JP2006284590A - 電子ビームを用いた表面下の画像化 - Google Patents
電子ビームを用いた表面下の画像化 Download PDFInfo
- Publication number
- JP2006284590A JP2006284590A JP2006102293A JP2006102293A JP2006284590A JP 2006284590 A JP2006284590 A JP 2006284590A JP 2006102293 A JP2006102293 A JP 2006102293A JP 2006102293 A JP2006102293 A JP 2006102293A JP 2006284590 A JP2006284590 A JP 2006284590A
- Authority
- JP
- Japan
- Prior art keywords
- subsurface
- image
- electron beam
- electrons
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 38
- 238000003384 imaging method Methods 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 57
- 238000003801 milling Methods 0.000 claims abstract description 29
- 239000002184 metal Substances 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 22
- 238000010884 ion-beam technique Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 claims description 7
- 238000013461 design Methods 0.000 claims description 3
- 238000005553 drilling Methods 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 description 8
- 238000011960 computer-aided design Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 4
- 238000013459 approach Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 238000000027 scanning ion microscopy Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- YLJREFDVOIBQDA-UHFFFAOYSA-N tacrine Chemical compound C1=CC=C2C(N)=C(CCCC3)C3=NC2=C1 YLJREFDVOIBQDA-UHFFFAOYSA-N 0.000 description 1
- 229960001685 tacrine Drugs 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24592—Inspection and quality control of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
- H01J2237/2817—Pattern inspection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
【解決手段】ミリングの適切な中止に関しては、ある既知の電子エネルギーにおいて表面下の像が明確な場合、ユーザーは自分が埋め込まれた部位に接近していることを知る。操縦に関しては、表面下の像は素子上のビームの位置を決定するための基準マーク又は他の部位によって形成されることができる。
【選択図】なし
Description
102 電子ビームコラム
104 イオンビームコラム
106 照射スポット
108 基板
112 検出器
500 素子
502 金属層
504 素子の裏側
506 穴(200 mm × 200 mm)
508 部位
512 穴(1 mm × 1 mm)
700 ウエハ
702 素子又は回路
704 基準マーク
Claims (13)
- イオンビームミリング及び電子ビーム画像化を用いた半導体素子を処理する方法であって:
埋め込まれた金属層に接近するための穴を開けるために集束イオンビームを半導体素子に向かって方向付ける段階;
表面下の像を取得するのに、前記穴の底部に向かって十分なエネルギーを有する電子を有する電子ビームを方向付け、少なくとも1mmのSiを通って前記金属層の前記表面下の像を観察するため、前記穴から放出された電子を収集する段階;及び
前記集束イオンビームによるミリングをいつ中止するのかを決定するための前記金属層の前記像を使用する段階;
を有する方法。 - 請求項1に記載の方法であって、方向の整合又はプロセス実行のため、表面下の部位の特定を目的とした前記表面下の像の使用を有する方法。
- 請求項2に記載の方法であって、位置決定又はプロセスを行うための部位を特定するための前記表面下の像の使用が前記像と前記素子の回路図との関連付けを有する方法。
- 工作物の操縦を行う方法であって:
前記工作物上で、2次電子又は後方散乱電子から1つ以上の表面下の部位の像を生成するのに十分高いエネルギーを有する電子ビームを走査する段階;及び
前記工作物上を操縦するための前記像を使用する段階;
を有する方法。 - 請求項4に記載の方法であって、前記工作物上を操縦するための前記像の使用が前記表面下の部位のうちの少なくとも1つと前記工作物に関する既知の情報との関連付けを有する方法。
- 請求項5に記載の方法であって、前記表面下の部位のうちの少なくとも1つと前記工作物に関する既知の情報との関連付けが前記表面下の部位のうちの少なくとも1つと前記工作物のコンピュータ支援設計との関連付けを有する方法。
- ミクロの表面下の部位の画像化又は変更のために行う露出のために基板に集束イオンビームを用いて穴を開けるプロセスであって、
前記プロセス中での改良が:
前記表面下の位置の決定する段階;又は
2次電子又は後方散乱電子から前記表面下の像を生成するのに十分高いエネルギ
ーを有する電子ビームを前記表面下の部位を被覆する前記表面に向けて方向付け
ることで前記部位の表面下の像を生成することで表面下の部位をいつ露出させる
のかを決定する段階;
を有する
ことを特徴とするプロセス。 - 請求項1又は請求項4に記載の方法又は、請求項7に記載のプロセスであって、前記電子ビーム中の前記電子が15kVより大きな平均エネルギーを有する
ことを特徴とする方法又はプロセス。 - 請求項1又は請求項4に記載の方法又は、請求項7に記載のプロセスであって、前記電子ビーム中の前記電子が25kVより大きな平均エネルギーを有する
ことを特徴とする方法又はプロセス。 - 請求項1又は請求項4に記載の方法又は、請求項7に記載のプロセスであって、前記電子ビーム中の前記電子が30kVより大きな平均エネルギーを有する
ことを特徴とする方法又はプロセス。 - 請求項4に記載の方法又は、請求項7に記載のプロセスであって、前記表面下の部位を被覆する材料の深さが0.5 mmよりも大きい
ことを特徴とする方法又はプロセス。 - 請求項4に記載の方法又は、請求項7に記載のプロセスであって、前記表面下の部位を被覆する材料の深さが0.5 mmから2.0 mmの間である
ことを特徴とする方法又はプロセス。 - 請求項4に記載の方法又は、請求項7に記載のプロセスであって、前記表面下の部位が金属又は金属層を有する
