JP2007017097A - 蒸気発生方法、その装置及び蒸気処理装置並びに蒸気発生用記録媒体 - Google Patents

蒸気発生方法、その装置及び蒸気処理装置並びに蒸気発生用記録媒体 Download PDF

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Publication number
JP2007017097A
JP2007017097A JP2005199898A JP2005199898A JP2007017097A JP 2007017097 A JP2007017097 A JP 2007017097A JP 2005199898 A JP2005199898 A JP 2005199898A JP 2005199898 A JP2005199898 A JP 2005199898A JP 2007017097 A JP2007017097 A JP 2007017097A
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JP
Japan
Prior art keywords
temperature
steam
fluid
heating unit
heating
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JP2005199898A
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English (en)
Japanese (ja)
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JP2007017097A5 (enrdf_load_stackoverflow
Inventor
Yuji Kamikawa
裕二 上川
Kazuhiko Kobayashi
和彦 小林
Nobutaka Kuroda
信孝 黒田
Mikio Nakajima
幹雄 中島
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2005199898A priority Critical patent/JP2007017097A/ja
Priority to US11/472,415 priority patent/US7637029B2/en
Priority to DE602006005992T priority patent/DE602006005992D1/de
Priority to EP06014037A priority patent/EP1742248B1/en
Priority to TW095124855A priority patent/TW200714843A/zh
Priority to KR1020060063794A priority patent/KR101111008B1/ko
Priority to CN2006101014914A priority patent/CN1911489B/zh
Publication of JP2007017097A publication Critical patent/JP2007017097A/ja
Publication of JP2007017097A5 publication Critical patent/JP2007017097A5/ja
Pending legal-status Critical Current

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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00—Climate change mitigation technologies for sector-wide applications
    • Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier
    • Y02P80/15—On-site combined power, heat or cool generation or distribution, e.g. combined heat and power [CHP] supply

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  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
  • Control Of Steam Boilers And Waste-Gas Boilers (AREA)
JP2005199898A 2005-07-08 2005-07-08 蒸気発生方法、その装置及び蒸気処理装置並びに蒸気発生用記録媒体 Pending JP2007017097A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2005199898A JP2007017097A (ja) 2005-07-08 2005-07-08 蒸気発生方法、その装置及び蒸気処理装置並びに蒸気発生用記録媒体
US11/472,415 US7637029B2 (en) 2005-07-08 2006-06-22 Vapor drying method, apparatus and recording medium for use in the method
DE602006005992T DE602006005992D1 (de) 2005-07-08 2006-07-06 Ein Dampftrocknungsvorrichtung und ein Verfahren
EP06014037A EP1742248B1 (en) 2005-07-08 2006-07-06 A vapor drying method and an apparatus
TW095124855A TW200714843A (en) 2005-07-08 2006-07-07 A vapor drying method and an apparatus
KR1020060063794A KR101111008B1 (ko) 2005-07-08 2006-07-07 증기 건조 방법, 그 장치, 증기 처리 장치 및 증기 발생용기록 매체
CN2006101014914A CN1911489B (zh) 2005-07-08 2006-07-10 蒸汽干燥方法以及装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005199898A JP2007017097A (ja) 2005-07-08 2005-07-08 蒸気発生方法、その装置及び蒸気処理装置並びに蒸気発生用記録媒体

Publications (2)

Publication Number Publication Date
JP2007017097A true JP2007017097A (ja) 2007-01-25
JP2007017097A5 JP2007017097A5 (enrdf_load_stackoverflow) 2008-08-21

Family

ID=37720642

Family Applications (1)

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JP2005199898A Pending JP2007017097A (ja) 2005-07-08 2005-07-08 蒸気発生方法、その装置及び蒸気処理装置並びに蒸気発生用記録媒体

Country Status (2)

Country Link
JP (1) JP2007017097A (enrdf_load_stackoverflow)
CN (1) CN1911489B (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008190734A (ja) * 2007-02-01 2008-08-21 Toyota Central R&D Labs Inc 蒸気供給装置
JP2008215671A (ja) * 2007-03-01 2008-09-18 Miura Co Ltd 過熱蒸気発生装置
CN102889579A (zh) * 2012-10-17 2013-01-23 亿恒节能科技江苏有限公司 一种内干燥蒸汽闪蒸两效换热系统
CN102889576A (zh) * 2012-10-17 2013-01-23 亿恒节能科技江苏有限公司 一种低湿度蒸汽两效换热系统
CN102901086A (zh) * 2012-10-17 2013-01-30 亿恒节能科技江苏有限公司 一种内干燥蒸汽三效换热系统
KR101297860B1 (ko) 2004-09-13 2013-08-19 네스텍 소시에테아노님 액체 가열 장치 및 액체 가열 방법
JP2015102308A (ja) * 2013-11-27 2015-06-04 タニコー株式会社 アクアガス発生ユニット

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7281925B2 (ja) * 2019-03-07 2023-05-26 東京エレクトロン株式会社 基板処理装置、基板処理方法および記憶媒体
CN112420485B (zh) * 2019-08-21 2023-03-31 长鑫存储技术有限公司 晶圆加工方法
US12098842B2 (en) * 2019-09-30 2024-09-24 Yoshiaki Miyazato Steam generation apparatus
CN113130357B (zh) * 2021-04-25 2024-04-12 北京北方华创微电子装备有限公司 一种晶圆干燥系统及晶圆干燥方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0947664A (ja) * 1995-05-31 1997-02-18 Seda Giken:Kk 触媒反応装置
JPH1128349A (ja) * 1997-05-16 1999-02-02 Tokyo Electron Ltd 蒸気発生方法及びその装置
JP2000356301A (ja) * 1999-06-14 2000-12-26 Miura Co Ltd 蒸気発生装置およびその制御方法
JP2002078779A (ja) * 2000-06-26 2002-03-19 Tetsuo Moriguchi 殺菌装置
JP2003014203A (ja) * 2001-06-27 2003-01-15 Maruyasu Industries Co Ltd 過熱蒸気発生装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328809B1 (en) * 1998-10-09 2001-12-11 Scp Global Technologies, Inc. Vapor drying system and method
KR100417040B1 (ko) * 2000-08-03 2004-02-05 삼성전자주식회사 웨이퍼를 건조시키기 위한 방법 및 이를 수행하기 위한웨이퍼 건조장치
TWI240952B (en) * 2003-10-28 2005-10-01 Samsung Electronics Co Ltd System for rinsing and drying semiconductor substrates and method therefor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0947664A (ja) * 1995-05-31 1997-02-18 Seda Giken:Kk 触媒反応装置
JPH1128349A (ja) * 1997-05-16 1999-02-02 Tokyo Electron Ltd 蒸気発生方法及びその装置
JP2000356301A (ja) * 1999-06-14 2000-12-26 Miura Co Ltd 蒸気発生装置およびその制御方法
JP2002078779A (ja) * 2000-06-26 2002-03-19 Tetsuo Moriguchi 殺菌装置
JP2003014203A (ja) * 2001-06-27 2003-01-15 Maruyasu Industries Co Ltd 過熱蒸気発生装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101297860B1 (ko) 2004-09-13 2013-08-19 네스텍 소시에테아노님 액체 가열 장치 및 액체 가열 방법
JP2008190734A (ja) * 2007-02-01 2008-08-21 Toyota Central R&D Labs Inc 蒸気供給装置
JP2008215671A (ja) * 2007-03-01 2008-09-18 Miura Co Ltd 過熱蒸気発生装置
CN102889579A (zh) * 2012-10-17 2013-01-23 亿恒节能科技江苏有限公司 一种内干燥蒸汽闪蒸两效换热系统
CN102889576A (zh) * 2012-10-17 2013-01-23 亿恒节能科技江苏有限公司 一种低湿度蒸汽两效换热系统
CN102901086A (zh) * 2012-10-17 2013-01-30 亿恒节能科技江苏有限公司 一种内干燥蒸汽三效换热系统
JP2015102308A (ja) * 2013-11-27 2015-06-04 タニコー株式会社 アクアガス発生ユニット

Also Published As

Publication number Publication date
CN1911489A (zh) 2007-02-14
CN1911489B (zh) 2010-10-06

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