JP2006305639A - CUTTING TOOL MADE OF SURFACE-COATED CERMET, WITH THICK alpha-TYPE ALUMINUM OXIDE LAYER ACHIEVING EXCELLENT ANTI-CHIPPING PERFORMANCE - Google Patents

CUTTING TOOL MADE OF SURFACE-COATED CERMET, WITH THICK alpha-TYPE ALUMINUM OXIDE LAYER ACHIEVING EXCELLENT ANTI-CHIPPING PERFORMANCE Download PDF

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JP2006305639A
JP2006305639A JP2005127353A JP2005127353A JP2006305639A JP 2006305639 A JP2006305639 A JP 2006305639A JP 2005127353 A JP2005127353 A JP 2005127353A JP 2005127353 A JP2005127353 A JP 2005127353A JP 2006305639 A JP2006305639 A JP 2006305639A
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JP4730702B2 (en
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Akira Osada
晃 長田
Fumio Tsushima
文雄 対馬
Takuya Hayatoi
拓也 早樋
Takatoshi Oshika
高歳 大鹿
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Mitsubishi Materials Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting tool made of surface-coated cermet, with a thick α-type Al<SB>2</SB>O<SB>3</SB>layer achieving anti-chipping performance. <P>SOLUTION: This cutting tool made of surface-coated cermet comprises a tool base body composed of WC-based cemented carbide or TiCN-based cermet, coated with a hard coating layer composed of (a) a lower layer of a Ti compound layer comprising one layer or more than two layers of TiC layer, TiN layer, TiCN layer, TiCO layer, and TiCNO layer, formed by chemical vapor deposition, and having total average layer thickness of 0.5-10μm, and (b) an upper layer of a thick reformed α-type Al<SB>2</SB>O<SB>3</SB>layer having α-type crystal structure in a chemically vapor-deposited state, showing a specific inclined angle numerical distribution graph, and having an average layer thickness of 16-30μm. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

この発明は、硬質被覆層の上部層、すなわち化学蒸着形成した状態でα型の結晶構造を有する酸化アルミニウム層(以下、α型Al23層で示す)を、特に厚膜化した状態で、各種の鋼や鋳鉄などの切削加工に用いた場合にも、すぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具(以下、被覆サーメット工具という)に関するものである。 In the present invention, an upper layer of a hard coating layer, that is, an aluminum oxide layer (hereinafter referred to as an α-type Al 2 O 3 layer) having an α-type crystal structure in a state where chemical vapor deposition is formed is particularly thick. The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent chipping resistance even when used for cutting various steels and cast iron.

従来、一般に、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された基体(以下、これらを総称して工具基体という)の表面に、
(a)下部層として、いずれも化学蒸着形成されたTiの炭化物(以下、TiCで示す)層、窒化物(以下、同じくTiNで示す)層、炭窒化物(以下、TiCNで示す)層、炭酸化物(以下、TiCOで示す)層、および炭窒酸化物(以下、TiCNOで示す)層のうちの1層または2層以上からなり、かつ0.5〜10μmの全体平均層厚を有するTi化合物層、
(b)上部層として、1〜15μmの平均層厚を有するα型Al23層、
以上(a)および(b)で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) As a lower layer, a Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition, Ti composed of one or more of a carbon oxide (hereinafter referred to as TiCO) layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer and having an overall average layer thickness of 0.5 to 10 μm Compound layer,
(B) an α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm as an upper layer;
There is known a coated cermet tool formed by vapor-depositing a hard coating layer composed of (a) and (b) above, and this coated cermet tool can be used for continuous cutting and intermittent cutting of various steels and cast irons, for example. It is well known to be used.

また、一般に、上記の被覆サーメット工具の硬質被覆層を構成するTi化合物層やα型Al23 層が粒状結晶組織を有し、さらに、前記Ti化合物層を構成するTiCN層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、700〜950℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
特開平6−31503号公報 特開平6−8010号公報
In general, the Ti compound layer and the α-type Al 2 O 3 layer constituting the hard coating layer of the above-mentioned coated cermet tool have a granular crystal structure, and further, the TiCN layer constituting the Ti compound layer is the layer itself. For the purpose of improving the strength of the crystal, a vertically grown crystal formed by chemical vapor deposition at a medium temperature range of 700 to 950 ° C. using a mixed gas containing an organic carbonitride as a reaction gas in a normal chemical vapor deposition apparatus. It is also known to have an organization.
Japanese Unexamined Patent Publication No. 6-31503 Japanese Patent Laid-Open No. 6-8010

近年の切削装置のFA化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削工具に対する使用寿命の一層の延命化を図る目的で、特に硬質被覆層を構成する上部層、すなわちすぐれた高温硬さと耐熱性を有するα型Al23 層には一段の厚膜化が強く望まれているが、前記α型Al23 層の層厚を従来実用に供されている最大平均層厚である15μmを越えて厚膜化すると、Al23 結晶粒が急激に粗大化し、かつ層自体の緻密性が著しく低下し、この結果高温強度の低下が避けられなくなることから、かかる厚膜化α型Al23 層を硬質被覆層の上部層として蒸着形成してなる被覆サーメット工具においては、前記厚膜化α型Al23 層が原因で、切刃部にチッピング(微少欠け)が発生し易くなり、この結果使用寿命のきわめて短いものとなることから、実用に供することができないのが現状である。 In recent years, the use of FA for cutting devices has been remarkable. On the other hand, there has been a strong demand for labor saving and energy saving and further cost reduction for cutting work, and with this purpose, especially for the purpose of further extending the service life of cutting tools. upper layer constituting the hard coating layer, i.e. excellent but the hot hardness and thickening of one step in the α-type the Al 2 O 3 layer having heat resistance is strongly demanded, of the α-type the Al 2 O 3 layer When the layer thickness exceeds 15 μm, which is the maximum average layer thickness that has been practically used in the past, the Al 2 O 3 crystal grains become coarser and the denseness of the layer itself is significantly reduced. since the decrease in the high-temperature strength can not be avoided, the coated cermet tool formed by depositing formed as an upper layer of such thickening α type the Al 2 O 3 layer a hard coating layer, the thickening α-type Al 2 O 3 layer due to chipping to the cutting edge (fine Chipping) is likely to occur, since it becomes very short for this result useful life, it can not be put to practical use at present.

そこで、本発明者等は、上述のような観点から、上記の従来被覆サーメット工具の硬質被覆層を構成する1〜15μmの平均層厚を有するα型Al23層に着目し、これの層厚を平均層厚で15μmを越えて厚膜化しても、前記厚膜化α型Al23層が原因のチッピングが切刃部に発生しない被覆サーメット工具を開発するべく研究を行った結果、
(a)工具基体の表面に、硬質被覆層としてのα型Al23層を蒸着形成するに際して、例えばこれの蒸着形成に先だって、通常の化学蒸着装置にて、
反応ガス組成:容量%で、AlCl3:3〜10%、CO2:0.5〜3%、C24:0.01〜0.3%、H2:残り、
反応雰囲気温度:750〜900℃、
反応雰囲気圧力:3〜13kPa、
の低温条件で、下部層であるTi化合物層の表面に、平均層厚:0.02〜0.2μm(20〜200nm)の核Al23薄膜を形成した後、反応雰囲気を圧力:3〜13kPaのArに変え、反応雰囲気温度を930〜1050℃に昇温した条件で前記核Al23薄膜に加熱処理を施した状態で、硬質被覆層としてのα型Al23層を通常の条件で、平均層厚で15μmを越えた16〜30μmの層厚に形成すると、この結果の前記加熱処理核Al23薄膜上に蒸着形成された厚膜化α型Al23層(以下、厚膜化改質α型Al23層という)においては、平均層厚で16〜30μmの層厚に厚膜化したにもかかわらず、Al23結晶粒の粗大化が著しく抑制され、かつ層自体の緻密性も保持されたものになるので、高温強度の低下が防止されるようになること。
Therefore, the present inventors focused on the α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm constituting the hard coating layer of the above-described conventional coated cermet tool from the above viewpoint, Research was conducted to develop a coated cermet tool in which chipping caused by the thickened α-type Al 2 O 3 layer does not occur at the cutting edge even if the layer thickness is increased to an average layer thickness exceeding 15 μm. result,
(A) When the α-type Al 2 O 3 layer as the hard coating layer is vapor-deposited on the surface of the tool base, for example, prior to the vapor-deposition formation,
Reaction gas composition:% by volume, AlCl 3 : 3 to 10%, CO 2 : 0.5 to 3%, C 2 H 4 : 0.01 to 0.3%, H 2 : remaining,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 3 to 13 kPa,
After forming a core Al 2 O 3 thin film having an average layer thickness of 0.02 to 0.2 μm (20 to 200 nm) on the surface of the Ti compound layer as the lower layer under the low temperature condition of The α-type Al 2 O 3 layer as the hard coating layer was changed in a state where the core Al 2 O 3 thin film was heated under the condition that the reaction atmosphere temperature was raised to 930 to 1050 ° C. by changing to Ar of 13 kPa. Under normal conditions, when an average layer thickness of 16 to 30 μm, which exceeds 15 μm, is formed, the resulting thickened α-type Al 2 O 3 deposited on the heat-treated core Al 2 O 3 thin film is deposited. In the layer (hereinafter referred to as “thickened modified α-type Al 2 O 3 layer”), the Al 2 O 3 crystal grains are coarsened even though the average layer thickness is increased to 16 to 30 μm. Is significantly suppressed and the denseness of the layer itself is maintained, preventing a decrease in high-temperature strength. To be done.

