JP2007041009A - コリオリ質量流量コントローラ - Google Patents
コリオリ質量流量コントローラ Download PDFInfo
- Publication number
- JP2007041009A JP2007041009A JP2006308893A JP2006308893A JP2007041009A JP 2007041009 A JP2007041009 A JP 2007041009A JP 2006308893 A JP2006308893 A JP 2006308893A JP 2006308893 A JP2006308893 A JP 2006308893A JP 2007041009 A JP2007041009 A JP 2007041009A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- sensor
- flow sensor
- mass flow
- sensor tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8404—Coriolis or gyroscopic mass flowmeters details of flowmeter manufacturing methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/8422—Coriolis or gyroscopic mass flowmeters constructional details exciters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/8436—Coriolis or gyroscopic mass flowmeters constructional details signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
- G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
- G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
- G01F1/8472—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having curved measuring conduits, i.e. whereby the measuring conduits' curved center line lies within a plane
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Abstract
【解決手段】質量流量測定装置のための容量型ピックオフセンサを開示する。質量流量測定装置は、フローセンサチューブと、フローセンサチューブを振動させる駆動装置とを有する。容量型ピックオフセンサは、第1の電圧電位に接続可能な少なくとも1枚の導電板を有し、これは第2の電圧電位に接続されたフローセンサチューブの近傍に配置するのに適している。導電板は、フローセンサチューブに関連して配置し、両者の間のギャップを画定する。導電板とフローセンサチューブの間の静電容量は、フローセンサチューブが振動する際に導電板及びフローセンサチューブの相対運動に起因して変化する。本発明の或る側面において、フローセンサチューブがハウジング内部に配置され、フローセンサチューブを振動させるための駆動装置がハウジング外部に配置される。
【選択図】図1
Description
Claims (6)
- コリオリ質量流量センサであって、 フローセンサチューブと、前記フローセンサチューブを内部に設置するハウジングと、 前記ハウジングの外に設置された、フローを振動させるための駆動装置と、少なくとも1個のピックオフセンサとから構成され、該少なくとも1個のピックオフセンサが、コリオリの力に起因する前記フローセンサチューブ内のねじれを測定するべく前記フローセンサチューブに関連して配置されていることを特徴とするセンサ。
- 前記少なくとも1個のピックオフセンサが、前記ハウジング内に配置されていることを特徴とする請求項1に記載のコリオリ質量流量センサ。
- 前記フローセンサチューブに接続された磁石を更に有し、また、前記駆動装置が電磁コイルから構成されることを特徴とする請求項1に記載のコリオリ質量流量センサ。
- 前記電磁コイルが、パワーインダクタからなることを特徴とする請求項3に記載のコリオリ質量流量センサ。
- 前記磁石が、非希土類磁石からなることを特徴とする請求項3に記載のコリオリ質量流量センサ。
- 前記磁石が、ニッケルめっきされたサマリウムコバルト磁石からなることを特徴とする請求項5に記載のコリオリ質量流量センサ。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/430,881 US6526839B1 (en) | 1998-12-08 | 1999-11-01 | Coriolis mass flow controller and capacitive pick off sensor |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001538758A Division JP3904926B2 (ja) | 1999-11-01 | 2000-10-30 | コリオリ質量流量コントローラ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007041009A true JP2007041009A (ja) | 2007-02-15 |
JP4522985B2 JP4522985B2 (ja) | 2010-08-11 |
Family
ID=23709469
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001538758A Expired - Fee Related JP3904926B2 (ja) | 1999-11-01 | 2000-10-30 | コリオリ質量流量コントローラ |
JP2006308893A Expired - Fee Related JP4522985B2 (ja) | 1999-11-01 | 2006-11-15 | コリオリ質量流量コントローラ |
JP2006308900A Pending JP2007041010A (ja) | 1999-11-01 | 2006-11-15 | コリオリ質量流量コントローラ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001538758A Expired - Fee Related JP3904926B2 (ja) | 1999-11-01 | 2000-10-30 | コリオリ質量流量コントローラ |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006308900A Pending JP2007041010A (ja) | 1999-11-01 | 2006-11-15 | コリオリ質量流量コントローラ |
Country Status (15)
Country | Link |
---|---|
US (2) | US6526839B1 (ja) |
EP (1) | EP1226407B1 (ja) |
