JP2006506674A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006506674A5 JP2006506674A5 JP2004552744A JP2004552744A JP2006506674A5 JP 2006506674 A5 JP2006506674 A5 JP 2006506674A5 JP 2004552744 A JP2004552744 A JP 2004552744A JP 2004552744 A JP2004552744 A JP 2004552744A JP 2006506674 A5 JP2006506674 A5 JP 2006506674A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES200202792 | 2002-11-19 | ||
PCT/ES2003/000584 WO2004046807A1 (es) | 2002-11-19 | 2003-11-18 | Dispositivo electroóptico miniaturizado y usos correspond ientes |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006506674A JP2006506674A (ja) | 2006-02-23 |
JP2006506674A5 true JP2006506674A5 (ja) | 2009-08-27 |
JP4372689B2 JP4372689B2 (ja) | 2009-11-25 |
Family
ID=32695801
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004552744A Expired - Fee Related JP4372689B2 (ja) | 2002-11-19 | 2003-11-18 | 小型光電装置及びその応用 |
JP2004552743A Expired - Fee Related JP4351634B2 (ja) | 2002-11-19 | 2003-11-18 | ミニチュアリレー及びその使用方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004552743A Expired - Fee Related JP4351634B2 (ja) | 2002-11-19 | 2003-11-18 | ミニチュアリレー及びその使用方法 |
Country Status (13)
Country | Link |
---|---|
US (2) | US7876182B2 (ja) |
EP (2) | EP1564584B1 (ja) |
JP (2) | JP4372689B2 (ja) |
KR (2) | KR20050083929A (ja) |
CN (2) | CN100410165C (ja) |
AT (2) | ATE322033T1 (ja) |
AU (2) | AU2003279414A1 (ja) |
BR (1) | BR0316409A (ja) |
CA (2) | CA2506775A1 (ja) |
DE (2) | DE60320832D1 (ja) |
ES (3) | ES2305527T3 (ja) |
RU (1) | RU2325722C2 (ja) |
WO (2) | WO2004046807A1 (ja) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6882256B1 (en) * | 2003-06-20 | 2005-04-19 | Northrop Grumman Corporation | Anchorless electrostatically activated micro electromechanical system switch |
CN1954478A (zh) * | 2004-05-19 | 2007-04-25 | 宝兰微系统公司 | 调整器电路及其相应用途 |
KR100599115B1 (ko) | 2004-07-20 | 2006-07-12 | 삼성전자주식회사 | 진동형 멤스 스위치 및 그 제조방법 |
JP4601528B2 (ja) * | 2005-09-15 | 2010-12-22 | ドングク ユニバーシティ インダストリー−アカデミック コオペレーション ファウンデーション | プルアップ型接触パッドを利用したマイクロマシーニングスイッチの製造法 |
ES2259570B1 (es) * | 2005-11-25 | 2007-10-01 | Baolab Microsystems S.L. | Dispositivo para la conexion de dos puntos de un circuito electrico. |
ES2281294B1 (es) * | 2006-03-10 | 2008-09-16 | Baolab Microsystems S.L. | Dispositivo electrooptico reflector digital miniaturizado. |
WO2007104811A1 (es) * | 2006-03-10 | 2007-09-20 | Baolab Microsystems S.L. | Dispositivo electroóptico reflector y procedimientos de actuación correspondientes |
ES2288111B1 (es) * | 2006-03-14 | 2008-10-16 | Baolab Microsystems S.L. | Conjunto electrooptico reflector miniaturizado para el procesado de una señal luminosa y procedimiento correspondiente. |
ES2288110B1 (es) * | 2006-03-13 | 2008-10-16 | Baolab Microsystems, S.L. | Procedimiento de actuacion de un dispositivo electrooptico reflector miniaturizado y dispositivo correspondiente. |
US8144125B2 (en) | 2006-03-30 | 2012-03-27 | Cypress Semiconductor Corporation | Apparatus and method for reducing average scan rate to detect a conductive object on a sensing device |
US8111243B2 (en) | 2006-03-30 | 2012-02-07 | Cypress Semiconductor Corporation | Apparatus and method for recognizing a tap gesture on a touch sensing device |
US8040142B1 (en) | 2006-03-31 | 2011-10-18 | Cypress Semiconductor Corporation | Touch detection techniques for capacitive touch sense systems |
US8059015B2 (en) | 2006-05-25 | 2011-11-15 | Cypress Semiconductor Corporation | Capacitance sensing matrix for keyboard architecture |
US8040321B2 (en) | 2006-07-10 | 2011-10-18 | Cypress Semiconductor Corporation | Touch-sensor with shared capacitive sensors |
US8547114B2 (en) | 2006-11-14 | 2013-10-01 | Cypress Semiconductor Corporation | Capacitance to code converter with sigma-delta modulator |
FR2911129A1 (fr) * | 2007-01-08 | 2008-07-11 | Microcomposants De Haute Secur | Micro-relais de type mems et procede de fabrication associe |
US8058937B2 (en) | 2007-01-30 | 2011-11-15 | Cypress Semiconductor Corporation | Setting a discharge rate and a charge rate of a relaxation oscillator circuit |
US8144126B2 (en) | 2007-05-07 | 2012-03-27 | Cypress Semiconductor Corporation | Reducing sleep current in a capacitance sensing system |
US9500686B1 (en) | 2007-06-29 | 2016-11-22 | Cypress Semiconductor Corporation | Capacitance measurement system and methods |
US8258986B2 (en) | 2007-07-03 | 2012-09-04 | Cypress Semiconductor Corporation | Capacitive-matrix keyboard with multiple touch detection |
US8570053B1 (en) | 2007-07-03 | 2013-10-29 | Cypress Semiconductor Corporation | Capacitive field sensor with sigma-delta modulator |
US8525798B2 (en) | 2008-01-28 | 2013-09-03 | Cypress Semiconductor Corporation | Touch sensing |
US8319505B1 (en) | 2008-10-24 | 2012-11-27 | Cypress Semiconductor Corporation | Methods and circuits for measuring mutual and self capacitance |
US8358142B2 (en) | 2008-02-27 | 2013-01-22 | Cypress Semiconductor Corporation | Methods and circuits for measuring mutual and self capacitance |
US9104273B1 (en) | 2008-02-29 | 2015-08-11 | Cypress Semiconductor Corporation | Multi-touch sensing method |
US8321174B1 (en) | 2008-09-26 | 2012-11-27 | Cypress Semiconductor Corporation | System and method to measure capacitance of capacitive sensor array |
ES2342872B1 (es) * | 2009-05-20 | 2011-05-30 | Baolab Microsystems S.L. | Chip que comprende un mems dispuesto en un circuito integrado y procedimiento de fabricacion correspondiente. |
TW201234527A (en) * | 2010-11-19 | 2012-08-16 | Baolab Microsystems Sl | Methods and systems for fabrication of MEMS CMOS devices |
JP5950336B2 (ja) * | 2012-03-22 | 2016-07-13 | 矢崎総業株式会社 | 電子部品モジュール |
TW202142481A (zh) | 2020-01-08 | 2021-11-16 | 西班牙商奈努勝公司 | 使用一固態半導體製程之後段製程金屬層建立之微機電裝置 |
CN113782356B (zh) * | 2021-07-23 | 2023-06-16 | 宁波金宸科技有限公司 | 一种基于液压传动的继电器 |
CN115355836B (zh) * | 2022-08-18 | 2023-12-19 | 西安铁路信号有限责任公司 | 一种继电器绝对间隙的测量方法 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2218502A (en) * | 1936-11-25 | 1940-10-22 | Illinois Testing Laboratories | Temperature controller |
CA1307842C (en) * | 1988-12-28 | 1992-09-22 | Adrian William Alden | Dual polarization microstrip array antenna |
WO1997015092A1 (en) * | 1995-10-13 | 1997-04-24 | Peter Nielsen | Method and system for communicating electromagnetic signals |
GB2326284A (en) * | 1997-06-11 | 1998-12-16 | Siemens Plessey Electronic | Wide bandwidth antenna arrays |
US6751442B1 (en) * | 1997-09-17 | 2004-06-15 | Aerosat Corp. | Low-height, low-cost, high-gain antenna and system for mobile platforms |
DE19912669A1 (de) * | 1999-03-20 | 2000-09-21 | Abb Research Ltd | Substratparallel arbeitendes Mikrorelais |
US6428173B1 (en) * | 1999-05-03 | 2002-08-06 | Jds Uniphase, Inc. | Moveable microelectromechanical mirror structures and associated methods |
US6143997A (en) * | 1999-06-04 | 2000-11-07 | The Board Of Trustees Of The University Of Illinois | Low actuation voltage microelectromechanical device and method of manufacture |
JP2001076605A (ja) * | 1999-07-01 | 2001-03-23 | Advantest Corp | 集積型マイクロスイッチおよびその製造方法 |
US6218911B1 (en) * | 1999-07-13 | 2001-04-17 | Trw Inc. | Planar airbridge RF terminal MEMS switch |
IL147475A0 (en) | 1999-07-20 | 2002-08-14 | Memlink Ltd | Microelectromechanincal device with moving element |
US6229640B1 (en) * | 1999-08-11 | 2001-05-08 | Adc Telecommunications, Inc. | Microelectromechanical optical switch and method of manufacture thereof |
US6307452B1 (en) * | 1999-09-16 | 2001-10-23 | Motorola, Inc. | Folded spring based micro electromechanical (MEM) RF switch |
CA2323189A1 (en) | 1999-10-15 | 2001-04-15 | Cristian A. Bolle | Dual motion electrostatic actuator design for mems micro-relay |
EP1093143A1 (en) * | 1999-10-15 | 2001-04-18 | Lucent Technologies Inc. | Flip-chip bonded micro-relay on integrated circuit chip |
US6667724B2 (en) * | 2001-02-26 | 2003-12-23 | Time Domain Corporation | Impulse radar antenna array and method |
JP3651404B2 (ja) * | 2001-03-27 | 2005-05-25 | オムロン株式会社 | 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置 |
US6917268B2 (en) * | 2001-12-31 | 2005-07-12 | International Business Machines Corporation | Lateral microelectromechanical system switch |
US6621135B1 (en) * | 2002-09-24 | 2003-09-16 | Maxim Integrated Products, Inc. | Microrelays and microrelay fabrication and operating methods |
JP4066928B2 (ja) * | 2002-12-12 | 2008-03-26 | 株式会社村田製作所 | Rfmemsスイッチ |
US6882256B1 (en) | 2003-06-20 | 2005-04-19 | Northrop Grumman Corporation | Anchorless electrostatically activated micro electromechanical system switch |
US20070236307A1 (en) * | 2006-04-10 | 2007-10-11 | Lianjun Liu | Methods and apparatus for a packaged MEMS switch |
US7141989B1 (en) * | 2006-04-10 | 2006-11-28 | Freescale Semiconductor, Inc. | Methods and apparatus for a MEMS varactor |
-
2003
- 2003-11-18 AT AT03772361T patent/ATE322033T1/de not_active IP Right Cessation
- 2003-11-18 WO PCT/ES2003/000584 patent/WO2004046807A1/es active IP Right Grant
- 2003-11-18 ES ES03772360T patent/ES2305527T3/es not_active Expired - Lifetime
- 2003-11-18 KR KR1020057009106A patent/KR20050083929A/ko not_active Application Discontinuation
- 2003-11-18 BR BR0316409-8A patent/BR0316409A/pt not_active IP Right Cessation
- 2003-11-18 CN CNB2003801071729A patent/CN100410165C/zh not_active Expired - Fee Related
- 2003-11-18 AU AU2003279414A patent/AU2003279414A1/en not_active Abandoned
- 2003-11-18 EP EP03772361A patent/EP1564584B1/en not_active Expired - Lifetime
- 2003-11-18 DE DE60320832T patent/DE60320832D1/de not_active Expired - Lifetime
- 2003-11-18 AT AT03772360T patent/ATE394344T1/de not_active IP Right Cessation
- 2003-11-18 US US10/534,736 patent/US7876182B2/en not_active Expired - Fee Related
- 2003-11-18 JP JP2004552744A patent/JP4372689B2/ja not_active Expired - Fee Related
- 2003-11-18 RU RU2005119166/09A patent/RU2325722C2/ru active
- 2003-11-18 DE DE60304355T patent/DE60304355T2/de not_active Expired - Lifetime
- 2003-11-18 CA CA002506775A patent/CA2506775A1/en not_active Abandoned
- 2003-11-18 KR KR1020057009110A patent/KR20050085065A/ko not_active Application Discontinuation
- 2003-11-18 CN CNB2003801071714A patent/CN100375921C/zh not_active Expired - Fee Related
- 2003-11-18 AU AU2003279415A patent/AU2003279415A1/en not_active Abandoned
- 2003-11-18 US US10/534,745 patent/US7446300B2/en not_active Expired - Fee Related
- 2003-11-18 WO PCT/ES2003/000583 patent/WO2004046019A1/es active IP Right Grant
- 2003-11-18 ES ES03772361T patent/ES2258735T3/es not_active Expired - Lifetime
- 2003-11-18 CA CA002506710A patent/CA2506710A1/en not_active Abandoned
- 2003-11-18 JP JP2004552743A patent/JP4351634B2/ja not_active Expired - Fee Related
- 2003-11-18 EP EP03772360A patent/EP1564182B1/en not_active Expired - Lifetime
-
2004
- 2004-05-18 ES ES200401275A patent/ES2239549B1/es not_active Expired - Fee Related