(b)上記の厚膜化改質α型Al23層、および上記の加熱処理核Al23薄膜の形成を行わないで、下部層であるTi化合物層の表面に、通常の条件で16〜30μmの平均層厚で蒸着形成された厚膜化α型Al23層(以下、厚膜化通常α型Al23層という)について、電界放出型走査電子顕微鏡を用い、図1(a),(b)に概略説明図で示される通り、表面研磨面の測定範囲内に存在する六方晶結晶格子を有するα型Al23結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記厚膜化通常α型Al23層は、図3に例示される通り、(0001)面の測定傾斜角の分布が0〜45度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記加熱処理核Al23薄膜上に蒸着形成された厚膜化改質α型Al23層は、図2に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、このシャープな最高ピークは、前記核Al23薄膜の平均層厚を変化させることによりグラフ横軸の傾斜角区分に現れる位置が変わること。 (B) Without forming the above-described thickening-modified α-type Al 2 O 3 layer and the above-described heat-treated nucleus Al 2 O 3 thin film, normal conditions are applied to the surface of the Ti compound layer as the lower layer. A thickened α-type Al 2 O 3 layer (hereinafter referred to as a thickened normal α-type Al 2 O 3 layer) deposited with an average layer thickness of 16 to 30 μm using a field emission scanning electron microscope, As schematically shown in FIGS. 1A and 1B, each α-type Al 2 O 3 crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam. The inclination angle formed by the normal line of the (0001) plane that is the crystal plane of the crystal grain is measured with respect to the normal line of the surface polished surface, and the measured inclination angle is within a range of 0 to 45 degrees. Inclination angle distribution that divides a certain measured inclination angle into pitches of 0.25 degrees and totals the frequencies existing in each section When you create a rough, the thickness is the film-forming typically α type the Al 2 O 3 layer, as illustrated in FIG. 3, (0001) Measurement inclination angle of the surface distribution is unbiased specific within the 0-45 degree In contrast to the tilt angle number distribution graph, the thickened modified α-type Al 2 O 3 layer deposited on the heat-treated nucleus Al 2 O 3 thin film is tilted as shown in FIG. A sharp maximum peak appears at a specific position in the angular section, and this sharp maximum peak changes in the position appearing in the tilt angle section on the horizontal axis of the graph by changing the average layer thickness of the core Al 2 O 3 thin film.

(c)試験結果によれば、上記の厚膜化改質α型Al23層においては、上記核Al23薄膜の平均層厚を0.02〜0.2μmとすると、上記シャープな最高ピークが傾斜角区分の12〜22度の範囲内に現れると共に、前記12〜22度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示すようになり、したがって、傾斜角度数分布グラフで12〜22度の範囲内に傾斜角区分の最高ピークが現れ、かつ前記12〜22度の範囲内に存在する度数割合が45%以上の割合を占める厚膜化改質α型Al23層を硬質被覆層の上部層として、下部層のTi化合物層と共存した状態で蒸着形成してなる被覆サーメット工具は、上記の厚膜化通常α型Al23層を硬質被覆層の上部層として蒸着形成した被覆サーメット工具に比して、特に切刃部にチッピングの発生なく、一段とすぐれた耐摩耗性を長期に亘って発揮するようになること。
以上(a)〜(c)に示される研究結果を得たのである。
(C) According to the test results, in the above-described thickened modified α-type Al 2 O 3 layer, the sharpness is increased when the average layer thickness of the core Al 2 O 3 thin film is 0.02 to 0.2 μm. The highest peak appears in the range of 12 to 22 degrees of the inclination angle section, and the total of the frequencies existing in the range of 12 to 22 degrees represents a ratio of 45% or more of the total degrees in the inclination angle frequency distribution graph. An inclination angle number distribution graph to be occupied is shown, and therefore, the highest peak of the inclination angle section appears in the range of 12 to 22 degrees in the inclination angle number distribution graph, and the frequency exists in the range of 12 to 22 degrees. A coated cermet tool formed by vapor deposition in the state of coexisting with the lower Ti compound layer, with the thickened modified α-type Al 2 O 3 layer occupying a ratio of 45% or more as the upper layer of the hard coating layer, The above-mentioned thickened normal α-type Al 2 O 3 layer Compared to a coated cermet tool deposited as an upper layer of a hard coating layer, it should exhibit superior wear resistance over a long period of time without chipping particularly at the cutting edge.
The research results shown in (a) to (c) above were obtained.

この発明は、上記の研究結果に基づいてなされたものであって、WC基超硬合金またはTiCN基サーメットで構成された工具基体の表面に、
(a)下部層として、いずれも化学蒸着形成された、TiC層、TiN層、TiCN層、TiCO層、およびTiCNO層のうちの1層または2層以上からなり、かつ0.5〜10μmの全体平均層厚を有するTi化合物層、
(b)上部層として、化学蒸着形成した状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、12〜22度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記2〜22度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示し、かつ16〜30μmの平均層厚を有する厚膜化改質α型Al23層、
以上(a)および(b)で構成された硬質被覆層を蒸着形成してなる、硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and on the surface of a tool base composed of a WC-based cemented carbide or TiCN-based cermet,
(A) The lower layer is composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, all of which are formed by chemical vapor deposition, and a whole of 0.5 to 10 μm. A Ti compound layer having an average layer thickness;
(B) As an upper layer, each crystal grain having a hexagonal crystal lattice which has an α-type crystal structure in a state where chemical vapor deposition is formed, and which exists within the measurement range of the surface polished surface using a field emission scanning electron microscope Is irradiated with an electron beam to measure the inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, with respect to the normal line of the surface polished surface. In the inclination angle number distribution graph obtained by dividing the measured inclination angles in the range of ˜45 degrees into the pitches of 0.25 degrees and totaling the frequencies existing in the respective sections, in the range of 12 to 22 degrees. An inclination angle number distribution graph in which the highest peak exists in the inclination angle section and the sum of the frequencies existing in the range of 2 to 22 degrees occupies 45% or more of the entire frequency in the inclination angle distribution graph. With an average layer thickness of 16-30 μm A thickening modified α-type Al 2 O 3 layer,
The hard coating layer formed by vapor deposition of the hard coating layer composed of (a) and (b) above is characterized by a coated cermet tool that exhibits excellent chipping resistance.

また、この発明の被覆サーメット工具の硬質被覆層の構成層において、上記の通りに数値限定した理由を以下に説明する。
(a)Ti化合物層
Ti化合物層は、基本的には厚膜化改質α型Al23層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層の高温強度向上に寄与するほか、工具基体と厚膜化改質α型Al23層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性を向上させる作用を有するが、その平均層厚が0.5μm未満では、前記作用を十分に発揮させることができず、一方その平均層厚が10μmを越えると、切削時の発生熱による熱塑性変形量が許容範囲を越えて大きくなり、この結果上部層である厚膜化改質α型Al23層に割れが発生し易くなることから、その平均層厚を0.5〜10μmと定めた。
In addition, the reason why the numerical values of the constituent layers of the hard coating layer of the coated cermet tool of the present invention are limited as described above will be described below.
(A) Ti compound layer The Ti compound layer basically exists as a lower layer of the thickening-modified α-type Al 2 O 3 layer, and the high temperature strength of the hard coating layer is improved by its excellent high temperature strength. In addition to the tool substrate and the thickened modified α-type Al 2 O 3 layer, and thus has an effect of improving the adhesion of the hard coating layer to the tool substrate. If the thickness is less than 0.5 μm, the above-mentioned effect cannot be sufficiently exerted. On the other hand, if the average layer thickness exceeds 10 μm, the amount of thermoplastic deformation caused by heat generated during cutting increases beyond the allowable range. As a result, cracks are likely to occur in the thickened reformed α-type Al 2 O 3 layer, which is the upper layer, so the average layer thickness was determined to be 0.5 to 10 μm.

(b)厚膜化改質α型Al23
上記の通り加熱処理核Al23薄膜上に形成された厚膜化改質α型Al23層には、Al23自体のもつすぐれた高温硬度と耐熱性によって硬質被覆層の耐摩耗性を向上させると共に、厚膜化通常α型Al23層に比して、一段とすぐれた高温強度を有するので、厚膜化した硬質被覆層にチッピングが発生するのを抑制する作用があるが、その平均層厚が16μm未満では厚膜化の要求に十分満足に対応することができず、一方その平均層厚が30μmを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を16〜30μmと定めた。
(B) Thickening-modified α-type Al 2 O 3 layer As described above, the thickening-modified α-type Al 2 O 3 layer formed on the heat-treated nucleus Al 2 O 3 thin film includes Al 2 O 3 The high temperature hardness and heat resistance of its own improve the wear resistance of the hard coating layer, and it has a higher temperature strength than that of the normal α-type Al 2 O 3 layer. It has the effect of suppressing the occurrence of chipping in the hard coating layer, but if its average layer thickness is less than 16 μm, it cannot sufficiently satisfy the demand for thickening, while its average layer thickness is 30 μm. If the thickness is too large, the chipping tends to occur. Therefore, the average layer thickness is determined to be 16 to 30 μm.

(c)加熱処理核Al23薄膜
この発明の被覆サーメット工具の硬質被覆層を構成する厚膜化改質α型Al23層に関して、傾斜角度数分布グラフで最高ピークを示す傾斜角区分と加熱処理核Al23薄膜の平均層厚との間には密接な関係があり、この場合試験結果によれば、前記加熱処理核Al23薄膜の平均層厚を0.02〜0.2μmの範囲で変化させると、最高ピークが12〜22度の範囲内の傾斜角区分に現れると共に、前記12〜22度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記加熱処理核Al23薄膜の平均層厚が、0.02μm未満では、これの上に蒸着形成される厚膜化改質α型Al23層の傾斜角度数分布グラフの12〜22度の範囲内に現れるピーク高さが不十分、すなわち、前記12〜22度の範囲内に存在する度数の合計割合が、傾斜角度数分布グラフにおける度数全体の45%未満となってしまい、この場合上記の通り、前記厚膜化改質α型Al23層の高温強度を、上記の従来被覆サーメット工具の硬質被覆層の上部層を構成するα型Al23層、すなわち1〜15μmの平均層厚を有するα型Al23層の具備する高温強度と同等の高温強度を保持することができず、この結果耐チッピング性が低下するようになり、一方その平均層厚が0.2μmを越えると、最高ピークの現れる傾斜角区分が12〜22度の範囲から外れてしまい、この場合も前記厚膜化改質α型Al23層の高温強度の低下が避けられなくなることから、硬質被覆層の下部層であるTi化合物層上に形成される前記核Al23薄膜の平均層厚を0.02〜0.2μmとしたのである。
(C) Heat-treated nucleus Al 2 O 3 thin film The inclination angle showing the highest peak in the inclination angle number distribution graph for the thickened modified α-type Al 2 O 3 layer constituting the hard coating layer of the coated cermet tool of the present invention between sections and heating core Al 2 O 3 average layer thickness Metropolitan of the thin film is closely related, according to this case the test results, the average layer thickness of the heat treatment core Al 2 O 3 thin film 0.02 When it is changed in the range of .about.0.2 .mu.m, the highest peak appears in the inclination angle section in the range of 12 to 22 degrees, and the total of the frequencies existing in the range of 12 to 22 degrees is the inclination angle number distribution graph. An inclination angle frequency distribution graph occupying a ratio of 45% or more of the entire frequency in the above is shown. Therefore, when the average layer thickness of the heat-treated nucleus Al 2 O 3 thin film is less than 0.02 μm, thickening modified α type is vapor deposited on Al 2 Inclination angle frequency distribution peak height appearing in the range of 12 to 22 degrees in the graph of three layers is unsatisfactory, i.e., the total ratio of the frequencies present in the range of the 12 to 22 degrees, the inclination angle frequency distribution graph In this case, as described above, the high-temperature strength of the thickening-modified α-type Al 2 O 3 layer constitutes the upper layer of the hard coating layer of the conventional coated cermet tool. α-type the Al 2 O 3 layer which, i.e. can not be maintained the same high-temperature strength and high temperature strength which includes an average layer thickness α type the Al 2 O 3 layer having a 1 to 15 m, this results chipping resistance On the other hand, when the average layer thickness exceeds 0.2 μm, the slope angle section where the highest peak appears is out of the range of 12 to 22 degrees, and in this case also the thickening modified α-type Al inevitable reduction in high-temperature strength 2 O 3 layer is From Rukoto is the average layer thickness of the core Al 2 O 3 thin film formed on the Ti compound layer as the lower layer of the hard coating layer was 0.02~0.2Myuemu.

