JP2007059948A - Semiconductor chip, method for manufacturing semiconductor chip, lead frame, method for manufacturing lead frame, semiconductor device, and method for manufacturing semiconductor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve the efficiency of information management in semiconductor manufacturing process. <P>SOLUTION: It is possible to perform the information management for each chip 31, each lead frame 93, and each product chip 171 by attaching two dimensional bar codes 30, 91, and 173 individually to each chip 31 arranged on a wafer 50, or each lead frame 93 in which a chip 92 is bonded, or each package product 171 of a semiconductor chip which is sealed with resin, based on chip ID information. Thus, the efficiency and the precision of the information management of the semiconductor device can be improved in all steps with respect to semiconductor manufacturing, such as each of treatment steps, a distribution step, a shipment step, a claim management step and the like in semiconductor manufacturing steps. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a semiconductor chip, a semiconductor chip manufacturing method, a lead frame, a lead frame manufacturing method, a semiconductor device, and a semiconductor device manufacturing method, and more particularly, to a semiconductor device manufacturing process by using a two-dimensional bar code pattern. The present invention relates to a semiconductor chip, a semiconductor chip manufacturing method, a lead frame, a lead frame manufacturing method, a semiconductor device, and a semiconductor device manufacturing method capable of efficiently and accurately performing information management.

  The manufacturing process of a semiconductor device is generally composed of a very large number of processes. Looking at a typical semiconductor device manufacturing process, first, in a wafer processing process, a necessary semiconductor chip is formed on a wafer surface by repeating a photolithography process, an etching process, a cleaning process, and the like. Next, the probe device inspects each chip formed on the wafer for goodness and badness, acquires mapping data, and sends it to the wafer assembly process. In the wafer assembly process, first, the wafer is divided into dies in a dicing process. Next, in the bonding process, a good die is picked up according to the mapping data and mounted on the lead frame. Further, in the wire bonding step, the connection electrodes on the semiconductor chip and the external lead terminals are connected by wire bonding. Then, in the packaging process, the semiconductor device is completed by molding the semiconductor chip with a thermosetting resin and marking predetermined information on the surface of the package.

  As described above, a very large number of complicated processes are required until a semiconductor device is completed, and it is necessary to accurately manage information on semiconductor products in each process. In this regard, in the conventional semiconductor manufacturing process, the focus was on mass-producing semiconductor devices of the same standard and taking advantage of the economies of scale, so information management of semiconductor devices distributed in the process was relatively easy. It was. In other words, in the conventional semiconductor manufacturing process, semiconductor devices processed by the same manufacturing method are collectively processed as one lot and in-process logistics, so each lot is usually processed under the same conditions. Management was also relatively easy.

  However, in recent years, semiconductor devices have been widely used as general products and industrial parts. For example, semiconductor devices such as ASIC (specific application IC) and SOS (system-on-silicon) have a small variety of small quantities. The market demand for production is increasing. In such a semiconductor device for a specific application, for example, in terms of quantity, there may be a sufficient amount by making a plurality of types with one wafer.

  On the other hand, there is a case where a part of a chip can be shipped as a good product, such as a large-capacity memory chip, and it is necessary to individually manage information for each chip even for chips on the same wafer. Has also arisen.

  In this regard, even in the conventional semiconductor manufacturing process, the in-process logistics of the semiconductor device is managed by marking ID information such as numerals and alphabets on the surface of the semiconductor chip on the wafer and the surface of the semiconductor package sealed with resin. Things were going on. However, there is a limit to the amount of information that can be recorded with numbers and alphabets, and it is necessary to perform edge recognition processing when reading numbers and alphabets, making the recognition work difficult, and also being vulnerable to dirt and scratches. was there.

  In this respect, since the reading operation by the optical device can be easily performed, various information is recorded using a one-dimensional barcode pattern in the in-process distribution of the semiconductor device in the semiconductor manufacturing process. However, there is a limit to the amount of information that can be stored in a one-dimensional barcode pattern per unit area, and as the amount of information that you want to place on the one-dimensional barcode pattern increases, the area of the one-dimensional barcode pattern increases accordingly. Information management using a barcode pattern cannot be used in all semiconductor manufacturing processes that handle semiconductor devices with limited information storage space.

  The present invention has been made in view of the above-mentioned problems relating to information management of semiconductor devices in the in-process distribution of a conventional semiconductor manufacturing process, and leads for each chip arranged on a wafer or to which a semiconductor chip is bonded. New and improved semiconductor chip, semiconductor chip manufacturing method, lead frame, and lead frame manufacturing method capable of individually managing information for each frame or each packaged product of a semiconductor chip sealed with resin A semiconductor device and a method for manufacturing the semiconductor device are provided.

  Furthermore, another object of the present invention is new and improved, which is capable of recording various kinds of information in a limited micro space of a semiconductor device to improve the efficiency and accuracy of in-process logistics in the semiconductor manufacturing process. A semiconductor chip, a semiconductor chip manufacturing method, a lead frame, a lead frame manufacturing method, a semiconductor device, and a semiconductor device manufacturing method are provided.

  Furthermore, another object of the present invention is to enable easy acquisition of ID information attached to each chip, each lead frame, and each product chip by using a relatively inexpensive industrial optical device. New and improved semiconductor chip, semiconductor chip manufacturing method, lead frame, lead frame manufacturing method, semiconductor device, and semiconductor device capable of performing highly reliable information acquisition even if damage or damage occurs It is to provide a manufacturing method.

  Furthermore, the present invention provides a user-friendly service during maintenance of shipped products by associating various additional information such as manufacturing process history information and complaint information in the field after shipment with the registered product ID information. A new and improved semiconductor chip, a method for manufacturing a semiconductor chip, a lead frame, a method for manufacturing a lead frame, a semiconductor device, and a method for manufacturing a semiconductor device are provided.

  In order to solve the above-described problems, according to the present invention, a plurality of grid patterns are provided on a surface provided with a plurality of bonding pads in a region surrounded by a peripheral region where the bonding pads are arranged. Accordingly, a semiconductor chip to which a two-dimensional pattern configured by arranging in a first direction and a second direction perpendicular to the first direction is added is provided.

  According to the present invention, in the method for manufacturing a semiconductor chip, a step of projecting and exposing a two-dimensional pattern in a region surrounded by the peripheral region in a wafer state using a mask for the two-dimensional pattern; There is provided a method for manufacturing a semiconductor chip, comprising the step of: die-cutting the wafer to obtain the semiconductor chip separated into individual pieces. The mask for the two-dimensional pattern is, for example, a liquid crystal mask that can change whether each of the plurality of mesh portions is light-transmitting or light-blocking based on information to be recorded as a two-dimensional pattern.

  According to the present invention, a lead frame on which a plurality of the above semiconductor chips are mounted is provided. The lead frame may also be provided with a two-dimensional pattern.

  According to the present invention, in the lead frame manufacturing method, the two-dimensional pattern provided on the lead frame is provided on a surface side on which the semiconductor chip is mounted by a laser. Is provided.

  According to the invention, a plurality of grid patterns are arranged on the surface of a package containing a semiconductor chip in a first direction and a second direction perpendicular to the first direction according to information. A semiconductor device to which the two-dimensional pattern is added is provided. It is also possible to have character information on the surface of the package together with the two-dimensional pattern.

  According to another aspect of the present invention, there is provided a method for manufacturing a semiconductor device, wherein the two-dimensional pattern is provided on the surface of the package with a laser in the method for manufacturing a semiconductor device. It is also possible to provide the two-dimensional pattern and the character information on the surface of the package with a laser.

  In addition, according to the present invention, there is provided a semiconductor device characterized in that a two-dimensional bar code pattern for information management is projected and exposed as chip ID information on each chip arranged on a wafer surface. As chip ID information added to the two-dimensional barcode pattern, unique chip information can be included for each chip.

  The two-dimensional barcode pattern has a very large amount of information that can be recorded per unit area and can be easily recognized by an optical device. Marking is performed for each chip, and information management for each chip can be easily performed.

  In addition, as a method of marking a two-dimensional barcode pattern on each chip, if a projection exposure is performed with a liquid crystal mask capable of changing a translucent pattern for each shot, each wafer is individually used with the same mask. It is possible to give the chip ID information.

  According to the present invention, there is provided a semiconductor device characterized in that an information management two-dimensional barcode pattern is marked as frame ID information on a lead frame to which a semiconductor chip is bonded. The frame ID information added to the two-dimensional barcode pattern can include chip arrangement information in the frame and chip ID information.

  According to such a configuration, it is possible to easily identify a lead frame with a chip that cannot be distinguished by simply looking at each lead frame in the past, and frame ID information can be obtained using an appropriate optical device. By reading out, the chips bonded in the frame can be individually distinguished.

  The present invention also provides a semiconductor device characterized in that an information management two-dimensional barcode pattern is marked as product ID information on the outer peripheral surface of a resin-sealed semiconductor chip. The product ID information recorded in the two-dimensional barcode can include attached information for each chip sealed with resin and chip ID information. According to such a configuration, information management can be performed for each chip even when the chip after molding is not visible.

  Furthermore, according to the present invention, there is provided an information management system for a semiconductor device that individually manages information related to the semiconductor device for each semiconductor device. The information management system registers chip ID information, a reading device that reads the chip ID information, and the read chip ID information, and manages each semiconductor manufacturing process based on the registered chip ID information. And a management unit. In addition, if the chip ID information and the mapping data at the time of probing are managed in association with each other, an erroneous pick-up operation at the time of die bonding can be reduced.

  Furthermore, according to the present invention, there is provided an information management system for a semiconductor device that individually manages information related to the semiconductor device for each semiconductor device. The information management system registers frame ID information, a reading device that reads the frame ID information, and the read frame ID information, and manages each semiconductor manufacturing process based on the registered frame ID information. It consists of a management department.

  Furthermore, according to the present invention, there is provided an information management system for a semiconductor device that individually manages information related to the semiconductor device for each semiconductor device. The information management system registers product ID information, a reading device that reads the product ID information, and registers the read product ID information, and manages the product shipping process based on the registered product ID information. Department.

  As described above, if chip ID information, frame ID information, and product ID information encoded by a two-dimensional barcode pattern are used in the in-process logistics of the semiconductor manufacturing process, fine management can be performed for each chip. Therefore, it is possible to construct a semiconductor manufacturing facility that can flexibly handle high-mix low-volume production.

  In addition, if the manufacturing process history information of each chip is associated with the registered product ID information, or the complaint information in the field after product shipment is associated, each cause of trouble occurring in the semiconductor manufacturing process can be identified. It becomes possible to narrow down to the chip unit, and maintenance service after shipment can be performed more finely.

  As described above, according to the present invention, based on the chip ID information, for each chip arranged on the wafer, for each lead frame to which the chip is bonded, or for a resin-encapsulated semiconductor chip package By attaching a unique two-dimensional barcode pattern to each product, it is possible to individually manage information for each chip, each frame, and each product chip sealed with resin. The efficiency and accuracy of information management of semiconductor devices can be improved in all processes related to semiconductor manufacturing, such as each processing process, logistics process, shipping process, and claim processing process.

  Exemplary embodiments of a semiconductor chip, a semiconductor chip manufacturing method, a lead frame, a lead frame manufacturing method, a semiconductor device, and a semiconductor device manufacturing method according to the present invention will be described below in detail with reference to the accompanying drawings.

  First, FIG. 1 shows an example of a two-dimensional barcode pattern applicable to the present embodiment. As shown in the figure, the two-dimensional barcode pattern 10 is a two-dimensional pattern capable of recording predetermined information by painting the cells 11 that are two-dimensionally developed in black and white according to a predetermined rule. is there. In addition, as for the coding rule that separates the cells of the two-dimensional pattern, it is possible to use a conventional one or create a new one. Since it is not directly related, its detailed description is omitted. However, it is possible to code the data error detection in the coding rule, and in that case, as described later, it is recorded in each chip, each frame, or each resin-encapsulated semiconductor chip. It is possible to reduce errors when reading a two-dimensional barcode pattern.

Here, a one-dimensional barcode pattern conventionally used as a pattern capable of recording various information will be described in comparison with a two-dimensional barcode pattern applied to the present invention.
FIG. 2 shows an example of a typical one-dimensional barcode pattern. As shown in the figure, the one-dimensional barcode pattern 20 is capable of recognizing optical characters with black and white parallel bars 21 having several widths. It is composed of a character string 23 composed of characters in a font style. However, the one-dimensional barcode pattern 20 has a limit in the amount of information that can be recorded in the pattern per unit area, and the area of the one-dimensional barcode pattern increases as the amount of information that is desired to be recorded in the one-dimensional barcode pattern increases. Therefore, the one-dimensional bar code pattern cannot be used as it is for information management of all semiconductor manufacturing processes that handle semiconductor devices with limited information storage space.

On the other hand, according to the inventor's knowledge, the two-dimensional barcode pattern employed in the present invention has the following superior characteristics compared to the conventional character information pattern and one-dimensional barcode pattern. Have.
(1) The amount of information recorded per unit area is much larger than that of a one-dimensional bar code, and the size of the pattern can be set freely, which is suitable for applications where the space to which the pattern is attached is limited.
(2) The pattern forming method is also easy, and various conventional techniques can be applied according to the part where the pattern is formed.
(3) The optical recognition of the pattern is easy, it is resistant to dirt, scratches, etc., and the degree of freedom in the reading direction is excellent, so that the cost required for the information reading apparatus can be kept low.
(4) It is possible to include a code for detecting a data error in the pattern, and therefore it is possible to minimize pattern reading errors.

  As a result of intensive studies in view of the above-described characteristics of the two-dimensional barcode pattern, the present inventor has utilized the two-dimensional barcode pattern in various stages of the semiconductor manufacturing process, thereby enabling in-process logistics of the semiconductor manufacturing process. Thus, the present invention has been conceived to enable efficient and accurate information management.

  Hereinafter, an embodiment using a two-dimensional barcode at each stage of the semiconductor manufacturing process will be described in detail.

1. Embodiment in Wafer Process According to the present embodiment, a two-dimensional barcode pattern 30 as chip ID information is formed in each chip 31-1 on each wafer as shown in FIG. Are recorded as two-dimensional barcode patterns 30-1 to 30-3 at predetermined positions (for example, the lower left position in the illustrated example). In order to record the chip ID information, for example, in the photolithography process of the wiring process performed in the vicinity of the final process of the wafer process, a two-dimensional barcode pattern corresponding to the chip ID information is projected onto a predetermined portion of the chip during projection exposure. Can be exposed.

  FIG. 4 shows an embodiment of a liquid crystal mask for projecting and exposing chip ID information onto each chip. The liquid crystal mask 40 can change the liquid crystal arrangement of each cell to express a light transmitting / shading pattern corresponding to a two-dimensional barcode pattern on the mask surface. The chip ID generator 41 obtains chip ID information such as a product name, lot ID, and chip position coordinates for each chip. The two-dimensional barcode conversion unit 42 converts the chip ID information transmitted from the chip ID generation unit 41 into a two-dimensional barcode pattern. The liquid crystal driver 43 appropriately changes the translucent / light-shielding pattern of each cell of the liquid crystal mask 40, and the translucent / light-shielding pattern converted into the two-dimensional barcode pattern by the two-dimensional barcode conversion unit 42 is This is expressed on the liquid crystal mask 40.

  Then, by using the liquid crystal mask 40 and performing shot exposure at a predetermined position of each chip by a projection exposure apparatus (not shown), a unique two-dimensional barcode pattern can be printed for each chip. After that, a unique two-dimensional barcode pattern can be formed for each chip by performing the same photolithography process and etching process as in the normal process. In the above example, an example in which a different two-dimensional barcode pattern is attached to each chip has been shown. Needless to say, the same two-dimensional barcode pattern can be attached to each chip. .

  As described above, according to the present embodiment, chip ID information for distinguishing each chip can be added to each chip on the wafer with a very small area, which has been impossible in the past. Each chip can be individually distinguished for each chip on the wafer surface. Further, if a two-dimensional barcode pattern is formed on a chip in the wiring process of the wafer process, chip ID information can be recorded for each chip without providing a space for adding a two-dimensional barcode pattern. . Furthermore, if a liquid crystal mask 40 as shown in FIG. 4 is used, different chip ID information can be recorded for each chip using the same mask.

2. Embodiment in Wafer Assembly Process Next, an embodiment in which the chip ID information recorded for each chip as described above is used in the wafer assembly process of the semiconductor manufacturing process will be described.

  In general, in a semiconductor manufacturing process, after a chip is formed on each wafer in a wafer process, a prober device checks the quality of each chip. FIG. 5 shows non-defective chips 51 (white rectangles in FIG. 5), semi-defective chips 52 (hatched rectangles in FIG. 5), defective chips 53 (see FIG. 5) on the wafer 50 inspected in the probe process. An arrangement example of a black rectangle in FIG. And the result of the probe test is managed as mapping data as shown in FIG. The semi-defective chip 52 includes a chip that can be shipped by changing the wiring and the like. As will be described later, according to the present embodiment, information management is individually performed for each chip. Therefore, the semi-defective chip 52 can be easily shipped and the product yield can be improved.

FIG. 7 shows a schematic configuration of an assembly process information management system 70 using mapping data including unique chip ID information for each chip and various information tables described later.
As shown in the figure, the information acquired by the probing process is sent from the probing LAN 71 to the assembly process LAN 73 via the bridge 72 and stored in the database 75 in the data server 74. The assembly process LAN 73 includes a semiconductor manufacturing apparatus that performs each assembly process, for example, a die bonder (DB) 76 that picks up a die-cut chip and mounts it on a lead frame, and an electrode on the chip and an external lead terminal. Wire bonder (WB) 77 connected by bonding, marking machine 78 for marking the surface of a package packaged with thermosetting resin, chip sorter 79 for classifying chips based on the information stamped on the package, etc. are connected. Has been.
Hereinafter, an application example of ID information management according to the present invention in each semiconductor manufacturing apparatus in the chip assembly process will be described in detail.

(A) Embodiment in Die Bonder First, information management based on each chip ID information in the die bonder (DB) 76 will be described.
In the mapping data fetch sequence 80 shown in FIG. 8, first, the die bonder (DB) 76 inquires the data server 74 about the lot ID to be subjected to the bonding process (S81). Then, the data server 74 takes out the wafer mapping data (see FIG. 6B) regarding the inquired lot from the database 75 and transfers it to the die bonder (DB) 76 (S82). The die bonder (DB) 76 performs die bonding processing based on the sent mapping data (S83). At this time, according to the present embodiment, as shown in FIG. 6B, since each chip ID information is associated with the mapping data, when each chip is picked up by the die bonder (DB) 76, The two-dimensional barcode of each chip can be directly recognized and collated with mapping data for each chip. As a result, erroneous pick-up at the time of die bonding can be further reduced. When the bonding process is completed, an end signal is sent to the server 74 and stored in the database 75 (S84), and the process proceeds to the next step.

  As described above, in the die bonder (DB) 76, by using the chip ID information assigned to each chip, compared with the conventional apparatus that relied only on the positional information of the coordinates of the wafer surface, at the time of processing Each chip ID information can be directly recognized by an appropriate optical device and collated with the mapping data, so that it is possible to reduce the incidence of chip mispickup during die bonding.

  The use of the two-dimensional barcode pattern in which the chip ID information directly marked on each chip is recorded has been described above. As shown in FIG. 9, the two-dimensional barcode pattern 91 is bonded to each chip 92. By attaching each frame 93, frame ID information can be recorded in each frame 93.

  FIG. 10 shows an embodiment of a die bonder for marking frame ID information on each frame. The schematic configuration of the illustrated die bonder 100 will be described. A wafer ring 102 on which chips before bonding processing are mounted is stored in a wafer ring storage magazine 101, and from there, the corresponding wafer ring is transferred by a transfer arm (not shown). 102 is taken out and transferred to the processing stage. The bonding arm 103 takes out a chip to be bonded from the wafer ring 102 and transfers it to the bonding head unit 104. A lead frame stored in a lead frame storage magazine 105 is appropriately supplied to the bonding head unit 104 by a lead frame supply device 106, and a chip is bonded to a predetermined position on the lead frame. Reference numeral 107 denotes an image recognition apparatus for correcting the position of the chip bonded on the lead frame and recognizing the chip ID information attached to each chip. In this way, the lead frame that has undergone the bonding process is transferred to the marking unit, where a two-dimensional barcode pattern as frame ID information is printed at a predetermined position by the frame ID information printing laser device 108, It is stored in the lead frame storage magazine 105 by a transfer arm (not shown). The wafer ring that has been bonded is returned to the wafer ring storage magazine 109.

  As described above, by using a die bonder 100 as shown in FIG. 10 and adding a unique two-dimensional barcode pattern 91 to each frame 93, a chip that has been conventionally indistinguishable even when looking at each frame. It is possible to identify the attached lead frame.

Next, an example of using the frame ID information in the chip assembly process system as shown in FIG. 7 will be described. FIG. 11 shows an example of a lead frame chip information table stored and managed in the database 75 of the data server 74. As shown, the lead frame chip information table includes a frame ID. Information, the number of chips, each chip ID information, and the like are recorded and managed in association with a two-dimensional barcode pattern on the frame and a two-dimensional barcode pattern on each chip.
Further, FIG. 12 shows an example of a manufacturing condition information table for each chip managed by the data server 74. As shown in the drawing, each chip ID, product code is included in the manufacturing condition information table for each chip. In addition to basic data such as wafer process flow numbers and probing category codes, the device type, manufacturing conditions, processing date and time, processing equipment, and collected data related to each assembly process are recorded. It is managed in association with the two-dimensional barcode pattern on each chip.

  As described above, the frame ID information and the chip ID information are managed in association with the two-dimensional barcode pattern on the frame and the two-dimensional barcode pattern on each chip. If there is an inquiry about the chip ID information bonded to the frame, the data server 74 searches the information table about the frame, and is bonded to the frame based on the data recorded in the information table. It becomes possible to respond with the chip ID information, and the logistics management of the semiconductor device manufacturing process can be performed efficiently.

Next, still another example of information inquiry / acquisition processing between the die bonder 76 and the data server 74 will be described with reference to the sequence 130 shown in FIG.
First, the die bonder (DB) 76 inquires of the data server 74 about a lot ID to be bonded from now on (S131). Then, the server 74 takes out the wafer mapping data related to the inquired lot from the database 75 and transfers it to the die bonder (DB) 76 (S132). The die bonder (DB) 76 performs a die bonding process based on the sent mapping data (S133). At this time, according to the present embodiment, since each chip ID information is associated with the mapping data, when each chip is picked up by the die bonder (DB) 76, the two-dimensional barcode of each chip is directly used. Since it is possible to perform image recognition and collation with the mapping data for each chip, erroneous pick-up during die bonding is less likely to occur.

  When the bonding process for one frame is completed (S134), the die bonder (DB) 76 notifies the data server 74 of the frame ID information that has been processed and the chip ID information bonded to the frame, and the database 75. The information table shown in FIGS. 11 and 12 is updated (S135). Next, the die bonder (DB) 76 performs the bonding process for the next frame based on the mapping data (S136), and when the bonding process for the frame is completed (S137), the frame ID information and the bonded frame are bonded to the frame. The chip ID information is notified to the data server 74, and the information table in the database 75 is updated (S138). Thereafter, the same procedure is repeated, and when the bonding process relating to the lot for which information has been provided from the data server 74 is completed, the fact is reported to the data server 74 (S139), and the process proceeds to the next step.

  As described above, according to the present embodiment, information about each chip recorded in the information table of the data server 74 is converted into a two-dimensional code pattern recorded in each chip and a two-dimensional code pattern recorded in each frame. Since management is performed in association with each other, it is possible to improve the efficiency of the subsequent in-process logistics process and to improve information management accuracy. For example, in subsequent manufacturing apparatuses, if frame ID information can be recognized by an appropriate image recognition apparatus, the chip ID information bonded to the frame and the manufacturing conditions of each chip are fetched from the information table stored in the data server 74. Therefore, accurate processing corresponding to each chip can be performed.

(B) Embodiment in Wire Bonder Next, as a specific example of the use of the information, the information table stored in the data server 74 and the two-dimensional barcode recorded in each chip and each frame are used in the wire bonding process. Will be described.

  FIG. 14 shows an outline of the wiring between the chip and the lead in the wire bonding process. In the wire bonding process according to the present embodiment, as shown in the drawing, the peripheral area of the chip 142 on which the two-dimensional code 141 is arranged. When the wiring 145 is wired between the bonding pad 143 and the lead 144 arranged in FIG. 15, an information inquiry / acquisition processing sequence 150 as shown in FIG. 15 is performed.

Hereinafter, the information inquiry / acquisition processing sequence 150 in the wire bonding process will be described with reference to FIGS. 15 and 16. First, the wire bonder (WB) 77 inquires of the data server 74 about the lot ID to be processed. (S151). In response to the inquiry, the data server 74 extracts the wiring information and mapping data of the target lot from the information table stored in the database 75, and returns it to the wire bonder (WD) 77 (S152). The lot wiring information includes a wiring pattern of each chip, category data of each chip, and the like.

  Then, the wire bonder (WB) 77 performs bonding (wiring) processing based on the sent information. Next, the bonding processing process according to the present embodiment will be described with reference to FIG. . First, the wire bonder (WB) 77 fetches product type wiring information and mapping data based on the lot ID from the data server 74 (S161), and supplies the corresponding chip to the bonding stage (S162). The wire bonder (WB) 77 recognizes the ID information on the frame and the chip by an appropriate image recognition device (S163). Then, based on the recognized ID information, the corresponding category code is acquired from the mapping data (S164), and the wiring pattern is set in the control unit (not shown) in the bonder according to the category type (S165, S166-1, S166-2, ..., S166-N).

  Here, as shown in FIG. 5, the non-defective chip 51, the semi-defective chip 52, and the defective chip 53 exist in the wafer 50. In the semi-defective chip 52, the wiring pattern is changed to a redundant circuit. There are products that can be shipped. In such a case, according to the present embodiment, the semi-defective chip 52 can be shipped by setting an optimum wiring category based on the chip ID information individually recognized for each chip, and the yield can be increased. Can be improved.

  Then, wiring between the bonding pad 143 and the lead 144 of each chip 142 is performed using wiring coordinates corresponding to the wiring pattern set for each chip (S167). When the predetermined bonding process is completed, the wire bonder (WB) 77 reports the fact to the server 74 as shown in FIG. 15 (S154), and proceeds to the next step.

  As described above, according to the present embodiment, the ID information of each chip is directly recognized by an appropriate image recognition device during wire bonding, and the wiring pattern set for each chip type and the probing of each chip. The wire bonding process can be performed by changing the wiring pattern according to the category code. As a result, even if the wiring pattern for each chip is different for chips made from the same wafer, the bonding process can be performed without changing the setup each time as in the conventional device. This makes it possible to increase the processing efficiency and speed.

(C) Embodiment in the stamping machine Next, an embodiment using the chip ID information and the frame ID information according to the present invention in the stamping machine 78 of the assembly process information management system shown in FIG. 7 will be described. Also in this case, the processing efficiency is improved by using the lead frame chip information table (FIG. 11) and the manufacturing condition information table (FIG. 12) stored in the data server 74 in association with each ID information. be able to.

  As a first example, an information inquiry / acquisition sequence 180 for marking predetermined seal information on the package surface of each semiconductor device 171 in which a semiconductor chip as shown in FIG. 17 is packaged with a resin will be described with reference to FIG. While explaining. First, the stamping machine 78 recognizes the frame ID information printed on the end of each lead frame with a laser or the like by an appropriate image recognition device (S181). Next, the stamping machine 78 queries the data server 74 for the recognized lead frame ID information (S182). The data server 74 receives necessary information from the information table stored in the database 75 and obtains necessary information, for example, the chip arrangement and ID information bonded to the lead frame, the stamp pattern and the stamp product of each chip. The name and attached information of the chip are taken out and transferred to the stamping machine 74 (S183). Based on the acquired information, the stamping machine 74 forms a stamping pattern composed of stamping characters 172 (FIG. 17) such as a product name and a characteristic code, and performs stamping on the outer peripheral surface of the package after molding using, for example, a laser device (S184). ). When the marking for one frame is completed, the server 74 is notified of this (S185), and the process proceeds to the next step.

  As described above, according to the embodiment shown in FIG. 18, the product name determined for each chip and the stamp attached information determined according to the characteristics of each chip are used as the ID information attached to the frame. Since it can be acquired by reading and inquiring information to the data server 74, even if the internal chip after molding is not visible, it is possible to perform marking according to the individual chip.

  In the embodiment shown in FIG. 18, a predetermined stamp character is formed on the basis of the frame ID information and the chip ID information. However, the present invention is not limited to such an example, and each chip ID information is used as the stamp information. It is also possible to stamp the two-dimensional barcode pattern itself. Next, such an embodiment will be described with reference to a sequence 190 shown in FIG.

  First, as in the previous embodiment, the stamping machine 78 recognizes the frame ID information printed by a laser or the like at the end of each lead frame with an appropriate image recognition device (S191). Next, the stamping machine 78 queries the server 74 for the recognized lead frame ID information (S192). The server 74 receives the inquiry, and from the information table stored in the database 75, the necessary information, for example, the arrangement and ID information of the chips bonded in the lead frame, the stamp pattern of each chip, and the stamped product name. And the attached information of the chip is taken out and transferred to the stamping machine 74 (S193). Based on the acquired information, the stamping machine 74 forms a stamping pattern including chip ID information 173 in addition to character information 172 such as a product name and a characteristic code as shown in FIG. The outer peripheral surface of the package is marked (S194). When the marking for one frame is completed, the server 74 is notified of this (S195), and the process proceeds to the next step.

  As described above, according to the embodiment shown in FIG. 19, since the chip ID information is also imprinted on the package surface in addition to the normal imprinting information, the operator recognizes the chip ID information with a predetermined image recognition device. Then, by making an information inquiry to the server 74, information management can be performed for each chip. Also, in the field, each chip ID information can be used as key information, and the quality of service such as maintenance can be improved.

(D) Embodiment in Chip Sorter FIG. 20 shows a schematic configuration of a chip sorter 79 for classifying a large number of products manufactured simultaneously. As shown in the figure, the chip sorter 79 picks up the chips stored in the chip storage tray 201 before sorting by a chip transfer head 203 configured to be movable left and right by the chip transfer unit 202, and recognizes the image. Part 204 is transferred. Then, the sorter control unit 205 recognizes the marking information stamped on the chip in the image recognition unit 204 and queries the server 74 for the lot ID of the recognized chip. Upon receiving the inquiry, the server 74 acquires necessary information from the information table and transfers it to the sorter control unit 205. The sorter control unit 205 performs sorting based on the transferred identification information, selects the corresponding storage tray 206-1, 206-2, 206-3, and selects each storage tray 206-1, 206-2, Sort to one of 206-3.

  As described above, in the embodiment shown in FIG. 20, even when various chips are manufactured in the same frame, the information table for identifying the marking information of each chip and storing it in the server 74 By making an inquiry, it is possible to automatically collect and sort only the same type of chips. Note that the chip sorter can be configured to recognize only the character information stamped on the package of each chip and collate with the chip ID information stored in the information table. When the chip ID information is also stamped on the package, the characteristic value of each chip stored in the ID information can be identified and sorted. According to such a configuration, it is possible to sort each chip by characteristic classification even on the same product on the seal, and even when the same product name is required, such as memory, a fine classification is required according to access time Even so, the sorting operation can be performed efficiently.

(3) Other Embodiments The example in which the two-dimensional code according to the present invention is applied to the assembly process has been described above. However, the present invention is not limited to such an example, and is related to unique chip ID information for each chip. Thus, by managing the information table including the processing history, it is possible to improve the efficiency of the final process such as the test process and the distribution process after the assembly, and the maintenance work after the product shipment.

  FIG. 21 shows an example of an information table storing the processing history of each chip used in the process or operation as described above. As shown in the figure, this chip ID information table includes processing history information in the wafer process, processing history information in the assembly process, and test data by probing and chip state inspection.

  By using such a chip ID information table, it is possible to search for necessary information for each chip from the information table stored in the database 75 of the data server 74 using the chip ID information as key information. Conventionally, when a trouble is found in a certain process in the semiconductor manufacturing process, it has been necessary to conduct a process investigation for each lot. However, according to the present embodiment, the investigation range may be limited to each chip. Since this is possible, the processing efficiency can be improved.

  FIG. 22 shows an example in which the information table of FIG. 21 is further expanded. In addition to the contents of the information table in FIG. 21, the chip ID information table shown in the figure includes shipping information such as the shipping destination, packaging form, and shipping date, and field complaint information after shipment such as a complaint history. In this way, in the chip history information table as shown in FIG. 22, shipping information and complaint information can be added and updated as appropriate using chip ID information as key information.

  By using this quality information table, when there is a complaint about the quality of the semiconductor device delivered from the user, matching with the processing history of each semiconductor manufacturing process, search for chip ID information having the same claim contents, Analysis of common elements in the chip group can be performed. As a result, it is possible to narrow down the investigation range of defective chip analysis, which has been difficult in the past, and a great effect can be expected in terms of quality improvement of the semiconductor device and quality assurance for the user.

  The semiconductor chip, the semiconductor chip manufacturing method, the lead frame, the lead frame manufacturing method, the semiconductor device, and the semiconductor device manufacturing method according to preferred embodiments of the present invention have been described above with reference to the accompanying drawings. The invention is not limited to such examples. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

  As described above, according to the present invention, based on the chip ID information, for each chip arranged on the wafer, for each lead frame to which the chip is bonded, or for a resin-encapsulated semiconductor chip package By attaching a unique two-dimensional barcode pattern to each product, it is possible to individually manage information for each chip, each frame, and each product chip sealed with resin. The efficiency and accuracy of information management of semiconductor devices can be improved in all processes related to semiconductor manufacturing, such as each processing process, logistics process, shipping process, and claim processing process.

