JP2006515713A - p型窒化物半導体材料のMBE成長 - Google Patents
p型窒化物半導体材料のMBE成長 Download PDFInfo
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- JP2006515713A JP2006515713A JP2004556848A JP2004556848A JP2006515713A JP 2006515713 A JP2006515713 A JP 2006515713A JP 2004556848 A JP2004556848 A JP 2004556848A JP 2004556848 A JP2004556848 A JP 2004556848A JP 2006515713 A JP2006515713 A JP 2006515713A
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- C30B23/02—Epitaxial-layer growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H01L21/0237—Materials
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
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Abstract
Description
あるいは、この方法は、ガリウム元素およびアルミニウム元素を、1×10−8mbar以上の総ビーム等価圧力で供給する工程を含み得、ガリウム元素およびアルミニウム元素を、1×10−5mbar以下の総ビーム等価圧力で供給する工程を含み得る。
Claims (23)
- p型窒化物半導体材料を分子線エピタキシーにより成長させる方法であって、該方法は、該成長プロセスの間にビス(シクロペンタジエニル)マグネシウム(Cp2Mg)を供給する工程を包含する、方法。
- 前記窒化物半導体材料がp型(Ga,Al)Nである、請求項1に記載の方法。
- 前記成長プロセスの間にアンモニアガスを供給する工程を包含する、請求項1または2に記載の方法。
- アンモニアガス、ガリウムおよびCp2Mgを成長チャンバに供給して、p型GaN層を成長させる工程を包含する、請求項1、2または3に記載の方法。
- アンモニアガス、アルミニウム、ガリウムおよびCp2Mgを成長チャンバに供給して、p型AlGaN層を成長させる工程を包含する、請求項1、2または3に記載の方法。
- 前記窒化物半導体材料の前記成長の間におけるCp2Mgの供給レートを変化させる工程を包含する、請求項1〜5のいずれか1項に記載の方法。
- 前記成長プロセスが700℃以上の温度において行われる、請求項1〜6のいずれか1項に記載の方法。
- 前記成長プロセスが800℃以上の温度において行われる、請求項1〜7のいずれか1項に記載の方法。
- 前記成長プロセスが850℃以上の温度において行われる、請求項1〜8のいずれか1項に記載の方法。
- 前記成長プロセスが920℃以上の温度において行われる、請求項1〜9のいずれか1項に記載の方法。
- 前記成長プロセスが950℃以上の温度において行われる、請求項1〜10のいずれか1項に記載の方法。
- 前記成長プロセスが960℃以下の温度において行われる、請求項1〜11のいずれか1項に記載の方法。
- Cp2Mgを1×10−9mbar以上のビーム等価圧力において供給する工程を包含する、請求項1〜12のいずれか1項に記載の方法。
- Cp2Mgを3×10−9mbar以上のビーム等価圧力において供給する工程を包含する、請求項1〜13のいずれか1項に記載の方法。
- Cp2Mgを1×10−7mbar以下のビーム等価圧力において供給する工程を包含する、請求項1〜14のいずれか1項に記載の方法。
- Cp2Mgを1.5×10−8mbar以下のビーム等価圧力において供給する工程を包含する、請求項1〜15のいずれか1項に記載の方法。
- ガリウム元素を1×10−8mbar以上のビーム等価圧力において供給する工程を包含する、請求項4、または請求項4に従属する場合における請求項6〜16のいずれか1項に記載の方法。
- ガリウム元素を1×10−5mbar以下のビーム等価圧力において供給する工程を包含する、請求項4、または請求項4に従属する場合における請求項6〜16のいずれか1項に記載の方法。
- ガリウム元素およびアルミニウム元素を、1×10−8mbar以上の総ビーム等価圧力において供給する工程を包含する、請求項5、または請求項5に従属する場合における請求項6〜16のいずれか1項に記載の方法。
- ガリウム元素およびアルミニウム元素を、1×10−5mbar以下の総ビーム等価圧力において供給する工程を包含する、請求項5、または請求項5に従属する場合における請求項6〜16のいずれか1項に記載の方法。
- 請求項1〜20のいずれか1項に記載の方法によって成長されるp型窒化物半導体材料。
- 請求項1〜21のいずれか1項に記載の方法によって成長されるp型窒化物半導体材料の層を備える半導体デバイス。
- 前記窒化物半導体材料の層が、p型(Ga,Al)Nの層である、請求項22に記載の半導体デバイス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0228019A GB2395839A (en) | 2002-11-30 | 2002-11-30 | MBE growth of p-type nitride semiconductor materials |
PCT/JP2003/015200 WO2004051719A1 (en) | 2002-11-30 | 2003-11-27 | Mbe growth of p-type nitride semiconductor materials |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006515713A true JP2006515713A (ja) | 2006-06-01 |
Family
ID=9948879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004556848A Pending JP2006515713A (ja) | 2002-11-30 | 2003-11-27 | p型窒化物半導体材料のMBE成長 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7648577B2 (ja) |
JP (1) | JP2006515713A (ja) |
AU (1) | AU2003302522A1 (ja) |
GB (1) | GB2395839A (ja) |
TW (1) | TWI317146B (ja) |
WO (1) | WO2004051719A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008029915A1 (fr) * | 2006-09-08 | 2008-03-13 | The Furukawa Electric Co., Ltd. | Dispositif d'émission de lumière à semiconducteur et son procédé de fabrication |
US8932943B2 (en) | 2012-03-07 | 2015-01-13 | Samsung Electronics Co., Ltd. | Nitride semiconductor light emitting device and method of manufacturing the same |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2392169A (en) * | 2002-08-23 | 2004-02-25 | Sharp Kk | MBE growth of an AlgaN layer or AlGaN multilayer structure |
US7535031B2 (en) * | 2005-09-13 | 2009-05-19 | Philips Lumiled Lighting, Co. Llc | Semiconductor light emitting device with lateral current injection in the light emitting region |
JP2007214378A (ja) * | 2006-02-09 | 2007-08-23 | Rohm Co Ltd | 窒化物系半導体素子 |
Family Cites Families (23)
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NL8702096A (nl) * | 1987-09-04 | 1989-04-03 | Stichting Katholieke Univ | Werkwijze en inrichting voor het mengen van gassen en het met behulp van een gasmengsel epitactisch vervaardigen van halfgeleiderproducten. |
JPH01168331A (ja) * | 1987-12-24 | 1989-07-03 | Mitsui Toatsu Chem Inc | 有機金属化合物の飽和方法 |
US5633192A (en) * | 1991-03-18 | 1997-05-27 | Boston University | Method for epitaxially growing gallium nitride layers |
US5602418A (en) * | 1992-08-07 | 1997-02-11 | Asahi Kasei Kogyo Kabushiki Kaisha | Nitride based semiconductor device and manufacture thereof |
US5585648A (en) * | 1995-02-03 | 1996-12-17 | Tischler; Michael A. | High brightness electroluminescent device, emitting in the green to ultraviolet spectrum, and method of making the same |
US5661074A (en) * | 1995-02-03 | 1997-08-26 | Advanced Technology Materials, Inc. | High brightness electroluminescent device emitting in the green to ultraviolet spectrum and method of making the same |
US5637146A (en) * | 1995-03-30 | 1997-06-10 | Saturn Cosmos Co., Ltd. | Method for the growth of nitride based semiconductors and its apparatus |
US6617235B2 (en) * | 1995-03-30 | 2003-09-09 | Sumitomo Chemical Company, Limited | Method of manufacturing Group III-V compound semiconductor |
JP2872096B2 (ja) * | 1996-01-19 | 1999-03-17 | 日本電気株式会社 | 低抵抗p型窒化ガリウム系化合物半導体の気相成長方法 |
US5874747A (en) * | 1996-02-05 | 1999-02-23 | Advanced Technology Materials, Inc. | High brightness electroluminescent device emitting in the green to ultraviolet spectrum and method of making the same |
US5930656A (en) * | 1996-10-21 | 1999-07-27 | Kabushiki Kaisha Toshiba | Method of fabricating a compound semiconductor device |
GB2323209A (en) | 1997-03-13 | 1998-09-16 | Sharp Kk | Molecular beam epitaxy apparatus and method |
US5831277A (en) * | 1997-03-19 | 1998-11-03 | Northwestern University | III-nitride superlattice structures |
US5891790A (en) * | 1997-06-17 | 1999-04-06 | The Regents Of The University Of California | Method for the growth of P-type gallium nitride and its alloys |
DE19882202B4 (de) | 1998-01-21 | 2007-03-22 | Rohm Co. Ltd., Kyoto | Lichtemittierende Halbleitervorrichtung und Verfahren zu ihrer Herstellung |
US6452242B1 (en) * | 2000-03-23 | 2002-09-17 | Mp Technologies Llc | Multi color detector |
GB2350927A (en) | 1999-06-12 | 2000-12-13 | Sharp Kk | A method growing nitride semiconductor layer by molecular beam epitaxy |
JP2001015437A (ja) | 1999-06-29 | 2001-01-19 | Nec Corp | Iii族窒化物結晶成長法 |
JP2001223440A (ja) * | 2000-02-08 | 2001-08-17 | Fuji Photo Film Co Ltd | 半導体レーザ装置 |
US6531716B2 (en) * | 2000-04-21 | 2003-03-11 | Showa Denko Kabushiki Kaisha | Group-III nitride semiconductor light-emitting device and manufacturing method for the same |
GB2363518A (en) * | 2000-06-17 | 2001-12-19 | Sharp Kk | A method of growing a nitride layer on a GaN substrate |
GB2372632A (en) * | 2001-02-23 | 2002-08-28 | Sharp Kk | A method of growing an InGaN semiconductor layer |
GB2376563A (en) * | 2001-06-13 | 2002-12-18 | Sharp Kk | A method of growing a magnesium-doped nitride semiconductor material |
-
2002
- 2002-11-30 GB GB0228019A patent/GB2395839A/en not_active Withdrawn
-
2003
- 2003-11-27 WO PCT/JP2003/015200 patent/WO2004051719A1/en active Application Filing
- 2003-11-27 US US10/536,706 patent/US7648577B2/en not_active Expired - Fee Related
- 2003-11-27 AU AU2003302522A patent/AU2003302522A1/en not_active Abandoned
- 2003-11-27 JP JP2004556848A patent/JP2006515713A/ja active Pending
- 2003-11-28 TW TW092133572A patent/TWI317146B/zh active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008029915A1 (fr) * | 2006-09-08 | 2008-03-13 | The Furukawa Electric Co., Ltd. | Dispositif d'émission de lumière à semiconducteur et son procédé de fabrication |
US8222658B2 (en) | 2006-09-08 | 2012-07-17 | The Furukawa Electric Co., Ltd. | Semiconductor light emitting element and method of manufacturing therefor |
US8932943B2 (en) | 2012-03-07 | 2015-01-13 | Samsung Electronics Co., Ltd. | Nitride semiconductor light emitting device and method of manufacturing the same |
US9202969B2 (en) | 2012-03-07 | 2015-12-01 | Samsung Electronics Co., Ltd. | Nitride semiconductor light emitting device and method of manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
US20060121637A1 (en) | 2006-06-08 |
TWI317146B (en) | 2009-11-11 |
US7648577B2 (en) | 2010-01-19 |
AU2003302522A8 (en) | 2004-06-23 |
AU2003302522A1 (en) | 2004-06-23 |
GB2395839A (en) | 2004-06-02 |
WO2004051719A1 (en) | 2004-06-17 |
TW200421451A (en) | 2004-10-16 |
GB0228019D0 (en) | 2003-01-08 |
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