なお、被覆サーメット工具の使用前後の識別を目的として、黄金色の色調を有するTiN層を、硬質被覆層の最表面層として必要に応じて蒸着形成してもよいが、この場合の平均層厚は0.1〜1μmでよく、これは0.1μm未満では、十分な識別効果が得られず、一方前記TiN層による前記識別効果は1μmまでの平均層厚で十分であるという理由からである。   For the purpose of identification before and after the use of the coated cermet tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer, but the average layer thickness in this case 0.1-1 μm may be sufficient, because if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient with an average layer thickness of up to 1 μm. .

この発明の被覆サーメット工具は、これの硬質被覆層を構成する厚膜化改質α型Al23層が、図2に例示される通り12〜22度の範囲内の傾斜角区分に最高ピークが現れる傾斜角度数分布グラフを示し、平均層厚で16〜30μmの層厚に厚膜化されても、すぐれた耐チッピング性を発揮することから、各種の鋼や鋳鉄の切削加工で、すぐれた耐摩耗性を長期に亘って発揮し、使用寿命の一段の延命化を可能とするものである。 In the coated cermet tool of the present invention, the thickened modified α-type Al 2 O 3 layer constituting the hard coating layer has the highest inclination angle in the range of 12 to 22 degrees as illustrated in FIG. An inclination angle number distribution graph in which a peak appears is shown, and even when it is thickened to an average layer thickness of 16 to 30 μm, it exhibits excellent chipping resistance. Therefore, in various steel and cast iron cutting processes, It exhibits excellent wear resistance over a long period of time, enabling a further increase in service life.

つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。   Next, the coated cermet tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも0.5〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr3 2 粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、切刃部にR:0.07mmのホーニング加工を施すことによりISO・CNMG120412に規定するスローアウエイチップ形状をもったWC基超硬合金製の工具基体A〜Fをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 0.5 to 3 μm as raw material powder These raw material powders are blended into the blending composition shown in Table 1, further added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and then formed into a compact with a predetermined shape at a pressure of 98 MPa. The green compact was press-molded and vacuum sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour. After sintering, the cutting edge portion had R: 0.07 mm. The tool bases A to F made of a WC-base cemented carbide having a throwaway tip shape specified in ISO · CNMG12041 were manufactured by performing the honing process.

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(質量比でTiC/TiN=50/50)粉末、Mo2 C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、98MPaの圧力で圧粉体にプレス成形し、この圧粉体を1.3kPaの窒素雰囲気中、温度:1540℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.07mmのホーニング加工を施すことによりISO規格・CNMG120412のチップ形状をもったTiCN基サーメット製の工具基体a〜fを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN-based cermet having a standard / CNMG12041 chip shape were formed.

ついで、これらの工具基体A〜Fおよび工具基体a〜fのそれぞれを、核Al23薄膜層厚測定用試験片と共に、通常の化学蒸着装置に装入し、まず、表3(表3中のl−TiCNは特開平6−8010号公報に記載される縦長成長結晶組織をもつTiCN層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである)に示される通常の条件にて、表4に示される目標層厚のTi化合物層を硬質被覆層の下部層として蒸着形成し、ついで、
反応ガス組成:容量%で、AlCl3:6.5%、CO2:1.6%、C24:0.13%、H2:残り、
反応雰囲気温度:820℃、
反応雰囲気圧力:8kPa、
時間:5〜80分の範囲内の核Al23薄膜の層厚に対応した時間、
の低温条件で表4に示される目標層厚の核Al23薄膜を形成した後(前記核Al23薄膜の層厚と処理時間の関係は上記Ti化合物層の場合と同様に実験により予め調査されている)、反応雰囲気を圧力:8kPaのAr雰囲気に変え、反応雰囲気温度を1000℃に昇温した条件で前記核Al23薄膜に加熱処理を施して加熱処理核Al23薄膜とし、
この時点で前記試験片を装置から取り出し、引続いて、同じく表3に示される通常の条件で、表4に示される目標層厚の厚膜化改質α型Al23層を硬質被覆層の上部層として蒸着形成することにより本発明被覆サーメット工具1〜13をそれぞれ製造した。
Next, each of the tool bases A to F and the tool bases a to f together with a test piece for measuring the thickness of the core Al 2 O 3 thin film layer was loaded into a normal chemical vapor deposition apparatus. Among them, l-TiCN indicates the conditions for forming a TiCN layer having a vertically grown crystal structure described in JP-A-6-8010, and the other conditions indicate the conditions for forming a normal granular crystal structure. The Ti compound layer having the target layer thickness shown in Table 4 is vapor-deposited as the lower layer of the hard coating layer under the normal conditions shown in FIG.
Reaction gas composition: volume%, AlCl 3 : 6.5%, CO 2 : 1.6%, C 2 H 4 : 0.13%, H 2 : remaining,
Reaction atmosphere temperature: 820 ° C.
Reaction atmosphere pressure: 8 kPa,
Time: Time corresponding to the layer thickness of the core Al 2 O 3 thin film in the range of 5 to 80 minutes,
After forming the core Al 2 O 3 thin film having the target layer thickness shown in Table 4 under the low temperature condition (the relation between the layer thickness of the core Al 2 O 3 thin film and the processing time is the same as in the case of the Ti compound layer) The reaction atmosphere is changed to an Ar atmosphere having a pressure of 8 kPa and the reaction atmosphere temperature is raised to 1000 ° C., and the core Al 2 O 3 thin film is subjected to heat treatment to heat-treat nucleus Al 2. O 3 thin film
At this time, the test piece is taken out from the apparatus, and subsequently, the thickened modified α-type Al 2 O 3 layer having the target layer thickness shown in Table 4 is hard-coated under the normal conditions also shown in Table 3. The coated cermet tools 1 to 13 of the present invention were produced by vapor deposition as the upper layer of each layer.

