TWI263690B - Evaporation coating apparatus - Google Patents
Evaporation coating apparatusInfo
- Publication number
- TWI263690B TWI263690B TW93100292A TW93100292A TWI263690B TW I263690 B TWI263690 B TW I263690B TW 93100292 A TW93100292 A TW 93100292A TW 93100292 A TW93100292 A TW 93100292A TW I263690 B TWI263690 B TW I263690B
- Authority
- TW
- Taiwan
- Prior art keywords
- evaporation
- coating apparatus
- different
- evaporation coating
- targets
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
An evaporation coating apparatus, which arranges the different nozzles corresponding to different evaporation targets in the way of coaxes or stagger, which enables the spurted gas molecules from each nozzle to be able to simultaneously arrive at the substrate surface, when the scanning co-evaporation process is carried out on the different evaporation targets, to achieve the uniformity of thin-film thickness and material distribution during co-evaporation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93100292A TWI263690B (en) | 2004-01-06 | 2004-01-06 | Evaporation coating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93100292A TWI263690B (en) | 2004-01-06 | 2004-01-06 | Evaporation coating apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200523380A TW200523380A (en) | 2005-07-16 |
TWI263690B true TWI263690B (en) | 2006-10-11 |
Family
ID=37967124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93100292A TWI263690B (en) | 2004-01-06 | 2004-01-06 | Evaporation coating apparatus |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI263690B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI456081B (en) * | 2009-12-31 | 2014-10-11 | Samsung Display Co Ltd | Evaporating device |
US8986783B2 (en) | 2009-11-30 | 2015-03-24 | Samsung Display Co., Ltd. | Method of forming thin film from multiple deposition sources |
TWI661067B (en) * | 2013-10-24 | 2019-06-01 | 日立造船股份有限公司 | Manifold for vacuum evaporation device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4001296B2 (en) * | 2005-08-25 | 2007-10-31 | トッキ株式会社 | Method and apparatus for vacuum deposition of organic materials |
CN114231912A (en) * | 2021-12-30 | 2022-03-25 | 武汉天马微电子有限公司 | Evaporation device and control method thereof |
-
2004
- 2004-01-06 TW TW93100292A patent/TWI263690B/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8986783B2 (en) | 2009-11-30 | 2015-03-24 | Samsung Display Co., Ltd. | Method of forming thin film from multiple deposition sources |
TWI456081B (en) * | 2009-12-31 | 2014-10-11 | Samsung Display Co Ltd | Evaporating device |
TWI661067B (en) * | 2013-10-24 | 2019-06-01 | 日立造船股份有限公司 | Manifold for vacuum evaporation device |
Also Published As
Publication number | Publication date |
---|---|
TW200523380A (en) | 2005-07-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |