JP2006259439A - 分波素子および分波方法 - Google Patents

分波素子および分波方法 Download PDF

Info

Publication number
JP2006259439A
JP2006259439A JP2005078702A JP2005078702A JP2006259439A JP 2006259439 A JP2006259439 A JP 2006259439A JP 2005078702 A JP2005078702 A JP 2005078702A JP 2005078702 A JP2005078702 A JP 2005078702A JP 2006259439 A JP2006259439 A JP 2006259439A
Authority
JP
Japan
Prior art keywords
light
diffraction grating
demultiplexed
incident
exit surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005078702A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006259439A5 (enExample
Inventor
Atsushi Kawamori
淳 河盛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP2005078702A priority Critical patent/JP2006259439A/ja
Publication of JP2006259439A publication Critical patent/JP2006259439A/ja
Publication of JP2006259439A5 publication Critical patent/JP2006259439A5/ja
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2005078702A 2005-03-18 2005-03-18 分波素子および分波方法 Withdrawn JP2006259439A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005078702A JP2006259439A (ja) 2005-03-18 2005-03-18 分波素子および分波方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005078702A JP2006259439A (ja) 2005-03-18 2005-03-18 分波素子および分波方法

Publications (2)

Publication Number Publication Date
JP2006259439A true JP2006259439A (ja) 2006-09-28
JP2006259439A5 JP2006259439A5 (enExample) 2008-02-21

Family

ID=37098761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005078702A Withdrawn JP2006259439A (ja) 2005-03-18 2005-03-18 分波素子および分波方法

Country Status (1)

Country Link
JP (1) JP2006259439A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018179866A (ja) * 2017-04-19 2018-11-15 株式会社ミツトヨ 光学式エンコーダ
DE102018124314A1 (de) * 2018-10-02 2020-04-02 Carl Zeiss Smt Gmbh Vorrichtung zur Bestimmung der Belichtungsenergie bei der Belichtung eines Elements in einem optischen System, insbesondere für die Mikrolithographie

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018179866A (ja) * 2017-04-19 2018-11-15 株式会社ミツトヨ 光学式エンコーダ
DE102018002259B4 (de) * 2017-04-19 2025-12-04 Mitutoyo Corporation Optische Kodiereinrichtung und Kodierverfahren
DE102018124314A1 (de) * 2018-10-02 2020-04-02 Carl Zeiss Smt Gmbh Vorrichtung zur Bestimmung der Belichtungsenergie bei der Belichtung eines Elements in einem optischen System, insbesondere für die Mikrolithographie
DE102018124314B4 (de) * 2018-10-02 2020-10-22 Carl Zeiss Smt Gmbh Vorrichtung zur Bestimmung der Belichtungsenergie bei der Belichtung eines Elements in einem optischen System, insbesondere für die Mikrolithographie
DE102018124314B9 (de) * 2018-10-02 2020-12-31 Carl Zeiss Smt Gmbh Vorrichtung zur Bestimmung der Belichtungsenergie bei der Belichtung eines Elements in einem optischen System, insbesondere für die Mikrolithographie
US11079604B2 (en) 2018-10-02 2021-08-03 Carl Zeiss Smt Gmbh Device for determining the exposure energy during the exposure of an element in an optical system, in particular for microlithography

Similar Documents

Publication Publication Date Title
US9176282B2 (en) High efficiency mono-order concave diffraction grating
US7170600B2 (en) Spectrometer using diffraction grating
JP5050594B2 (ja) 分光装置
US6927915B2 (en) Diffractive optical element, and optical system and optical apparatus provided with the same
US7349612B2 (en) Optical element, optical circuit provided with the optical element, and method for producing the optical element
CN103999303B (zh) 集成亚波长光栅系统
US4838645A (en) Reflecting diffraction grating
JP2005115176A (ja) 分光素子、回折格子、複合回折格子、カラー表示装置、分波器、および回折格子の製造方法
JP2003255113A (ja) 光分離素子およびそれを用いた光学機器
US20020122613A1 (en) Optical device and spectroscopic and integrated optical apparatus using the same
CN1549938B (zh) 集成透明衬底及衍射光学组件
US6914715B2 (en) Optical element
JP2006259439A (ja) 分波素子および分波方法
US7009701B2 (en) Optical element and spectroscopic device using the same
JP2004205880A (ja) 反射型回折格子
JP2003066269A (ja) 波長多重分離光学デバイス及び波長多重光伝送モジュール
KR101466385B1 (ko) 평판형 분광 모듈 및 그 제조방법
JP5312309B2 (ja) 光合分波器
CN1246716C (zh) 低回损蚀刻衍射光栅波分复用器
JP2002236206A (ja) 光学素子およびそれを用いた分光装置
JP2007058102A (ja) 光合分波器および光合波ユニット
US20200301240A1 (en) Liquid crystal waveguide with sub-aperture light coupling
US6718092B2 (en) Frequency detection, tuning and stabilization system
JP6976516B2 (ja) 透過型回折格子、光導波路、ならびに透過型回折格子の使用方法および設計方法
JP3476652B2 (ja) 光分波器

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080107

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080107

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100204

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100209

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20100325