JP2006337271A - Method for inspecting semiconductor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To shorten inspection time while reducing inspection costs by dispensing with a waiting time till stabilizing of voltage when inspecting a semiconductor device by changing voltage level. <P>SOLUTION: This device comprises a power supply control part 121 which linearly varies an internal power supply voltage applied to an internal cell 122 of the semiconductor device according to a control counter signal 101 which is provided from outside on a board on which the semiconductor device 131 or the semiconductor device 132 is mounted, and the device controls the power supply control part 121 using the control counter signal 101 so that the power supply voltage applied to the semiconductor device varies synchronizing with a signal for inspection applied to the semiconductor device. Accordingly, the waiting time till stabilizing of voltage become unnecessary and the inspection time can be shortened, and thus the inspection costs can be reduced. Furthermore, inspection efficiency can be higher by changing the voltage level of a clock or data applied to the semiconductor device in the power supply control part 121. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an inspection method performed by changing a power supply voltage level of a semiconductor device.

  Conventionally, in the inspection of semiconductor devices, the power supply voltage is inspected at a single level, and even when inspecting at the highest voltage or the lowest voltage of the product, the inspection is performed at a specific voltage corresponding to each. Had gone. In addition, when cores and circuit blocks of various voltages exist on one chip, the inspection is performed with a circuit configuration in which each core or circuit block can be individually inspected.

As described above, it is important to stabilize the internal power supply voltage when performing inspection by changing the power supply voltage level of the semiconductor device. However, as a semiconductor device itself, the transient response is suppressed and the high frequency response characteristics are excellent. Further, a technique for providing an internal power supply voltage generation circuit is disclosed (for example, see Patent Document 1).
JP-A-8-190437

  However, in the conventional semiconductor device inspection, when the voltage level is changed and the inspection is performed, when changing the voltage, a waiting time until the voltage becomes stable is required, and the test time increases and the inspection cost increases. There was a problem.

  In addition, the voltage level change by the tester device has a problem in that the voltage generation unit and the voltage setting unit are separately set, so that the voltage levels of both cannot be changed completely in synchronization.

  In addition, it is desirable to inspect circuit blocks collectively in order to simplify the test in scan tests, etc., but if there are various internal power supply cores and circuit blocks on one chip, individual inspections at different voltage levels There is a problem that the test time increases and the inspection cost increases.

  The present invention eliminates the waiting time until the voltage stabilizes when the semiconductor device is inspected by changing the voltage level, and can reduce the inspection time and the inspection cost. The purpose is to provide.

  According to the method for inspecting a semiconductor device of the present invention, a power supply control unit that linearly varies a power supply voltage applied to the semiconductor device according to a control signal applied from the outside is provided, and the power supply voltage applied to the semiconductor device is applied to the semiconductor device. Control is performed using the control signal so as to vary in synchronization with the inspection signal.

  According to the above configuration, the power supply voltage applied to the semiconductor device is linearly changed in synchronization with the inspection signal applied to the semiconductor device, thereby eliminating the waiting time until the voltage stabilizes and reducing the inspection time. Thus, the inspection cost can be reduced. Further, linearly changing the voltage level can be expected to suppress IR drops.

  In the present invention, in addition to the power supply voltage applied to the semiconductor device, the voltage levels of the clock signal and the data signal applied to the semiconductor device are also variable according to the control signal, and the power supply control unit is provided in the semiconductor device. Control is performed using the control signal so that the applied power supply voltage and the voltage level of the clock signal or data signal can be varied in synchronization.

  According to the above-described configuration, it is possible to inspect a semiconductor device that guarantees a plurality of voltage levels by arbitrarily changing not only the power supply voltage level but also the clock and data voltages in the inspection of the semiconductor device.

  In the present invention, the semiconductor device includes a plurality of IP cores and circuit blocks having different internal power supply voltages, and the power supply control unit externally supplies a power supply voltage to each of the plurality of IP cores and circuit blocks. It varies linearly according to the control signal to be applied.

  According to the above configuration, even in a semiconductor device in which the internal core and the circuit block are configured with different power supplies, the voltage level of the internal power supply given to each is linearly changed according to the signal value given from the outside, Thus, the semiconductor device can be inspected in a short time while changing the voltage level of the internal power supply.

  In the present invention, the semiconductor device is a product that guarantees a plurality of power supply voltage ranges, and the inspection of the plurality of power supply voltage ranges is continuously performed by controlling the power supply control unit using the control signal. .

  According to the above configuration, in the inspection of a semiconductor device that guarantees a plurality of voltage levels, it is not necessary to stop the inspection every time the voltage level is changed and wait for the stability of the semiconductor inspection device. Continuous inspection such as measurement inspection becomes possible.

  According to the present invention, it is not necessary to wait for the voltage to stabilize in the inspection of the semiconductor device, and the inspection time can be shortened and the inspection cost can be reduced. Even in a semiconductor device in which the internal core and the circuit block are configured with different power supply voltages, the semiconductor device can be inspected in a short time while changing the voltage level in synchronization with the whole.

(Embodiment 1)
FIG. 1 is a diagram showing an apparatus configuration for carrying out a semiconductor device inspection method according to the first embodiment of the present invention. In FIG. 1, 101 is a control counter signal input from a semiconductor inspection apparatus, 102 is an internal power supply provided from the semiconductor inspection apparatus, 103 is a device terminal power supply for supplying terminal voltage to the device terminal 124, and 121 is an internal power supply. A power supply control unit that changes the voltage level of 102 by the control counter signal 101, 122 is an internal cell that operates by changing the voltage, and 123 is a level shifter that converts the voltage of the device terminal 124 into a voltage suitable for the internal cell 122.

  Reference numeral 131 denotes a device when the power control unit 121 is mounted in the device, and 132 denotes a device when the power control unit 121 is mounted on the board.

  FIG. 2 is a timing chart for explaining the operation of the power control unit 121 in the present embodiment. In FIG. 2, the level of the internal power supply 102 supplied to the internal cell 122 changes linearly according to the count value of the control counter signal 105.

  In this way, by changing the level of the internal power supply linearly in accordance with the value of the control counter signal given from the outside, it becomes possible to change it in synchronization with the terminal voltage applied to the device terminal 124. The semiconductor device can be inspected while changing the voltage level.

(Embodiment 2)
FIG. 3 is a diagram showing an apparatus configuration for carrying out the semiconductor device inspection method according to the second embodiment of the present invention. In FIG. 3, 101 is a control counter signal input from a semiconductor inspection apparatus, 102 is an internal power supply provided from the semiconductor inspection apparatus, 105 is a clock, 106 is data, and 125 is or is not performing power control. A switch 121 for switching the power is a power control unit. 131 and 132 are the same as those in FIG.

  In the present embodiment, the control counter signal 101 input from a semiconductor inspection apparatus or the like causes the power supply control unit 121 to change the voltage level of the clock and data in accordance with the change of the voltage level of the internal power supply 102. As described above, it is possible to inspect a semiconductor device that guarantees a plurality of voltage levels by arbitrarily changing not only the power supply voltage level but also the clock and data voltages.

  FIG. 4 is a diagram illustrating a circuit configuration example of the power supply control unit 121 in the present embodiment. In FIG. 4, 201 is a counter control signal input from a semiconductor inspection apparatus, 202 is a counter clock, 203 is a control counter that generates a signal for controlling a voltage level from the counter control signal 201 and the counter clock 202, and 204 is a variable resistor. It is a vessel. Note that the power supply controller in the first embodiment also has a similar circuit configuration.

  With such a circuit configuration, by controlling the variable resistor 204, the voltage levels of the internal power supply 102, the clock 105, and the data 106 input from the semiconductor inspection apparatus or the like are linearly changed to voltage levels as necessary. Can do.

  FIG. 5 is a timing chart when a semiconductor device is inspected continuously for a plurality of inspection voltages. By using the power supply control unit of the present embodiment, when the guaranteed voltage levels A, B, and C are different, it is not necessary to stop the inspection and wait for the stability of the semiconductor inspection apparatus every time the voltage level is changed. Continuous inspection such as function inspection and current and voltage measurement inspection becomes possible.

(Embodiment 3)
FIG. 6 is a diagram showing a device configuration for carrying out the method for inspecting a semiconductor device according to the third embodiment of the present invention. In contrast to the configuration of the first embodiment shown in FIG. The internal power supply voltage is replaced by an internal core A126, an internal core B127, and an internal core C128, and the internal power supply 102 is replaced by an internal power supply A107, an internal power supply B108, and an internal power supply C109 that supply the power supply voltage to each internal core. Yes.

  The internal core A126, the internal core B127, and the internal core C128 constitute a scan chain in this order, 110 is scan input data, and 111 is scan output data. The power supply control unit 121 changes the voltage levels of the internal power supply A 107, the internal power supply B 108, the internal power supply C 109, and the scan input data 110 according to the control counter signal 101.

  In this way, even in a semiconductor device in which the internal cores are configured with different power supplies, the voltage level of the internal power supply given to each internal core is linearly changed according to the signal value given from the outside, thereby synchronizing the whole. The semiconductor device can be inspected in a short time while changing the voltage level of the internal power supply.

  As described above, the method for inspecting a semiconductor device while linearly changing the voltage level according to the present invention is in a situation where the power of the semiconductor device itself is reduced with the reduction in power consumption during standby of a portable terminal or the like. It is suitable for the case where the inspection is performed by lowering the voltage while operating these semiconductor devices. It is also suitable for a scan test of a semiconductor device having a core or circuit block that operates with a plurality of different power supply voltages.

  The method for inspecting a semiconductor device of the present invention eliminates the need for a waiting time until the voltage is stabilized in the inspection of the semiconductor device, and has an effect that the inspection time can be shortened and the inspection cost can be reduced. This is useful as an inspection method to be performed by changing the power supply voltage level.

The apparatus block diagram in the test | inspection method of the semiconductor device which concerns on Embodiment 1 of this invention. FIG. 3 is a timing chart for explaining the operation of the power supply control unit in the semiconductor device inspection method according to the first embodiment of the present invention; The apparatus block diagram in the test | inspection method of the semiconductor device which concerns on Embodiment 2 of this invention. The figure which shows the circuit structural example of the power supply control part in the test | inspection method of the semiconductor device which concerns on Embodiment 2 of this invention. The timing diagram in the case of enforcing the inspection method of the semiconductor device of the present invention continuously to a plurality of inspection voltages. The apparatus block diagram in the test | inspection method of the semiconductor device which concerns on Embodiment 3 of this invention.

Explanation of symbols

101 Control counter signal 102, 107, 108, 109 Internal power supply 103 Device terminal power supply 105 Clock 106 Data 110 Scan input data 111 Scan output data 121 Power supply control unit 122 Internal cell 123 Level shifter 124 Device terminal 125 Changeover switch,
126, 127, 128 Internal core 131 Device when power supply control unit is mounted in device 132 Device when power supply control unit is mounted on board 201 Counter control signal 202 Counter clock 203 Control counter 204 Variable resistor

Claims (4)

  A power supply control unit that linearly varies a power supply voltage applied to the semiconductor device according to a control signal applied from the outside, and varies a power supply voltage applied to the semiconductor device in synchronization with an inspection signal applied to the semiconductor device. Thus, a method for inspecting a semiconductor device controlled using the control signal.   A voltage level of a clock signal or a data signal applied to the semiconductor device in addition to a power supply voltage applied to the semiconductor device is variable according to the control signal, and the power supply voltage applied to the semiconductor device 2. The method for inspecting a semiconductor device according to claim 1, wherein the control signal is used to control the voltage level of the clock signal and the data signal so as to vary in synchronization.   The semiconductor device includes a plurality of IP cores and circuit blocks having different internal power supply voltages, and the power supply control unit applies a power supply voltage applied to each of the plurality of IP cores and circuit blocks to a control signal supplied from the outside. 2. The method for inspecting a semiconductor device according to claim 1, wherein the inspection method varies linearly in response.   The semiconductor device is a product that guarantees a plurality of power supply voltage ranges, and the inspection of the plurality of power supply voltage ranges is continuously performed by controlling the power supply control unit using the control signal. Inspection method for semiconductor devices.

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