ことを特徴とする方法又はプロセス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/098,578 US7388218B2 (en) | 2005-04-04 | 2005-04-04 | Subsurface imaging using an electron beam |
US11/098,578 | 2005-04-04 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006284590A true JP2006284590A (ja) | 2006-10-19 |
JP2006284590A5 JP2006284590A5 (ja) | 2009-05-14 |
JP5719494B2 JP5719494B2 (ja) | 2015-05-20 |
Family
ID=36609130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006102293A Active JP5719494B2 (ja) | 2005-04-04 | 2006-04-03 | 電子ビームを用いた表面下の画像化 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7388218B2 (ja) |
EP (1) | EP1717841A1 (ja) |
JP (1) | JP5719494B2 (ja) |
CN (1) | CN1855365B (ja) |
TW (1) | TWI404105B (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8110814B2 (en) | 2003-10-16 | 2012-02-07 | Alis Corporation | Ion sources, systems and methods |
US9159527B2 (en) | 2003-10-16 | 2015-10-13 | Carl Zeiss Microscopy, Llc | Systems and methods for a gas field ionization source |
JP4413746B2 (ja) | 2004-10-28 | 2010-02-10 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
WO2007067296A2 (en) * | 2005-12-02 | 2007-06-14 | Alis Corporation | Ion sources, systems and methods |
EP2149897A1 (en) * | 2008-07-31 | 2010-02-03 | FEI Company | Method for milling and end-pointing a sample |
DE102008041815A1 (de) * | 2008-09-04 | 2010-04-15 | Carl Zeiss Nts Gmbh | Verfahren zur Analyse einer Probe |
CN105390358B (zh) * | 2010-04-07 | 2018-09-04 | Fei 公司 | 组合激光器和带电粒子束系统 |
WO2012031049A2 (en) * | 2010-08-31 | 2012-03-08 | Fei Company | Navigation and sample processing using an ion source containing both low-mass and high-mass species |
CN102064077A (zh) * | 2010-12-02 | 2011-05-18 | 北京航空航天大学 | 一种利用同步可控电子束提高聚焦离子束加工精度的方法 |
WO2012103534A1 (en) | 2011-01-28 | 2012-08-02 | Fei Company | Tem sample preparation |
WO2013082181A1 (en) * | 2011-11-29 | 2013-06-06 | Kla-Tencor Corporation | Systems and methods for preparation of samples for sub-surface defect review |
CN103137531B (zh) * | 2011-12-02 | 2016-09-07 | 无锡华润上华科技有限公司 | 晶圆对位方法 |
JP5986027B2 (ja) * | 2012-03-31 | 2016-09-06 | エフ・イ−・アイ・カンパニー | レーザ・アブレーション中に光学構成部品を保護するシステム |
WO2014014446A1 (en) * | 2012-07-16 | 2014-01-23 | Fei Company | Endpointing for focused ion beam processing |
US8895923B2 (en) * | 2012-11-20 | 2014-11-25 | Dcg Systems, Inc. | System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing |
CN106842001B (zh) * | 2013-04-24 | 2019-09-24 | 泰科英赛科技有限公司 | 采用聚焦离子束的电路跟踪 |
JP6490938B2 (ja) * | 2013-10-24 | 2019-03-27 | 株式会社日立ハイテクサイエンス | 断面加工方法、断面加工装置 |
CN104795302B (zh) | 2013-10-29 | 2018-10-02 | Fei 公司 | 具有用于横切应用的过程自动化的图案识别的差分成像 |
US9558911B2 (en) | 2014-08-01 | 2017-01-31 | Carl Zeiss Microscopy Gmbh | Method for analyzing and/or processing an object as well as a particle beam device for carrying out the method |
EP3104155A1 (en) | 2015-06-09 | 2016-12-14 | FEI Company | Method of analyzing surface modification of a specimen in a charged-particle microscope |
US20190287762A1 (en) * | 2018-01-25 | 2019-09-19 | Fei Company | System and method of preparing integrated circuits for backside probing using charged particle beams |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63211620A (ja) * | 1987-02-27 | 1988-09-02 | Hitachi Ltd | イオンビ−ム加工方法及びその装置 |
JPH01168029A (ja) * | 1987-12-24 | 1989-07-03 | Hitachi Ltd | イオンビーム加工方法及びその装置 |
JPH0221549A (ja) * | 1988-07-08 | 1990-01-24 | Jeol Ltd | 走査電子顕微鏡 |
JPH0264644A (ja) * | 1988-08-31 | 1990-03-05 | Seiko Instr Inc | 集束イオンビーム装置 |
JPH05291195A (ja) * | 1992-04-09 | 1993-11-05 | Hitachi Ltd | 薄膜加工装置及び方法 |
