JP2006250636A - 移動装置 - Google Patents

移動装置 Download PDF

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Publication number
JP2006250636A
JP2006250636A JP2005065981A JP2005065981A JP2006250636A JP 2006250636 A JP2006250636 A JP 2006250636A JP 2005065981 A JP2005065981 A JP 2005065981A JP 2005065981 A JP2005065981 A JP 2005065981A JP 2006250636 A JP2006250636 A JP 2006250636A
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JP
Japan
Prior art keywords
scanning
stage
axis
sample
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005065981A
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English (en)
Japanese (ja)
Other versions
JP2006250636A5 (US20080242721A1-20081002-C00053.png
Inventor
Hiroaki Yanagimoto
裕章 柳本
Yasushi Minomoto
泰 美野本
Shigeru Miwa
茂 三輪
Toru Kurenuma
榑沼　　透
Hiroshi Kuroda
浩史 黒田
Yuichi Kunitomo
裕一 國友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery FineTech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery FineTech Co Ltd filed Critical Hitachi Construction Machinery FineTech Co Ltd
Priority to JP2005065981A priority Critical patent/JP2006250636A/ja
Publication of JP2006250636A publication Critical patent/JP2006250636A/ja
Publication of JP2006250636A5 publication Critical patent/JP2006250636A5/ja
Pending legal-status Critical Current

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2005065981A 2005-03-09 2005-03-09 移動装置 Pending JP2006250636A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005065981A JP2006250636A (ja) 2005-03-09 2005-03-09 移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005065981A JP2006250636A (ja) 2005-03-09 2005-03-09 移動装置

Publications (2)

Publication Number Publication Date
JP2006250636A true JP2006250636A (ja) 2006-09-21
JP2006250636A5 JP2006250636A5 (US20080242721A1-20081002-C00053.png) 2007-05-10

Family

ID=37091314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005065981A Pending JP2006250636A (ja) 2005-03-09 2005-03-09 移動装置

Country Status (1)

Country Link
JP (1) JP2006250636A (US20080242721A1-20081002-C00053.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105043193A (zh) * 2015-05-25 2015-11-11 沈阳工业大学 转矩转速传感器快速安装调整装置
JP2017013210A (ja) * 2015-07-06 2017-01-19 日本精工株式会社 二軸位置決めステージ装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04146038A (ja) * 1990-10-04 1992-05-20 Matsushita Electric Ind Co Ltd 位置決めテーブル
JPH0839375A (ja) * 1994-07-27 1996-02-13 Mitsutoyo Corp テーブル装置
JPH11153405A (ja) * 1997-11-20 1999-06-08 Olympus Optical Co Ltd スキャナーシステムの変位センサー
JPH11245128A (ja) * 1998-02-26 1999-09-14 Thk Co Ltd ２軸平行・１軸旋回運動案内機構およびこれを用いた２軸平行・１軸旋回テーブル装置
JPH11271340A (ja) * 1998-03-20 1999-10-08 Olympus Optical Co Ltd スキャナ破損防止機構を備えた走査型プローブ顕微鏡
JP2002246304A (ja) * 2001-02-21 2002-08-30 Canon Inc 走査露光装置及び走査露光方法並びにデバイスの製造方法
JP2003316440A (ja) * 2002-04-24 2003-11-07 Mejiro Precision:Kk ステージ装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04146038A (ja) * 1990-10-04 1992-05-20 Matsushita Electric Ind Co Ltd 位置決めテーブル
JPH0839375A (ja) * 1994-07-27 1996-02-13 Mitsutoyo Corp テーブル装置
JPH11153405A (ja) * 1997-11-20 1999-06-08 Olympus Optical Co Ltd スキャナーシステムの変位センサー
JPH11245128A (ja) * 1998-02-26 1999-09-14 Thk Co Ltd ２軸平行・１軸旋回運動案内機構およびこれを用いた２軸平行・１軸旋回テーブル装置
JPH11271340A (ja) * 1998-03-20 1999-10-08 Olympus Optical Co Ltd スキャナ破損防止機構を備えた走査型プローブ顕微鏡
JP2002246304A (ja) * 2001-02-21 2002-08-30 Canon Inc 走査露光装置及び走査露光方法並びにデバイスの製造方法
JP2003316440A (ja) * 2002-04-24 2003-11-07 Mejiro Precision:Kk ステージ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105043193A (zh) * 2015-05-25 2015-11-11 沈阳工业大学 转矩转速传感器快速安装调整装置
JP2017013210A (ja) * 2015-07-06 2017-01-19 日本精工株式会社 二軸位置決めステージ装置

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