KR100798530B1 - 코리올리 질량 유량 컨트롤러 - Google Patents
코리올리 질량 유량 컨트롤러 Download PDFInfo
- Publication number
- KR100798530B1 KR100798530B1 KR1020027005625A KR20027005625A KR100798530B1 KR 100798530 B1 KR100798530 B1 KR 100798530B1 KR 1020027005625 A KR1020027005625 A KR 1020027005625A KR 20027005625 A KR20027005625 A KR 20027005625A KR 100798530 B1 KR100798530 B1 KR 100798530B1
- Authority
- KR
- South Korea
- Prior art keywords
- sensor tube
- sensor
- flow sensor
- tube
- flow
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8404—Coriolis or gyroscopic mass flowmeters details of flowmeter manufacturing methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/8422—Coriolis or gyroscopic mass flowmeters constructional details exciters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/8436—Coriolis or gyroscopic mass flowmeters constructional details signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
- G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
- G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
- G01F1/8472—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having curved measuring conduits, i.e. whereby the measuring conduits' curved center line lies within a plane
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Abstract
Description
Claims (20)
- 유량 센서 관과 이 유량 센서 관을 진동시키는 구동 장치를 포함하는 질량 유량 측정 장치용의 용량형 픽오프 센서로서,제1 전위에 접속 가능한 하나 이상의 도전판을 포함하고, 이 도전판은 제2 전위에 접속된 유량 센서 관에 인접하게 배치되어 상기 유량 센서 관과의 사이에 틈새(gap)를 형성하게 되어 있어서,상기 유량 센서 관이 진동할 때의 상기 도전판과 유량 센서 관 사이의 상대 운동으로 인하여 상기 도전판과 상기 유량 센서 관 사이의 정전 용량이 변동하도록 되어 있는 것인 용량형 픽오프 센서.
- 제1항에 있어서, 상기 유량 센서 관은 접지 전위에 접속되어 있는 것인 용량형 픽오프 센서.
- 제1항에 있어서, 상기 하나 이상의 도전판은 제1 판과 제2 판을 포함하고, 이들 제1 판과 제2 판은 진동하는 유량 센서 관의 운동에 대해 접선 방향의 평면 내에 있는 것인 용량형 픽오프 센서.
- 제3항에 있어서, 상기 제1 판과 제2 판은 이들 사이에 균일한 틈새를 형성하도록 나란하게 위치 결정되어 있는 것인 용량형 픽오프 센서.
- 제4항에 있어서, 상기 제1 판과 제2 판은 동일한 전위에 있고, 상기 유량 센서 관은 접지 전위에 있는 것인 용량형 픽오프 센서.
- 제5항에 있어서, 상기 제1 판과 제2 판은 대체로 장방형이고, 상기 틈새는 상기 유량 센서 관에 대체로 평행하게 연장되는 것인 용량형 픽오프 센서.
- 제5항에 있어서, 상기 제1 판과 제2 판은 대체로 삼각형이고, 상기 틈새는 유량 센서 관에 대하여 비스듬하게 연장되는 것인 용량형 픽오프 센서.
- 제5항에 있어서, 상기 제1 판과 제2 판은 대체로 톱니 형상이고, 상기 틈새는 대체로 톱니 형상을 이루고 있는 것인 용량형 픽오프 센서.
- 제1항에 있어서, 상기 하나 이상의 도전판은 인쇄 회로 기판으로 구현되어 있는 것인 용량형 픽오프 센서.
- 제9항에 있어서, 상기 인쇄 회로 기판은 센서 블록에 납땜 가능한 이면층 및 보호층을 포함하는 다층 인쇄 회로 기판인 것인 용량형 픽오프 센서.