JPH05290786A (ja) * | 1992-04-10 | 1993-11-05 | Hitachi Ltd | 走査試料像表示方法および装置ならびにそれに供される試料 |
JPH06176731A (ja) * | 1992-12-02 | 1994-06-24 | Hitachi Ltd | 走査型電子顕微鏡の試料像表示方法 |
JPH08327514A (ja) * | 1995-06-05 | 1996-12-13 | Nippondenso Co Ltd | 透過電子顕微鏡用試料の作製方法及びその装置 |
JP2002072456A (ja) * | 2000-08-30 | 2002-03-12 | Nikon Corp | レチクルリペア方法、それにより得られたレチクル及びレチクルリペア装置 |
JP2003066118A (ja) * | 2001-08-29 | 2003-03-05 | Sanyo Electric Co Ltd | 半導体装置の故障解析方法 |
JP2005302600A (ja) * | 2004-04-14 | 2005-10-27 | Seiko Epson Corp | 微細加工方法およびその装置 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0616391B2 (ja) * | 1984-07-13 | 1994-03-02 | 株式会社日立製作所 | イオンビーム照射装置 |
US4785182A (en) | 1987-05-21 | 1988-11-15 | Electroscan Corporation | Secondary electron detector for use in a gaseous atmosphere |
US5594245A (en) | 1990-10-12 | 1997-01-14 | Hitachi, Ltd. | Scanning electron microscope and method for dimension measuring by using the same |
US5821549A (en) * | 1997-03-03 | 1998-10-13 | Schlumberger Technologies, Inc. | Through-the-substrate investigation of flip-chip IC's |
EP0932022B1 (en) * | 1998-01-23 | 2003-04-16 | Advantest Corporation | Method and apparatus for dimension measurement and inspection of structures |
US6885444B2 (en) * | 1998-06-10 | 2005-04-26 | Boxer Cross Inc | Evaluating a multi-layered structure for voids |
US6262430B1 (en) * | 1998-07-30 | 2001-07-17 | Advanced Micro Devices, Inc. | Integrated system for frontside navigation and access of multi-layer integrated circuits |
US6252412B1 (en) * | 1999-01-08 | 2001-06-26 | Schlumberger Technologies, Inc. | Method of detecting defects in patterned substrates |
US6344750B1 (en) * | 1999-01-08 | 2002-02-05 | Schlumberger Technologies, Inc. | Voltage contrast method for semiconductor inspection using low voltage particle beam |
US6414307B1 (en) * | 1999-07-09 | 2002-07-02 | Fei Company | Method and apparatus for enhancing yield of secondary ions |
US6452176B1 (en) * | 1999-07-22 | 2002-09-17 | Advanced Micro Devices, Inc. | Arrangement and method for using electron channeling patterns to detect substrate damage |
US6281025B1 (en) * | 1999-09-30 | 2001-08-28 | Advanced Micro Devices, Inc. | Substrate removal as a function of SIMS analysis |
JP3749107B2 (ja) * | 1999-11-05 | 2006-02-22 | ファブソリューション株式会社 | 半導体デバイス検査装置 |
US6322672B1 (en) * | 2000-03-10 | 2001-11-27 | Fei Company | Method and apparatus for milling copper interconnects in a charged particle beam system |
JP3874996B2 (ja) * | 2000-05-30 | 2007-01-31 | ファブソリューション株式会社 | デバイス検査方法および装置 |
AU2001293294A1 (en) * | 2000-09-20 | 2002-04-02 | Fei Company | Real time monitoring for simultaneous imaging and exposure in charged particle beam systems |
US20020074494A1 (en) | 2000-12-15 | 2002-06-20 | Lundquist Theodore R. | Precise, in-situ endpoint detection for charged particle beam processing |
US6548810B2 (en) | 2001-08-01 | 2003-04-15 | The University Of Chicago | Scanning confocal electron microscope |
US20030138709A1 (en) | 2001-11-09 | 2003-07-24 | Burbank Daniel P. | Wafer fabrication having improved laserwise alignment recovery |
EP1388883B1 (en) | 2002-08-07 | 2013-06-05 | Fei Company | Coaxial FIB-SEM column |
US6787783B2 (en) * | 2002-12-17 | 2004-09-07 | International Business Machines Corporation | Apparatus and techniques for scanning electron beam based chip repair |
US20060140144A1 (en) * | 2004-12-27 | 2006-06-29 | Motorola, Inc. | Method and system for providing an open gateway initiative bundle over the air |
-
2005
- 2005-04-04 US US11/098,578 patent/US7388218B2/en active Active
-
2006
