JP2007086061A5 - - Google Patents

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Publication number
JP2007086061A5
JP2007086061A5 JP2006226530A JP2006226530A JP2007086061A5 JP 2007086061 A5 JP2007086061 A5 JP 2007086061A5 JP 2006226530 A JP2006226530 A JP 2006226530A JP 2006226530 A JP2006226530 A JP 2006226530A JP 2007086061 A5 JP2007086061 A5 JP 2007086061A5
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JP
Japan
Prior art keywords
insulating layer
pair
electrodes
contact
microstructure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006226530A
Other languages
English (en)
Japanese (ja)
Other versions
JP4823810B2 (ja
JP2007086061A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006226530A priority Critical patent/JP4823810B2/ja
Priority claimed from JP2006226530A external-priority patent/JP4823810B2/ja
Publication of JP2007086061A publication Critical patent/JP2007086061A/ja
Publication of JP2007086061A5 publication Critical patent/JP2007086061A5/ja
Application granted granted Critical
Publication of JP4823810B2 publication Critical patent/JP4823810B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006226530A 2005-08-26 2006-08-23 粒子検出センサ Expired - Fee Related JP4823810B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006226530A JP4823810B2 (ja) 2005-08-26 2006-08-23 粒子検出センサ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005246554 2005-08-26
JP2005246554 2005-08-26
JP2006226530A JP4823810B2 (ja) 2005-08-26 2006-08-23 粒子検出センサ

Publications (3)

Publication Number Publication Date
JP2007086061A JP2007086061A (ja) 2007-04-05
JP2007086061A5 true JP2007086061A5 (es) 2009-10-01
JP4823810B2 JP4823810B2 (ja) 2011-11-24

Family

ID=37973165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006226530A Expired - Fee Related JP4823810B2 (ja) 2005-08-26 2006-08-23 粒子検出センサ

Country Status (1)

Country Link
JP (1) JP4823810B2 (es)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5922470B2 (ja) * 2012-04-12 2016-05-24 アズビル株式会社 クリーンルーム内の粒子を検出する方法
JP7128140B2 (ja) 2019-03-25 2022-08-30 フタバ産業株式会社 Ｅｇｒ装置
CN118112060A (zh) * 2019-04-26 2024-05-31 纳博特斯克有限公司 传感器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6189541A (ja) * 1984-10-08 1986-05-07 Kawasaki Heavy Ind Ltd ガス中の浮遊液滴濃度の測定方法及びその装置
JPH0783830A (ja) * 1993-09-14 1995-03-31 Sanyo Electric Co Ltd 花粉センサ
JPH09138192A (ja) * 1995-09-29 1997-05-27 Ngk Insulators Ltd 多要素粒子センサ及び信号処理電子装置
JP2000310608A (ja) * 1999-04-26 2000-11-07 Tokimec Inc 花粉測定装置
JP2002157511A (ja) * 2000-11-21 2002-05-31 Nippon Telegr & Teleph Corp <Ntt> 花粉情報提供方法およびシステム
JP2003329704A (ja) * 2002-05-14 2003-11-19 Mitsubishi Electric Corp 慣性力センサ、およびその製造方法
JP2005010083A (ja) * 2003-06-20 2005-01-13 Sharp Corp 粒子検出センサー及びそれを用いた粒子検出測定装置。

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