JP2013057671A5 - - Google Patents

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Publication number
JP2013057671A5
JP2013057671A5 JP2012228071A JP2012228071A JP2013057671A5 JP 2013057671 A5 JP2013057671 A5 JP 2013057671A5 JP 2012228071 A JP2012228071 A JP 2012228071A JP 2012228071 A JP2012228071 A JP 2012228071A JP 2013057671 A5 JP2013057671 A5 JP 2013057671A5
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JP
Japan
Prior art keywords
stylus
surface detection
lateral displacement
conversion system
probe body
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JP2012228071A
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English (en)
Japanese (ja)
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JP5746121B2 (ja
JP2013057671A (ja
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Priority claimed from GBGB0508388.6A external-priority patent/GB0508388D0/en
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Publication of JP2013057671A publication Critical patent/JP2013057671A/ja
Publication of JP2013057671A5 publication Critical patent/JP2013057671A5/ja
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Publication of JP5746121B2 publication Critical patent/JP5746121B2/ja
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JP2012228071A 2005-04-26 2012-10-15 光学センサ付きの表面検出装置 Active JP5746121B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0508388.6A GB0508388D0 (en) 2005-04-26 2005-04-26 Surface sensing device with optical sensor
GB0508388.6 2005-04-26

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2008508296A Division JP5324214B2 (ja) 2005-04-26 2006-04-26 光学センサ付きの表面検出装置

Publications (3)

Publication Number Publication Date
JP2013057671A JP2013057671A (ja) 2013-03-28
JP2013057671A5 true JP2013057671A5 (enExample) 2013-08-29
JP5746121B2 JP5746121B2 (ja) 2015-07-08

Family

ID=34640121

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008508296A Active JP5324214B2 (ja) 2005-04-26 2006-04-26 光学センサ付きの表面検出装置
JP2012228071A Active JP5746121B2 (ja) 2005-04-26 2012-10-15 光学センサ付きの表面検出装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2008508296A Active JP5324214B2 (ja) 2005-04-26 2006-04-26 光学センサ付きの表面検出装置

Country Status (6)

Country Link
US (3) US7847955B2 (enExample)
EP (1) EP1875158B1 (enExample)
JP (2) JP5324214B2 (enExample)
CN (2) CN102997843B (enExample)
GB (1) GB0508388D0 (enExample)
WO (1) WO2006114627A1 (enExample)

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GB201806830D0 (en) * 2018-04-26 2018-06-13 Renishaw Plc Surface finish stylus
JP6898966B2 (ja) * 2019-06-07 2021-07-07 株式会社ミツトヨ 不具合判定ユニット
CA3155008A1 (en) * 2019-09-18 2021-03-25 DWFritz Automation, Inc. Non-contact optical measurement devices and exchangeable optical probes
CN110500958B (zh) * 2019-09-30 2021-03-12 北方民族大学 一种激光扫描精密测头装置
US11644299B2 (en) 2020-12-31 2023-05-09 Mitutoyo Corporation Inductive position sensor signal gain control for coordinate measuring machine probe

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