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/430,881 US6526839B1 (en) | 1998-12-08 | 1999-11-01 | Coriolis mass flow controller and capacitive pick off sensor |
US09/430,881 | 1999-11-01 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020067027798A Division KR20070012865A (ko) | 1999-11-01 | 2000-10-30 | 코리올리 질량 유량 컨트롤러 |
KR1020067027795A Division KR20070012864A (ko) | 1999-11-01 | 2000-10-30 | 코리올리 질량 유량 컨트롤러 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020049006A KR20020049006A (ko) | 2002-06-24 |
KR100798530B1 true KR100798530B1 (ko) | 2008-01-28 |
Family
ID=23709469
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020067027795A KR20070012864A (ko) | 1999-11-01 | 2000-10-30 | 코리올리 질량 유량 컨트롤러 |
KR1020067027798A KR20070012865A (ko) | 1999-11-01 | 2000-10-30 | 코리올리 질량 유량 컨트롤러 |
KR1020027005625A KR100798530B1 (ko) | 1999-11-01 | 2000-10-30 | 코리올리 질량 유량 컨트롤러 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020067027795A KR20070012864A (ko) | 1999-11-01 | 2000-10-30 | 코리올리 질량 유량 컨트롤러 |
KR1020067027798A KR20070012865A (ko) | 1999-11-01 | 2000-10-30 | 코리올리 질량 유량 컨트롤러 |
Country Status (15)
Country | Link |
---|---|
US (2) | US6526839B1 (ko) |
EP (1) | EP1226407B1 (ko) |
JP (3) | JP3904926B2 (ko) |
KR (3) | KR20070012864A (ko) |
CN (1) | CN1176352C (ko) |
AR (3) | AR026329A1 (ko) |
AU (1) | AU778137B2 (ko) |
BR (1) | BR0015173A (ko) |
CA (3) | CA2571653C (ko) |
HK (1) | HK1051720A1 (ko) |
MX (1) | MXPA02004348A (ko) |
MY (1) | MY136531A (ko) |
PL (2) | PL195922B1 (ko) |
RU (1) | RU2272257C2 (ko) |
WO (1) | WO2001036918A2 (ko) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100350438C (zh) * | 2001-02-07 | 2007-11-21 | 格伦雷茨家族信托公司 | 具有电容检测器的控制系统 |
US6606917B2 (en) | 2001-11-26 | 2003-08-19 | Emerson Electric Co. | High purity coriolis mass flow controller |
US20030098069A1 (en) | 2001-11-26 | 2003-05-29 | Sund Wesley E. | High purity fluid delivery system |
US7117751B2 (en) * | 2004-01-02 | 2006-10-10 | Emerson Electric Co. | Coriolis mass flow sensor having optical sensors |
JP3812844B2 (ja) * | 2004-09-17 | 2006-08-23 | 株式会社オーバル | 三次モード振動式コリオリ流量計 |
DE102004057088B3 (de) * | 2004-11-25 | 2006-06-01 | Krohne Ag | Coriolis-Massendurchflußmeßgerät und Verfahren zur Herstellung eines Meßrohrs für ein Coriolis-Massendurchflußmeßgerät |
DE102005017698B4 (de) * | 2005-04-07 | 2007-02-08 | Festo Ag & Co. | Sensorvorrichtung mit einem Durchflusssensor und einem Schaltausgang |
US7392709B2 (en) * | 2005-05-16 | 2008-07-01 | Endress + Hauser Flowtec Ag | Inline measuring device with a vibration-type measurement pickup |
JP4966306B2 (ja) * | 2005-08-18 | 2012-07-04 | マイクロ・モーション・インコーポレーテッド | 流量計における多相流体物質に対するセンサ信号を処理するための計測器電子機器及び方法 |
CN101278173B (zh) * | 2005-10-06 | 2011-12-21 | 微动公司 | 磁体装置 |
US7325461B2 (en) | 2005-12-08 | 2008-02-05 | Endress + Hauser Flowtec Ag | Measurement transducer of vibration-type |
JP5060557B2 (ja) * | 2006-07-28 | 2012-10-31 | マイクロ・モーション・インコーポレーテッド | 3つのピックオフ・センサを持つ流量計 |
GB2456937B (en) * | 2006-10-24 | 2011-07-13 | Bradley Fixtures Corp | Capacitive sensing for washroom fixture |
JP5086814B2 (ja) * | 2008-01-07 | 2012-11-28 | 株式会社キーエンス | 流量計 |
US7930115B2 (en) * | 2008-10-15 | 2011-04-19 | Honeywell International Inc. | Low-power flow meter and related method |
WO2010068202A1 (en) * | 2008-12-10 | 2010-06-17 | Micro Motion, Inc. | Method and apparatus for vibrating a flow tube of a vibrating flow meter |
DE102009030904A1 (de) * | 2009-06-26 | 2010-12-30 | Krohne Ag | Durchflussmessgerät und Verfahren zu dessen Herstellung |
US20120197446A1 (en) * | 2010-12-01 | 2012-08-02 | Glaudel Stephen P | Advanced feed-forward valve-control for a mass flow controller |
EP2812660B1 (en) * | 2012-02-06 | 2021-03-31 | Micro Motion, Inc. | Vibrating meter with a synthetically wrapped case |
