JP2006343249A5 - - Google Patents

Download PDF

Info

Publication number
JP2006343249A5
JP2006343249A5 JP2005170265A JP2005170265A JP2006343249A5 JP 2006343249 A5 JP2006343249 A5 JP 2006343249A5 JP 2005170265 A JP2005170265 A JP 2005170265A JP 2005170265 A JP2005170265 A JP 2005170265A JP 2006343249 A5 JP2006343249 A5 JP 2006343249A5
Authority
JP
Japan
Prior art keywords
probe
shape
measuring
moving body
gantry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005170265A
Other languages
English (en)
Japanese (ja)
Other versions
JP4500736B2 (ja
JP2006343249A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005170265A priority Critical patent/JP4500736B2/ja
Priority claimed from JP2005170265A external-priority patent/JP4500736B2/ja
Publication of JP2006343249A publication Critical patent/JP2006343249A/ja
Publication of JP2006343249A5 publication Critical patent/JP2006343249A5/ja
Application granted granted Critical
Publication of JP4500736B2 publication Critical patent/JP4500736B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005170265A 2005-06-10 2005-06-10 形状測定装置 Expired - Fee Related JP4500736B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005170265A JP4500736B2 (ja) 2005-06-10 2005-06-10 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005170265A JP4500736B2 (ja) 2005-06-10 2005-06-10 形状測定装置

Publications (3)

Publication Number Publication Date
JP2006343249A JP2006343249A (ja) 2006-12-21
JP2006343249A5 true JP2006343249A5 (enExample) 2008-07-24
JP4500736B2 JP4500736B2 (ja) 2010-07-14

Family

ID=37640311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005170265A Expired - Fee Related JP4500736B2 (ja) 2005-06-10 2005-06-10 形状測定装置

Country Status (1)

Country Link
JP (1) JP4500736B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5025444B2 (ja) * 2007-12-12 2012-09-12 キヤノン株式会社 三次元形状測定装置
JP5179852B2 (ja) * 2007-12-19 2013-04-10 Ｎｔｎ株式会社 軸受の回転精度の測定装置
JP5438988B2 (ja) * 2009-02-17 2014-03-12 株式会社ミツトヨ 測定システムおよび干渉計
JP2012237686A (ja) * 2011-05-12 2012-12-06 Canon Inc 測定装置
JP2014077692A (ja) * 2012-10-10 2014-05-01 Kosaka Laboratory Ltd 触針式測定装置及び触針式測定装置による高さ測定方法
JP6655888B2 (ja) * 2014-08-20 2020-03-04 キヤノン株式会社 計測装置、計測方法、および物品の製造方法
JP6049786B2 (ja) * 2015-03-05 2016-12-21 株式会社ミツトヨ 測定プローブ
JP6039718B2 (ja) * 2015-03-05 2016-12-07 株式会社ミツトヨ 測定プローブ
JP6049785B2 (ja) * 2015-03-05 2016-12-21 株式会社ミツトヨ 測定プローブ
CN110388875B (zh) * 2019-08-29 2021-04-06 合肥工业大学 能提高测量范围的微纳米三维接触式测量探头及控制方法
JP7340761B2 (ja) * 2019-10-28 2023-09-08 パナソニックＩｐマネジメント株式会社 測定用プローブ
CN112066900B (zh) * 2020-09-16 2022-04-29 江西财经大学 一种距离测量装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001317933A (ja) * 2000-05-02 2001-11-16 Ricoh Co Ltd 形状測定装置

Similar Documents

Publication Publication Date Title
JP2006343249A5 (enExample)
JP2013057671A5 (enExample)
JP2015119187A5 (enExample)
DE502007004432D1 (de) Verfahren und vorrichtung zum bestimmen von raumkoordinaten an einer vielzahl von messpunkten
WO2012151125A3 (en) System for measuring length of a beam extension and detecting support
JP2009014517A5 (enExample)
JP2020001109A5 (enExample)
JP2009025024A5 (enExample)
ATE547293T1 (de) Mobile robotervorrichtung mit kollisionssensor
ATE528614T1 (de) Verfahren zum scannen der oberfläche eines arbeitsstücks
JP2014056352A5 (enExample)
JP2008538845A5 (enExample)
JP2011122899A5 (enExample)
JP2010243280A5 (enExample)
JP2014507810A5 (enExample)
JP2011122898A5 (enExample)
JP2008539410A5 (enExample)
JP2011093082A5 (enExample)
ATE549173T1 (de) Druckvorrichtung
BRPI0822613A2 (pt) Processo e dispositivo para a medição sem contato da defasagem dos componentes funcionais no percurso de deslocamento de um teleférico magnético propulsionado por um motor linear
EP2264409A3 (en) Lithographic apparatus and device manufacturing method
JP2025081529A5 (enExample)
TW200636794A (en) Method of measuring beam angle
JP2014052222A5 (enExample)
WO2006128733A3 (de) Koordinatenmessgerät sowie verfahren zum messen eines objektes mit einem koordinatenmessgerät