JP2006307257A5 - - Google Patents

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Publication number
JP2006307257A5
JP2006307257A5 JP2005129044A JP2005129044A JP2006307257A5 JP 2006307257 A5 JP2006307257 A5 JP 2006307257A5 JP 2005129044 A JP2005129044 A JP 2005129044A JP 2005129044 A JP2005129044 A JP 2005129044A JP 2006307257 A5 JP2006307257 A5 JP 2006307257A5
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JP
Japan
Prior art keywords
film forming
substrate
ozone
continuous
continuous film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005129044A
Other languages
English (en)
Japanese (ja)
Other versions
JP4635132B2 (ja
JP2006307257A (ja
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Publication date
Application filed filed Critical
Priority to JP2005129044A priority Critical patent/JP4635132B2/ja
Priority claimed from JP2005129044A external-priority patent/JP4635132B2/ja
Publication of JP2006307257A publication Critical patent/JP2006307257A/ja
Publication of JP2006307257A5 publication Critical patent/JP2006307257A5/ja
Application granted granted Critical
Publication of JP4635132B2 publication Critical patent/JP4635132B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2005129044A 2005-04-27 2005-04-27 連続式成膜装置および方法 Expired - Lifetime JP4635132B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005129044A JP4635132B2 (ja) 2005-04-27 2005-04-27 連続式成膜装置および方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005129044A JP4635132B2 (ja) 2005-04-27 2005-04-27 連続式成膜装置および方法

Publications (3)

Publication Number Publication Date
JP2006307257A JP2006307257A (ja) 2006-11-09
JP2006307257A5 true JP2006307257A5 (cg-RX-API-DMAC7.html) 2008-05-15
JP4635132B2 JP4635132B2 (ja) 2011-02-16

Family

ID=37474475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005129044A Expired - Lifetime JP4635132B2 (ja) 2005-04-27 2005-04-27 連続式成膜装置および方法

Country Status (1)

Country Link
JP (1) JP4635132B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5246862B2 (ja) * 2008-10-10 2013-07-24 Ａｇｃテクノグラス株式会社 スパッタリング装置
CN102226267B (zh) * 2011-06-10 2013-01-16 谢德培 在真空室内连续完成喷底漆、烘干、电镀的装置

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