JP2006253691A - 水性研磨パッド及びその製造方法 - Google Patents

水性研磨パッド及びその製造方法 Download PDF

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Publication number
JP2006253691A
JP2006253691A JP2006062122A JP2006062122A JP2006253691A JP 2006253691 A JP2006253691 A JP 2006253691A JP 2006062122 A JP2006062122 A JP 2006062122A JP 2006062122 A JP2006062122 A JP 2006062122A JP 2006253691 A JP2006253691 A JP 2006253691A
Authority
JP
Japan
Prior art keywords
polishing pad
polishing
dispersion
aqueous
polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006062122A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006253691A5 (enExample
Inventor
Chau H Duong
チャウ・エイチ・ドン
David B James
デビッド・ビー・ジェームス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DuPont Electronic Materials Holding Inc
DuPont Electronic Materials International LLC
Original Assignee
Rohm and Haas Electronic Materials CMP Holdings Inc
Rohm and Haas Electronic Materials LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm and Haas Electronic Materials CMP Holdings Inc, Rohm and Haas Electronic Materials LLC filed Critical Rohm and Haas Electronic Materials CMP Holdings Inc
Publication of JP2006253691A publication Critical patent/JP2006253691A/ja
Publication of JP2006253691A5 publication Critical patent/JP2006253691A5/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K47/00—Beehives
    • A01K47/02—Construction or arrangement of frames for honeycombs
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K47/00—Beehives
    • A01K47/04—Artificial honeycombs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/14—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/14—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of indefinite length
    • B29C39/18—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of indefinite length incorporating preformed parts or layers, e.g. casting around inserts or for coating articles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Animal Husbandry (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP2006062122A 2005-03-08 2006-03-08 水性研磨パッド及びその製造方法 Pending JP2006253691A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65983305P 2005-03-08 2005-03-08

Publications (2)

Publication Number Publication Date
JP2006253691A true JP2006253691A (ja) 2006-09-21
JP2006253691A5 JP2006253691A5 (enExample) 2009-03-26

Family

ID=36928528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006062122A Pending JP2006253691A (ja) 2005-03-08 2006-03-08 水性研磨パッド及びその製造方法

Country Status (7)

Country Link
US (1) US20060202384A1 (enExample)
JP (1) JP2006253691A (enExample)
KR (1) KR20060099398A (enExample)
CN (1) CN1830627A (enExample)
DE (1) DE102006010503A1 (enExample)
FR (1) FR2882952A1 (enExample)
TW (1) TW200635703A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126497A1 (ja) * 2007-03-27 2008-10-23 Toyo Tire & Rubber Co., Ltd. ポリウレタン発泡体の製造方法
JP2013199618A (ja) * 2012-03-26 2013-10-03 Fujibo Holdings Inc 研磨パッド及び研磨パッドの製造方法

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200720017A (en) 2005-09-19 2007-06-01 Rohm & Haas Elect Mat Water-based polishing pads having improved adhesion properties and methods of manufacture
US20080063856A1 (en) * 2006-09-11 2008-03-13 Duong Chau H Water-based polishing pads having improved contact area
CN100506487C (zh) * 2007-06-29 2009-07-01 南京航空航天大学 具有自修正功能的固结磨料研磨抛光垫及制备方法
US20100112919A1 (en) * 2008-11-03 2010-05-06 Applied Materials, Inc. Monolithic linear polishing sheet
JP5388212B2 (ja) * 2009-03-06 2014-01-15 エルジー・ケム・リミテッド フロートガラス研磨システム用下部ユニット
US20110287698A1 (en) * 2010-05-18 2011-11-24 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for elastomer pad for fabricating magnetic recording disks
US8512427B2 (en) * 2011-09-29 2013-08-20 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Acrylate polyurethane chemical mechanical polishing layer
US10449710B2 (en) 2017-02-17 2019-10-22 Thermwood Corporation Methods and apparatus for compressing material during additive manufacturing
CN107350978A (zh) * 2017-07-26 2017-11-17 天津市职业大学 一种绿色固定磨料抛光片及其制备方法
KR102674027B1 (ko) * 2019-01-29 2024-06-12 삼성전자주식회사 재생 연마패드
US11667061B2 (en) * 2020-04-18 2023-06-06 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method of forming leveraged poromeric polishing pad
CN114574107B (zh) * 2022-03-18 2023-01-17 北京通美晶体技术股份有限公司 一种研磨抛光液的清洗剂及其制备方法
CN115431175B (zh) * 2022-09-16 2024-03-22 湖北鼎汇微电子材料有限公司 一种自修整抛光垫及其制备方法和应用

