JP2006526155A - 水素ガスを感知するための方法および装置 - Google Patents
水素ガスを感知するための方法および装置 Download PDFInfo
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 86
- 238000000034 method Methods 0.000 title claims description 22
- 239000001257 hydrogen Substances 0.000 claims abstract description 133
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 133
- 239000002070 nanowire Substances 0.000 claims abstract description 60
- 150000002431 hydrogen Chemical class 0.000 claims abstract description 54
- 239000002105 nanoparticle Substances 0.000 claims abstract description 48
- 229910052751 metal Inorganic materials 0.000 claims abstract description 31
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- 229910052763 palladium Inorganic materials 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims description 57
- 238000007747 plating Methods 0.000 claims description 18
- 229910004205 SiNX Inorganic materials 0.000 claims description 10
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- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract description 59
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 abstract description 23
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 230000008569 process Effects 0.000 description 6
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- 238000012544 monitoring process Methods 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 101150003085 Pdcl gene Proteins 0.000 description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
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- 238000004070 electrodeposition Methods 0.000 description 4
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
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- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 3
- 101710134784 Agnoprotein Proteins 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910001252 Pd alloy Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004769 chrono-potentiometry Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- ZOMNIUBKTOKEHS-UHFFFAOYSA-L dimercury dichloride Chemical class Cl[Hg][Hg]Cl ZOMNIUBKTOKEHS-UHFFFAOYSA-L 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920001651 Cyanoacrylate Polymers 0.000 description 1
- MWCLLHOVUTZFKS-UHFFFAOYSA-N Methyl cyanoacrylate Chemical compound COC(=O)C(=C)C#N MWCLLHOVUTZFKS-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000002042 Silver nanowire Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000003090 exacerbative effect Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052987 metal hydride Inorganic materials 0.000 description 1
- 150000004681 metal hydrides Chemical class 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 150000002940 palladium Chemical class 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
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- 238000004886 process control Methods 0.000 description 1
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- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/005—H2
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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- Life Sciences & Earth Sciences (AREA)
- Nanotechnology (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Molecular Biology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
本発明は、米国仮特許出願第60/475,558号への優先権を主張する。
本発明は、水素ガスセンサーに関し、より具体的には、金属ナノワイヤを利用する水素ガスセンサーおよびスイッチに関する。
任意の燃料のように、水素は、多量のエネルギーを貯蔵し、そして水素を取り扱うことは、安全対策を必要とする。水素燃料の使用がより一般的になるにつれて、信頼のおける水素センサーに対する必要性が高まっている。水素は現在、輸送、石油化学、食品加工、マイクロチップ、および宇宙船の産業に使用されている。これらの産業の各々は、多くの用途のための信頼のおける水素センサー(例えば、製造装置、輸送タンク、および貯蔵タンクにおいて、漏出を突き止めて爆発の可能性を防止すること)を必要とする。燃料電池技術の進歩により、水素センサーについて多くの未来の用途が提供される。
本発明は、水素ガスを感知するための、向上した方法および装置に関する。実施形態は、シリコン基板上に絶縁層を堆積させる工程;上記絶縁層の上面に金属層を堆積させる工程、および上記金属層の側壁に複数のナノ粒子を堆積させる工程を包含する。1つの実施形態において、金属層が取り除かれ得る。
以下の記載において、本発明の完全な理解を提供するために、多くの特定の詳細(例えば、特定の合金の組み合わせなど)が示される。しかし、本発明は、このような特定の詳細がなくても実施され得ることは、当業者に明らかである。このような詳細と同程度に省略された、いくらかの詳細は、本発明の完全な理解を得るために必要ではなく、関連技術の当業者の技術内である。
Claims (12)
- 水素を感知するための装置であって、該装置は:
基板であって、ここで、複数のナノ粒子が該基板上に堆積して、少なくとも1つのナノ粒子経路を形成する、基板を備え、ここで、該少なくとも1つのナノ粒子経路は、水素の存在下では導電率の上昇を、および水素の非存在下では導電率の低下を示し、そして該少なくとも1つのナノ粒子経路は、側壁メッキ技術を使用して該基板の近くに形成されており、該少なくとも1つのナノ粒子経路の導電率は、該基板の非導電性の性質に起因して、該基板の導電率を超えて容易に識別可能である、
装置。 - 前記少なくとも1つのナノ粒子経路が、少なくとも1つのナノワイヤを形成する、請求項1に記載の装置。
- 前記複数のナノ粒子が、金属層の少なくとも1つの側壁に堆積され;
ここで、該金属層は、前記複数のナノ粒子を堆積する間に前記基板上に存在し、そして該金属層は、該複数のナノ粒子を堆積した後に該基板から取り除かれる、
請求項1に記載の装置。 - 前記少なくとも1つのナノ粒子経路が、PdおよびAgの組み合わせから構成される、請求項1に記載の装置。
- 前記基板が、SiNxから構成される、請求項1に記載の装置。
- 前記基板が、SiO2から構成される、請求項1に記載の装置。
- 水素を感知するための装置であって、該装置は、以下:
上面を有する、半導体基板;
該半導体基板の上面に堆積したTiO2の層であって、ここで該TiO2の層は、上面を有する、TiO2の層;および
該TiO2の層の該上面に堆積したナノ粒子であって、ここで該ナノ粒子の経路は、上面を有し、そして該ナノ粒子経路は、水素の存在下で導電率の上昇を示す、ナノ粒子、
を備える、装置。 - 前記TiO2の層が、上面を有するTiの層を酸化することによって形成され、そして該Tiの層は、前記ナノ粒子経路が該Tiの層の上面に堆積された後に酸化される、請求項7に記載の装置。
- 請求項7に記載の装置であって、該装置は、前記TiO2の層が前記Tiの層を酸化することによって形成された後に、前記ナノ粒子の上面に堆積される第2のナノ粒子経路を備える、装置。
- 水素を感知するための装置であって、該装置は、以下:
上面を有する、半導体基板;
該半導体基板の上面に堆積したSiNxの層であって、ここで該SiNxの層は、上面を有する、SiNxの層;
該SiNxの層の該上面に堆積したTi層であって、ここで該Ti層は、少なくとも1つの側壁を有する、Ti層;および
該SiNxの層の該上面に堆積した複数のナノ粒子であって、ここで該複数のナノ粒子は、水素の非存在下でよりも水素の存在下でより高い導電率を有するナノ粒子経路を形成する、ナノ粒子、
を備える、装置。 - 前記複数のナノ粒子が、該複数のナノ粒子を前記Ti層の少なくとも1つの側壁に側壁メッキすることによって、前記SiNxの層上に堆積される、請求項10に記載の装置。
- 水素を感知するための装置であって、該装置は、以下:
上面を有する、半導体基板;
該半導体基板の上面に堆積された第1の金属層であって、ここで該第1の金属層は、上面を有する、第1の金属層;
該第1の金属層の上面に堆積した第2の金属層であって、該第2の金属層は、該第1の金属層の上面の覆われた領域、および該第1の金属層の上面の露出した領域を作製し、そして該第2の金属層は、少なくとも1つの側壁を有する、第2の金属層;ならびに
該第2の金属層の該少なくとも1つの側壁に堆積した複数のナノ粒子、および該第1の金属層の露出した領域に堆積した複数のナノ粒子であって、ここで該複数のナノ粒子は、少なくとも1つのナノ粒子経路を形成し、該ナノ粒子経路は、水素の存在下で上昇した導電率を示す、ナノ粒子、
を備える、装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47555803P | 2003-06-03 | 2003-06-03 | |
US10/854,420 US7287412B2 (en) | 2003-06-03 | 2004-05-26 | Method and apparatus for sensing hydrogen gas |
PCT/US2004/017324 WO2005001420A2 (en) | 2003-06-03 | 2004-06-01 | Method and apparatus for sensing hydrogen gas |
Publications (2)
Publication Number | Publication Date |
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JP2006526155A true JP2006526155A (ja) | 2006-11-16 |
JP4629665B2 JP4629665B2 (ja) | 2011-02-09 |
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JP2006515084A Expired - Fee Related JP4629665B2 (ja) | 2003-06-03 | 2004-06-01 | 水素ガスを感知するための方法および装置 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7287412B2 (ja) |
EP (1) | EP1629259A4 (ja) |
JP (1) | JP4629665B2 (ja) |
KR (1) | KR101110532B1 (ja) |
CA (1) | CA2523583A1 (ja) |
WO (1) | WO2005001420A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2017111015A (ja) * | 2015-12-17 | 2017-06-22 | 株式会社日立製作所 | 水素計測装置および水素計測方法 |
WO2022181400A1 (ja) * | 2021-02-25 | 2022-09-01 | 国立研究開発法人科学技術振興機構 | ガスセンサ |
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US8958917B2 (en) | 1998-12-17 | 2015-02-17 | Hach Company | Method and system for remote monitoring of fluid quality and treatment |
US20060011487A1 (en) * | 2001-05-31 | 2006-01-19 | Surfect Technologies, Inc. | Submicron and nano size particle encapsulation by electrochemical process and apparatus |
WO2003018875A1 (en) * | 2001-08-27 | 2003-03-06 | Surfect Techologies, Inc. | Electrodeposition apparatus and method using magnetic assistance and rotary cathode for ferrous and magnetic particles |
US7287412B2 (en) * | 2003-06-03 | 2007-10-30 | Nano-Proprietary, Inc. | Method and apparatus for sensing hydrogen gas |
JP2006513041A (ja) * | 2002-12-05 | 2006-04-20 | サーフェクト テクノロジーズ インク. | コーティングされた磁性粒子及びその応用 |
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US20070125153A1 (en) * | 2005-10-21 | 2007-06-07 | Thomas Visel | Palladium-Nickel Hydrogen Sensor |
US20070240491A1 (en) * | 2003-06-03 | 2007-10-18 | Nano-Proprietary, Inc. | Hydrogen Sensor |
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US20050244811A1 (en) * | 2003-12-15 | 2005-11-03 | Nano-Proprietary, Inc. | Matrix array nanobiosensor |
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WO2006121349A1 (en) * | 2005-05-09 | 2006-11-16 | Nano Cluster Devices Limited | Hydrogen sensors and fabrication methods |
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US7762121B2 (en) | 2010-07-27 |
US20040261500A1 (en) | 2004-12-30 |
WO2005001420A2 (en) | 2005-01-06 |
US20090133474A1 (en) | 2009-05-28 |
US7287412B2 (en) | 2007-10-30 |
KR101110532B1 (ko) | 2012-01-31 |
KR20060015629A (ko) | 2006-02-17 |
EP1629259A2 (en) | 2006-03-01 |
WO2005001420A3 (en) | 2005-11-03 |
EP1629259A4 (en) | 2011-03-30 |
JP4629665B2 (ja) | 2011-02-09 |
CA2523583A1 (en) | 2005-01-06 |
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