- 2006-04-03 CN CN2006100793738A patent/CN1855365B/zh active Active
- 2006-04-03 EP EP06112148A patent/EP1717841A1/en not_active Withdrawn
- 2006-04-03 TW TW095111807A patent/TWI404105B/zh active
- 2006-04-03 JP JP2006102293A patent/JP5719494B2/ja active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63211620A (ja) * | 1987-02-27 | 1988-09-02 | Hitachi Ltd | イオンビ−ム加工方法及びその装置 |
JPH01168029A (ja) * | 1987-12-24 | 1989-07-03 | Hitachi Ltd | イオンビーム加工方法及びその装置 |
JPH0221549A (ja) * | 1988-07-08 | 1990-01-24 | Jeol Ltd | 走査電子顕微鏡 |
JPH0264644A (ja) * | 1988-08-31 | 1990-03-05 | Seiko Instr Inc | 集束イオンビーム装置 |
JPH05291195A (ja) * | 1992-04-09 | 1993-11-05 | Hitachi Ltd | 薄膜加工装置及び方法 |
JPH05290786A (ja) * | 1992-04-10 | 1993-11-05 | Hitachi Ltd | 走査試料像表示方法および装置ならびにそれに供される試料 |
JPH06176731A (ja) * | 1992-12-02 | 1994-06-24 | Hitachi Ltd | 走査型電子顕微鏡の試料像表示方法 |
JPH08327514A (ja) * | 1995-06-05 | 1996-12-13 | Nippondenso Co Ltd | 透過電子顕微鏡用試料の作製方法及びその装置 |
JP2002072456A (ja) * | 2000-08-30 | 2002-03-12 | Nikon Corp | レチクルリペア方法、それにより得られたレチクル及びレチクルリペア装置 |
JP2003066118A (ja) * | 2001-08-29 | 2003-03-05 | Sanyo Electric Co Ltd | 半導体装置の故障解析方法 |
JP2005302600A (ja) * | 2004-04-14 | 2005-10-27 | Seiko Epson Corp | 微細加工方法およびその装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI404105B (zh) | 2013-08-01 |
CN1855365A (zh) | 2006-11-01 |
TW200723342A (en) | 2007-06-16 |
US20060219953A1 (en) | 2006-10-05 |
US7388218B2 (en) | 2008-06-17 |
JP5719494B2 (ja) | 2015-05-20 |
EP1717841A1 (en) | 2006-11-02 |
CN1855365B (zh) | 2010-06-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5719494B2 (ja) | 電子ビームを用いた表面下の画像化 | |
US11315756B2 (en) | Fiducial design for tilted or glancing mill operations with a charged particle beam | |
JP5882381B2 (ja) | デコレーションを用いたスライス・アンド・ビュー | |
US8358832B2 (en) | High accuracy beam placement for local area navigation | |
JP5090255B2 (ja) | 原位置でのstemサンプル作製方法 | |
JP5492364B2 (ja) | 3次元基準マーク | |
US9087366B2 (en) | High accuracy beam placement for local area navigation | |
US10539489B2 (en) | Methods for acquiring planar view STEM images of device structures | |
EP2533278A2 (en) | High accuracy beam placement for local area navigation | |
US10410829B1 (en) | Methods for acquiring planar view stem images of device structures | |
KR101275943B1 (ko) | 전자 빔을 이용한 표면 아래 이미징 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090330 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090330 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110708 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110809 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111108 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120612 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120911 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120914 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20121010 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20121015 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20121108 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20121113 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121212 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130611 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131011 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20131021 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20140110 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150119 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150323 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5719494 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |