JP2007003326A - Method and device for inspecting components on tray - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To precisely position components stored in a tray in a short time to conduct visual inspection. <P>SOLUTION: The tray 2 is suction-held to be moved when image-recognizing and inspecting respectively the components 1 stored in a plurality of recesses 2a of the tray 2, using a camera 12, and the components 1 suction-held in the recesses 2a are sequentially image-recognized and inspected using the camera 12, while positioned individually with respect to the camera 12. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method and apparatus for inspecting a tray part that is handled in a package form in which parts are stored in a plurality of recesses of the tray.

  There is a tray part as one of the packaging forms for handling a part when the part is mounted on a base material to produce a product. The tray parts are housed in a large number of recesses arranged in the vertical and horizontal directions of the tray. By aligning a large number of parts, the tray parts can be handled in a batch without any change in direction. For example, a semiconductor wafer on which a large number of integrated circuits and the like are formed is divided into individual semiconductor pieces, that is, semiconductor chips by dicing, and the divided semiconductor chips are picked up one by one and stored in a tray to be used as a bump bonder. Supply bumps for electrical connection on the electrodes of the semiconductor chips, or store the semiconductor chips with bumps in the tray again and supply them to the component mounting device. It has been carried out to produce products on board.

  Although these parts are handled in a clean environment, chipping is caused by dicing, dust generated during dicing is attached, bump formation is defective, and it is mounted on the substrate. However, it may become defective. For this reason, visual inspection is performed at each stage. However, since the visual inspection itself may cause adhesion of foreign matters from humans, an appearance inspection is automatically performed at a stage before using the parts stored in the tray for use (for example, , See Patent Document 1).

  Patent Document 1 discloses a tray moving system that moves a tray that stores IC chips, an appearance inspection unit that performs an appearance inspection of an IC chip that is still stored in the tray, and a non-defective chip and a defective chip according to the appearance inspection result. And a tray storage unit for storing the trays after the separation are disclosed. This disclosed apparatus automatically inspects the appearance of tray parts without problems such as oversight as in the case of human sensory inspection, and separates non-defective chips from defective chips so that they can be stored and handled in the tray. In particular, the tray is placed on an XYθ table and sandwiched and fixed from all sides, and each component is positioned with respect to the image input unit by movement of XYθ for use in appearance inspection.

On the other hand, a product such as a CCD sensor has a pixel as fine as 2.8 μm to 2.2 μm, for example, and even if an extra fine foreign substance on the order of 1 μm is adhered, reading of an image is hindered and becomes a defective product. For this reason, the depth of field of the camera becomes extremely shallow in order to focus on and enlarge such a fine foreign object and to perform an appearance inspection with sufficient accuracy. Accordingly, as in the apparatus described in Patent Document 1, the inner surface of the concave portion due to the shaping error of the tray can be obtained by simply moving the tray held on the moving system by XYθ and sequentially positioning the components housed in the concave portion with respect to the camera. Sometimes it is not possible to focus on fine foreign matter adhering to a part due to inclination or undulation of the surface. Therefore, conventionally, as shown in FIG. 5, the component c housed in the concave portion of the tray b held by the XY table a is sucked and pushed up by the individual push-up shaft d and moved by XYθ by the push-up shaft d in the push-up state. The parts c are individually positioned with respect to the camera.
JP-A-5-152406

  By the way, while the tray b has the same external dimensions and the handling conditions are made common, the size of the concave portion b1 is set to a plurality of sizes in order to correspond to various sizes of parts c with a smaller number of types of trays b. The size is shared by the component c. For this reason, the storage pitch and the number of storages of the component c are different depending on the size of the recess b1, and a plurality of push-up portions having the corresponding placement pitch and the number of push-up shafts d and switching between them are required. Double positioning of the XY positioning and the positioning of XY and θ for each part c by each push-up axis d is necessary. As a result, the equipment cost is high and positioning takes time.

  An object of the present invention is to provide a low-cost tray component inspection method and apparatus that can accurately inspect and visually inspect components stored in a tray in a short time.

  In order to achieve the above-described object, the tray component inspection method of the present invention is configured to suck and hold a tray in order to individually recognize and inspect the components stored in a plurality of recesses of the tray using a camera. One feature is that inspection is performed by sequentially recognizing an image using the camera while individually positioning the parts held in the concave portion by suction with respect to the camera.

  In such a configuration, each part in the recess is sequentially positioned with respect to the camera along with the movement of the tray, and the image is recognized and inspected by using the camera. In addition, positioning in the pushed-up state is omitted, and unintentional movement due to inertia and vibration of the tray and parts is held and restrained, and positioning with respect to the camera at high speed and high accuracy is performed. Can be inspected.

  Such a method includes a camera for recognizing an image of a component, a tray holding unit that receives and holds a tray containing the component in a plurality of recesses, a tray received on the tray holding unit, and the component. A suction means that applies suction force to the tray to the tray holding means and sucks and holds the components to the tray; and a moving means that allows the components in the concave portion of the tray to be individually positioned with respect to the camera by the movement of the tray holding means; While sucking and holding the tray to the holding means by operating the suction means and holding the parts in the concave portion by suction on the tray, the moving means is used to position each part in the concave portion of the tray individually with respect to the camera. And a control means for performing inspection by image recognition using the camera, and automatically and stably achieved by a tray component inspection apparatus having one feature. Rukoto can.

  The tray component inspection method according to the present invention is also capable of sucking and holding the tray and moving the tray and sucking and holding it in the recess to individually inspect and inspect the components housed in the plurality of recesses of the tray. While the individual parts are positioned with respect to the camera, the angle of the positioned parts around the axis, the inclination of the parts and the optical axis of the camera, and the height of the camera are adjusted. Another feature is to perform inspection.

  In such a configuration, in addition to the case of the one feature, in the positioning of the component with respect to the camera, angle adjustment around the component axis, tilt adjustment between the component and the optical axis of the camera, and camera height adjustment are performed. Therefore, it is possible to inspect the ultra-fine foreign substance at any position at the same time in the inspection range where there is no excess or deficiency due to the correct orientation with respect to the field of view coordinates of the camera, and the entire inspection range is in focus. it can.

The positioning and angle adjustment of the parts is done with the movement of the tray, and the tilt adjustment and height adjustment are done on the camera side.
The positioning of the part and the angle around the axis can be adjusted easily and reliably by simultaneous or abnormal movement of one tray held by suction, and the tilt of the optical axis of the camera with respect to the part is small on the camera side. Easy to adjust.

  To that end, in the above-described tray component inspection apparatus, the positioning of the tray, the component, and the camera includes adjustment of the angle of the component around the camera optical axis, and the tilt determination that determines the tilt between the component and the optical axis of the camera. Means, a tilt adjusting unit that adjusts the tilt of the optical axis of the camera with respect to the components on the camera side, and a control unit that operates the tilt adjusting unit and the height adjusting unit according to the determination by the tilt determining unit. Can be achieved automatically and stably.

  Further, the tilt determination means can determine the tilt between the optical axis of the camera and the component based on the focusing data when the camera is focused on a plurality of parts. However, other methods can be used.

In a further configuration, the tray and parts are held by suction through a sealing member.
For holding and holding trays and parts, the seal member is well-familiar with the distortion and undulations on the holding side and the held side, so that it can be securely held without leaks. It can be avoided that the inspection is damaged due to the deformation.

In the further configuration, the adsorption of the component is performed after the processing of shifting the component to one side in the concave portion of the tray.
Regardless of the difference in play with the recess due to the size of the components stored in each recess of the tray, the position of the component and the angle around the optical axis of the camera can be obtained by adsorbing and holding to one side of the recess Can be made uniform along one side of the recess to eliminate variations, so that the adjustment of the position and angle of the components can be performed at a higher speed and with higher accuracy by suppressing the adjustment width to the extent of the error of the recess of the tray.

  For this purpose, in the tray part inspection apparatus, there is provided a biasing means for biasing a part accommodated in the concave portion of the tray to one side by at least one of instantaneous movement on the tray side, inertial movement due to vibration, and sliding movement due to inclination. This can be achieved if you prepare.

The inspection is performed in the previous process before using the tray parts for use, and it is instructed to discard the defective parts prior to the supply of the tray parts in accordance with the judgment of the defect, or to instruct to not use the tray parts supply without discarding them. In a further configuration for generating a disable signal to
Including the case where foreign matters are attached on the way by inspecting the tray parts in the previous process before use, regardless of whether the parts have been inspected by various processes or the transfer system. The final pass / fail judgment can be made and the part is discarded and not supplied to the next process as a tray part according to the discard signal generated due to the judgment of the defect or the use prohibition signal. The bad effects of defective parts can be eliminated by not using them.

  For this purpose, in the tray part inspection apparatus, the control means generates a discard signal for discarding the defective part prior to the supply of the tray part in accordance with the determination of the defect of the part, or a use prohibition signal for preventing the use of the part by supplying the tray part. It only has to be generated and sent to compatible devices.

  According to one aspect of the tray part inspection method and apparatus of the present invention, only the movement of one tray eliminates the pushing up of individual parts and the positioning in the pushed up state, and the inertia and By constraining unforeseen movement due to vibration or the like, the camera can be positioned at high speed and with high accuracy, and image recognition and inspection can be performed.

  According to another feature of the tray part inspection method and apparatus of the present invention, in addition to the case of the one feature, an angle adjustment around the axis of the part, an inclination adjustment between the part and the optical axis of the camera, and a camera height By adjusting the height, it is possible to focus on the entire inspection range where there is no excess or deficiency with respect to the camera's field of view coordinates and simultaneously inspect ultrafine foreign objects without overlooking.

  The positioning of the part and the angle around the optical axis can be adjusted easily and reliably by simultaneous or unusual movement of one tray held by suction, and the inclination and height correction of the optical axis relative to the part can be adjusted on the camera side. Easy to adjust with small load.

  The seal member absorbs and absorbs distortion, undulation, unevenness, etc., on the holding and holding sides that hold the tray and parts by suction, and the suction and holding are reliable. Can prevent the inspection from harming.

  By positioning the part to one side of the recess and adjusting the position and the angle adjustment around the axis to the extent of the error of the tray recess, positioning can be performed at a higher speed and with higher accuracy.

  The tray parts are inspected in the pre-process before use, and the final pass / fail judgment is made including the various processes up to that point and foreign substances adhering along the way such as the transfer system. It is possible to eliminate the harmful effects of defective parts by disposing them from being used or prohibiting the use as tray parts.

  A tray part inspection method and apparatus according to an embodiment of the present invention will be described below with reference to the drawings for understanding of the present invention. However, the following description is a specific example of the present invention and does not limit the scope of the claims.

  The component inspection method according to the present embodiment is, for example, assembling in a production line E in which a product D is manufactured by assembling an assembly B, C or the like on a substrate A as shown in FIG. When the parts 1 which are the semiconductor pieces as the object B are stored in the recesses arranged in the vertical and horizontal directions of the tray 2 and handled and supplied in a batch, an appearance inspection is performed in advance to prevent defective products from being assembled. It is an example of a case. The product D is a CCD camera, the assembly B is a glass plate, and the component 1 is a CCD sensor. However, the present invention is not limited to this, and includes all tray parts that need to be judged as good or bad.

  The component 1 which is a semiconductor piece as a CCD sensor is equipped with the photoconductive element corresponding to the fine pixels of 2.8 μm and 2.2 μm described above, and is defective even if an ultrafine foreign matter of about 1 μm is attached. In this case, the semiconductor wafer 4 on the dicing sheet 3 shown in FIG. 1 (e) is formed by dividing each wafer by dicing, and foreign matter such as dicing powder is attached or chipped. . Therefore, by visual inspection, only the non-defective part 1 is stored and handled in the tray 2 as shown in FIG. 1B, supplied to the bump bonder 5 as shown in FIG. While taking out, bumps for electrical connection are formed on the bonding stage. Each time the bump is formed by the bump bonder 5, the component 1 which is a semiconductor piece is again stored in the tray 2, and after the visual inspection of the bump, the component 1 to be used by the inspection apparatus 11 shown in FIG. For final visual inspection. In other words, it is possible to cope with oversight in visual inspection and adhesion of foreign matter during and after visual inspection.

  In the inspection apparatus 11 of the present embodiment, as shown in FIG. 1 (d), the components 1, which are tray components housed in a plurality of recesses of the tray 2, are individually image-recognized using a camera 12 and inspected. Therefore, as shown in the examples of FIGS. 2 and 3 and the example of FIG. 4, the tray 2 is sucked and held on the receiving table 23, and the parts 1 sucked and held in the recesses are individually moved with respect to the camera 12. An inspection method is adopted in which images are sequentially recognized and inspected using the camera 12 while positioning. As described above, the inspection is an appearance inspection and mainly a foreign matter inspection. As described above, when the tray 2 is moved, each component 1 in the concave portion is sequentially positioned with respect to the camera 12 and the camera 12 is used for image recognition and inspection. In addition, the parts 1 are not pushed up and positioned in the pushed-up state, and the tray 2 and the parts 1 are sucked and held to restrain their movement due to inertia or vibration, so that the camera can be operated at high speed and high accuracy. 12 can be positioned and recognized and inspected. Therefore, there is no need for a mechanism for individually pushing up and positioning the parts 1 or preparing and replacing the number of types of the trays 2, making the device simple and inexpensive, and changing the types of the trays 2. Even in such a case, no special setup is required, which is convenient.

  For positioning the component 1 with respect to the camera 12 in such an inspection method, the receiving table 23 as a holding means of the inspection device 11 and the tray 2 held on the receiving table 23 via the receiving table 23 are positioned, for example, on a horizontal plane. The X table 13 and the Y table 14 are used as moving mechanisms that move in the XY2 directions perpendicular to each other, and the XY tables 13 and 14 are used for the X axis motor 15 and the X screw shaft 16 and the Y axis motor 17 and Y, respectively. By driving the screw shaft 18 and moving the tray 2 in the XY2 direction, any component 1 on the tray 2 is positioned in the XY2 direction with respect to the optical axis 12a of the camera 12, and the center of the component 1 is positioned in the camera field of view. It can be made to coincide with the center, that is, the position of the optical axis 12a. Further, even if the center of the part 1 coincides with the center of the camera field of view, if the orientation of the part 1 is rotated around the axis of the camera 1 with respect to the XY coordinates in the camera field of view, a part of the part 1 May be out of the effective inspection range in the camera field of view or in the camera field of view. Therefore, the θ table 19 is provided between the rotating receiving table 23 and the X table 13 and is rotated by the θ motor 21 so that the component 1 is rotated. The angle θ around the optical axis 12 or around the optical axis 12a where the component 1 is positioned is adjusted. The XY orientation of the part 1 and the XY coordinates in the camera field of view coincide with each other, and the scanning range in the camera field of view for foreign object inspection is specified. You can also.

  For such positioning, the receiving table 23 of the inspection apparatus 11 of the example shown in FIGS. 2 and 3 receives the tray 2 by fitting it into the concave portion 2c on the back surface thereof. A suction means 24 for sucking and holding the tray 2 on the tray 23 and the component 1 on the tray 2 is provided by applying a suction force to the received tray 2 and the component 1. The suction means 24 receives the tray 2 through a seal member 33 made of an elastic material such as silicon rubber, with the receiving surface for receiving the tray 2 of the receiving table 23 as a suction surface 31 having a suction hole 31a. A suction source (not shown) is connected to a suction port 34 provided on the side surface of the receiving table 23, so that external suction reaches the suction hole 31 a through the internal space 35 of the receiving table 23, and the tray 2 is moved to the suction surface 31. It is adsorbed and held on the upper seal member 33 so as not to move. In addition, a suction hole 2b is provided in the bottom of the recess 2a of the tray 2, and the suction hole is also provided in the component 1 housed in the tray 2 and supported via a sealing member 36 made of an elastic material such as silicon rubber. The suction force on the suction surface 31 is applied through 2b, and the component 1 is sucked and held on the seal member 36 in the recess 2a to be immobile.

  When the tray 2 and the component 1 are sucked and held through the seal members 33 and 36 as described above, the holding side and held side surfaces are distorted, wavy, uneven, etc. Furthermore, the seal members 33 and 36 are well-adapted so that they can be securely sucked and held without leaks, and the surface to be inspected of the component 1 is distorted or deformed so that a simultaneous in-focus state cannot be obtained over the entire area. You can avoid doing harm. Further, it is possible to eliminate the damage to the tray 2 and the component 1 due to the suction holding, and it is possible to avoid the lifespan from being reduced or damaged.

  The positioning of the components 1 accompanied by the movement of the tray 2 as described above can be performed for all the components 1 by moving the single tray 2 using a set of support mechanisms that hold the tray 2 and move it XYθ. . However, in the θ adjustment of the component 1 by rotating the tray 2 around the axis 30, the position in the XY direction of the component 1 positioned with respect to the optical axis 12 a of the camera 12 is shifted. For this reason, it is necessary to correct this deviation. However, such a misregistration amount is uniquely determined by the correlation between the correction amount of θ and the distance from the axis 30 of the tray 2 to the part 1, so that it can be automatically corrected and dealt with by data setting on the program. it can.

  In addition, when the surface to be inspected of the component 1 is inclined with respect to the optical axis 12a, only a part of the surface to be inspected of the component 1 is focused in the foreign material inspection focused on the ultrafine foreign material. It will be. When the inclination of the surface to be inspected of the component 1 is large, a situation may occur where the entire surface of the component 1 is not focused even if the inclination is adjusted. In that case, by moving the camera 12 along the mZ guide 63 shown in FIG. 2 by the Z-axis motor 61 via the Z-screw shaft 62 in the Z direction, that is, in the vertical direction, by a displacement amount obtained from the inclination of the component 1, Focusing can be sequentially performed on the entire surface of the component 1, and foreign matter inspection can be performed on the entire surface.

  In this case, it is impossible to scan and inspect the inspection surface image of the component 1 in the camera field of view. Therefore, such inconvenience is solved by adjusting so as to eliminate the inclination between the component 1 and the optical axis 12a. For this purpose, adjusting the tilt of the optical axis 12a of the camera 12 with respect to the component 1 on the camera 12 side is advantageous because it can be easily performed with a small load. In order to realize this, at least the optical axis 12a may be supported so that the tilt can be adjusted by the support portion 22 whose tilt can be changed in the XY2 direction. When the tilt adjustment by the support portion 22 is performed with the focal point on the component 1 of the optical axis 12a as the center, the tilt adjustment can be performed without distorting the positioning of the positioned component 1 in the X and Y directions. By doing so, positioning adjustment of the component 1 can be made unnecessary. However, it is not limited to this.