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000238207A (ja) * 1999-02-22 2000-09-05 Dainippon Printing Co Ltd 化粧シート
JP2001522729A (ja) * 1997-11-06 2001-11-20 ロデール ホールディングス インコーポレイテッド 研磨剤研磨システムを使用したメモリーディスクあるいは半導体デバイスの製造方法及び研磨パッド
JP2002518603A (ja) * 1998-06-17 2002-06-25 ミリケン・アンド・カンパニー エアバッグ布地用ポリウレタン／ポリアクリレート分散コーティング
JP2003516872A (ja) * 1999-12-14 2003-05-20 ロデール ホールディングス インコーポレイテッド 高分子又は高分子複合材研磨パッドの製造方法
US20040166779A1 (en) * 2003-02-24 2004-08-26 Sudhakar Balijepalli Materials and methods for chemical-mechanical planarization
US20040166790A1 (en) * 2003-02-21 2004-08-26 Sudhakar Balijepalli Method of manufacturing a fixed abrasive material

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY114512A (en) * 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US6099394A (en) * 1998-02-10 2000-08-08 Rodel Holdings, Inc. Polishing system having a multi-phase polishing substrate and methods relating thereto
US6099954A (en) * 1995-04-24 2000-08-08 Rodel Holdings, Inc. Polishing material and method of polishing a surface
EP1161322A4 (en) * 1999-01-21 2003-09-24 Rodel Inc IMPROVED POLISHING CUSHIONS AND RELATED METHODS
US20020098789A1 (en) * 2001-01-19 2002-07-25 Peter A. Burke Polishing pad and methods for improved pad surface and pad interior characteristics
US6918821B2 (en) * 2003-11-12 2005-07-19 Dow Global Technologies, Inc. Materials and methods for low pressure chemical-mechanical planarization
US20050171224A1 (en) * 2004-02-03 2005-08-04 Kulp Mary J. Polyurethane polishing pad

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001522729A (ja) * 1997-11-06 2001-11-20 ロデール ホールディングス インコーポレイテッド 研磨剤研磨システムを使用したメモリーディスクあるいは半導体デバイスの製造方法及び研磨パッド
JP2002518603A (ja) * 1998-06-17 2002-06-25 ミリケン・アンド・カンパニー エアバッグ布地用ポリウレタン／ポリアクリレート分散コーティング
JP2000238207A (ja) * 1999-02-22 2000-09-05 Dainippon Printing Co Ltd 化粧シート
JP2003516872A (ja) * 1999-12-14 2003-05-20 ロデール ホールディングス インコーポレイテッド 高分子又は高分子複合材研磨パッドの製造方法
US20040166790A1 (en) * 2003-02-21 2004-08-26 Sudhakar Balijepalli Method of manufacturing a fixed abrasive material
US20040166779A1 (en) * 2003-02-24 2004-08-26 Sudhakar Balijepalli Materials and methods for chemical-mechanical planarization

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126497A1 (ja) * 2007-03-27 2008-10-23 Toyo Tire & Rubber Co., Ltd. ポリウレタン発泡体の製造方法
US8314029B2 (en) 2007-03-27 2012-11-20 Toyo Tire & Rubber Co., Ltd. Process for producing polyurethane foam
JP2013199618A (ja) * 2012-03-26 2013-10-03 Fujibo Holdings Inc 研磨パッド及び研磨パッドの製造方法
WO2013146733A1 (ja) * 2012-03-26 2013-10-03 富士紡ホールディングス株式会社 研磨パッド及び研磨パッドの製造方法
KR20140147859A (ko) * 2012-03-26 2014-12-30 후지보홀딩스가부시끼가이샤 연마 패드 및 연마 패드의 제조 방법
CN104321370A (zh) * 2012-03-26 2015-01-28 富士纺控股株式会社 研磨垫及研磨垫的制造方法
US10071460B2 (en) 2012-03-26 2018-09-11 Fujibo Holdings, Inc. Polishing pad and method for producing polishing pad
KR101999418B1 (ko) 2012-03-26 2019-07-11 후지보홀딩스가부시끼가이샤 연마 패드 및 연마 패드의 제조 방법

Also Published As

Publication number Publication date
FR2882952A1 (fr) 2006-09-15
US20060202384A1 (en) 2006-09-14
CN1830627A (zh) 2006-09-13
KR20060099398A (ko) 2006-09-19
TW200635703A (en) 2006-10-16
DE102006010503A1 (de) 2006-09-21

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