また、比較の目的で、表5に示される通り、上記の核Al23薄膜の形成およびこれの加熱処理を行なわず、硬質被覆層の上部層として厚膜化通常α型Al23層を形成する以外は同一の条件で、比較被覆サーメット工具1〜13をそれぞれ製造した。 For comparison purposes, as shown in Table 5, the formation of the above-mentioned core Al 2 O 3 thin film and the heat treatment thereof are not performed, and the thickened normal α-type Al 2 O 3 is used as the upper layer of the hard coating layer. Comparative coated cermet tools 1 to 13 were produced under the same conditions except that the layers were formed.

さらに、上記の本発明被覆サーメット工具1〜13および比較被覆サーメット工具1〜13の硬質被覆層を構成する厚膜化改質α型Al23層および厚膜化通常α型Al23層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の各種厚膜化α型Al23層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に70度の入射角度で15kVの加速電圧の電子線を1nAの照射電流で、前記表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射し、電子後方散乱回折像装置を用いて、30×50μmの領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Furthermore, the thickened modified α-type Al 2 O 3 layer and the thickened normal α-type Al 2 O 3 constituting the hard coating layers of the above-described coated cermet tools 1 to 13 of the present invention and the comparative coated cermet tools 1 to 13 About the layer, the inclination angle number distribution graph was each created using the field emission scanning electron microscope.
That is, the inclination angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope in a state where the surface of each of the various thickened α-type Al 2 O 3 layers is a polished surface. An electron backscattered diffraction image is obtained by irradiating an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 ° to an individual crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface with an irradiation current of 1 nA. Using an apparatus, an inclination angle formed by a normal line of the (0001) plane that is a crystal plane of the crystal grain with respect to a normal line of the surface-polished surface in a 30 × 50 μm region at an interval of 0.1 μm / step Based on the measurement result, the measurement inclination angle within the range of 0 to 45 degrees is divided into 0.25 degree pitches among the measurement inclination angles, and the frequency existing in each division is measured. Created by counting.

この結果得られた各種の厚膜化α型Al23層の傾斜角度数分布グラフにおいて、(0001)面が最高ピークを示す傾斜角区分、並びに12〜22度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合をそれぞれ表4,5にそれぞれ示した。 In the gradient angle distribution graphs of the various thickened α-type Al 2 O 3 layers obtained as a result, the inclination angle section in which the (0001) plane shows the highest peak, and the inclination angle section within the range of 12 to 22 degrees. Tables 4 and 5 show the ratio of the number of tilt angles existing in the tilt angle number distribution graph to the entire tilt angle number distribution graph.

上記の各種の厚膜化α型Al23層の傾斜角度数分布グラフにおいて、表4,5にそれぞれ示される通り、本発明被覆サーメット工具の加熱処理核Al23薄膜上に形成された厚膜化改質α型Al23層は、いずれも(0001)面の測定傾斜角の分布が12〜22度の範囲内の傾斜角区分に最高ピークが現れ、かつ12〜22度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が45%以上である傾斜角度数分布グラフを示すのに対して、比較被覆サーメット工具の厚膜化通常α型Al23層は、いずれも(0001)面の測定傾斜角の分布が0〜45度の範囲内で不偏的で、最高ピークが存在せず、12〜22度の範囲内の傾斜角区分内に存在する傾斜角度数の割合も30%以下である傾斜角度数分布グラフを示すものであった。
なお、図2は、本発明被覆サーメット工具5の厚膜化改質α型Al23層の傾斜角度数分布グラフ、図3は、比較被覆サーメット工具5の厚膜化通常α型Al23層の傾斜角度数分布グラフをそれぞれ示すものである。
In the gradient angle number distribution graphs of the various thickened α-type Al 2 O 3 layers described above, as shown in Tables 4 and 5, each is formed on the heat-treated core Al 2 O 3 thin film of the coated cermet tool of the present invention. In each of the thickening-modified α-type Al 2 O 3 layers, the highest peak appears in the inclination angle section within the range of 12 to 22 degrees of the measured inclination angle of the (0001) plane, and 12 to 22 degrees. In contrast, an inclination angle number distribution graph in which the ratio of the inclination angle number existing in the inclination angle section within the range of 45% is 45% or more is shown, whereas the thickened normal α-type Al 2 O 3 layer of the comparative coated cermet tool In any case, the measured inclination angle distribution of the (0001) plane is unbiased in the range of 0 to 45 degrees, the highest peak does not exist, and the inclination exists in the inclination angle section in the range of 12 to 22 degrees. An inclination angle number distribution graph in which the ratio of the angle number is 30% or less was also shown.
Incidentally, FIG. 2, the inclination angle frequency distribution graph of the present invention thickened modified α type the Al 2 O 3 layer of the coated cermet tool 5, FIG. 3 is thickened usually α-type Al 2 comparative coated cermet tool 5 The graph of the distribution of the number of inclination angles of the O 3 layer is shown respectively.

また、この結果得られた本発明被覆サーメット工具1〜13および比較被覆サーメット工具1〜13の硬質被覆層の構成層の厚さ、並びに上記の試験片の加熱処理核Al23薄膜の厚さを、走査型電子顕微鏡を用いて測定(縦断面測定)したところ、いずれも目標層厚と実質的に同じ平均層厚(5点測定の平均値)を示した。 Moreover, the thickness of the constituent layer of the hard coating layer of the present invention coated cermet tools 1 to 13 and the comparative coated cermet tools 1 to 13 obtained as a result, and the thickness of the heat-treated core Al 2 O 3 thin film of the above test piece When measured using a scanning electron microscope (longitudinal section measurement), all showed an average layer thickness (average value of five-point measurement) substantially the same as the target layer thickness.

つぎに、上記の各種の被覆サーメット工具をいずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆サーメット工具1〜13および比較被覆サーメット工具1〜13について、
被削材:JIS・S40Cの長さ方向等間隔4本縦溝入り丸棒、
切削速度:250m/min、
切り込み:1.4mm、
送り:0.1mm/rev、
切削時間:20分、
の条件(切削条件Aという)での炭素鋼の乾式断続切削試験、
被削材:JIS・SCr420Hの丸棒、
切削速度:250m/min、
切り込み:1.5mm、
送り:0.28mm/rev、
切削時間:20分、
の条件(切削条件Bという)での合金鋼の乾式連続切削試験、さらに、
被削材:JIS・FCD450の丸棒、
切削速度:250m/min、
切り込み:1.8mm、
送り:0.32mm/rev、
切削時間:20分、
の条件(切削条件Cという)でのダクタイル鋳鉄の乾式連続切削試験を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表6に示した。
Next, with the various coated cermet tools described above, the present coated cermet tools 1 to 13 and comparative coated cermet tools 1 to 13 in a state where all the above-mentioned various coated cermet tools are screwed to the tip of the tool steel tool with a fixing jig.
Work material: JIS / S40C lengthwise equal length 4 fluted round bars,
Cutting speed: 250 m / min,
Cutting depth: 1.4mm,
Feed: 0.1 mm / rev,
Cutting time: 20 minutes,
A dry intermittent cutting test of carbon steel under the conditions (referred to as cutting condition A),
Work material: JIS / SCr420H round bar,
Cutting speed: 250 m / min,
Incision: 1.5mm,
Feed: 0.28mm / rev,
Cutting time: 20 minutes,
Dry continuous cutting test of alloy steel under the following conditions (referred to as cutting condition B),
Work material: JIS / FCD450 round bar,
Cutting speed: 250 m / min,
Cutting depth: 1.8mm,
Feed: 0.32mm / rev,
Cutting time: 20 minutes,
The dry continuous cutting test of ductile cast iron under the above conditions (referred to as cutting condition C) was performed, and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 6.

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Figure 2006305639
Figure 2006305639

表4〜6に示される結果から、本発明被覆サーメット工具1〜13は、いずれも硬質被覆層の上部層が、(0001)面の傾斜角が12〜22度の範囲内の傾斜角区分で最高ピークを示すと共に、前記12〜22度の範囲内に存在する合計度数割合が45%以上を占める傾斜角度数分布グラフを示す厚膜化改質α型Al23層で構成され、平均層厚で16〜30μmと厚膜化したにもかかわらず、鋼や鋳鉄の切削加工で、前記厚膜化改質α型Al23層がすぐれた耐チッピング性を発揮し、切刃部のチッピング発生が著しく抑制され、長期に亘ってすぐれた耐摩耗性を示し、使用寿命の延命化を可能とするのに対して、硬質被覆層の上部層が、(0001)面の測定傾斜角の分布が0〜45度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す厚膜化通常α型Al23層で構成された比較被覆サーメット工具1〜13においては、いずれも前記厚膜化通常α型Al23層が平均層厚で16〜30μmと厚膜化すると、これの高温強度低下が著しく、この結果切刃部にチッピングが発生し、短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4 to 6, in the coated cermet tools 1 to 13 of the present invention, the upper layer of the hard coating layer is an inclination angle section in which the inclination angle of the (0001) plane is in the range of 12 to 22 degrees. It is composed of a thickening-modified α-type Al 2 O 3 layer showing an inclination angle number distribution graph showing a maximum peak and a total frequency ratio existing in the range of 12 to 22 degrees occupying 45% or more. Despite the film thickness of 16-30 μm, the thickened modified α-type Al 2 O 3 layer exhibits excellent chipping resistance when cutting steel and cast iron, and the cutting edge portion The occurrence of chipping is significantly suppressed, and the wear resistance is improved over a long period of time, and the service life can be extended. On the other hand, the upper layer of the hard coating layer has a measured inclination angle of the (0001) plane. In the range of 0 to 45 degrees, and the highest peak does not exist In comparison coated cermet tools 1 to 13 thicker typically showing the angular frequency distribution graph being composed of α-type the Al 2 O 3 layer, both at the thickened usually α type the Al 2 O 3 layer is the average layer thickness When the film thickness is increased to 16 to 30 μm, the high temperature strength is remarkably lowered, and as a result, chipping occurs at the cutting edge portion, and it is clear that the service life is reached in a short time.

上述のように、この発明の被覆サーメット工具は、これの硬質被覆層の上部層であるα型Al23層の層厚を平均層厚で16〜30μmに厚くしても、各種の鋼や鋳鉄などの切削加工で、すぐれた耐チッピング性を示し、長期に亘ってすぐれた耐摩耗性を発揮し、使用寿命の延命化を可能とするものであるから、切削加工のFA化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool according to the present invention can be used for various steels even when the α-type Al 2 O 3 layer, which is the upper layer of the hard coating layer, has an average layer thickness of 16 to 30 μm. It shows excellent chipping resistance in cutting work such as cast iron and cast iron, exhibits excellent wear resistance over a long period of time, and can extend the service life. It can cope with labor saving, energy saving and cost reduction of processing sufficiently satisfactorily.

硬質被覆層を構成する各種厚膜化α型Al23層における結晶粒の(0001)面の傾斜角の測定範囲を示す概略説明図である。It is a schematic diagram illustrating a measurement range of the inclination angle of the crystal grains (0001) plane in various thickened α type the Al 2 O 3 layer constituting the hard coating layer. 本発明被覆サーメット工具5の硬質被覆層を構成する厚膜化改質α型Al23層の(0001)面の傾斜角度数分布グラフである。It is an inclination angle number distribution graph of the (0001) plane of the thickening modified α-type Al 2 O 3 layer constituting the hard coating layer of the coated cermet tool 5 of the present invention. 比較被覆サーメット工具5の硬質被覆層を構成する厚膜化通常α型Al23層の(0001)面の傾斜角度数分布グラフである。6 is a graph showing the distribution of the number of inclination angles of the (0001) plane of the thickened normal α-type Al 2 O 3 layer constituting the hard coating layer of the comparative coated cermet tool 5.

Claims (1)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
(a)下部層として、いずれも化学蒸着形成されたTiの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの1層または2層以上からなり、かつ0.5〜10μmの全体平均層厚を有するTi化合物層、
(b)上部層として、化学蒸着形成された状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、12〜22度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記12〜22度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示し、かつ16〜30μmの平均層厚を有する厚膜化改質α型酸化アルミニウム層、
以上(a)および(b)で構成された硬質被覆層を蒸着形成してなる、厚膜化α型酸化アルミニウム層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。
On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) As a lower layer, each consists of one or two or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride oxide layer formed by chemical vapor deposition, And a Ti compound layer having an overall average layer thickness of 0.5 to 10 μm,
(B) Crystal grains having an α-type crystal structure in the state of chemical vapor deposition as an upper layer and having a hexagonal crystal lattice existing within the measurement range of the surface polished surface using a field emission scanning electron microscope Individually irradiate an electron beam, measure the tilt angle formed by the normal of the (0001) plane that is the crystal plane of the crystal grain with respect to the normal of the polished surface, and among the measured tilt angles, In the inclination angle number distribution graph formed by dividing the measured inclination angles in the range of 0 to 45 degrees for each pitch of 0.25 degrees and totaling the frequencies existing in each section, the range of 12 to 22 degrees An inclination angle distribution graph in which the highest peak is present in the inclination angle section and the sum of the frequencies existing in the range of 12 to 22 degrees occupies a ratio of 45% or more of the entire frequency in the inclination angle distribution graph. And an average layer thickness of 16 to 30 μm A thickened modified α-type aluminum oxide layer,
A surface-coated cermet cutting tool that exhibits excellent chipping resistance with a thickened α-type aluminum oxide layer formed by vapor-depositing the hard coating layer composed of (a) and (b) above.
JP2005127353A 2005-04-26 2005-04-26 Surface-coated cermet cutting tool with excellent chipping resistance thanks to thick α-type aluminum oxide layer Expired - Fee Related JP4730702B2 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000144427A (en) * 1998-11-05 2000-05-26 Hitachi Metals Ltd Aluminum oxide coated tool
JP2004122269A (en) * 2002-10-01 2004-04-22 Mitsubishi Materials Corp Surface coated cermet cutting tool exhibiting superior chipping resistance under high speed heavy duty cutting

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000144427A (en) * 1998-11-05 2000-05-26 Hitachi Metals Ltd Aluminum oxide coated tool
JP2004122269A (en) * 2002-10-01 2004-04-22 Mitsubishi Materials Corp Surface coated cermet cutting tool exhibiting superior chipping resistance under high speed heavy duty cutting

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