It is explanatory drawing which shows schematic structure of one Embodiment of the two-dimensional barcode applicable to this invention. It is explanatory drawing which shows schematic structure of the conventional one-dimensional barcode. It is explanatory drawing which shows one Embodiment of the two-dimensional barcode pattern formed on a semiconductor chip based on this invention. It is explanatory drawing which shows one Embodiment of the liquid-crystal mask used in order to carry out projection exposure of the two-dimensional barcode pattern on a semiconductor chip based on this invention. It is explanatory drawing which shows the arrangement | sequence state of the chip | tip of various quality formed on a wafer. An example of a mapping data table stored in a data server is shown, (a) is an example of a conventional mapping data table, and (b) is an example of a mapping data table according to the present invention. 1 is a system configuration diagram showing a schematic configuration of an assembly process information management system to which the present invention is applicable. It is a flowchart which shows the information inquiry / acquisition sequence in the die bonder of the assembly process information management system shown in FIG. It is explanatory drawing which shows one Embodiment of the two-dimensional barcode pattern attached | subjected on the lead frame to which the predetermined | prescribed chip | tip was bonded based on this invention. It is a block diagram which shows schematic structure of the die bonder which can attach | subject a two-dimensional barcode pattern to a lead frame in a bonding process based on this invention. It is explanatory drawing which shows an example of the chip | tip information table produced regarding a lead frame based on this invention. It is explanatory drawing which shows an example of the information table regarding the assembly process conditions produced in the assembly process information management system concerning this invention. It is a flowchart which shows the other example of the information inquiry / acquisition sequence in the die bonder of the assembly process information management system shown in FIG. It is explanatory drawing which shows a mode that the bonding pad and lead | read | reed of a chip | tip by a wire bonder are wired. It is a flowchart which shows an example of the information reference / acquisition sequence in the wire bonder of the assembly process information management system shown in FIG. 6 is a flowchart showing a process of performing wire bonding processing while recognizing chip ID information when the present invention is applied to a bonding process. It is explanatory drawing which shows the state by which the character information and the two-dimensional code pattern were stamped on the package. It is a flowchart which shows an example of the information inquiry / acquisition sequence in the stamping machine of the assembly process information management system shown in FIG. It is a flowchart which shows the other example of the information reference / acquisition sequence in the stamping machine of the assembly process information management system shown in FIG. It is a block diagram which shows schematic structure of the chip sorter which can apply this invention. It is explanatory drawing which shows an example of the information table in which the process history of each chip | tip was stored based on this invention. It is explanatory drawing which shows an example of the information table which added shipping information and claim information to the information table shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Two-dimensional barcode pattern 11 Grid 30 Two-dimensional barcode pattern for chip ID information 31 Chip 40 Liquid crystal mask 41 Chip ID generation part 42 Two-dimensional barcode conversion part 43 Liquid crystal driver 70 Assembly process information management system 71 LAN for probing
72 Bridge 73 LAN for assembly process
74 Data server 75 Database 76 Die bonder 77 Wire bonder 78 Stamping machine 79 Chip sorter 91 Two-dimensional barcode pattern for frame ID information 92 Chip 93 Frame 171 Semiconductor device 172 Character information 173 Two-dimensional barcode pattern for product ID information

Claims (10)

  A plurality of grid-like patterns are formed on a surface provided with a plurality of bonding pads, in a region surrounded by a peripheral region where the bonding pads are arranged, in a first direction and perpendicular to the first direction according to information. A semiconductor chip to which a two-dimensional pattern arranged in a second direction is added. A method of manufacturing a semiconductor chip according to claim 1,
Projecting and exposing a two-dimensional pattern in a region surrounded by the peripheral region in a wafer state using a mask for the two-dimensional pattern;
A step of die-cutting the wafer to form the semiconductor chip,
A method for manufacturing a semiconductor chip, comprising:   3. The liquid crystal mask according to claim 2, wherein the mask for the two-dimensional pattern is a liquid crystal mask that can be changed depending on information to be recorded as a two-dimensional pattern. The manufacturing method of the semiconductor chip of description.   A lead frame on which a plurality of semiconductor chips according to claim 1 are mounted.   The lead frame according to claim 4, wherein the lead frame is also provided with a two-dimensional pattern. The lead frame manufacturing method according to claim 5,
A method of manufacturing a lead frame, wherein the two-dimensional pattern provided on the lead frame is provided on a surface side on which the semiconductor chip is mounted by a laser.   A two-dimensional pattern configured by arranging a plurality of grid patterns in a first direction and a second direction perpendicular to the first direction according to information is added to the surface of the package containing the semiconductor chip. Semiconductor device.   8. The semiconductor device according to claim 7, wherein the surface of the package has character information together with the two-dimensional pattern. A method of manufacturing a semiconductor device according to claim 7 or 8,
A method of manufacturing a semiconductor device, wherein the two-dimensional pattern is provided on a surface of the package with a laser. The semiconductor device according to claim 8,
A method of manufacturing a semiconductor device, wherein the two-dimensional pattern and the character information are provided on a surface of the package with a laser.

Images