JP2006324618A - Mask for conductive ball arrangement and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To highly precisely arrange conductive balls 13 in prescribed positions in an arrangement mask which has an opening part 11a corresponding to a prescribed arrangement pattern and loads the conductive balls 13 in the prescribed positions by putting the conductive balls 13 into the opening part 11a. <P>SOLUTION: Projections 11c are integrally formed on a side confronted with a body 14 to be loaded in the arrangement mask. Thus, the arrangement mask and the body 14 to be loaded are easily positioned. Consequently, the conductive balls 13 are loaded on the prescribed positions and therefor defects can be reduced. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an array mask suitable for mounting conductive balls and a method for manufacturing the same.

  As a method for mounting the conductive ball, the solder ball or flux is applied to the electrode portion formed on the substrate, the conductive ball is mounted on the electrode portion to which the solder paste or flux has been applied, and then the reflow is performed. Is generally melted. There are already many methods for mounting the conductive balls, and one of them is a transfer type. The transfer type is a method of mounting conductive balls using a mask in which a plurality of openings are formed, and there is one disclosed in Patent Document 1 as a mask used for this transfer type. Patent Document 1 will be described with reference to FIG. 20. A mask 104 in which a holding base 106 for holding a substrate 101 is provided and an introduction hole 104 a for a conductive ball 103 corresponding to the pattern 102 formed on the substrate 101 is formed. A spacer 105 is provided between the mask 104 and the substrate 101 so as to prevent the flux from adhering to the mask 104 to cause mounting failure of the conductive balls 103. It is.

Japanese Patent Laid-Open No. 10-126046

  However, in the mask 104 disclosed in Patent Document 1, since the mask 104 and the spacer 105 are not integrally formed, it is difficult to accurately align the substrate 101, the mask 104, and the spacer 105. As a result, the conductive ball 103 was not mounted at a predetermined position, which led to a failure.

  An object of the present invention is to provide a mask in which conductive balls are accurately arranged at predetermined positions.

  The present invention is an array mask having openings 11a corresponding to a predetermined array pattern, and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 11a. A protrusion 11c is integrally formed on the side of the arrangement mask facing the mounted body 14. The term “integrally” as used herein includes those in which the same substance or different substances are fixed.

  The protrusion 11c is formed of a nonmagnetic material.

  The non-magnetic material is a resist.

  Further, the protrusion 11c is formed at a position that does not overlap the electrode portions 14a arranged in a predetermined pattern on the mounted body 14 when the arrangement mask is placed on the mounted body 14. It is characterized by that.

  An arrangement mask having openings 18 corresponding to a predetermined arrangement pattern and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 18. Is characterized in that it is formed by a two-step hole of a minute hole part 18a and a large diameter hole part 18b having a larger diameter than the minute hole part.

  Further, the side of the arrangement mask facing the mounted body 14 is formed of a non-magnetic material.

  Further, the non-magnetic material is a resist.

  The large-diameter hole portion 18b is formed to have a size that does not overlap with the electrode portions 14a arranged in a predetermined pattern on the mounted body 14 when the arrangement mask is placed on the mounted body 14. It is characterized by being

  Furthermore, the mounted body 14 in which the electrode portions 14a are arranged in a predetermined pattern, the table 12 on which the mounted body 14 is placed with the surface on which the electrode portions 14a are arrayed facing upward, and the table 12 is magnetically An array mask provided in a mounting device 10 having a magnetic generator for generating a magnetic field, wherein the array mask corresponds to an array pattern of the electrode portions 14a and is an opening through which the conductive balls 13 can be inserted. The alignment mask faces the surface on which the electrode portion 14a is arranged, and the opening is aligned with the electrode portion 14a. The aligned alignment mask is magnetically By sucking, the electrode part 14a is brought into close contact with the arrayed surface.

  The present invention also relates to a method of manufacturing an array mask having openings 11a corresponding to a predetermined array pattern, and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 11a. In the first patterning step of providing a primary pattern resist 21 having a resist body 21a on the surface of the mother die 20, and using the primary pattern resist 21, an electrodeposited metal is electroformed on the mother die, A first electroforming step for forming the primary electrodeposition layer 22; a second patterning step for providing a secondary pattern resist 24 having a resist body 24a on the primary electrodeposition layer 22; A second electrode for forming a secondary electrodeposition layer 25 by electroforming an electrodeposited metal on the surface where the electrodeposition layer 22 is not formed and the surface not covered with the resist body 24a on the primary electrodeposition layer 22. Casting process and mother In terms of stripping the 20, characterized in that it comprises a step of removing the primary electrodeposited layers 22.

  The present invention also has a method of manufacturing an array mask having openings 11a corresponding to a predetermined array pattern, and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 11a. In the first patterning step of providing a primary pattern resist 31 having a resist body 31a on the surface of the mother die 20, and using the primary pattern resist 31, an electrodeposited metal is electroformed on the mother die 20. A first electroforming process for forming the primary electrodeposition layer 32; a second patterning process for forming a resist layer 33 on the primary electrodeposition layer 32 and providing a secondary pattern resist 34 having a resist body 34a; And a step of peeling the mother die 20.

  In the present invention, there is provided an array mask having openings 11a corresponding to a predetermined array pattern, and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 11a. The protrusion 11c is integrally formed on the side of the arrangement mask facing the mounted body 14, thereby making it easier to align the alignment mask and the mounted body 14. Since the conductive ball 13 is mounted at a predetermined position, defects can be reduced. Further, when the conductive ball 13 is dropped by the squeegee 17, it is difficult for the squeegee 17 to bend due to the load. Therefore, a certain amount of the conductive ball 13 can be collectively mounted in each opening 11a, so that defects can be reduced. .