JP (3) | JP3904926B2 (ja) |
KR (3) | KR20070012864A (ja) |
CN (1) | CN1176352C (ja) |
AR (3) | AR026329A1 (ja) |
AU (1) | AU778137B2 (ja) |
BR (1) | BR0015173A (ja) |
CA (3) | CA2571653C (ja) |
HK (1) | HK1051720A1 (ja) |
MX (1) | MXPA02004348A (ja) |
MY (1) | MY136531A (ja) |
PL (2) | PL195922B1 (ja) |
RU (1) | RU2272257C2 (ja) |
WO (1) | WO2001036918A2 (ja) |
Families Citing this family (33)
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CN100350438C (zh) * | 2001-02-07 | 2007-11-21 | 格伦雷茨家族信托公司 | 具有电容检测器的控制系统 |
US6606917B2 (en) | 2001-11-26 | 2003-08-19 | Emerson Electric Co. | High purity coriolis mass flow controller |
US20030098069A1 (en) | 2001-11-26 | 2003-05-29 | Sund Wesley E. | High purity fluid delivery system |
US7117751B2 (en) * | 2004-01-02 | 2006-10-10 | Emerson Electric Co. | Coriolis mass flow sensor having optical sensors |
JP3812844B2 (ja) * | 2004-09-17 | 2006-08-23 | 株式会社オーバル | 三次モード振動式コリオリ流量計 |
DE102004057088B3 (de) * | 2004-11-25 | 2006-06-01 | Krohne Ag | Coriolis-Massendurchflußmeßgerät und Verfahren zur Herstellung eines Meßrohrs für ein Coriolis-Massendurchflußmeßgerät |
DE102005017698B4 (de) * | 2005-04-07 | 2007-02-08 | Festo Ag & Co. | Sensorvorrichtung mit einem Durchflusssensor und einem Schaltausgang |
US7392709B2 (en) * | 2005-05-16 | 2008-07-01 | Endress + Hauser Flowtec Ag | Inline measuring device with a vibration-type measurement pickup |
JP4966306B2 (ja) * | 2005-08-18 | 2012-07-04 | マイクロ・モーション・インコーポレーテッド | 流量計における多相流体物質に対するセンサ信号を処理するための計測器電子機器及び方法 |
CN101278173B (zh) * | 2005-10-06 | 2011-12-21 | 微动公司 | 磁体装置 |
US7325461B2 (en) | 2005-12-08 | 2008-02-05 | Endress + Hauser Flowtec Ag | Measurement transducer of vibration-type |
JP5060557B2 (ja) * | 2006-07-28 | 2012-10-31 | マイクロ・モーション・インコーポレーテッド | 3つのピックオフ・センサを持つ流量計 |
GB2456937B (en) * | 2006-10-24 | 2011-07-13 | Bradley Fixtures Corp | Capacitive sensing for washroom fixture |
JP5086814B2 (ja) * | 2008-01-07 | 2012-11-28 | 株式会社キーエンス | 流量計 |
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WO2010068202A1 (en) * | 2008-12-10 | 2010-06-17 | Micro Motion, Inc. | Method and apparatus for vibrating a flow tube of a vibrating flow meter |
DE102009030904A1 (de) * | 2009-06-26 | 2010-12-30 | Krohne Ag | Durchflussmessgerät und Verfahren zu dessen Herstellung |
US20120197446A1 (en) * | 2010-12-01 | 2012-08-02 | Glaudel Stephen P | Advanced feed-forward valve-control for a mass flow controller |
EP2812660B1 (en) * | 2012-02-06 | 2021-03-31 | Micro Motion, Inc. | Vibrating meter with a synthetically wrapped case |
CA2893967C (en) * | 2012-12-17 | 2018-07-17 | Micro Motion, Inc. | Improved case for a vibrating meter |
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GB2539504B (en) * | 2015-06-19 | 2019-04-17 | Aqua21 Ltd | Absorption Sensor for Measuring Substance Concentration |
JP6471078B2 (ja) * | 2015-10-26 | 2019-02-13 | 日立オートモティブシステムズ株式会社 | 多結晶材表面の加工方法およびそれを用いて加工された多結晶材の接合方法 |
CN109997018B (zh) | 2016-11-30 | 2021-11-30 | 高准公司 | 计量器校验中使用的测试音的温度补偿 |
WO2019107215A1 (ja) * | 2017-11-30 | 2019-06-06 | 株式会社フジキン | 流量制御装置 |
JP7382339B2 (ja) * | 2018-03-30 | 2023-11-16 | ラム リサーチ コーポレーション | Memsに基づくコリオリ質量流コントローラ |
CN108871480B (zh) * | 2018-07-04 | 2021-03-19 | 韩泽方 | 动密封铰链管式科里奥利质量流量计 |
CN110727294A (zh) * | 2018-07-17 | 2020-01-24 | 北京七星华创流量计有限公司 | 流体传感器及质量流量控制器 |
RU187534U1 (ru) * | 2018-12-14 | 2019-03-12 | Общество с ограниченной ответственностью "ЭлМетро Групп" | Массовый кориолисовый расходомер с узлом контроля наличия разрежения в его корпусе |
US20210178507A1 (en) | 2019-12-13 | 2021-06-17 | Norsk Titanium As | Volumetric plasma gas flow measurement and control system for metal-based wire-plasma arc additive manufacturing applications |
DE102019135303B4 (de) * | 2019-12-19 | 2024-03-14 | Endress + Hauser Flowtec Ag | Messaufnehmer eines Messgerätes zum Erfassen eines Massedurchflusses, einer Viskosität, einer Dichte und/oder einer davon abgeleiteten Größe eines fließfähigen Mediums |
US11333538B2 (en) * | 2020-04-22 | 2022-05-17 | Saudi Arabian Oil Company | Systems and methods for fluid flow measurement with mass flow and electrical permittivity sensors |
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1999
- 1999-11-01 US US09/430,881 patent/US6526839B1/en not_active Expired - Lifetime
- 1999-12-07 PL PL99349630A patent/PL195922B1/pl unknown
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2000
- 2000-10-30 CA CA2571653A patent/CA2571653C/en not_active Expired - Lifetime
- 2000-10-30 KR KR1020067027795A patent/KR20070012864A/ko not_active Application Discontinuation
- 2000-10-30 WO PCT/US2000/029837 patent/WO2001036918A2/en active IP Right Grant
- 2000-10-30 AU AU14428/01A patent/AU778137B2/en not_active Expired
- 2000-10-30 PL PL355608A patent/PL200852B1/pl unknown
- 2000-10-30 BR BR0015173-4A patent/BR0015173A/pt not_active Application Discontinuation
- 2000-10-30 KR KR1020067027798A patent/KR20070012865A/ko not_active Application Discontinuation
- 2000-10-30 CA CA002571655A patent/CA2571655A1/en not_active Abandoned
- 2000-10-30 KR KR1020027005625A patent/KR100798530B1/ko active IP Right Grant
- 2000-10-30 EP EP00976690.8A patent/EP1226407B1/en not_active Expired - Lifetime
- 2000-10-30 RU RU2002113168/28A patent/RU2272257C2/ru active
- 2000-10-30 MY MYPI20005066A patent/MY136531A/en unknown
- 2000-10-30 CA CA002389433A patent/CA2389433C/en not_active Expired - Lifetime
- 2000-10-30 CN CNB008179492A patent/CN1176352C/zh not_active Expired - Lifetime
- 2000-10-30 JP JP2001538758A patent/JP3904926B2/ja not_active Expired - Fee Related
- 2000-10-30 MX MXPA02004348A patent/MXPA02004348A/es active IP Right Grant
- 2000-11-01 AR ARP000105769A patent/AR026329A1/es active IP Right Grant
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2003
- 2003-02-12 US US10/365,023 patent/US7032462B2/en not_active Expired - Lifetime
- 2003-06-05 HK HK03103977A patent/HK1051720A1/xx not_active IP Right Cessation
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2006
- 2006-08-23 AR ARP060103674A patent/AR054943A2/es active IP Right Grant
- 2006-08-23 AR ARP060103673A patent/AR054942A2/es active IP Right Grant
- 2006-11-15 JP JP2006308893A patent/JP4522985B2/ja not_active Expired - Fee Related
- 2006-11-15 JP JP2006308900A patent/JP2007041010A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH09512341A (ja) * | 1994-04-26 | 1997-12-09 | ダイレクト、メジャマント、コーパレイシャン | コリオリ質量流量計 |
JPH09512340A (ja) * | 1994-04-26 | 1997-12-09 | ダイレクト、メジャマント、コーパレイシャン | 調整できる圧力及び密度感度を持つコリオリ質量流量計 |
JPH1038655A (ja) * | 1996-04-27 | 1998-02-13 | Endress & Hauser Frohtec Ag | コリオリ式質量流量センサ |
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