CA2893967C (en) * | 2012-12-17 | 2018-07-17 | Micro Motion, Inc. | Improved case for a vibrating meter |
SG10201605528PA (en) * | 2013-04-18 | 2016-08-30 | Micro Motion Inc | Verification of a meter sensor for a vibratory meter |
MX2016012369A (es) * | 2014-04-07 | 2016-12-02 | Micro Motion Inc | Aparato y metodo para detectar flujo asimetrico en medidores de flujo vibratorios. |
GB2539504B (en) * | 2015-06-19 | 2019-04-17 | Aqua21 Ltd | Absorption Sensor for Measuring Substance Concentration |
JP6471078B2 (ja) * | 2015-10-26 | 2019-02-13 | 日立オートモティブシステムズ株式会社 | 多結晶材表面の加工方法およびそれを用いて加工された多結晶材の接合方法 |
CN109997018B (zh) | 2016-11-30 | 2021-11-30 | 高准公司 | 计量器校验中使用的测试音的温度补偿 |
WO2019107215A1 (ja) * | 2017-11-30 | 2019-06-06 | 株式会社フジキン | 流量制御装置 |
JP7382339B2 (ja) * | 2018-03-30 | 2023-11-16 | ラム リサーチ コーポレーション | Memsに基づくコリオリ質量流コントローラ |
CN108871480B (zh) * | 2018-07-04 | 2021-03-19 | 韩泽方 | 动密封铰链管式科里奥利质量流量计 |
CN110727294A (zh) * | 2018-07-17 | 2020-01-24 | 北京七星华创流量计有限公司 | 流体传感器及质量流量控制器 |
RU187534U1 (ru) * | 2018-12-14 | 2019-03-12 | Общество с ограниченной ответственностью "ЭлМетро Групп" | Массовый кориолисовый расходомер с узлом контроля наличия разрежения в его корпусе |
US20210178507A1 (en) | 2019-12-13 | 2021-06-17 | Norsk Titanium As | Volumetric plasma gas flow measurement and control system for metal-based wire-plasma arc additive manufacturing applications |
DE102019135303B4 (de) * | 2019-12-19 | 2024-03-14 | Endress + Hauser Flowtec Ag | Messaufnehmer eines Messgerätes zum Erfassen eines Massedurchflusses, einer Viskosität, einer Dichte und/oder einer davon abgeleiteten Größe eines fließfähigen Mediums |
US11333538B2 (en) * | 2020-04-22 | 2022-05-17 | Saudi Arabian Oil Company | Systems and methods for fluid flow measurement with mass flow and electrical permittivity sensors |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4747312A (en) * | 1986-02-21 | 1988-05-31 | Fischer & Porter Co. | Double-loop Coriolis type mass flowmeter |
WO1992014123A1 (en) | 1991-02-05 | 1992-08-20 | Donald Reed Cage | Improved coriolis mass flow rate meter |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4726227A (en) * | 1984-10-22 | 1988-02-23 | United Technologies Corporation | Angular velocity sensor having low temperature sensitivity |
DE3632800A1 (de) | 1986-09-26 | 1988-04-07 | Flowtec Ag | Nach dem coriolisprinzip arbeitendes massendurchflussmessgeraet |
US4911006A (en) * | 1986-10-03 | 1990-03-27 | Micro Motion Incorporated | Custody transfer meter |
GB8809715D0 (en) | 1988-04-25 | 1988-06-02 | Pa Consulting Services | Fluid mass flow & density sensor |
US4876898A (en) * | 1988-10-13 | 1989-10-31 | Micro Motion, Inc. | High temperature coriolis mass flow rate meter |
US5080131A (en) * | 1989-09-26 | 1992-01-14 | Lintec Co., Ltd. | Mass flow controller |
DE4027936A1 (de) | 1990-09-04 | 1992-03-05 | Rota Yokogawa Gmbh & Co Kg | Massedosierautomat |
US5497665A (en) * | 1991-02-05 | 1996-03-12 | Direct Measurement Corporation | Coriolis mass flow rate meter having adjustable pressure and density sensitivity |
US5448921A (en) | 1991-02-05 | 1995-09-12 | Direct Measurement Corporation | Coriolis mass flow rate meter |
AU5405694A (en) | 1992-10-16 | 1994-05-09 | Unit Instruments, Inc. | Thermal mass flow controller having orthogonal thermal mass flow sensor |
FR2698962B1 (fr) | 1992-12-07 | 1995-02-10 | Commissariat Energie Atomique | Procédé et dispositif de mesure sans contact de la tension et de la vitesse de défilement d'un fil. |
GB9404416D0 (en) * | 1994-03-08 | 1994-04-20 | Turner Intellect Property Ltd | Device for finding concealed studs |
IL112218A0 (en) | 1995-01-02 | 1995-03-30 | Netzer Yishay | A method and apparatus for measuring linear displacements |
DE19601349A1 (de) * | 1996-01-17 | 1997-07-24 | Danfoss As | Durchflußmesser für kleine Mengen |
DE19605923C2 (de) | 1996-02-17 | 2001-09-13 | Danfoss As | Durchflußmesser |
ES2140196T3 (es) * | 1996-04-27 | 2000-02-16 | Flowtec Ag | Captador de caudal masico de coriolis. |
US5854430A (en) | 1996-05-07 | 1998-12-29 | Endress + Hauser Flowtec Ag | Coriolis mass flow sensor |
US5987999A (en) * | 1998-07-01 | 1999-11-23 | Micro Motion, Inc. | Sensitivity enhancing balance bar |
US6249752B1 (en) * | 1998-07-16 | 2001-06-19 | Micro Motion, Inc. | Vibrating conduit parameter sensors, operating methods and computer program productors utilizing real normal modal decomposition |
KR20060116260A (ko) | 1998-12-08 | 2006-11-14 | 에머슨 일렉트릭 컴파니 | 코리올리 질량 유동 제어기 |
-
1999
- 1999-11-01 US US09/430,881 patent/US6526839B1/en not_active Expired - Lifetime
- 1999-12-07 PL PL99349630A patent/PL195922B1/pl unknown
-
2000
- 2000-10-30 CA CA2571653A patent/CA2571653C/en not_active Expired - Lifetime
- 2000-10-30 KR KR1020067027795A patent/KR20070012864A/ko not_active Application Discontinuation
- 2000-10-30 WO PCT/US2000/029837 patent/WO2001036918A2/en active IP Right Grant
- 2000-10-30 AU AU14428/01A patent/AU778137B2/en not_active Expired
- 2000-10-30 PL PL355608A patent/PL200852B1/pl unknown
- 2000-10-30 BR BR0015173-4A patent/BR0015173A/pt not_active Application Discontinuation
- 2000-10-30 KR KR1020067027798A patent/KR20070012865A/ko not_active Application Discontinuation
- 2000-10-30 CA CA002571655A patent/CA2571655A1/en not_active Abandoned
- 2000-10-30 KR KR1020027005625A patent/KR100798530B1/ko active IP Right Grant
- 2000-10-30 EP EP00976690.8A patent/EP1226407B1/en not_active Expired - Lifetime
- 2000-10-30 RU RU2002113168/28A patent/RU2272257C2/ru active
- 2000-10-30 MY MYPI20005066A patent/MY136531A/en unknown
- 2000-10-30 CA CA002389433A patent/CA2389433C/en not_active Expired - Lifetime
- 2000-10-30 CN CNB008179492A patent/CN1176352C/zh not_active Expired - Lifetime
- 2000-10-30 JP JP2001538758A patent/JP3904926B2/ja not_active Expired - Fee Related
- 2000-10-30 MX MXPA02004348A patent/MXPA02004348A/es active IP Right Grant
- 2000-11-01 AR ARP000105769A patent/AR026329A1/es active IP Right Grant
-
2003
- 2003-02-12 US US10/365,023 patent/US7032462B2/en not_active Expired - Lifetime
- 2003-06-05 HK HK03103977A patent/HK1051720A1/xx not_active IP Right Cessation
-
2006
- 2006-08-23 AR ARP060103674A patent/AR054943A2/es active IP Right Grant
- 2006-08-23 AR ARP060103673A patent/AR054942A2/es active IP Right Grant
- 2006-11-15 JP JP2006308893A patent/JP4522985B2/ja not_active Expired - Fee Related
- 2006-11-15 JP JP2006308900A patent/JP2007041010A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4747312A (en) * | 1986-02-21 | 1988-05-31 | Fischer & Porter Co. | Double-loop Coriolis type mass flowmeter |
WO1992014123A1 (en) | 1991-02-05 | 1992-08-20 | Donald Reed Cage | Improved coriolis mass flow rate meter |
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100798530B1 (ko) | 코리올리 질량 유량 컨트롤러 | |
KR100678430B1 (ko) | 코리올리 질량 유동 제어기 | |
KR100825278B1 (ko) | 코리올리 질량 유량 센서 | |
US6748813B1 (en) | Coriolis mass flow controller |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
N231 | Notification of change of applicant | ||
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
A107 | Divisional application of patent | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20130109 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20140107 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20150107 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20160111 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20170113 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20180108 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20190109 Year of fee payment: 12 |