  Further, when the protrusion 11c is formed of a nonmagnetic material, the protrusion 11c is used in a mounting device that attracts the array mask on which the protrusion 11c is formed of a nonmagnetic material by a magnetic force. Since the magnetic force acts uniformly on the mask portion 111 as compared with the portion 11c formed of a magnetic body, the array mask can be adhered to the mounted body 14 well, and the array When removing the mask, the mounted body 14 and the projection 11c are not directly magnetically coupled, so that the plate separation can be improved.

  Further, if the non-magnetic material is a soft material such as a resist, the projection 11c functions as a cushion. Therefore, when the arrangement mask is placed on the mounting body 14 or removed from the mounting body 14. In addition, it is difficult to cause the mounted body 14 to be damaged by the protrusion 11c.

  Further, the protrusion 11c is formed at a position that does not overlap the electrode portions 14a arranged in a predetermined pattern on the mounted body 14 when the arrangement mask is placed on the mounted body 14. As a result, it is possible to prevent a temporary fixing material having a viscosity such as solder paste or flux from adhering to the protruding portion 11c and causing the mounting failure of the conductive balls 13.

  An arrangement mask having openings 18 corresponding to a predetermined arrangement pattern and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 18. Is formed by a two-stage hole of a micro hole portion 18a and a large hole portion 18b having a larger diameter than the micro hole portion, so that when the conductive ball 13 is dropped by the squeegee 17, the deflection due to the load of the squeegee 17 Therefore, a certain amount of conductive balls 13 can be collectively mounted in each opening 18 and defects can be reduced.

  Further, the side facing the mounted body 14 of the array mask is formed of a non-magnetic material, so that the side facing the mounted body 14 of the array mask is formed of a magnetic material. Since the magnetic force acts uniformly on the mask portion 211, the alignment mask can be satisfactorily adhered to the non-magnetic body 14, and when the alignment mask is removed, Since the surface of the array mask in contact with the mounted body 14 is not directly magnetically coupled, the plate separation can be improved.

  Furthermore, if the non-magnetic material is a soft material such as a resist, the non-magnetic material on the side facing the mounted body 14 of the array mask serves as a cushion, so the array mask is mounted. When being placed on or removed from the mounted body 14, the mounted body 14 is hardly damaged.

  The large-diameter hole portion 18b is formed to have a size that does not overlap with the electrode portions 14a arranged in a predetermined pattern on the mounted body 14 when the arrangement mask is placed on the mounted body 14. By doing so, it is possible to prevent a temporary fixing material having viscosity such as solder paste or flux from adhering to the arrangement mask and causing the mounting failure of the conductive balls 13.

  Furthermore, the mounted body 14 in which the electrode portions 14a are arranged in a predetermined pattern, the table 12 on which the mounted body 14 is placed with the surface on which the electrode portions 14a are arrayed facing upward, and the table 12 is magnetically An array mask provided in a mounting device 10 having a magnetic generator for generating a magnetic field, wherein the array mask corresponds to an array pattern of the electrode portions 14a and is an opening through which the conductive balls 13 can be inserted. The alignment mask faces the surface on which the electrode portion 14a is arranged, and the opening is aligned with the electrode portion 14a. The aligned alignment mask is magnetically By sucking, the electrode portion 14a is brought into close contact with the arrayed surface, thereby making it difficult for the array mask to be bent by a magnetic force. Further, in the mounting apparatus 10, when an array mask in which a portion in contact with the mounted body 14 is formed of a non-magnetic material is used, the magnetic force acts uniformly on the array mask. Since the arrangement mask can be satisfactorily adhered to the mounted body 14 and the arrangement mask is indirectly sucked by the table 12, it is easy to remove the arrangement mask. Can do. Further, if the non-magnetic material is a soft material such as a resist, the non-magnetic material serves as a cushion. Therefore, when the arrangement mask is placed on or removed from the mounted body 14. It is unlikely that the mounted body 14 is damaged by the nonmagnetic material.

  In the method for manufacturing an array mask according to the present invention, a primary pattern resist 21 having a resist body 21 a is provided on the surface of a mother die 20, and an electrodeposited metal is electroformed on the mother die using the primary pattern resist 21. An electrodeposition layer 22 is formed, a secondary pattern resist 24 having a resist body 24 a is provided on the primary electrodeposition layer 22, and the surface on which the primary electrodeposition layer 22 is not formed on the matrix 20 and the primary electrodeposition layer 22. An electrodeposited metal was electroformed on the surface not covered with the upper resist body 24a to form a secondary electrodeposition layer 25. After the mother die 20 was peeled off, the primary electrodeposition layer 22 was removed. According to this, the protrusion 11c is integrated with the mask portion 111 with high accuracy.

  In the method for manufacturing an array mask according to the present invention, a primary pattern resist 31 having a resist body 31 a is provided on the surface of a mother die 20, and an electrodeposited metal is electroformed on the mother die 20 using the primary pattern resist 31. A primary electrodeposition layer 32 was formed, a resist layer 33 was formed on the primary electrodeposition layer 32, a secondary pattern resist 34 having a resist body 34a was provided, and the matrix 20 was peeled off. According to this, the projection part 11c is formed with a resist, and cost can be suppressed. The resist is preferably a solder resist.

(First embodiment)
An arrangement mask of the present invention and a conductive ball mounting device provided with the arrangement mask will be described below with reference to the drawings. FIG. 1 is a schematic configuration diagram showing an aspect of a conductive ball mounting apparatus. FIG. 2A is a plan view of the arrangement mask, and FIG. 2B is a cross-sectional view of the arrangement mask. FIG. 3 is a partially enlarged sectional view of the arrangement mask.

