI line among Figure 23.
Structure milling tool 190 with Figure 19 except following difference of Figure 23 and milling tool 230 shown in Figure 24 is identical, described difference is: a plurality of ultrasonic oscillators 39 are attached to towards the inner side surface of the endless elastomeric 37 of the clearance portion 44 of connect mechanism 45, and with the outer lateral side of this inner side surface opposition side on.Also can in this wise a plurality of ultrasonic oscillators be attached on the side of endless elastomeric.In addition, as each ultrasonic oscillator 39, use and Figure 14 and the identical structure of ultrasonic oscillator shown in Figure 15.
Figure 25 is the vertical view of other structure example of the milling tool that uses in the lapping device of the present invention of expression.The structure of the milling tool 250 of Figure 25 milling tool 230 with Figure 23 except following difference is identical, described difference is: the outboard peripheries of endless elastomeric 37 (and inboard periphery) be shaped as octagon, and a plurality of ultrasonic oscillator 39 is attached on the outer lateral side of the clearance portion 44 and inner side surface opposition side above-mentioned endless elastomeric 37 of connect mechanism 45.
Figure 26 represents the stereogram of other structure example again of the milling tool that uses in the lapping device of the present invention.The structure of the milling tool 260 of Figure 26 milling tool 230 with Figure 23 except following difference is identical, described difference is: connect mechanism 45 with each fixes three ultrasonic oscillators 39 on the outer lateral side of the inner side surface opposition side of the endless elastomeric 37 of each clearance portion 44, and, on the upper portion of each oscillator 39 of the outer lateral side of above-mentioned endless elastomeric, form open-work 44a up to the clearance portion 44 of connect mechanism 45.
If be equipped with such open-work 44a, then the clearance portion 44 of open-work 44a and above-mentioned connect mechanism 45 similarly works, and the linking part 43a between open-work 44a and open-work 44a and the linking part 43 of connect mechanism 45 play a part identical.Therefore, the ultrasonic vibration that is produced by each ultrasonic oscillator 39 is difficult for being delivered to from the above-mentioned open-work 44a of endless elastomeric 37 part of upside.Therefore, have the lapping device of the present invention of the milling tool 260 of Figure 26, can grind object with high accuracy more by use.
In addition, in this manual, for " disposing upper surface, inner side surface or the outer lateral side of the endless elastomeric of a plurality of ultrasonic oscillators ", when on these surfaces, forming open-work (the open-work 44a of endless elastomeric 37 for example shown in Figure 26) or groove, also comprise the inner surface of this open-work or groove.Promptly, for example in the milling tool 260 of Figure 26, each ultrasonic oscillator 39 is configured on the outer lateral side of the opposition side of the inner side surface of the endless elastomeric 37 of each clearance portion 44 of connect mechanism 45, but said here " outer lateral side " also comprises the inner surface of the open-work 44a that is formed on this outer lateral side.That is each ultrasonic oscillator 39, shown in Figure 26 is also configurable on the inner surface of open-work 44a.
Claims (8)
1. a lapping device that utilizes ultrasonic vibration comprises: at the fixing supporting station that grinds object of upper surface upper support; Be configured in the liftable rotating shaft of the top of this supporting station; Drive the drive unit of this rotating shaft lifting; Drive the drive unit of this rotating shaft rotation; Be fixed on the elastomer on the base portion of this rotating shaft; Be provided in the grinding stone of the ring-type of this elastomeric bottom; Be attached to a plurality of ultrasonic oscillators on this elastomer; And transmit the transfer device of electric energy to this ultrasonic oscillator, it is characterized in that,
This elastomer is endless elastomeric; Between the base portion of this endless elastomeric and rotating shaft, dispose connecting plate; The downside surface of the circumference of this connecting plate and the uper side surface of this endless elastomeric link by the connect mechanism that is made of a plurality of linking parts that alternatively form and clearance portion; A plurality of ultrasonic oscillators be configured in this endless elastomeric on the uper side surface of this clearance portion of this connect mechanism or be configured on the outer lateral side or inner side surface of this endless elastomeric of downside of this clearance portion; Perhaps
This elastomer is an endless elastomeric, between the base portion of this endless elastomeric and rotating shaft, dispose connecting plate, the outer lateral side of the circumference of this connecting plate and the inner side surface of this endless elastomeric link by the connect mechanism that is made of a plurality of linking parts that alternatively form and clearance portion, a plurality of ultrasonic oscillators be configured in this endless elastomeric on the inner side surface of this clearance portion of this connect mechanism or be configured on the outer lateral side with this inner side surface opposition side or be configured on the uper side surface with approaching this endless elastomeric of clearance portion.
2. lapping device as claimed in claim 1 is characterized in that, above-mentioned connecting plate and above-mentioned linking part all are elastomers.
3. lapping device as claimed in claim 1 is characterized in that, above-mentioned connecting plate and above-mentioned linking part all are elastomers, and this connecting plate and this linking part and above-mentioned endless elastomeric form.
4. lapping device as claimed in claim 1 is characterized in that, the ratio along the length of the periphery of connecting plate of the linking part of connect mechanism and clearance portion is the ratio of length with the length of clearance portion of linking part, in 1: 1 to 1: 20 scope.
5. lapping device as claimed in claim 1 is characterized in that, the transfer device that transmits electric energy to ultrasonic oscillator is a rotary transformer.
6. lapping device as claimed in claim 1 is characterized in that, a plurality of linking parts and the clearance portion of connect mechanism reciprocally dispose with respect to rotating shaft respectively symmetrically.
7. lapping device as claimed in claim 1 is characterized in that a plurality of ultrasonic oscillators reciprocally dispose with respect to rotating shaft respectively symmetrically.
8. lapping device as claimed in claim 1 is characterized in that supporting station can rotate, and has the drive unit that drives this supporting station rotation.
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP209192/2005 | 2005-06-21 | ||
| JP2005209192 | 2005-06-21 | ||
| JP2005217979 | 2005-06-29 | ||
| JP217979/2005 | 2005-06-29 | ||
| JP2006161552 | 2006-05-15 | ||
| JP161552/2006 | 2006-05-15 | ||
| PCT/JP2006/312440 WO2006137453A1 (en) | 2005-06-21 | 2006-06-21 | Grinding device using ultrasonic vibration |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101242930A CN101242930A (en) | 2008-08-13 |
| CN101242930B true CN101242930B (en) | 2010-11-03 |
Family
ID=37570481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800299977A Expired - Fee Related CN101242930B (en) | 2005-06-21 | 2006-06-21 | Grinding device using ultrasonic vibration |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20100197205A1 (en) |
| JP (1) | JPWO2006137453A1 (en) |
| CN (1) | CN101242930B (en) |
| WO (1) | WO2006137453A1 (en) |
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- 2006-06-21 CN CN2006800299977A patent/CN101242930B/en not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| CN101242930A (en) | 2008-08-13 |
| JPWO2006137453A1 (en) | 2009-01-22 |
| US20100197205A1 (en) | 2010-08-05 |
| WO2006137453A1 (en) | 2006-12-28 |
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