  In the inspection apparatus 11 of the example of FIG. 4, the tray 2 is fitted into a recess 41 a formed at the lip of the opening 41 at the upper end of the receiving table 23, is received via the seal member 33, and is connected to a suction source. The tray 2 is sucked and held on the recess 41a by suction from the suction chamber 42 in the receiving table 23, and at the same time, the component 1 in the tray 2 is sucked and held. However, other structures, operations, and effects are not particularly different from those in the examples of FIGS. 2 and 3, and thus, common members are denoted by the same reference numerals and redundant description is omitted.

  The fitting of the receiving table 23 and the tray 2 is particularly difficult to receive the tray 2 as in the inspection apparatus 11 of the example shown in FIGS. 2 and 3 and the inspection apparatus 11 of the example shown in FIG. The receiving position of the tray 2 on the receiving table 23 can be appropriately positioned without the need for the tray 2, and the receiving position of the tray 2 can be used to position the component 1 stored in the tray 2 on the camera 12. Due to the difference, it is possible to avoid that a large correction is required in the initial positioning of the component 1 with respect to the camera 12 and that the correction amount fluctuates greatly from time to time.

  The tray 2 stores the component 1 in the recess 2a having a little play so as not to interfere and damage during storage or removal, but this play stores the component 1 in the recess 2a. There are cases where the position is varied and the correction amount when the individual components 1 are sequentially positioned with respect to the camera 12 is increased or varied. Thus, it has been found that a tendency common to the storage position of the component 1 can be given by utilizing the forming accuracy of the tray 2. In other words, by shifting the component 1 to one common side of the concave portions 2a of the tray 2, it is possible to prevent the storage position from varying, and the correction amount and tendency that the positioning with respect to the camera 12 is substantially constant. Can be achieved easily and in a short time. That is, the position XY direction position of the component 1 and the angle θ around the axis line or the optical axis 12a of the camera 12 are unified along one side of the recess 2a so that the variation can be eliminated. In both cases, the adjustment width is suppressed to the level of the error of the concave portion 2a of the tray 2, and the positioning can be performed at a higher speed and with higher accuracy. In particular, if the component 1 is shifted to one corner of the recess 2a, all XYθ can be unified using the recess 2a.

  For this purpose, the component 1 housed in the recess 2a of the tray 2 may be shifted to one side by at least one of instantaneous movement on the tray 2 side, inertial movement due to vibration, and sliding movement due to inclination. This can be achieved by high-speed instantaneous movement of the XY tables 13 and 14, and can be achieved by tapping the tray 2 from the side within the range of play with the receiving table 23. According to this, the tray 2 is received. It is also possible to avoid a variation for each tray 2 on which the inspection position is received by being shifted to the mounting table 23.

  In the examples of FIGS. 2 and 3 and FIG. 4, the concave portion 2a of the tray 2 is widened upward so that the illumination is easy to reach around the part 1, and there is no shadow or blind spot in the appearance inspection. It is possible to prevent the occurrence of oversight.

  Further, when the inspection is performed in the previous process for using the tray part as shown in FIG. 1, a discard signal for instructing to discard the defective part 1 prior to the supply of the tray part in accordance with the determination of the defect, or A use prohibition signal is generated to instruct not to discard the tray part and to use the tray part supply. As a result, regardless of whether the part 1 has been inspected in various processes or transfer systems up to that point, it is possible to make a final pass / fail judgment including the case where foreign matter is attached on the way, Depending on the discard signal generated when the defect is judged or the use prohibition signal, the part 1 is discarded and not supplied to the next process as a tray part, or is not used even if supplied. Eliminate harmful effects. For this purpose, the control means 51 shown in FIG. 1D generates a discard signal R or a use prohibition signal N in accordance with the determination of “defective” in the inspection of the component 1 using the camera 12, and sends it to the corresponding device. Just send it to.

  The present invention is practically used for inspecting parts stored and handled in a tray, and can be inspected at high speed and with high accuracy, and an apparatus for that purpose can be simple and inexpensive.

It is process explanatory drawing which shows the production process of the product which employ | adopted the tray component inspection method and apparatus which concern on embodiment of this invention. It is a perspective view which shows the tray component inspection apparatus used for FIG. FIG. 3 is a front view of a part of the tray part inspection apparatus of FIG. It is the front view which looked at the part which shows another example of the tray component inspection apparatus which concerns on embodiment of this invention, and was seen in cross section. It is a partial sectional view showing a conventional tray part inspection apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Component 2 Tray 2a Recessed part 2b Suction hole 2c Recessed part 11 Inspection apparatus 12 Camera 12a Optical axis 13 X table 14 Y table 19 θ table 63 Z guide 22 Support part 23 Supporting table 24 Suction means 31 Suction surface 31a Suction holes 33, 36 Seal member 34 Suction port 35 Internal space 41 Opening 41a Recess 51 Control means R Discard signal N Use prohibition signal

Claims (12)

In the tray part inspection method for inspecting the parts stored in the plurality of recesses of the tray by individually recognizing images using a camera,
A tray parts inspection method, wherein a tray is sucked and held and moved, and the parts sucked and held in the recesses are individually positioned with respect to the camera and the image is sequentially recognized and inspected. In the tray part inspection method for inspecting the parts stored in the plurality of recesses of the tray by individually recognizing the images with a camera,
While the tray is sucked and held and moved, and the parts sucked and held in the recess are individually positioned with respect to the camera, the angle adjustment around the axis of the positioned part, the inclination adjustment between the part and the optical axis of the camera, and the camera A tray part inspection method, comprising adjusting the height of images and sequentially recognizing and inspecting images using a camera. 3. The tray component inspection method according to claim 2, wherein the positioning of the component and the angle adjustment are performed with the movement of the tray, and the tilt adjustment and the height adjustment are performed on the camera side. The tray component inspection method according to any one of claims 1 to 3, wherein the suction holding of the tray and the component is performed via a seal member. 5. The tray part inspection method according to claim 1, wherein the adsorption of the part is performed after a process of aligning the part to one side in the concave portion of the tray. Inspection is performed in the pre-process before using the tray parts for use, and it is instructed to discard the defective parts prior to the supply of the tray parts in accordance with the judgment of the defect, or to not use the tray parts supply without discarding them. The tray part inspection method according to claim 1, wherein a use prohibition signal is generated. A camera for recognizing an image of a component, a tray holding unit for receiving and holding a tray containing the component in a plurality of recesses, a tray received on the tray holding unit and a tray that applies a suction force to the component. A suction means for sucking and holding the components on the tray holding means, a moving means for individually positioning the parts in the concave portion of the tray with respect to the camera by the movement of the tray holding means, and the tray by using the suction means. And holding the parts in the recesses by suction on the holding means, and then using the camera while positioning each part in the recesses of the tray individually with respect to the camera by moving the means. A tray part inspection apparatus comprising: control means for performing inspection by recognition. The tray part inspection apparatus according to claim 7, wherein the positioning of the tray and the part and the camera includes adjustment of an angle of the part around the camera optical axis. Inclination determination means for determining the inclination between the component and the optical axis of the camera, inclination adjustment means for adjusting the inclination of the optical axis of the camera with respect to the component on the camera side, inclination adjustment means and height according to the determination by the inclination determination means The tray part inspection apparatus according to claim 7, further comprising a control unit that operates the adjusting unit. The tray part inspection apparatus according to claim 8, wherein the inclination determination unit determines an inclination between the optical axis of the camera and the part based on focusing data when the camera is focused on a plurality of parts of the part. The tray component according to any one of claims 7 to 10, further comprising a biasing means for biasing the component accommodated in the concave portion of the tray to one side by at least one of movement, vibration, and tilting of the tray side. Inspection device. The control means generates and transmits a discard signal for discarding the defective part prior to supplying the tray part or a use prohibiting signal for preventing the defective part from being used even when the tray part is supplied. The tray part inspection apparatus according to any one of the above.

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