JP4635132B2 - 連続式成膜装置および方法 - Google Patents

連続式成膜装置および方法 Download PDF

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Publication number
JP4635132B2
JP4635132B2 JP2005129044A JP2005129044A JP4635132B2 JP 4635132 B2 JP4635132 B2 JP 4635132B2 JP 2005129044 A JP2005129044 A JP 2005129044A JP 2005129044 A JP2005129044 A JP 2005129044A JP 4635132 B2 JP4635132 B2 JP 4635132B2
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film forming
substrate
ozone
continuous film
forming apparatus
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Japanese (ja)
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JP2006307257A (ja
JP2006307257A5 (cg-RX-API-DMAC7.html
Inventor
修 白井
俊明 荒川
忠司 金子
恭介 小寺
達也 下口
哲尚 岡本
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Showa Shinku Co Ltd
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Showa Shinku Co Ltd
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JP2005129044A 2005-04-27 2005-04-27 連続式成膜装置および方法 Expired - Lifetime JP4635132B2 (ja)

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JP2005129044A JP4635132B2 (ja) 2005-04-27 2005-04-27 連続式成膜装置および方法

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JP2005129044A JP4635132B2 (ja) 2005-04-27 2005-04-27 連続式成膜装置および方法

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JP2006307257A JP2006307257A (ja) 2006-11-09
JP2006307257A5 JP2006307257A5 (cg-RX-API-DMAC7.html) 2008-05-15
JP4635132B2 true JP4635132B2 (ja) 2011-02-16

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JP2005129044A Expired - Lifetime JP4635132B2 (ja) 2005-04-27 2005-04-27 連続式成膜装置および方法

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5246862B2 (ja) * 2008-10-10 2013-07-24 Ａｇｃテクノグラス株式会社 スパッタリング装置
CN102226267B (zh) * 2011-06-10 2013-01-16 谢德培 在真空室内连续完成喷底漆、烘干、电镀的装置

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JP2006307257A (ja) 2006-11-09

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