  As shown in FIG. 1, the mounting device 10 mounts the mounted body 14 in which the electrode portions 14a are arranged in a predetermined pattern and the mounted body 14 with the surface on which the electrode portions 14a are arranged facing upward. The table 12 has an arrangement mask 11 corresponding to the arrangement pattern of the electrode portions 14a and formed with openings 11a through which the conductive balls 13 can be inserted. The arrangement mask is provided on the surface on which the electrode portions 14a are arranged. 11 is a mounting device 10 in which the opening 11a is aligned with the electrode portion 14a, and the conductive ball 13 is mounted on the electrode portion 14a through the opening 11a.

  As shown in FIG. 1, the arrangement mask 11 includes a mask part 111 and a frame part 112. As shown in FIGS. 2 and 3, the conductive ball 13 can be inserted into the mask part 111, and the electrode part 14a. Opening portions 11a, non-opening portions 11b, and projections 11c such as pillars formed according to the arrangement pattern are formed. Hereinafter, a method of manufacturing the array mask 11 will be described with reference to FIGS.

  First, as shown in FIG. 4A, a mother die 20 is prepared. The mother die 20 may be anything as long as it has conductivity, and SUS is used in this embodiment.

  Next, a photoresist layer is formed on the surface of the mother die 20, and exposure, development, and drying are performed by known methods to dissolve and remove unexposed portions, as shown in FIG. A primary pattern resist 21 having a resist body 21 a was formed on the mother die 20. The photoresist layer was formed by laminating one or several negative photosensitive dry film resists at a predetermined height.

  Next, the mother die 20 is put in an electroforming tank bathed under a predetermined condition, and covered with the resist body 21a of the mother die 20 to the same level as the previous resist body 21a as shown in FIG. 4 (c). A primary electrodeposition layer 22 was formed by electroforming an electrodeposited metal on an unfinished surface. In this embodiment, the primary electrodeposition layer 22 was formed by Cu electroforming.

  Next, as shown in FIG. 4D, the resist body 21a was dissolved and removed.

  Next, as shown in FIG. 4E, a photoresist layer 23 was formed on the surface of the primary electrodeposition layer 22. The photoresist layer 23 was formed by laminating one or several negative photosensitive dry film resists at a predetermined height.

  Next, exposure, development, and drying are performed by well-known methods to dissolve and remove the unexposed portions, thereby forming the secondary pattern resist 24 having the resist body 24a as shown in FIG. 5A. It was formed on the deposition layer 22.

  Next, as shown in FIG. 5B, the electrodeposited metal is charged onto the surface of the master die 20 where the primary electrodeposition layer 22 is not formed and the surface of the primary electrodeposition layer 22 not covered with the resist body 24a. The secondary electrodeposition layer 25 was formed by casting. In the present embodiment, the secondary electrodeposition layer 25 is formed by Ni-Co alloy electroforming. In the step of forming the secondary electrodeposition layer 25, so-called overhang may be performed in which electrodeposition is performed beyond the thickness of the resist pattern 24. As a result, the conductive ball 13 can be easily transferred into the opening 11a and the conductive ball 13 once mounted can be made difficult to come off. In addition, after the secondary electrodeposition layer 25 is formed, the surface of the secondary electrodeposition layer 25 is preferably subjected to mechanical polishing such as belt polishing and / or electrolytic polishing.

  Next, as shown in FIG. 5C, the resist body 24a was dissolved and removed.

  Next, as shown in FIG. 5 (d), the electrodeposited metal layers 22 and 25 were peeled from the matrix 20.

  Finally, the primary electrodeposition layer is removed, and in this embodiment, etching is performed, thereby obtaining an alignment mask 11 as shown in FIGS. 2 and 3 (FIG. 5E).

  The arrangement mask 11 may be attached or detached manually or by providing a mask moving means. When the mask moving means is provided, one end of the array mask 11 is supported by the mask moving means. When the conductive balls 13 are mounted, the mask moving means is positioned above the mounted body 14 and mounted from the table 12. When removing the body 14, it is desirable that the arrangement mask 11 be detached from above the mounted body 14 because the alignment mask 11 can be positioned efficiently.

  The positioning of the table 12 may be performed manually or by providing a table lifting / lowering means. When the table elevating means is provided, the table 12 is connected to the table elevating means, and when the conductive ball 13 is mounted, the table 12 is raised to a predetermined position, and after the conductive ball 13 is mounted, the table 12 It is desirable to lower the position because the table 12 can be positioned efficiently.

  The means for supplying the conductive balls 13, that is, means for supplying more conductive balls 13 than the number of the openings 11a to the upper surface of the arrangement mask 11 positioned above the surface on which the electrode portions 14a are arranged, Although not limited thereto, for example, a conductive ball supply unit 15 having a supply port 15 a disposed above the left end (one end) of the array mask 11 is provided, and the conductive ball supply unit 15 is provided. Therefore, it is desirable to supply the conductive balls 13 in a fixed quantity because the conductive balls 13 can be supplied efficiently.

  The configuration of the transfer means for transferring the conductive balls 13 supplied to the array mask 11 into the openings 11a is not particularly limited. For example, the left end (one end) of the array mask 11 on the paper surface. It is preferable to use a squeegee 17 that can traverse while the upper surface and the tip of the arrangement mask 11 are in contact with each other between the upper end and the right end (the other end). When this squeegee 17 is used, the conductive balls 13 supplied to the upper surface of the array mask 11 are captured at the tip of the squeegee 17 and moved between both ends of the array mask 11 and inserted into the opening 11a. It will be.

  The means for removing the conductive balls 13, that is, the means for removing the remaining conductive balls 13 not inserted into the openings 11a from the upper surface of the array mask 11 is not particularly limited. 11 is provided with a conductive ball removing means 16 having a supply port 16a disposed above the right end (the other end) of 11 and the remaining conductive balls 13 moved to the right end by the squeegee 17 are conductive. The removal by the ball removing means 16 is desirable because the conductive balls 13 can be efficiently removed.

  The mounting method of the conductive ball 13 by the mounting device 10 having such a configuration corresponds to the mounted body 14 in which the electrode portions 14a are arrayed in a predetermined pattern and the arrangement pattern of the electrode portions 14a of the mounted body 14, The arraying mask 11 having the opening 11a through which the ball 13 can be inserted is opposed to the surface of the mounted body 14 on which the electrode part 14a of the mounted body 14 is arranged, and the electrode part 14a The opening 1a is aligned with the conductive ball 13 mounted on the electrode portion 14a through the opening 11a. Hereinafter, a method of mounting the conductive ball 13 will be described with reference to FIG.

  First, a temporary fixing material having a viscosity such as a solder paste or a flux is applied to the electrode portion 14a formed on the mounted body 14 using a printing mask. This is performed in order to prevent the mounted conductive ball 13 from being detached from the electrode portion 14a. (Temporary fixing material application process)

  Next, the arrangement mask 11 is prepared, and positioned so that the lower surface of the arrangement mask 11 faces upward with respect to the surface of the mounted body 14 where the electrode portions 14a are arranged, and the opening 11a is formed in the electrode portion 14a. In alignment, the lower surface of the array mask 11 is brought into close contact with the surface on which the electrode portions 14a are arrayed. (Sequence mask mounting process)

  Next, the number of conductive balls 13 equal to or more than the number of the openings 11a is supplied to the upper surface of the alignment mask 11, the conductive balls 13 are swung into the openings 11a, mounted on the electrode portions 14a through the openings 11a, and the rest. The conductive balls 13 are removed from the upper surface of the alignment mask 11. (Conductive ball mounting step) If necessary, in order to prevent the mounted conductive ball 13 from detaching from the electrode portion 14a, for example, the mounted conductive ball 13 is pressed against the electrode portion 14a. The process may be provided after the conductive ball mounting process.

  Next, the arrangement mask 11 is removed. (Masking mask removal process)

  Then, by reflowing the conductive ball 13 mounted on the electrode portion 14a, the conductive ball 13 can be accurately melted on the electrode portion 14a of the mounted body 14. (Reflow process)

  The arrangement mask according to the present invention is also suitable for a mounting apparatus provided with a magnetic generator in the conductive ball mounting apparatus, and it is possible to make it difficult for the arrangement mask 11 to bend even when attracted by magnetic force. For example, the array mask 11 is configured such that a magnetic generator is connected to a power supply control unit, and power is supplied from the power supply control unit, thereby generating a magnetic force on the table 12 and attracting the array mask 11.

(Second Embodiment)
Next, a second embodiment of the array mask according to the present invention will be described. In the present embodiment, attention is focused on the fact that the protrusion 11c is integrally formed of a nonmagnetic material. The protrusion 11c may be anything as long as it is a non-magnetic material such as a resin or a resist, but in the present embodiment, it is preferably formed of a solder resist. Hereinafter, a method for manufacturing the array mask 11 according to the present embodiment will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the same member as the said embodiment, and the description is abbreviate | omitted.

  First, as shown in FIG. 7A, a mother die 20 is prepared. The mother die 20 may be anything as long as it has conductivity, and SUS is used in this embodiment.

  Next, a photoresist layer is formed on the surface of the mother die 20, and exposure, development, and drying are performed by well-known methods to dissolve and remove unexposed portions, as shown in FIG. A primary pattern resist 31 having a resist body 31 a was formed on the mother die 20. The photoresist layer was formed by laminating one or several negative photosensitive dry film resists at a predetermined height.

  Next, the mother die 20 is put in an electroforming tank bathed under predetermined conditions, and covered with the resist body 31a of the mother die 20 to the same level as the previous resist body 31a as shown in FIG. A primary electrodeposition layer 32 was formed by electroforming an electrodeposited metal on an unfinished surface. In the present embodiment, the primary electrodeposition layer 32 is formed by Ni-Co electroforming. In addition, after forming the primary electrodeposition layer 32, it is preferable that the surface of the primary electrodeposition layer 32 is subjected to mechanical polishing such as belt polishing and / or electrolytic polishing.

  Next, as shown in FIG. 7D, the resist body 31a was dissolved and removed.

  Next, as shown in FIG. 8A, a solder resist layer 33 was formed on the surface of the primary electrodeposition layer 32. The solder resist layer 33 is formed by laminating one or several sheets according to a predetermined height.

  Next, exposure, development, and drying are performed by well-known methods to dissolve and remove the unexposed portions, so that the secondary pattern resist 34 having the resist body 34a is formed into a primary power as shown in FIG. 8B. It was integrally formed on the adhesion layer 32. It is preferable that after the secondary pattern resist 34 is formed, a dropping prevention process such as baking is performed. Thereby, the adhesion between the secondary pattern resist 34 having the resist body 34a and the primary electrodeposition layer 32 becomes stronger.

  Next, as shown in FIG. 8 (c), the primary electrodeposition layer 32 and the secondary pattern resist 34 formed on the surface thereof are peeled off from the mother die 20 so that the projections 11c are formed of resin. The mask 11 can be obtained.

  Here, as in the first embodiment, in the case where the projection 11c of the arrangement mask 11 is formed of a metal body, the load on the squeegee 17 when the conductive ball 13 is dropped by the squeegee 17 is used. Although it is excellent in durability, as in the present embodiment, in the case where the protrusion 11c of the arrangement mask 11 is formed of a nonmagnetic material, the magnetic force acts uniformly on the mask 111. Therefore, the arrangement mask can be satisfactorily adhered to the non-magnetic material 14, and the plate separation can be improved when the arrangement mask is removed. If the non-magnetic material is a soft material such as a resist, the projection 11c functions as a cushion. Therefore, when the arrangement mask is placed on the mounting body 14 or removed from the mounting body 14. Further, it is possible to make it difficult to cause the mounted body 14 to be damaged by the protrusion 11c.

(Third embodiment)
Next, a third embodiment of the array mask according to the present invention will be described below with reference to the drawings. FIG. 9A is a perspective view of the arrangement mask, and FIG. 9B is a cross-sectional view of the arrangement mask. As shown in FIG. 9, the arrangement mask 210 according to the present embodiment includes a mask portion 211 and a frame portion 112 (not shown). The conductive ball 13 can be inserted into the mask portion 211 and the electrode portion 14 a can be inserted. Openings 18 formed according to the arrangement pattern are formed, and the openings 18 are formed by two-stage holes of a microhole 18a and a large-diameter hole 18b having a larger diameter than the microhole. . Hereinafter, the manufacturing method of the array mask according to the present embodiment will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the same member as the said embodiment, and the description is abbreviate | omitted.

  First, as shown in FIG. 10A, a mother die 20 is prepared. The mother die 20 may be anything as long as it has conductivity, and SUS is used in this embodiment.

  Next, a photoresist layer is formed on the surface of the mother die 20, and exposure, development, and drying are performed by well-known methods to dissolve and remove unexposed portions, as shown in FIG. A primary pattern resist 41 having a resist body 41 a was formed on the mother die 20. The photoresist layer was formed by laminating one or several negative photosensitive dry film resists at a predetermined height.

  Next, the mother die 20 is put in an electroforming tank bathed under a predetermined condition, and covered with the resist body 41a of the mother die 20 to the same level as the previous resist body 41a as shown in FIG. 10 (c). A primary electrodeposition layer 42 was formed by electroforming an electrodeposited metal on an unfinished surface. In this embodiment, the primary electrodeposition layer 422 was formed by Ni-Co electroforming. In addition, it is preferable to perform mechanical polishing and / or electrolytic polishing on the surface of the primary electrodeposition layer 42 after forming the primary electrodeposition layer 42.

  Next, as shown in FIG. 10D, a resist layer 43 was formed on the surface of the primary electrodeposition layer 42 and on the surface of the resist body 41a. The resist layer 43 is formed by laminating one or several sheets according to a predetermined height.

  Next, exposure, development, and drying are performed by well-known methods to dissolve and remove the unexposed portions, so that the secondary pattern resist 44 having the resist body 44a as shown in FIG. It was formed on the adhesion layer 42 and on the surface of the resist body 41a.

  Next, as shown in FIG. 11B, an electrodeposited metal is electroformed on the surface of the primary electrodeposition layer 42 and the surface of the resist body 41a that is not covered with the resist body 44a. Formed. In this embodiment, the secondary electrodeposition layer 45 was formed by Ni-Co alloy electroforming. In addition, after forming the secondary electrodeposition layer 45, the surface of the secondary electrodeposition layer 45 is preferably subjected to mechanical polishing such as belt polishing and / or electrolytic polishing.

  Next, as shown in FIG. 11 (c), the electrodeposited metal layers 42 and 45 are peeled off from the mother die 20, so that the opening 18 has a large hole portion having a larger hole diameter than the minute hole portion 18a. It is possible to obtain the alignment mask 210 which is a two-step hole with 18b and is formed of a magnetic material.

(Fourth embodiment)
Next, a fourth embodiment of the array mask according to the present invention will be described. In the present embodiment, it is noted that the side of the arrangement mask 210 that faces the mounted body 14 is formed of a nonmagnetic material. Hereinafter, a method of manufacturing the array mask according to the present embodiment will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the same member as the said embodiment, and the description is abbreviate | omitted.

  First, as shown in FIG. 12A, a mother die 20 is prepared. The mother die 20 may be anything as long as it has conductivity, and SUS is used in this embodiment.

  Next, a photoresist layer is formed on the surface of the mother die 20, and exposure, development, and drying are performed by well-known methods to dissolve and remove unexposed portions, as shown in FIG. A primary pattern resist 51 having a resist body 51 a was formed on the mother die 20. The photoresist layer was formed by laminating one or several negative photosensitive dry film resists at a predetermined height.

  Next, the mother die 20 is put in an electroforming tank bathed under a predetermined condition, and is covered with a resist body 31a of the mother die 20 as much as the height of the previous resist body 51a as shown in FIG. 12 (c). A primary electrodeposition layer 52 was formed by electroforming an electrodeposited metal on an unfinished surface. In the present embodiment, the primary electrodeposition layer 52 is formed by Ni-Co electroforming. In addition, after forming the primary electrodeposition layer 52, it is preferable that the surface of the primary electrodeposition layer 52 is subjected to mechanical polishing such as belt polishing and / or electrolytic polishing.

  Next, as shown in FIG. 12D, the resist body 51a was dissolved and removed.

  Next, as shown in FIG. 13A, a solder resist layer 53 was formed on the surface of the primary electrodeposition layer 52. The solder resist layer 53 is formed by laminating one or several sheets according to a predetermined height.

  Next, exposure, development, and drying are performed by well-known methods to dissolve and remove the unexposed portions, so that the secondary pattern resist 54 having a resist body 54a is formed into a primary power as shown in FIG. 13B. It was formed on the deposition layer 52. It is preferable that after the secondary pattern resist 54 is formed, a dropping prevention process such as baking is performed. Thereby, the adhesion between the secondary pattern resist 54 having the resist body 54a and the primary electrodeposition layer 52 becomes stronger.

  Next, as shown in FIG. 13C, the primary electrodeposition layer 52 and the secondary pattern resist 54 formed on the surface of the master die 20 are peeled off, so that the side facing the mounted body 14 is made of a nonmagnetic material. The array mask 210 that is formed can be obtained.

  Here, as in the third embodiment, in the case where the side facing the mounted body 14 of the arrangement mask 210 is formed of a metal body, the load on the squeegee 17 when the conductive ball 13 is dropped by the squeegee 17. However, in the case where the side facing the mounted body 14 of the arrangement mask 210 is formed of a non-magnetic material as in this embodiment, a magnetic force is applied to the mask portion 211. Since it works uniformly, the arrangement mask can be satisfactorily adhered to the non-magnetic material 14, and the plate separation can be improved when the arrangement mask is removed. If the non-magnetic material is a soft material such as a resist, the non-magnetic material facing the mounted body 14 acts as a cushion, so that the arrangement mask is placed on or mounted on the mounted body 14. When removing from the body 14, it is possible to prevent the mounted body 14 from being damaged.

(Fifth embodiment)
Next, a fifth embodiment of the array mask according to the present invention will be described. This embodiment differs from the previous embodiment in the shape and formation position of the protrusion 11c. Hereinafter, the array mask 11 of the present embodiment will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the same member as the said embodiment, and the description is abbreviate | omitted.

  The arrangement mask 11 shown in FIG. 14 is provided with a protrusion 11c near the center, and is effective for the case where the conductive balls 13 have a large diameter and the arrangement mask 11 to be used has a large thickness. This is because if the arrangement mask is thick to some extent, it is difficult to bend, and therefore it is sufficient to provide the projection 11c near the center of the arrangement mask without providing a large number of projections 11c as shown in FIG. For example, as shown in FIG. 15, for example, as shown in FIG. 15, a process for preparing a master mold (SUS) 20 (FIG. 15A) is performed on the surface of the master mold 20. As shown in FIG. A primary pattern resist 61 having a resist body 61a is formed on the mother die 20 by forming a photoresist layer, performing exposure, development, and drying processes by well-known methods and dissolving and removing unexposed portions. Step (FIG. 15 (b)), put the mother die 20 in an electroforming bath bathed under a predetermined condition, until the height of the previous resist body 61a or the height of the previous resist body 61a, A step of forming a primary electrodeposition layer 62 by electroforming an electrodeposited metal (Ni-Co) on the surface of the matrix 20 not covered with the resist body 61a (FIG. 15C), the primary electrodeposition layer 62 Forming a photoresist layer 63 on the surface of ( 15 (d)), the secondary pattern resist 64 having the resist body 64a is formed on the primary electrodeposition layer 62 by performing exposure, development, and drying processes by a known method to dissolve and remove the unexposed portions. Step of forming (FIG. 15E), step of etching the primary electrodeposition layer 62 not covered with the secondary pattern resist 64 to the height of the primary pattern resist 61 (FIG. 15F), dissolving the resist body 64a A method of forming the electrodeposited metal layer 62 from the matrix 20 after the removal by a step (FIG. 15G) is conceivable.

  In addition to the above method, for example, as shown in FIG. 16, first, a step of preparing a mother die (SUS) 20 (FIG. 16A), a photoresist layer is formed on the surface of the mother die 20, A step of forming a primary pattern resist 71 having a resist body 71a on the mother die 20 by carrying out exposure, development and drying by the above method and dissolving and removing unexposed portions (FIG. 16 (b)). Then, the mother die 20 is put in an electroforming tank bathed under a predetermined condition, and an electrodeposited metal (Ni) is formed on the surface not covered with the resist member 71a of the mother die 20 up to the same height as the resist member 71a. -Co) to form a primary electrodeposition layer 72 (FIG. 16C), and a step of forming a photoresist layer 73 on the surface of the primary electrodeposition layer 72 (FIG. 16D). ), Each process of exposure, development and drying is performed by a well-known method, The step of forming the secondary pattern resist 74 having the resist body 74a on the primary electrodeposition layer 72 by removing the resist body 74a (FIG. 16E), the resist body 74a is dissolved and removed, and then electrodeposition is performed from the matrix 20. It is better to form by the process of peeling the metal layer 72 (FIG. 16F).

(Sixth embodiment)
Next, a sixth embodiment of the array mask according to the present invention will be described. In the present embodiment, the shape and formation position of the protrusion 11c are further different from those in the above embodiment. Hereinafter, the array mask 11 of the present embodiment will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the same member as the said embodiment, and the description is abbreviate | omitted.

  The arrangement mask 11 shown in FIG. 17 does not have the protrusion 11c in the vicinity of the opening 11a, but is provided at the periphery of the mask 111. The conductive ball 13 has a large diameter, and the thickness of the arrangement mask 11 to be used. It is effective for those with a large length. This is because if the arrangement mask is thick to some extent, it is difficult to bend, and therefore it is sufficient to provide the protrusions 11c on the periphery of the mask part 111 without providing a large number of protrusions 11c as shown in FIG. For example, as shown in FIG. 18, for example, as shown in FIG. 18, a process for preparing a master mold (SUS) 20 (FIG. 18A) is performed on the surface of the master mold 20. A primary pattern resist 81 having a resist body 81a is formed on the mother die 20 by forming a photoresist layer, performing exposure, development, and drying processes by well-known methods and dissolving and removing unexposed portions. Step (FIG. 18 (b)), put the matrix 20 in an electroforming bath built on a predetermined condition, until the height of the previous resist body 81a or the height of the previous resist body 81a, A step of forming a primary electrodeposition layer 82 by electroforming an electrodeposited metal (Ni—Co) on the surface of the matrix 20 not covered with the resist body 81a (FIG. 18C), the primary electrodeposition layer 82 Forming a photoresist layer 83 on the surface of ( 18 (d)), the secondary pattern resist 84 having the resist body 84a is formed on the primary electrodeposition layer 82 by performing exposure, development, and drying processes by known methods to dissolve and remove the unexposed portions. Step of forming (FIG. 18E), step of etching the primary electrodeposition layer 82 not covered with the secondary pattern resist 84 to the height of the primary pattern resist 81 (FIG. 18F), dissolving the resist body 84a A method of forming the electrodeposited metal layer 62 from the matrix 20 after removing it by a step (FIG. 18G) is conceivable.

  In addition to the above method, for example, as shown in FIG. 19, first, a step of preparing a mother die (SUS) 20 (FIG. 19A), a photoresist layer is formed on the surface of the mother die 20, A step of forming a primary pattern resist 91 having a resist body 91a on the mother die 20 by performing exposure, development and drying processes by a known method and dissolving and removing the unexposed portions (FIG. 19B). ), Put the mother die 20 in an electroforming bath built under predetermined conditions, and deposit the electrodeposited metal (on the surface not covered with the resist body 91a of the mother die 20 up to the same height as the resist body 91a. Ni-Co) is electroformed to form a primary electrodeposition layer 92 (FIG. 19C), and a photoresist layer 93 is formed on the surface of the primary electrodeposition layer 92 (FIG. 19D). )), Unexposed areas after exposure, development and drying A step of forming a secondary pattern resist 94 having a resist body 94a on the primary electrodeposition layer 92 by dissolution and removal (FIG. 19 (e)). After the resist body 94a is dissolved and removed, electrodeposition is performed from the matrix 20. It is better to form by the process of peeling the metal layer 92 (FIG. 19F).

  As described above, in the arrangement masks 11 of the fifth and sixth embodiments, the protrusions 11c are integrally formed on the side of the arrangement mask facing the mounted body 14, so that the arrangement mask and the mounting mask are mounted. Positioning with the body 14 is facilitated. As a result, the conductive ball 13 can be mounted at a predetermined position, and defects can be reduced. Further, a large number of protrusions 11c as shown in FIG. 2 must be formed on the non-opening portion 11b so as not to hang over the opening portion 11a. 17 can relatively easily form the protrusion 11c.

  Further, when the protrusion 11c is formed of a nonmagnetic material, the protrusion 11c is used in a mounting device that attracts the array mask 11 on which the protrusion 11c is formed of a nonmagnetic material by a magnetic force. Compared with the case where the portion 11c is made of a magnetic material, the magnetic force acts uniformly on the mask portion 111, so that the alignment mask 11 can be satisfactorily adhered to the mounted body 14, When the arrangement mask 11 is removed, the mounted body 14 and the protrusion 11c are not directly magnetically coupled, so that the plate separation can be improved.

  Further, if the non-magnetic material is a soft material such as a resist, the projection 11c serves as a cushion, so that the arrangement mask 11 is placed on the mounting body 14 or removed from the mounting body 14. In addition, it is difficult to cause the mounted body 14 to be damaged by the protrusion 11c.

  Of course, an array mask such as a combination of FIGS. 14 and 17 may be used.

(Other embodiments)
In the above embodiment, the shape of the protrusion 11c is not limited to the illustrated example, and may be any shape such as a star shape, a triangular shape, an endless frame shape, and the like. Further, the formation position of the protrusion 11c is preferably formed in the middle of the openings 11a and 11a as in the illustrated example. However, the protrusion 11c may not necessarily be in the middle, and may be a position that does not hang over the opening 11a. Do it anywhere. Further, it is not necessary to form the protrusions 11c regularly. For example, the protrusions 11c may be skipped or mottled, and the protrusions 11c may be formed so that the arrangement mask 11 is not bent.

  In the above-described embodiment, the array mask has a form in which an array pattern corresponding to one mounted body 14 is formed. Of course, one array mask corresponds to a plurality of mounted bodies 14. It is conceivable that the conductive balls 13 are collectively mounted on the plurality of mounted bodies 14 by forming an array pattern. This makes it possible to mount the conductive ball 13 more efficiently.

  In the above-described embodiment, it is preferable that each opening is formed in a tapered shape that is narrowed toward the mounted body 14 when the arrangement mask is mounted on the mounting apparatus 10. According to this, the conductive ball 13 can be accurately mounted at a predetermined position.

  In the embodiment, examples of the mounted body 14 include a wafer. In this wafer, the conductive balls 13 are collectively mounted at a predetermined position of the wafer using the arrangement mask of the above embodiment, and then the electronic components are coupled to the predetermined position by reflowing.

  In the embodiment, examples of the conductive ball 13 include a solder ball and a copper ball.

It is a schematic block diagram of the mounting apparatus which concerns on this invention. (A) is a top view of the mask for arrangement | sequence which concerns on 1st Embodiment of this invention, (b) is the sectional drawing. It is a partial expanded sectional view which shows the state which mounted the mask for arrangement | sequence which concerns on 1st Embodiment of this invention in the to-be-mounted body. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 1st Embodiment of this invention. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 1st Embodiment of this invention. It is explanatory drawing of the mounting method of the conductive ball which concerns on 1st Embodiment of this invention. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 2nd Embodiment of this invention. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 2nd Embodiment of this invention. (A) is a perspective view of the mask for arrangement | sequence which concerns on 3rd Embodiment of this invention, (b) is the sectional drawing. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 3rd Embodiment of this invention. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 3rd Embodiment of this invention. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 4th Embodiment of this invention. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 4th Embodiment of this invention. (A) is a top view of the mask for arrangement | sequence which concerns on 5th Embodiment of this invention, (b) is the sectional drawing. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 5th Embodiment of this invention. It is process explanatory drawing of another manufacturing method of the mask for arrangement | sequence which concerns on 5th Embodiment of this invention. (A) is a top view of the mask for arrangement | sequence which concerns on 6th Embodiment of this invention, (b) is the sectional drawing. It is process explanatory drawing of the manufacturing method of the mask for arrangement | sequence which concerns on 6th Embodiment of this invention. It is process explanatory drawing of another manufacturing method of the mask for arrangement | sequence which concerns on 6th Embodiment of this invention. It is sectional drawing which shows the state which mounts a conductive ball using the conventional mask for arrangement | sequence.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Mounting apparatus 11,210 Arrangement mask 111, 211 Mask part 112 Frame part 11a, 18 Opening part 11b Non-opening part 11c Protrusion part 12 Table 13 Conductive ball 14 Mounted object 15 Supply means 16 Removal means 17 Squeegee 18a Micro hole Part 18b Large-diameter hole part 20 Master mold 21, 31, 41, 51, 61, 71, 81, 91 Primary pattern resist 22, 32, 42, 52, 62, 72, 82, 92 Primary electrodeposition layers 23, 33, 43, 53, 63, 73, 83, 93 Resist layer 24, 34, 44, 54, 64, 74, 84, 94 Secondary pattern resist 25, 45 Secondary electrodeposition layer

Claims (11)

  An arrangement mask having openings 11a corresponding to a predetermined arrangement pattern and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 11a. The arraying mask is characterized in that a protrusion 11c is integrally formed on the side facing the mounted body 14 of the substrate.   The arraying mask according to claim 1, wherein the protrusions 11 c are made of a nonmagnetic material.   The alignment mask according to claim 2, wherein the nonmagnetic material is a resist.   The protrusion 11c is formed at a position that does not overlap with the electrode portions 14a arranged in a predetermined pattern on the mounted body 14 when the arrangement mask is placed on the mounted body 14. The array mask according to claim 1, wherein the mask is an array mask.   An arrangement mask having openings 18 corresponding to a predetermined arrangement pattern and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 18. Is an array mask characterized in that it is formed by a two-stage hole of a minute hole portion 18a and a large diameter hole portion 18b having a larger diameter than the minute hole portion.   6. The array mask according to claim 5, wherein a side of the array mask facing the mounted body is made of a nonmagnetic material.   The alignment mask according to claim 6, wherein the nonmagnetic material is a resist.   The large-diameter hole portion 18b is formed to have a size that does not overlap with the electrode portions 14a arranged in a predetermined pattern on the mounted body 14 when the arrangement mask is placed on the mounted body 14. The array mask according to claim 5, wherein the mask is an array mask.   A mounted body 14 in which electrode portions 14a are arranged in a predetermined pattern, a table 12 on which the mounted body 14 is placed with the surface on which the electrode portions 14a are arrayed facing upward, and magnetism is generated in the table 12 An array mask provided in the mounting device 10 having a magnetic generator that performs the opening, and the array mask corresponds to the array pattern of the electrode portions 14a and has an opening through which the conductive balls 13 can be inserted. The alignment mask faces the surface on which the electrode portions 14a are arranged, and the openings are aligned with the electrode portions 14a. The aligned alignment mask is attracted by magnetic force. The arrangement mask according to claim 1, wherein the electrode portion 14 a is in close contact with the arranged surface. A method for manufacturing an array mask having openings 11a corresponding to a predetermined array pattern and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 11a.
A first patterning step of providing a primary pattern resist 21 having a resist body 21a on the surface of the matrix 20;
A first electroforming step of forming a primary electrodeposition layer 22 by electroforming an electrodeposition metal on a matrix using the primary pattern resist 21;
A second patterning step of providing a secondary pattern resist 24 having a resist body 24a on the primary electrodeposition layer 22;
An electrodeposited metal is electroformed on the surface of the matrix 20 where the primary electrodeposition layer 22 is not formed and on the surface of the primary electrodeposition layer 22 that is not covered with the resist body 24a. A second electroforming step to be formed;
And a step of removing the primary electrodeposition layer 22 after the mother die 20 is peeled off. A method of manufacturing an array mask having openings 11a corresponding to a predetermined array pattern and mounting the conductive balls 13 at predetermined positions by swinging the conductive balls 13 into the openings 11a.
A first patterning step of providing a primary pattern resist 31 having a resist body 31a on the surface of the matrix 20;
A first electroforming step of forming a primary electrodeposition layer 32 by electroforming an electrodeposition metal on the mother die 20 using the primary pattern resist 31;
A second patterning step of forming a resist layer 33 on the primary electrodeposition layer 32 and providing a secondary pattern resist 34 having a resist body 34a;
And a step of peeling the mother die 20.