JP2007057438A5 - - Google Patents
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- Publication number
- JP2007057438A5 JP2007057438A5 JP2005244800A JP2005244800A JP2007057438A5 JP 2007057438 A5 JP2007057438 A5 JP 2007057438A5 JP 2005244800 A JP2005244800 A JP 2005244800A JP 2005244800 A JP2005244800 A JP 2005244800A JP 2007057438 A5 JP2007057438 A5 JP 2007057438A5
- Authority
- JP
- Japan
- Prior art keywords
- contactor
- pressing member
- probe card
- convex portion
- card according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims 17
- 230000002093 peripheral Effects 0.000 claims 8
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005244800A JP4642603B2 (ja) | 2005-08-25 | 2005-08-25 | プローブカード |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005244800A JP4642603B2 (ja) | 2005-08-25 | 2005-08-25 | プローブカード |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007057438A JP2007057438A (ja) | 2007-03-08 |
JP2007057438A5 true JP2007057438A5 (zh) | 2008-10-09 |
JP4642603B2 JP4642603B2 (ja) | 2011-03-02 |
Family
ID=37921059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005244800A Expired - Fee Related JP4642603B2 (ja) | 2005-08-25 | 2005-08-25 | プローブカード |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4642603B2 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008126601A1 (ja) * | 2007-03-14 | 2008-10-23 | Nhk Spring Co., Ltd. | プローブカード |
JP5306192B2 (ja) * | 2007-05-31 | 2013-10-02 | 株式会社アドバンテスト | プローブカードの固定装置 |
JP5015672B2 (ja) * | 2007-06-21 | 2012-08-29 | 日本電子材料株式会社 | プローブカード |
JP5188161B2 (ja) * | 2007-11-30 | 2013-04-24 | 東京エレクトロン株式会社 | プローブカード |
JP5232555B2 (ja) * | 2008-07-23 | 2013-07-10 | スタンレー電気株式会社 | 光半導体装置モジュール |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6483328B1 (en) * | 1995-11-09 | 2002-11-19 | Formfactor, Inc. | Probe card for probing wafers with raised contact elements |
KR100459050B1 (ko) * | 2000-03-17 | 2004-12-03 | 폼팩터, 인크. | 반도체 접촉자를 평탄화하기 위한 방법 및 장치 |
JP2002267687A (ja) * | 2001-03-12 | 2002-09-18 | Advantest Corp | プローブカード及び試験装置 |
JP3621938B2 (ja) * | 2002-08-09 | 2005-02-23 | 日本電子材料株式会社 | プローブカード |
JP2004205487A (ja) * | 2002-11-01 | 2004-07-22 | Tokyo Electron Ltd | プローブカードの固定機構 |
-
2005
- 2005-08-25 JP JP2005244800A patent/JP4642603B2/ja not_active Expired - Fee Related
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